SG11201601952RA - Method and apparatus for non-contact measurement of internal quantum efficiency in light emitting diode structures - Google Patents

Method and apparatus for non-contact measurement of internal quantum efficiency in light emitting diode structures

Info

Publication number
SG11201601952RA
SG11201601952RA SG11201601952RA SG11201601952RA SG11201601952RA SG 11201601952R A SG11201601952R A SG 11201601952RA SG 11201601952R A SG11201601952R A SG 11201601952RA SG 11201601952R A SG11201601952R A SG 11201601952RA SG 11201601952R A SG11201601952R A SG 11201601952RA
Authority
SG
Singapore
Prior art keywords
light emitting
emitting diode
quantum efficiency
internal quantum
contact measurement
Prior art date
Application number
SG11201601952RA
Inventor
Vladimir N Faifer
Original Assignee
Kla Tencor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kla Tencor Corp filed Critical Kla Tencor Corp
Publication of SG11201601952RA publication Critical patent/SG11201601952RA/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/66Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0095Semiconductive materials
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • G01R31/2607Circuits therefor
    • G01R31/2632Circuits therefor for testing diodes
    • G01R31/2635Testing light-emitting diodes, laser diodes or photodiodes

Landscapes

  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Immunology (AREA)
  • Engineering & Computer Science (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Led Devices (AREA)
  • Electroluminescent Light Sources (AREA)
SG11201601952RA 2013-09-14 2014-09-13 Method and apparatus for non-contact measurement of internal quantum efficiency in light emitting diode structures SG11201601952RA (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201361877949P 2013-09-14 2013-09-14
US201461933284P 2014-01-29 2014-01-29
US14/485,468 US9823198B2 (en) 2013-09-14 2014-09-12 Method and apparatus for non-contact measurement of internal quantum efficiency in light emitting diode structures
PCT/US2014/055537 WO2015038992A1 (en) 2013-09-14 2014-09-13 Method and apparatus for non-contact measurement of internal quantum efficiency in light emitting diode structures

Publications (1)

Publication Number Publication Date
SG11201601952RA true SG11201601952RA (en) 2016-04-28

Family

ID=52666359

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201601952RA SG11201601952RA (en) 2013-09-14 2014-09-13 Method and apparatus for non-contact measurement of internal quantum efficiency in light emitting diode structures

Country Status (5)

Country Link
US (1) US9823198B2 (en)
CN (1) CN105829902B (en)
SG (1) SG11201601952RA (en)
TW (1) TWI641851B (en)
WO (1) WO2015038992A1 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9921261B2 (en) * 2013-10-17 2018-03-20 Kla-Tencor Corporation Method and apparatus for non-contact measurement of sheet resistance and shunt resistance of p-n junctions
KR101720165B1 (en) * 2015-09-02 2017-04-03 한양대학교 에리카산학협력단 Apparatus and method for analyzing state density of light emitting diode
WO2018112267A1 (en) * 2016-12-16 2018-06-21 Tesoro Scientific, Inc. Light emitting diode (led) test apparatus and method of manufacture
WO2018236767A2 (en) * 2017-06-20 2018-12-27 Tesoro Scientific, Inc. Light emitting diode (led) test apparatus and method of manufacture
CN109765472A (en) * 2018-12-29 2019-05-17 江西兆驰半导体有限公司 A kind of electroluminescent method for measurement of the LED device of indirect electric contact type
CN110009102B (en) * 2019-04-12 2023-03-24 南京吉相传感成像技术研究院有限公司 Depth residual error network acceleration method based on photoelectric computing array
CN109993283B (en) * 2019-04-12 2023-02-28 南京吉相传感成像技术研究院有限公司 Deep convolution generation type countermeasure network acceleration method based on photoelectric calculation array
CN110133542B (en) * 2019-05-13 2021-10-08 合肥京东方显示光源有限公司 Lamp source screening device, system and screening method
CN112635340B (en) * 2019-10-09 2023-11-03 台湾爱司帝科技股份有限公司 LED wafer detection device and method
CN113985252B (en) * 2021-10-28 2022-07-15 江苏博敏电子有限公司 Lamp panel jig regional testing method
CN114705698A (en) * 2022-06-02 2022-07-05 季华实验室 Defect detection method, device, system and storage medium

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1237128B1 (en) 2001-03-01 2012-08-01 Sicpa Holding Sa Improved luminescence characteristics detector
US6670820B2 (en) 2001-12-27 2003-12-30 General Electric Company Method and apparatus for evaluating electroluminescence properties of semiconductor materials and devices
US7362088B1 (en) * 2003-10-15 2008-04-22 Ahbee 1, L.P. Non contact method and apparatus for measurement of sheet resistance of P-N junctions
US7414409B1 (en) * 2005-08-19 2008-08-19 Vladimir Faifer Non-contact method and apparatus for measurement of leakage current of p-n junctions in IC product wafers
JP2007088389A (en) * 2005-09-26 2007-04-05 Yamaguchi Univ Equipment for measuring internal quantum efficiency of semiconductor light emitting device (led), and method therefor
US7679381B2 (en) * 2006-01-23 2010-03-16 Maxmile Technologies, Llc Method and apparatus for nondestructively evaluating light-emitting materials
WO2009007164A2 (en) 2007-05-18 2009-01-15 Interuniversitair Microelektronica Centrum Vzw Junction-photovoltage method and apparatus for contactless determination of sheet resistance and leakage current of semiconductor
DE602007004714D1 (en) * 2007-05-29 2010-03-25 Imec Mobility measurements of inversion carriers
US8299416B2 (en) 2009-03-01 2012-10-30 Tau Science Corporation High speed quantum efficiency measurement apparatus utilizing solid state lightsource
DE102009039399A1 (en) * 2009-08-31 2011-03-03 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method for measuring a semiconductor structure, which is a solar cell or a precursor of a solar cell
US20110301892A1 (en) 2010-06-03 2011-12-08 Emil Kamieniecki System and method for characterizing the electrical properties of a semiconductor sample
TW201333487A (en) * 2012-02-08 2013-08-16 Yi-Ping Wang A surface and photoconductive technique for determination of defect and surface states in semiconductors

Also Published As

Publication number Publication date
TW201518746A (en) 2015-05-16
TWI641851B (en) 2018-11-21
US20150077741A1 (en) 2015-03-19
WO2015038992A1 (en) 2015-03-19
US9823198B2 (en) 2017-11-21
CN105829902B (en) 2019-08-06
CN105829902A (en) 2016-08-03

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