SG10201507086VA - Developing method, developing apparatus and storage medium - Google Patents

Developing method, developing apparatus and storage medium

Info

Publication number
SG10201507086VA
SG10201507086VA SG10201507086VA SG10201507086VA SG10201507086VA SG 10201507086V A SG10201507086V A SG 10201507086VA SG 10201507086V A SG10201507086V A SG 10201507086VA SG 10201507086V A SG10201507086V A SG 10201507086VA SG 10201507086V A SG10201507086V A SG 10201507086VA
Authority
SG
Singapore
Prior art keywords
developing
storage medium
developing apparatus
developing method
medium
Prior art date
Application number
SG10201507086VA
Inventor
Terashita Yuichi
Takeguchi Hirofumi
Shimoaoki Takeshi
Yoshihara Kousuke
Iseki Tomohiro
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of SG10201507086VA publication Critical patent/SG10201507086VA/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
SG10201507086VA 2014-09-04 2015-09-04 Developing method, developing apparatus and storage medium SG10201507086VA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014180015 2014-09-04
JP2015114140A JP6528546B2 (en) 2014-09-04 2015-06-04 Developing method, developing device and storage medium

Publications (1)

Publication Number Publication Date
SG10201507086VA true SG10201507086VA (en) 2016-04-28

Family

ID=55756704

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201507086VA SG10201507086VA (en) 2014-09-04 2015-09-04 Developing method, developing apparatus and storage medium

Country Status (4)

Country Link
JP (1) JP6528546B2 (en)
KR (1) KR102186415B1 (en)
SG (1) SG10201507086VA (en)
TW (1) TWI614585B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6475123B2 (en) * 2015-09-01 2019-02-27 株式会社Ｓｃｒｅｅｎホールディングス Substrate processing apparatus and substrate processing method
JP6902404B2 (en) * 2017-06-12 2021-07-14 東京エレクトロン株式会社 Development processing equipment, development processing method and storage medium
JP6994346B2 (en) * 2017-10-11 2022-01-14 東京エレクトロン株式会社 Development processing equipment, development processing method and storage medium
JP2021044335A (en) 2019-09-10 2021-03-18 キオクシア株式会社 Substrate processing apparatus

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2770338B2 (en) * 1988-08-30 1998-07-02 ソニー株式会社 Development method
JPH08138997A (en) * 1994-11-09 1996-05-31 Asahi Kasei Micro Syst Kk Method of developing photoresist
JP3527426B2 (en) 1998-01-09 2004-05-17 東京エレクトロン株式会社 Development processing method and development processing apparatus
JP3912920B2 (en) * 1998-12-10 2007-05-09 大日本スクリーン製造株式会社 Development device
JP3704059B2 (en) * 2000-06-13 2005-10-05 東京エレクトロン株式会社 Development processing method and development processing apparatus
JP3926544B2 (en) * 2000-08-25 2007-06-06 東京エレクトロン株式会社 Development processing equipment
JP2002141272A (en) * 2000-11-06 2002-05-17 Fujitsu Ltd Developing method and developing equipment of photosensitive film
US6955485B2 (en) * 2002-03-01 2005-10-18 Tokyo Electron Limited Developing method and developing unit
JP2007234984A (en) * 2006-03-02 2007-09-13 Seiko Epson Corp Photo developing method
JP4788785B2 (en) * 2009-02-06 2011-10-05 東京エレクトロン株式会社 Development device, development processing method, and storage medium
JP5314461B2 (en) * 2009-03-10 2013-10-16 東京エレクトロン株式会社 Substrate processing method, program, computer storage medium, and substrate processing system
JP4893799B2 (en) * 2009-10-23 2012-03-07 東京エレクトロン株式会社 Developing device, developing method, and storage medium
JP5797532B2 (en) * 2011-02-24 2015-10-21 東京エレクトロン株式会社 Development processing method and development processing apparatus using developer containing organic solvent
JP5857864B2 (en) * 2012-04-23 2016-02-10 東京エレクトロン株式会社 Liquid processing apparatus, liquid processing method, and storage medium
JP5937028B2 (en) * 2013-02-18 2016-06-22 東京エレクトロン株式会社 Development processing method, development processing apparatus, and development processing recording medium

Also Published As

Publication number Publication date
JP2016058712A (en) 2016-04-21
KR102186415B1 (en) 2020-12-03
JP6528546B2 (en) 2019-06-12
TWI614585B (en) 2018-02-11
KR20160028983A (en) 2016-03-14
TW201619713A (en) 2016-06-01

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