SE9901029L - Integrated circuit with component isolation - Google Patents
Integrated circuit with component isolationInfo
- Publication number
- SE9901029L SE9901029L SE9901029A SE9901029A SE9901029L SE 9901029 L SE9901029 L SE 9901029L SE 9901029 A SE9901029 A SE 9901029A SE 9901029 A SE9901029 A SE 9901029A SE 9901029 L SE9901029 L SE 9901029L
- Authority
- SE
- Sweden
- Prior art keywords
- region
- integrated circuit
- active
- substrate
- manufacturing
- Prior art date
Links
- 238000002955 isolation Methods 0.000 title 1
- 238000000034 method Methods 0.000 abstract 4
- 239000010410 layer Substances 0.000 abstract 3
- 239000003990 capacitor Substances 0.000 abstract 2
- 238000004519 manufacturing process Methods 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 150000004767 nitrides Chemical class 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 239000002344 surface layer Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Semiconductor Integrated Circuits (AREA)
- Bipolar Integrated Circuits (AREA)
- Bipolar Transistors (AREA)
- Element Separation (AREA)
Abstract
A semiconductor component, in particular an NPN bipolar transistor, comprises an active surface region surrounded by thick field oxide and which is partly covered by an electrically isolating surface layer different from the field oxide. A base region within the active region is defined by a lithographically defined opening in the isolating layer. Also claimed are: (i) a process for manufacturing a transistor as above; (ii) a capacitor at the surface of a substrate comprising a dielectric layer over a highly doped buried region; (iii) a process of manufacturing the capacitor above; (iv) a process for producing a free area at a surface of a substrate which is limited by a nitride layer; (v) a side-string structure having conductive silicon contact a border of an active area; and (vi) an integrated circuit, bipolar device and process.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE9901029A SE522530C2 (en) | 1999-03-22 | 1999-03-22 | NPN bipolar transistors for radio frequency use |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE9901029A SE522530C2 (en) | 1999-03-22 | 1999-03-22 | NPN bipolar transistors for radio frequency use |
Publications (3)
Publication Number | Publication Date |
---|---|
SE9901029D0 SE9901029D0 (en) | 1999-03-22 |
SE9901029L true SE9901029L (en) | 1999-03-22 |
SE522530C2 SE522530C2 (en) | 2004-02-17 |
Family
ID=20414946
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE9901029A SE522530C2 (en) | 1999-03-22 | 1999-03-22 | NPN bipolar transistors for radio frequency use |
Country Status (1)
Country | Link |
---|---|
SE (1) | SE522530C2 (en) |
-
1999
- 1999-03-22 SE SE9901029A patent/SE522530C2/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
SE9901029D0 (en) | 1999-03-22 |
SE522530C2 (en) | 2004-02-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
NUG | Patent has lapsed |