SG11201504884YA - Chemical vapor deposition of fluorocarbon polymers - Google Patents

Chemical vapor deposition of fluorocarbon polymers

Info

Publication number
SG11201504884YA
SG11201504884YA SG11201504884YA SG11201504884YA SG11201504884YA SG 11201504884Y A SG11201504884Y A SG 11201504884YA SG 11201504884Y A SG11201504884Y A SG 11201504884YA SG 11201504884Y A SG11201504884Y A SG 11201504884YA SG 11201504884Y A SG11201504884Y A SG 11201504884YA
Authority
SG
Singapore
Prior art keywords
vapor deposition
chemical vapor
fluorocarbon polymers
fluorocarbon
polymers
Prior art date
Application number
SG11201504884YA
Inventor
Andrew Vladimirovich Zhuk
Neville Sonnenberg
Original Assignee
Gillette Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gillette Co filed Critical Gillette Co
Publication of SG11201504884YA publication Critical patent/SG11201504884YA/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/60—Deposition of organic layers from vapour phase
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
    • B05D5/08—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain an anti-friction or anti-adhesive surface
    • B05D5/083—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain an anti-friction or anti-adhesive surface involving the use of fluoropolymers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles
    • C23C16/45568—Porous nozzles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles
    • C23C16/4557—Heated nozzles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
    • C23C16/463—Cooling of the substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B26—HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26B—HAND-HELD CUTTING TOOLS NOT OTHERWISE PROVIDED FOR
    • B26B21/00—Razors of the open or knife type; Safety razors or other shaving implements of the planing type; Hair-trimming devices involving a razor-blade; Equipment therefor
    • B26B21/54—Razor-blades
    • B26B21/58—Razor-blades characterised by the material
    • B26B21/60—Razor-blades characterised by the material by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
SG11201504884YA 2012-12-21 2013-12-18 Chemical vapor deposition of fluorocarbon polymers SG11201504884YA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/723,449 US8889225B2 (en) 2012-12-21 2012-12-21 Chemical vapor deposition of fluorocarbon polymers
PCT/US2013/075977 WO2014100101A1 (en) 2012-12-21 2013-12-18 Chemical vapor deposition of fluorocarbon polymers

Publications (1)

Publication Number Publication Date
SG11201504884YA true SG11201504884YA (en) 2015-07-30

Family

ID=49918898

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201504884YA SG11201504884YA (en) 2012-12-21 2013-12-18 Chemical vapor deposition of fluorocarbon polymers

Country Status (9)

Country Link
US (1) US8889225B2 (en)
EP (1) EP2935649A1 (en)
JP (1) JP2016509127A (en)
CN (1) CN104870687B (en)
BR (1) BR112015014868A2 (en)
MX (1) MX2015007801A (en)
RU (1) RU2608482C1 (en)
SG (1) SG11201504884YA (en)
WO (1) WO2014100101A1 (en)

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US20130220546A1 (en) * 2011-11-09 2013-08-29 Sakti 3, Inc. High throughput physical vapor deposition apparatus and method for manufacture of solid state batteries
WO2016109481A2 (en) 2014-12-30 2016-07-07 DePuy Synthes Products, Inc. Coatings for surgical instruments
US10832885B2 (en) * 2015-12-23 2020-11-10 Massachusetts Institute Of Technology Electron transparent membrane for cold cathode devices
USD795497S1 (en) 2016-01-15 2017-08-22 Medline Industries, Inc. Clipper
USD794871S1 (en) 2016-01-15 2017-08-15 Medline Industries, Inc. Clipper
USD802214S1 (en) 2016-06-10 2017-11-07 Medline Industries, Inc. Clipper head
USD802216S1 (en) 2016-06-10 2017-11-07 Medline Industries, Inc. Clipper head
USD802215S1 (en) 2016-06-10 2017-11-07 Medline Industries, Inc. Clipper head
USD802217S1 (en) 2016-06-10 2017-11-07 Medline Industries, Inc. Clipper head
JP6737215B2 (en) * 2017-03-16 2020-08-05 東京エレクトロン株式会社 Film forming apparatus, film forming method and storage medium
EP3616800B1 (en) 2018-08-31 2022-11-09 BIC Violex Single Member S.A. Thinning of razor blade coatings
US20230323523A1 (en) * 2020-09-03 2023-10-12 BIC Violex Single Member S.A. Methods and systems for forming a blade of a shaving device
CN114703465B (en) * 2022-04-25 2023-03-28 四川大学 Method for improving adhesion of PECVD (plasma enhanced chemical vapor deposition) fluorocarbon coating on gold surface

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US3283117A (en) 1965-04-22 1966-11-01 Philip Morris Inc Method for coating cutting edges of sharpened instruments
JPH0780718B2 (en) 1989-08-04 1995-08-30 トヨタ自動車株式会社 Diamond synthesizing method and synthesizing apparatus
EP0485641B1 (en) 1990-11-10 1994-07-27 Wilkinson Sword Gesellschaft mit beschränkter Haftung Razor blade steel having high corrosion resistance, razor blades and a process for manufacturing razor blades
US6468642B1 (en) 1995-10-03 2002-10-22 N.V. Bekaert S.A. Fluorine-doped diamond-like coatings
US5764850A (en) 1996-04-04 1998-06-09 Phoenix Solutions Co. Silicon carbide foam electric heater for heating gas directed therethrough
US5888591A (en) * 1996-05-06 1999-03-30 Massachusetts Institute Of Technology Chemical vapor deposition of fluorocarbon polymer thin films
US5985459A (en) * 1996-10-31 1999-11-16 The Gillette Company Method of treating razor blade cutting edges
JPH10251853A (en) 1997-03-17 1998-09-22 Mitsubishi Electric Corp Chemical vapor deposition device
US6086679A (en) 1997-10-24 2000-07-11 Quester Technology, Inc. Deposition systems and processes for transport polymerization and chemical vapor deposition
JPH11135442A (en) 1997-10-31 1999-05-21 Canon Inc Method and apparatus for forming deposited film
US6123993A (en) 1998-09-21 2000-09-26 Advanced Technology Materials, Inc. Method and apparatus for forming low dielectric constant polymeric films
US6458718B1 (en) * 2000-04-28 2002-10-01 Asm Japan K.K. Fluorine-containing materials and processes
US6763593B2 (en) 2001-01-26 2004-07-20 Hitachi Metals, Ltd. Razor blade material and a razor blade
US20030051662A1 (en) * 2001-02-26 2003-03-20 Dielectric Systems, Inc. Thermal reactor for transport polymerization of low epsilon thin film
EP1448807A4 (en) 2001-10-30 2005-07-13 Massachusetts Inst Technology Fluorocarbon-organosilicon copolymers and coatings prepared by hot-filament chemical vapor deposition
FR2873676B1 (en) * 2004-07-29 2007-02-09 Univ Claude Bernard Lyon MESOPOROUS BORON NITRIDE HOMOGENEOUS AND ORDINATED POROSITY HAVING A HIGH SPECIFIC SURFACE AND PROCESS FOR PREPARING THE SAME
JP2008066413A (en) * 2006-09-05 2008-03-21 Tokyo Electron Ltd Shower head structure and treatment device using the same
JP2008205219A (en) * 2007-02-20 2008-09-04 Masato Toshima Showerhead, and cvd apparatus using the same showerhead
CN102121096A (en) * 2010-01-08 2011-07-13 甘志银 Chemical vapor deposition method and equipment integrated with atomic layer deposition process

Also Published As

Publication number Publication date
RU2608482C1 (en) 2017-01-18
EP2935649A1 (en) 2015-10-28
WO2014100101A1 (en) 2014-06-26
BR112015014868A2 (en) 2017-07-11
MX2015007801A (en) 2015-09-10
US8889225B2 (en) 2014-11-18
US20140178584A1 (en) 2014-06-26
JP2016509127A (en) 2016-03-24
CN104870687B (en) 2017-08-11
CN104870687A (en) 2015-08-26

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