SE9901029L - Integrated circuit with component isolation - Google Patents

Integrated circuit with component isolation

Info

Publication number
SE9901029L
SE9901029L SE9901029A SE9901029A SE9901029L SE 9901029 L SE9901029 L SE 9901029L SE 9901029 A SE9901029 A SE 9901029A SE 9901029 A SE9901029 A SE 9901029A SE 9901029 L SE9901029 L SE 9901029L
Authority
SE
Sweden
Prior art keywords
region
integrated circuit
active
substrate
manufacturing
Prior art date
Application number
SE9901029A
Other languages
Swedish (sv)
Other versions
SE9901029D0 (en
SE522530C2 (en
Inventor
Hans Norstroem
Stefan Nygren
Ola Tylstedt
Original Assignee
Ericsson Telefon Ab L M
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ericsson Telefon Ab L M filed Critical Ericsson Telefon Ab L M
Priority to SE9901029A priority Critical patent/SE522530C2/en
Publication of SE9901029D0 publication Critical patent/SE9901029D0/en
Publication of SE9901029L publication Critical patent/SE9901029L/en
Publication of SE522530C2 publication Critical patent/SE522530C2/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/283Deposition of conductive or insulating materials for electrodes conducting electric current
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40Electrodes ; Multistep manufacturing processes therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Bipolar Integrated Circuits (AREA)
  • Bipolar Transistors (AREA)
  • Element Separation (AREA)

Abstract

A semiconductor component, in particular an NPN bipolar transistor, comprises an active surface region surrounded by thick field oxide and which is partly covered by an electrically isolating surface layer different from the field oxide. A base region within the active region is defined by a lithographically defined opening in the isolating layer. Also claimed are: (i) a process for manufacturing a transistor as above; (ii) a capacitor at the surface of a substrate comprising a dielectric layer over a highly doped buried region; (iii) a process of manufacturing the capacitor above; (iv) a process for producing a free area at a surface of a substrate which is limited by a nitride layer; (v) a side-string structure having conductive silicon contact a border of an active area; and (vi) an integrated circuit, bipolar device and process.
SE9901029A 1999-03-22 1999-03-22 NPN bipolar transistors for radio frequency use SE522530C2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SE9901029A SE522530C2 (en) 1999-03-22 1999-03-22 NPN bipolar transistors for radio frequency use

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9901029A SE522530C2 (en) 1999-03-22 1999-03-22 NPN bipolar transistors for radio frequency use

Publications (3)

Publication Number Publication Date
SE9901029D0 SE9901029D0 (en) 1999-03-22
SE9901029L true SE9901029L (en) 1999-03-22
SE522530C2 SE522530C2 (en) 2004-02-17

Family

ID=20414946

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9901029A SE522530C2 (en) 1999-03-22 1999-03-22 NPN bipolar transistors for radio frequency use

Country Status (1)

Country Link
SE (1) SE522530C2 (en)

Also Published As

Publication number Publication date
SE9901029D0 (en) 1999-03-22
SE522530C2 (en) 2004-02-17

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Legal Events

Date Code Title Description
NUG Patent has lapsed