SG10201810172QA - Anti-backlash mechanism for motor-driven components in precision systems and applications - Google Patents

Anti-backlash mechanism for motor-driven components in precision systems and applications

Info

Publication number
SG10201810172QA
SG10201810172QA SG10201810172QA SG10201810172QA SG10201810172QA SG 10201810172Q A SG10201810172Q A SG 10201810172QA SG 10201810172Q A SG10201810172Q A SG 10201810172QA SG 10201810172Q A SG10201810172Q A SG 10201810172QA SG 10201810172Q A SG10201810172Q A SG 10201810172QA
Authority
SG
Singapore
Prior art keywords
motor
backlash
lead screw
nut
applications
Prior art date
Application number
SG10201810172QA
Inventor
James Cedrone
Iraj Gashgaee
George Gonnella
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of SG10201810172QA publication Critical patent/SG10201810172QA/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H25/2003—Screw mechanisms with arrangements for taking up backlash
    • F16H25/2006—Screw mechanisms with arrangements for taking up backlash with more than one nut or with nuts consisting of more than one bearing part
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B17/00—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
    • F04B17/03—Pumps characterised by combination with, or adaptation to, specific driving engines or motors driven by electric motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/04—Pumps for special use
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B23/00—Pumping installations or systems
    • F04B23/04—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B25/00—Multi-stage pumps
    • F04B25/005—Multi-stage pumps with two cylinders
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/025—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms two or more plate-like pumping members in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/10—Other safety measures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B51/00—Testing machines, pumps, or pumping installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/20—Filtering
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B9/00—Piston machines or pumps characterised by the driving or driven means to or from their working members
    • F04B9/02—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being mechanical
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/02—Pressure in the inlet chamber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/50—Presence of foreign matter in the fluid
    • F04B2205/503—Presence of foreign matter in the fluid of gas in a liquid flow, e.g. gas bubbles

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Reciprocating Pumps (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Details Of Reciprocating Pumps (AREA)
  • Transmission Devices (AREA)

Abstract

ANTI-BACKLASH MECHANISM FOR MOTOR-DRIVEN COMPONENTS IN PRECISION SYSTEMS AND APPLICATIONS Backlash in a precision system such as a pumping system can be reduced or eliminated with an anti-backlash device that has a first nut coupled to and fixed in relation to a piston. The first nut and a second nut may engage with a lead screw of a motor driving the piston. Relative rotation between the first and second nuts are limited or prevented. A biasing member maintains a spaced relationship between the first and second nuts along the lead screw such that the first nut remains in engagement with the lead screw to thereby reduce or eliminate backlash when the lead screw is rotated by the motor. Figure 5A
SG10201810172QA 2014-05-28 2015-05-28 Anti-backlash mechanism for motor-driven components in precision systems and applications SG10201810172QA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US201462004117P 2014-05-28 2014-05-28

Publications (1)

Publication Number Publication Date
SG10201810172QA true SG10201810172QA (en) 2018-12-28

Family

ID=53433273

Family Applications (2)

Application Number Title Priority Date Filing Date
SG11201609910XA SG11201609910XA (en) 2014-05-28 2015-05-28 Anti-backlash mechanism for motor-driven components in precision systems and applications
SG10201810172QA SG10201810172QA (en) 2014-05-28 2015-05-28 Anti-backlash mechanism for motor-driven components in precision systems and applications

Family Applications Before (1)

Application Number Title Priority Date Filing Date
SG11201609910XA SG11201609910XA (en) 2014-05-28 2015-05-28 Anti-backlash mechanism for motor-driven components in precision systems and applications

Country Status (8)

Country Link
US (2) US20170114879A1 (en)
EP (2) EP3149328B1 (en)
JP (2) JP6644712B2 (en)
KR (2) KR102141271B1 (en)
CN (2) CN106662083B (en)
SG (2) SG11201609910XA (en)
TW (2) TWI664350B (en)
WO (2) WO2015184057A1 (en)

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US10570896B1 (en) * 2017-04-28 2020-02-25 Vp Sales And Company Lp Packing nut lock
US10792697B2 (en) * 2017-05-17 2020-10-06 Taiwan Semiconductor Manufacturing Company, Ltd. Drippage prevention system and method of operating same
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US10663865B2 (en) * 2018-06-29 2020-05-26 Taiwan Semiconductor Manufacturing Co., Ltd. Photoresist recycling apparatus
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WO2020097700A1 (en) * 2018-11-14 2020-05-22 Drausuisse Brasil Comercio E Locacao De Unidades Hidraulicas Inteligentes S.A. Hydraulic unit with parallel pumps linked to a servomotor and use thereof
CN111219248A (en) * 2018-11-27 2020-06-02 罗伯特·博世有限公司 Method of detecting the presence of a filter in a system
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Also Published As

Publication number Publication date
JP6543646B2 (en) 2019-07-10
WO2015184057A9 (en) 2016-09-01
TWI670417B (en) 2019-09-01
KR102141271B1 (en) 2020-08-04
US20170107982A1 (en) 2017-04-20
SG11201609910XA (en) 2016-12-29
KR20170012423A (en) 2017-02-02
EP3149328B1 (en) 2019-03-20
CN106662083B (en) 2018-11-27
WO2015184057A1 (en) 2015-12-03
WO2015184056A1 (en) 2015-12-03
CN106460811A (en) 2017-02-22
EP3149328A1 (en) 2017-04-05
JP2017516944A (en) 2017-06-22
KR20170013322A (en) 2017-02-06
EP3149329A1 (en) 2017-04-05
TW201608131A (en) 2016-03-01
CN106662083A (en) 2017-05-10
EP3149329B1 (en) 2020-01-29
KR102141270B1 (en) 2020-08-04
US20170114879A1 (en) 2017-04-27
JP6644712B2 (en) 2020-02-12
TW201608133A (en) 2016-03-01
JP2017517696A (en) 2017-06-29
TWI664350B (en) 2019-07-01

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