SG10202011202RA - Solid inspection apparatus and method of use - Google Patents

Solid inspection apparatus and method of use

Info

Publication number
SG10202011202RA
SG10202011202RA SG10202011202RA SG10202011202RA SG10202011202RA SG 10202011202R A SG10202011202R A SG 10202011202RA SG 10202011202R A SG10202011202R A SG 10202011202RA SG 10202011202R A SG10202011202R A SG 10202011202RA SG 10202011202R A SG10202011202R A SG 10202011202RA
Authority
SG
Singapore
Prior art keywords
inspection apparatus
solid inspection
solid
inspection
Prior art date
Application number
SG10202011202RA
Inventor
John Gerhardt Earney
Joseph Francis Pinto
M Shane Bowen
Michael S Graige
Arthur Pitera
Bala Murali K Venkatesan
Dajun A Yuan
Original Assignee
Illumina Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Illumina Inc filed Critical Illumina Inc
Publication of SG10202011202RA publication Critical patent/SG10202011202RA/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N21/6456—Spatial resolved fluorescence measurements; Imaging
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0289—Field-of-view determination; Aiming or pointing of a spectrometer; Adjusting alignment; Encoding angular position; Size of measurement area; Position tracking
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
    • G01J3/4406—Fluorescence spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
    • G01N21/274—Calibration, base line adjustment, drift correction
    • G01N21/278—Constitution of standards
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/6428—Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes"
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/6428—Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes"
    • G01N21/643—Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes" non-biological material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/6489—Photoluminescence of semiconductors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9515—Objects of complex shape, e.g. examined with use of a surface follower device
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J2003/1842—Types of grating
    • G01J2003/1861—Transmission gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N2021/6417—Spectrofluorimetric devices
    • G01N2021/6419—Excitation at two or more wavelengths
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/6428—Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes"
    • G01N2021/6439—Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes" with indicators, stains, dyes, tags, labels, marks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/02—Mechanical
    • G01N2201/022—Casings
    • G01N2201/0227—Sealable enclosure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/02—Mechanical
    • G01N2201/024—Modular construction
    • G01N2201/0245—Modular construction with insertable-removable part
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/12—Circuits of general importance; Signal processing
    • G01N2201/127—Calibration; base line adjustment; drift compensation
SG10202011202RA 2017-01-07 2017-12-11 Solid inspection apparatus and method of use SG10202011202RA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US201762443675P 2017-01-07 2017-01-07

Publications (1)

Publication Number Publication Date
SG10202011202RA true SG10202011202RA (en) 2021-01-28

Family

ID=62782869

Family Applications (2)

Application Number Title Priority Date Filing Date
SG10202011202RA SG10202011202RA (en) 2017-01-07 2017-12-11 Solid inspection apparatus and method of use
SG11201811333RA SG11201811333RA (en) 2017-01-07 2017-12-11 Solid inspection apparatus and method of use

Family Applications After (1)

Application Number Title Priority Date Filing Date
SG11201811333RA SG11201811333RA (en) 2017-01-07 2017-12-11 Solid inspection apparatus and method of use

Country Status (17)

Country Link
US (3) US10261018B2 (en)
EP (1) EP3535567B1 (en)
JP (2) JP6651656B1 (en)
KR (2) KR102304495B1 (en)
CN (2) CN109313136B (en)
AU (2) AU2017390166B2 (en)
BR (2) BR112018077001B1 (en)
CA (2) CA3022953C (en)
IL (2) IL270722B (en)
MX (1) MX2019007948A (en)
MY (1) MY196658A (en)
NZ (1) NZ767004A (en)
RU (1) RU2701875C1 (en)
SA (1) SA518400565B1 (en)
SG (2) SG10202011202RA (en)
TW (2) TWI772752B (en)
WO (1) WO2018128753A1 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3602629A4 (en) 2017-03-20 2021-01-13 MGI Tech Co., Ltd. Biosensors for biological or chemical analysis and methods of manufacturing the same
US10784103B2 (en) 2017-09-19 2020-09-22 Mgi Tech Co., Ltd. Water level sequencing flow cell fabrication
US10859371B2 (en) * 2017-11-28 2020-12-08 Koh Young Technology Inc. Apparatus for inspecting substrate and method thereof
TW202138867A (en) 2019-12-06 2021-10-16 美商伊路米納有限公司 Apparatus and method of providing parameter estimation
TW202138866A (en) 2019-12-06 2021-10-16 美商伊路米納有限公司 Apparatus and method of estimating values from images
RU2752577C1 (en) * 2020-12-30 2021-07-29 Российская Федерация, от имени которой выступает Министерство здравоохранения Российской Федерации Device for testing and adjustment of micro-object vizualizing optic system and method for its manufacture
US20220252514A1 (en) * 2021-02-10 2022-08-11 Star Voltaic, LLC Fluorescent solid-state materials for optical calibration and methods thereof
US20220280935A1 (en) * 2021-03-05 2022-09-08 Taiwan Semiconductor Manufacturing Company Ltd. System and method for detecting biomolecules
WO2023239917A1 (en) 2022-06-09 2023-12-14 Illumina, Inc. Dependence of base calling on flow cell tilt
CN117250207B (en) * 2023-11-17 2024-01-30 四川睿杰鑫电子股份有限公司 Flexible circuit board detection device and detection method

Family Cites Families (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU1518678A1 (en) * 1987-07-22 1989-10-30 Предприятие П/Я Р-6681 Inverted microscope-photometer
US6242114B1 (en) * 1994-07-05 2001-06-05 Optical Coating Laboratory Solid fluorescence reference and method
EP0746865B1 (en) * 1994-12-08 2003-03-26 Molecular Dynamics, Inc. Fluorescence imaging system employing a macro scanning objective
US6891627B1 (en) * 2000-09-20 2005-05-10 Kla-Tencor Technologies Corp. Methods and systems for determining a critical dimension and overlay of a specimen
US7011794B2 (en) * 2002-11-25 2006-03-14 Immunivest Corporation Upon a cartridge for containing a specimen sample for optical analysis
US20070014694A1 (en) * 2003-09-19 2007-01-18 Beard Nigel P High density plate filler
US20050079102A1 (en) * 2003-10-14 2005-04-14 Staton Kenneth L. Interrogation apparatus
JP4445745B2 (en) * 2003-11-21 2010-04-07 オリンパス株式会社 Endoscope device
DE102004047593A1 (en) * 2004-09-30 2006-04-13 Carl Zeiss Jena Gmbh Reference body for fluorescence measurements and method of making the same
US7355657B2 (en) * 2004-12-14 2008-04-08 Coherent, Inc. Laser illuminated projection displays
DE102005049364B4 (en) * 2005-03-18 2023-05-25 BAM Bundesanstalt für Materialforschung und -prüfung Multifunctional calibration device and kit and their uses for characterizing luminescence measurement systems
US7993585B2 (en) * 2005-07-14 2011-08-09 Battelle Memorial Institute Biological and chemical monitoring
KR101206031B1 (en) * 2006-01-25 2012-11-28 삼성전자주식회사 VECSEL having modulating mirror and display apparatus using the same
US7829162B2 (en) * 2006-08-29 2010-11-09 international imagining materials, inc Thermal transfer ribbon
WO2008052667A1 (en) * 2006-10-31 2008-05-08 Bayer Materialscience Ag Method and device for detecting defects in a transparent solid
WO2008093869A1 (en) * 2007-02-02 2008-08-07 Hitachi Metals, Ltd. Fluorescent material, scintillator using the fluorescent material, and radiation detector
WO2008136812A2 (en) * 2007-05-07 2008-11-13 The Board Of Trustees Of The University Of Illinois Fluorescence detection enhancement using photonic crystal extraction
TW200940684A (en) * 2008-03-10 2009-10-01 Nikon Corp Fluorescent film, film-forming method therefor, multilayer dielectric film, optical element, optical system, imaging unit, instrument for measuring optical characteristics, method of measuring optical characteristics, exposure apparatus, exposure met
GB0904934D0 (en) 2009-03-23 2009-05-06 Geneseqe As Method and apparatus for detecting molecules
US8803332B2 (en) * 2009-09-11 2014-08-12 Taiwan Semiconductor Manufacturing Company, Ltd. Delamination resistance of stacked dies in die saw
JP5839648B2 (en) * 2010-04-27 2016-01-06 株式会社日立製作所 Power generation method using solar cell and solar cell power generation system
KR101799518B1 (en) 2011-05-03 2017-11-21 삼성전자 주식회사 Fluorescence detecting optical system and multi-channel fluorescence detection apparatus having the same
US20130015651A1 (en) * 2011-07-15 2013-01-17 Honeywell International Inc. Luminescent phosphor compounds, articles including such compounds, and methods for their production and use
JP2013205015A (en) * 2012-03-27 2013-10-07 Hitachi Ltd Optical inspection device and method thereof
WO2013151622A1 (en) * 2012-04-03 2013-10-10 Illumina, Inc. Integrated optoelectronic read head and fluidic cartridge useful for nucleic acid sequencing
DE102012106890A1 (en) * 2012-07-30 2014-01-30 Carl Zeiss Microscopy Gmbh Three-dimensional representation of objects
WO2014040141A1 (en) * 2012-09-17 2014-03-20 Macquarie University Enhancing upconversion luminescence in rare-earth doped particles
CN103063650A (en) * 2012-12-17 2013-04-24 江汉大学 Improved atomic ground state energy detection device
DK3039409T3 (en) * 2013-08-28 2018-01-29 Illumina Inc Optical alignment tool
US9993819B2 (en) * 2014-12-30 2018-06-12 Stmicroelectronics S.R.L. Apparatus for actuating and reading a centrifugal microfluidic disk for biological and biochemical analyses, and use of the apparatus
CN104614347A (en) * 2015-01-04 2015-05-13 中国科学院物理研究所 Measuring method for intermediate-state energy level of energy gap of semiconductor material
US10018571B2 (en) * 2015-05-28 2018-07-10 Kla-Tencor Corporation System and method for dynamic care area generation on an inspection tool
US9816941B2 (en) * 2016-03-28 2017-11-14 Saudi Arabian Oil Company Systems and methods for constructing and testing composite photonic structures

Also Published As

Publication number Publication date
BR112018077001B1 (en) 2022-02-01
AU2019222891A1 (en) 2019-09-19
NZ747901A (en) 2021-02-26
US10830700B2 (en) 2020-11-10
KR20200047768A (en) 2020-05-07
NZ767004A (en) 2024-01-26
EP3535567B1 (en) 2021-07-07
CA3022953A1 (en) 2018-07-12
US20180195961A1 (en) 2018-07-12
BR122020025291B1 (en) 2021-06-15
EP3535567A4 (en) 2020-06-17
US20210055224A1 (en) 2021-02-25
AU2017390166B2 (en) 2019-10-03
CN109313136B (en) 2020-02-28
KR102304495B1 (en) 2021-09-23
TWI689720B (en) 2020-04-01
JP6651656B1 (en) 2020-02-19
US20190195799A1 (en) 2019-06-27
MY196658A (en) 2023-04-27
US10261018B2 (en) 2019-04-16
IL270722A (en) 2020-01-30
AU2019222891B2 (en) 2021-08-05
RU2701875C1 (en) 2019-10-02
JP2020507052A (en) 2020-03-05
TW201827811A (en) 2018-08-01
CN111323402A (en) 2020-06-23
JP2020079794A (en) 2020-05-28
IL270722B (en) 2022-08-01
US11442017B2 (en) 2022-09-13
AU2017390166A1 (en) 2018-11-22
SG11201811333RA (en) 2019-01-30
CN109313136A (en) 2019-02-05
IL262705B (en) 2019-12-31
CA3022953C (en) 2022-09-06
WO2018128753A1 (en) 2018-07-12
KR20190084209A (en) 2019-07-16
BR112018077001A2 (en) 2019-04-02
MX2019007948A (en) 2019-11-05
EP3535567A1 (en) 2019-09-11
CA3166392C (en) 2023-10-31
IL262705A (en) 2018-12-31
TWI772752B (en) 2022-08-01
JP6920485B2 (en) 2021-08-18
CA3166392A1 (en) 2018-07-12
KR102107210B1 (en) 2020-05-06
TW202024606A (en) 2020-07-01
SA518400565B1 (en) 2021-10-26

Similar Documents

Publication Publication Date Title
IL272735A (en) Measuring apparatus and measuring method
GB201703769D0 (en) Imaging apparatus and method of imaging
IL270722A (en) Solid inspection apparatus and method of use
IL259578B (en) Inspection apparatus and method
GB201803988D0 (en) Apparatus and method for non-destructive testing of materials
GB201816686D0 (en) Non-destructive testing apparatus and method of use
IL274772B (en) Inspection system and method of inspection
SG11202011267XA (en) Apparatus and method of use thereof
GB201615307D0 (en) Measurement method and apparatus
PL3694342T3 (en) Rod inspection method and apparatus
GB201718137D0 (en) Barrier apparatus and method of use thereof
SG10201702547QA (en) Methods of vibro-treating and vibro-treating apparatus
GB2546371B (en) Ultrasonic inspection method and apparatus
GB201811350D0 (en) Engagement apparatus and method of use thereof
GB201616637D0 (en) Multiplexer apparatus and method of use thereof
GB201704520D0 (en) Clamping apparatus and method of use thereof
IL268171A (en) Method and apparatus for examination of cells
GB201900460D0 (en) Construction apparatus and method of use thereof
GB201814600D0 (en) Support apparatus and method of use thereof
GB201804474D0 (en) Fall prevention apparatus and method of use thereof
GB201705601D0 (en) Spindle apparatus and method of use thereof
GB201602076D0 (en) Sampling apparatus and method of use thereof
GB201714882D0 (en) Method of inspection and inspection apparatus
GB201703210D0 (en) Inspection apparatus and method
GB201717782D0 (en) Engagement apparatus and method of use thereof