SG10201505311PA - Movable microchamber system with gas curtain - Google Patents

Movable microchamber system with gas curtain

Info

Publication number
SG10201505311PA
SG10201505311PA SG10201505311PA SG10201505311PA SG10201505311PA SG 10201505311P A SG10201505311P A SG 10201505311PA SG 10201505311P A SG10201505311P A SG 10201505311PA SG 10201505311P A SG10201505311P A SG 10201505311PA SG 10201505311P A SG10201505311P A SG 10201505311PA
Authority
SG
Singapore
Prior art keywords
movable
gas curtain
microchamber system
microchamber
curtain
Prior art date
Application number
SG10201505311PA
Inventor
Pun Digby
Shajii Ali
B Cowe Andrew
Ellis Raymond
T Mcwhirter James
Original Assignee
Ultratech Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ultratech Inc filed Critical Ultratech Inc
Publication of SG10201505311PA publication Critical patent/SG10201505311PA/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B23K26/127Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an enclosure
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/324Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26Bombardment with radiation
    • H01L21/263Bombardment with radiation with high-energy radiation
    • H01L21/268Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/186Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
    • H01L31/1864Annealing
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00Fluid handling
    • Y10T137/0318Processes
SG10201505311PA 2012-11-30 2013-10-11 Movable microchamber system with gas curtain SG10201505311PA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US13/690,132 US9029809B2 (en) 2012-11-30 2012-11-30 Movable microchamber system with gas curtain

Publications (1)

Publication Number Publication Date
SG10201505311PA true SG10201505311PA (en) 2015-08-28

Family

ID=50824428

Family Applications (2)

Application Number Title Priority Date Filing Date
SG10201505311PA SG10201505311PA (en) 2012-11-30 2013-10-11 Movable microchamber system with gas curtain
SG2013076443A SG2013076443A (en) 2012-11-30 2013-10-11 Movable microchamber system with gas curtain

Family Applications After (1)

Application Number Title Priority Date Filing Date
SG2013076443A SG2013076443A (en) 2012-11-30 2013-10-11 Movable microchamber system with gas curtain

Country Status (5)

Country Link
US (1) US9029809B2 (en)
JP (1) JP5964800B2 (en)
KR (1) KR102176801B1 (en)
SG (2) SG10201505311PA (en)
TW (1) TWI509697B (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9613828B2 (en) * 2014-06-24 2017-04-04 Ultratech, Inc. Method of laser annealing a semiconductor wafer with localized control of ambient oxygen
JP6185512B2 (en) * 2014-06-24 2017-08-23 ウルトラテック インク Laser annealing method of semiconductor wafer using localization control of ambient oxygen gas
US20160354865A1 (en) 2015-06-08 2016-12-08 Ultratech, Inc. Microchamber laser processing systems and methods using localized process-gas atmosphere
KR20160144307A (en) * 2015-06-08 2016-12-16 울트라테크 인크. Microchamber Laser Processing Systems and Methods Using Localized Process-Gas Atmosphere
CN107398634A (en) * 2016-05-19 2017-11-28 上海新昇半导体科技有限公司 A kind of laser anneal device and laser anneal method

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US4444812A (en) 1980-07-28 1984-04-24 Monsanto Company Combination gas curtains for continuous chemical vapor deposition production of silicon bodies
US4435445A (en) 1982-05-13 1984-03-06 Energy Conversion Devices, Inc. Photo-assisted CVD
US4801352A (en) 1986-12-30 1989-01-31 Image Micro Systems, Inc. Flowing gas seal enclosure for processing workpiece surface with controlled gas environment and intense laser irradiation
JPH02142696A (en) * 1988-11-22 1990-05-31 Mitsubishi Heavy Ind Ltd Dust collector for laser beam machine
JPH02143517A (en) * 1988-11-25 1990-06-01 Fujitsu Ltd Manufacture of semiconductor device
US5997588A (en) 1995-10-13 1999-12-07 Advanced Semiconductor Materials America, Inc. Semiconductor processing system with gas curtain
US5891251A (en) 1996-08-07 1999-04-06 Macleish; Joseph H. CVD reactor having heated process chamber within isolation chamber
JPH10172919A (en) * 1996-12-11 1998-06-26 Sony Corp Laser annealing method and apparatus
JP3400396B2 (en) * 1998-01-13 2003-04-28 株式会社東芝 Laser annealing apparatus and laser annealing method
US5997963A (en) * 1998-05-05 1999-12-07 Ultratech Stepper, Inc. Microchamber
US5965048A (en) 1998-11-20 1999-10-12 General Electric Company Heated chamber including an open wall with a gas curtain
US6654095B1 (en) * 1999-10-18 2003-11-25 Nikon Corporation Exposure apparatus, exposure method, and device manufacturing method
KR100722592B1 (en) 1999-12-22 2007-05-28 아익스트론 아게 Chemical vapor deposition reactor and process chamber for said reactor
JP2001358056A (en) 2000-06-15 2001-12-26 Canon Inc Exposure apparatus
JP2002075904A (en) * 2000-09-04 2002-03-15 Toshiba Corp Laser annealer and method of manufacturing polycrystalline silicon
JP4495851B2 (en) 2000-11-15 2010-07-07 積水化学工業株式会社 Semiconductor device manufacturing equipment
US6818857B1 (en) * 2000-11-28 2004-11-16 Heung Ki Cho Method and apparatus for welding
JP4845267B2 (en) * 2001-01-15 2011-12-28 東芝モバイルディスプレイ株式会社 Laser annealing apparatus and laser annealing method
JP4258840B2 (en) * 2002-04-22 2009-04-30 株式会社ニコン Support apparatus, optical apparatus and exposure apparatus, and device manufacturing method
US20040058293A1 (en) * 2002-08-06 2004-03-25 Tue Nguyen Assembly line processing system
JP2005166768A (en) * 2003-12-01 2005-06-23 Advanced Display Inc Laser annealing device and method of manufacturing thin film transistor
US7807947B2 (en) 2005-05-09 2010-10-05 3D Systems, Inc. Laser sintering process chamber gas curtain window cleansing in a laser sintering system
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KR100769475B1 (en) * 2005-11-16 2007-10-23 코닉시스템 주식회사 Method and apparatus for crystallization in locally induced inert gas ambient
US7867868B2 (en) * 2007-03-02 2011-01-11 Applied Materials, Inc. Absorber layer candidates and techniques for application
JP2009099917A (en) * 2007-10-19 2009-05-07 Ulvac Japan Ltd Laser annealing apparatus
SG178765A1 (en) * 2009-01-21 2012-03-29 Semiconductor Energy Lab Method for manufacturing soi substrate and semiconductor device
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JP5408678B2 (en) * 2011-11-07 2014-02-05 株式会社日本製鋼所 Laser processing equipment

Also Published As

Publication number Publication date
JP2014110420A (en) 2014-06-12
US20140151344A1 (en) 2014-06-05
KR20140070364A (en) 2014-06-10
TWI509697B (en) 2015-11-21
TW201430956A (en) 2014-08-01
US9029809B2 (en) 2015-05-12
SG2013076443A (en) 2014-06-27
KR102176801B1 (en) 2020-11-10
JP5964800B2 (en) 2016-08-03

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