SG10201500561SA - Cleaning method for coating systems - Google Patents

Cleaning method for coating systems

Info

Publication number
SG10201500561SA
SG10201500561SA SG10201500561SA SG10201500561SA SG10201500561SA SG 10201500561S A SG10201500561S A SG 10201500561SA SG 10201500561S A SG10201500561S A SG 10201500561SA SG 10201500561S A SG10201500561S A SG 10201500561SA SG 10201500561S A SG10201500561S A SG 10201500561SA
Authority
SG
Singapore
Prior art keywords
cleaning method
coating systems
coating
systems
cleaning
Prior art date
Application number
SG10201500561SA
Inventor
Peter Näff
Original Assignee
Oerlikon Trading Ag; Trübbach
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Trading Ag; Trübbach filed Critical Oerlikon Trading Ag; Trübbach
Publication of SG10201500561SA publication Critical patent/SG10201500561SA/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
    • B24C1/003—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods using material which dissolves or changes phase after the treatment, e.g. ice, CO2
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
    • B24C1/04—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for treating only selected parts of a surface, e.g. for carving stone or glass
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C23C16/4407—Cleaning of reactor or reactor parts by using wet or mechanical methods

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Physical Vapour Deposition (AREA)
SG10201500561SA 2010-01-25 2010-12-22 Cleaning method for coating systems SG10201500561SA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102010005762A DE102010005762A1 (en) 2010-01-25 2010-01-25 Cleaning process for coating systems

Publications (1)

Publication Number Publication Date
SG10201500561SA true SG10201500561SA (en) 2015-05-28

Family

ID=43706705

Family Applications (2)

Application Number Title Priority Date Filing Date
SG10201500561SA SG10201500561SA (en) 2010-01-25 2010-12-22 Cleaning method for coating systems
SG2012055216A SG182730A1 (en) 2010-01-25 2010-12-22 Cleaning method for coating systems

Family Applications After (1)

Application Number Title Priority Date Filing Date
SG2012055216A SG182730A1 (en) 2010-01-25 2010-12-22 Cleaning method for coating systems

Country Status (12)

Country Link
US (1) US20120298139A1 (en)
EP (1) EP2529040A1 (en)
JP (1) JP2013518177A (en)
KR (1) KR20120120944A (en)
CN (1) CN102812154B (en)
BR (1) BR112012018524A2 (en)
CA (1) CA2788448A1 (en)
DE (1) DE102010005762A1 (en)
MX (1) MX2012008661A (en)
RU (1) RU2554838C2 (en)
SG (2) SG10201500561SA (en)
WO (1) WO2011088884A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012003514A1 (en) * 2012-02-24 2013-08-29 Acp-Advanced Clean Production Gmbh Method for dry cleaning and pretreatment of surfaces, involves pairing of beam with synergistic medium by external supply, where beam is mixed with fuel gas and carbon dioxide snow
WO2017031571A1 (en) * 2015-08-22 2017-03-02 Novena Tec Inc. Process chamber shielding system and method
WO2020096091A1 (en) * 2018-11-09 2020-05-14 주식회사 그리너지 Surface treatment method for lithium metal negative electrode, surface-treated lithium metal negative electrode, and lithium metal battery comprising same
FR3088564B1 (en) * 2018-11-16 2020-12-25 Safran Aircraft Engines PROCESS FOR COMPACTING AN ANTI-CORROSION PAINT OF A TURBOMACHINE PART
CN109663790B (en) * 2018-12-12 2021-02-19 盐城市国泰混凝土有限公司 Cleaning method for excess material of concrete mixer truck returned to factory
DE102019110642A1 (en) 2019-04-25 2020-10-29 Vtd Vakuumtechnik Dresden Gmbh Anode for PVD processes

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06170735A (en) * 1992-12-03 1994-06-21 Shin Etsu Chem Co Ltd Manufacture of polycrystalline diamond grinding wheel
JPH1136061A (en) * 1997-07-17 1999-02-09 Mitsubishi Materials Corp Masking jig of physical vapor deposition device
JP2000044843A (en) * 1998-08-04 2000-02-15 Mitsubishi Heavy Ind Ltd Coating material and its production
JP3030287B1 (en) * 1998-10-09 2000-04-10 株式会社協同インターナショナル Method for cleaning film forming apparatus, method for cleaning sputtering target, and cleaning apparatus used for these
WO2001082368A2 (en) * 2000-04-25 2001-11-01 Tokyo Electron Limited Method of depositing metal film and metal deposition cluster tool including supercritical drying/cleaning module
JP3984833B2 (en) * 2001-01-16 2007-10-03 キヤノン株式会社 Method for regenerating developer carrier
JP4200662B2 (en) * 2001-02-19 2008-12-24 富士ゼロックス株式会社 Manufacturing method of image display medium
DE10111235A1 (en) 2001-03-08 2002-09-19 Linde Ag Process for blasting treatment with blasting media
ITMI20010134U1 (en) 2001-03-12 2002-09-12 Valentini Guido SUBSTANTIALLY CIRCULAR OPERATING PLATE FOR PORTABLE TOOL
JP2002339059A (en) * 2001-05-16 2002-11-27 Mitsubishi Heavy Ind Ltd Vacuum vapor deposition apparatus
US20030037879A1 (en) * 2001-08-24 2003-02-27 Applied Materials, Inc. Top gas feed lid for semiconductor processing chamber
JP3876167B2 (en) * 2002-02-13 2007-01-31 川崎マイクロエレクトロニクス株式会社 Cleaning method and semiconductor device manufacturing method
US7002790B2 (en) * 2002-09-30 2006-02-21 Medtronic, Inc. Capacitor in an implantable medical device
US6902628B2 (en) * 2002-11-25 2005-06-07 Applied Materials, Inc. Method of cleaning a coated process chamber component
JP4653406B2 (en) * 2004-03-10 2011-03-16 株式会社アルバック Water-disintegrating Al composite material, water-disintegrating Al sprayed film, method for producing water-disintegrating Al powder, film forming chamber component, and method for recovering film forming material
US7384486B2 (en) * 2004-03-26 2008-06-10 Taiwan Semiconductor Manufacturing Co., Ltd. Chamber cleaning method
ES2276186T3 (en) * 2004-05-06 2007-06-16 Siemens Aktiengesellschaft PROCEDURE TO ADJUST THE ELECTRICAL CONDUCTIVITY OF A COATING OF A CONSTRUCTION MACHINE PART, WHOSE ELECTRICAL CONDUCTIVITY CAN BE MODIFIED BY PRESSURE, BY DRY ICE RADIATION.
DE102006002653B4 (en) 2005-01-27 2009-10-08 Luderer Schweißtechnik GmbH Dry Ice Blasting
EP1772529A1 (en) * 2005-10-07 2007-04-11 Siemens Aktiengesellschaft Dry chemical composition, use thereof to form a layer system and method for coating
WO2008040819A1 (en) 2006-10-06 2008-04-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method of decontamination by means of dry ice
DE102007033788A1 (en) * 2007-07-09 2009-01-15 Gerd Wurster Pretreatment plant for special- or burnished tire rims, includes high pressure carbon dioxide jet cleaning equipment, with guidance provided by camera and robot
CA2744032C (en) * 2008-11-20 2018-07-31 Oerlikon Trading Ag, Trubbach Cleaning method for coating systems

Also Published As

Publication number Publication date
JP2013518177A (en) 2013-05-20
DE102010005762A1 (en) 2011-07-28
CN102812154B (en) 2015-07-15
RU2012136472A (en) 2014-03-10
SG182730A1 (en) 2012-08-30
BR112012018524A2 (en) 2016-08-23
CN102812154A (en) 2012-12-05
EP2529040A1 (en) 2012-12-05
US20120298139A1 (en) 2012-11-29
WO2011088884A1 (en) 2011-07-28
MX2012008661A (en) 2012-10-15
RU2554838C2 (en) 2015-06-27
CA2788448A1 (en) 2011-07-28
KR20120120944A (en) 2012-11-02

Similar Documents

Publication Publication Date Title
PL2539080T3 (en) Method for coating components
PT2648873T (en) Imaging system for coating removal
EP2618710A4 (en) Cleaning robot system and its method for controling
GB201010591D0 (en) Novel cleaning method
EP2652167A4 (en) Continuous coating apparatus
GB0909183D0 (en) Coating method
EP2537596A4 (en) Method for forming antifouling coating film
PL3339052T3 (en) Method for decorating surfaces
EP2497576A4 (en) Coating system
IL233551B (en) Method for coating pipes
EP2535183A4 (en) Hard coating forming method
PL2765866T3 (en) Novel coating system
EP2737620A4 (en) Solar-redshift systems
EP2697409A4 (en) System and method for industrial cleaning
HUE035874T2 (en) Radar-transparent coating
EP2539077A4 (en) Electrostatic spray system
SI2511868T1 (en) Method for invoicing the use of locations
IL222607A0 (en) Method for disinfecting surfaces
GB201019522D0 (en) Surface coating for inspection
HK1198291A1 (en) Carrier systems for coating panels
EP2583761A4 (en) Cleaning system
PL2714826T3 (en) Coating system
GB201119330D0 (en) Anti-fouling system
SG10201500561SA (en) Cleaning method for coating systems
EP2587731A4 (en) Method for controlling component for network system