SE8402153L - Forfarande och anordning for ytbeleggning av ett substrat med ett material som pa elektrisk veg har overforts till angfas - Google Patents
Forfarande och anordning for ytbeleggning av ett substrat med ett material som pa elektrisk veg har overforts till angfasInfo
- Publication number
- SE8402153L SE8402153L SE8402153A SE8402153A SE8402153L SE 8402153 L SE8402153 L SE 8402153L SE 8402153 A SE8402153 A SE 8402153A SE 8402153 A SE8402153 A SE 8402153A SE 8402153 L SE8402153 L SE 8402153L
- Authority
- SE
- Sweden
- Prior art keywords
- electrode
- substrate
- ang
- transferred
- procedure
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32055—Arc discharge
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Ceramic Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Structural Engineering (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06494302 US4609564C2 (en) | 1981-02-24 | 1983-05-13 | Method of and apparatus for the coating of a substrate with material electrically transformed into a vapor phase |
Publications (3)
Publication Number | Publication Date |
---|---|
SE8402153D0 SE8402153D0 (sv) | 1984-04-18 |
SE8402153L true SE8402153L (sv) | 1984-11-14 |
SE458205B SE458205B (sv) | 1989-03-06 |
Family
ID=23963918
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE8402153A SE458205B (sv) | 1983-05-13 | 1984-04-18 | Foerfarande och anordning foer belaeggning av ett substrat med material, som paa elektrisk vaeg har oeverfoerts till aangfas |
Country Status (10)
Country | Link |
---|---|
US (2) | US4609564C2 (sv) |
JP (1) | JPS59211574A (sv) |
CA (1) | CA1213852A (sv) |
CH (1) | CH662823A5 (sv) |
DE (1) | DE3417462C3 (sv) |
FR (1) | FR2545839B1 (sv) |
GB (1) | GB2139648B (sv) |
IL (1) | IL71643A (sv) |
IT (1) | IT1173587B (sv) |
SE (1) | SE458205B (sv) |
Families Citing this family (41)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IL74360A (en) * | 1984-05-25 | 1989-01-31 | Wedtech Corp | Method of coating ceramics and quartz crucibles with material electrically transformed into a vapor phase |
US4628174A (en) * | 1984-09-17 | 1986-12-09 | General Electric Company | Forming electrical conductors in long microdiameter holes |
JPS6224916A (ja) * | 1985-07-22 | 1987-02-02 | Masahiko Suzuki | 放電加工による表面層の形成方法 |
DE3700633C2 (de) * | 1987-01-12 | 1997-02-20 | Reinar Dr Gruen | Verfahren und Vorrichtung zum schonenden Beschichten elektrisch leitender Gegenstände mittels Plasma |
GB2202237A (en) * | 1987-03-12 | 1988-09-21 | Vac Tec Syst | Cathodic arc plasma deposition of hard coatings |
DE3781551T2 (de) * | 1987-06-29 | 1993-04-08 | Hauzer Holding | Verfahren und vorrichtung zur beschichtung von aushoehlungen von gegenstaenden. |
US4869203A (en) * | 1988-07-18 | 1989-09-26 | Vapor Technologies Inc. | Apparatus for coating a metal gas-pressure bottle or tank |
US4859489A (en) * | 1988-07-18 | 1989-08-22 | Vapor Technologies Inc. | Method of coating a metal gas-pressure bottle or tank |
US4898623A (en) * | 1988-12-09 | 1990-02-06 | Vapor Technologies Inc. | Method of shaping hard difficult-to-roll alloys |
US5062936A (en) * | 1989-07-12 | 1991-11-05 | Thermo Electron Technologies Corporation | Method and apparatus for manufacturing ultrafine particles |
US5194128A (en) * | 1989-07-12 | 1993-03-16 | Thermo Electron Technologies Corporation | Method for manufacturing ultrafine particles |
US5037522B1 (en) * | 1990-07-24 | 1996-07-02 | Vergason Technology Inc | Electric arc vapor deposition device |
US5393575A (en) * | 1992-03-03 | 1995-02-28 | Esterlis; Moisei | Method for carrying out surface processes |
US5480527A (en) * | 1994-04-25 | 1996-01-02 | Vapor Technologies, Inc. | Rectangular vacuum-arc plasma source |
US5830540A (en) * | 1994-09-15 | 1998-11-03 | Eltron Research, Inc. | Method and apparatus for reactive plasma surfacing |
US6009829A (en) * | 1997-08-30 | 2000-01-04 | United Technologies Corporation | Apparatus for driving the arc in a cathodic arc coater |
US5932078A (en) * | 1997-08-30 | 1999-08-03 | United Technologies Corporation | Cathodic arc vapor deposition apparatus |
US6036828A (en) * | 1997-08-30 | 2000-03-14 | United Technologies Corporation | Apparatus for steering the arc in a cathodic arc coater |
US5972185A (en) * | 1997-08-30 | 1999-10-26 | United Technologies Corporation | Cathodic arc vapor deposition apparatus (annular cathode) |
US6358323B1 (en) * | 1998-07-21 | 2002-03-19 | Applied Materials, Inc. | Method and apparatus for improved control of process and purge material in a substrate processing system |
US6735854B1 (en) * | 1998-07-27 | 2004-05-18 | Honeywell International, Inc. | Method for forming an electro-mechanical device |
US6096391A (en) * | 1998-10-16 | 2000-08-01 | Wilson Greatbatch Ltd. | Method for improving electrical conductivity of metals, metal alloys and metal oxides |
US6187089B1 (en) * | 1999-02-05 | 2001-02-13 | Memc Electronic Materials, Inc. | Tungsten doped crucible and method for preparing same |
AUPR054000A0 (en) * | 2000-10-04 | 2000-10-26 | Austai Motors Designing Pty Ltd | A planetary gear apparatus |
US6395151B1 (en) * | 2000-10-26 | 2002-05-28 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Vacuum ARC vapor deposition method and apparatus for applying identification symbols to substrates |
WO2002040732A1 (en) | 2000-11-15 | 2002-05-23 | G.T. Equipment Technologies Inc. | A protective layer for quartz crucibles used for silicon crystallization |
US20040118156A1 (en) * | 2001-03-08 | 2004-06-24 | Gabriele Korus | Method of producing a quartz glass crucible |
GB2375725A (en) * | 2001-05-26 | 2002-11-27 | Siemens Ag | Blasting metallic surfaces |
US6749685B2 (en) * | 2001-08-16 | 2004-06-15 | Cree, Inc. | Silicon carbide sublimation systems and associated methods |
US6866752B2 (en) * | 2001-08-23 | 2005-03-15 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Method of forming ultra thin film devices by vacuum arc vapor deposition |
US6936145B2 (en) * | 2002-02-28 | 2005-08-30 | Ionedge Corporation | Coating method and apparatus |
US8038858B1 (en) | 2004-04-28 | 2011-10-18 | Alameda Applied Sciences Corp | Coaxial plasma arc vapor deposition apparatus and method |
US7867366B1 (en) | 2004-04-28 | 2011-01-11 | Alameda Applied Sciences Corp. | Coaxial plasma arc vapor deposition apparatus and method |
AU2006208226A1 (en) * | 2005-01-24 | 2006-08-03 | Amgen Inc. | Humanized anti-amyloid antibody |
US20080210565A1 (en) * | 2005-08-08 | 2008-09-04 | Shou-Hui Chen | Method of Surface Treatment for Metal and Nonmetal Surfaces |
US7524385B2 (en) * | 2006-10-03 | 2009-04-28 | Elemetric, Llc | Controlled phase transition of metals |
EP2261254A3 (en) | 2007-12-21 | 2011-04-13 | Amgen, Inc | Anti-amyloid antibodies and uses thereof |
WO2011099110A1 (ja) * | 2010-02-09 | 2011-08-18 | Kaneko Kyojiro | シリコン真空溶解法 |
JP5945601B2 (ja) * | 2011-08-26 | 2016-07-05 | コンサーク コーポレイションConsarc Corporation | 消耗電極真空アーク再溶解法によるメタロイドの精製 |
EP2602354A1 (en) | 2011-12-05 | 2013-06-12 | Pivot a.s. | Filtered cathodic vacuum arc deposition apparatus and method |
KR101879274B1 (ko) * | 2012-01-09 | 2018-08-20 | 삼성디스플레이 주식회사 | 저온 증착 장치 |
Family Cites Families (31)
Publication number | Priority date | Publication date | Assignee | Title |
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GB191418970A (en) * | 1913-08-23 | Schlueter Hermann | Process for Producing Metallic Coatings. | |
US1221104A (en) * | 1913-10-07 | 1917-04-03 | Georg Stolle | Process for making coatings of fusible substances. |
DE767858C (de) * | 1936-06-09 | 1954-03-29 | Rudolf Maier Dr | Verfahren, um Metalle, Metallegierungen und schwer in den Dampfzustand zu ueberfuehrende Stoffe ueber die Dampfform in technisch verwertbare Feststoffe, z. B. Metalloxyde, ueberzufuehren |
FR979772A (fr) * | 1948-01-30 | 1951-05-02 | Procédé et dispositif pour l'application de précipités métalliques sur des corps quelconques | |
CH342980A (de) * | 1950-11-09 | 1959-12-15 | Berghaus Elektrophysik Anst | Verfahren zur Diffusionsbehandlung von Rohren aus Eisen und Stahl oder deren Legierungen |
US3036549A (en) * | 1957-05-08 | 1962-05-29 | Sumitomo Electric Industries | Apparatus for vacuum evaporation of metals |
GB889018A (en) * | 1957-05-24 | 1962-02-07 | Ass Elect Ind | Improvements relating to the stabilisation of low pressure d.c. arc discharges |
US3010009A (en) * | 1958-09-29 | 1961-11-21 | Plasmadyne Corp | Method and apparatus for uniting materials in a controlled medium |
NL270313A (sv) * | 1961-01-03 | |||
FR1400961A (fr) * | 1964-07-15 | 1965-05-28 | Huettenwerk Oberhausen Ag | Procédé et dispositif de détermination spectroscopique ou spectrographique de la composition d'échantillons métalliques représentatifs prélevés de produits finis |
GB1061949A (en) * | 1965-04-21 | 1967-03-15 | Ibm | Rare earth chalcogenide films |
US3491015A (en) * | 1967-04-04 | 1970-01-20 | Automatic Fire Control Inc | Method of depositing elemental material from a low pressure electrical discharge |
DE1648968A1 (de) * | 1967-10-18 | 1971-10-21 | Lochte Holtgreven Walter Prof | Verfahren zur qualitativen und quantitativen Spektralanalyse mittels Entladungen an elektrisch verdampften Fluessigkeitsfaeden |
GB1257015A (sv) * | 1967-11-03 | 1971-12-15 | ||
DE1646004A1 (de) * | 1967-11-25 | 1971-07-01 | Lochte Holtgreven Walter Prof | Verfahren zur Behandlung von Oberflaechen mittels elektrisch explodierter Draehte oder Fluessigkeitsstrahlen |
CH529224A (de) * | 1968-09-26 | 1972-10-15 | Bbc Brown Boveri & Cie | Verfahren zum Beschichten eines Körpers, sowie Vorrichtung zur Durchführung des Verfahrens |
US3625848A (en) * | 1968-12-26 | 1971-12-07 | Alvin A Snaper | Arc deposition process and apparatus |
US3793179A (en) * | 1971-07-19 | 1974-02-19 | L Sablev | Apparatus for metal evaporation coating |
US3791852A (en) * | 1972-06-16 | 1974-02-12 | Univ California | High rate deposition of carbides by activated reactive evaporation |
GB1447224A (en) * | 1972-08-24 | 1976-08-25 | Secr Defence | Aluminium alloys |
US3925177A (en) * | 1973-01-30 | 1975-12-09 | Boeing Co | Method and apparatus for heating solid and liquid particulate material to vaporize or disassociate the material |
DE2346738A1 (de) * | 1973-09-17 | 1975-04-24 | Bbc Brown Boveri & Cie | Verfahren zum aufbringen duenner schichten auf flaechenhafte gebilde |
US3889632A (en) * | 1974-05-31 | 1975-06-17 | Ibm | Variable incidence drive for deposition tooling |
JPS587704B2 (ja) * | 1975-09-22 | 1983-02-10 | 川崎重工業株式会社 | イオンプレ−テイングホウ |
CH619344B (de) * | 1977-12-23 | Balzers Hochvakuum | Verfahren zur herstellung goldfarbener ueberzuege. | |
CH640886A5 (de) * | 1979-08-02 | 1984-01-31 | Balzers Hochvakuum | Verfahren zum aufbringen harter verschleissfester ueberzuege auf unterlagen. |
CH624817B (de) * | 1979-09-04 | Balzers Hochvakuum | Verfahren zur herstellung goldfarbener ueberzuege. | |
JPS56161834A (en) * | 1980-05-15 | 1981-12-12 | Satake Eng Co Ltd | Ion nitriding treatment apparatus |
JPS6011103B2 (ja) * | 1981-02-23 | 1985-03-23 | レオニド パフロヴイツチ サブレフ | 電弧金属蒸発装置用の消耗性陰極 |
US4351855A (en) * | 1981-02-24 | 1982-09-28 | Eduard Pinkhasov | Noncrucible method of and apparatus for the vapor deposition of material upon a substrate using voltaic arc in vacuum |
AT376460B (de) * | 1982-09-17 | 1984-11-26 | Kljuchko Gennady V | Plasmalichtbogeneinrichtung zum auftragen von ueberzuegen |
-
1983
- 1983-05-13 US US06494302 patent/US4609564C2/en not_active Expired - Lifetime
-
1984
- 1984-04-18 SE SE8402153A patent/SE458205B/sv not_active IP Right Cessation
- 1984-04-25 IL IL71643A patent/IL71643A/xx not_active IP Right Cessation
- 1984-04-26 CA CA000452922A patent/CA1213852A/en not_active Expired
- 1984-05-08 IT IT20832/84A patent/IT1173587B/it active
- 1984-05-10 CH CH2289/84A patent/CH662823A5/de not_active IP Right Cessation
- 1984-05-11 GB GB08412124A patent/GB2139648B/en not_active Expired
- 1984-05-11 DE DE3417462A patent/DE3417462C3/de not_active Expired - Lifetime
- 1984-05-11 FR FR8407826A patent/FR2545839B1/fr not_active Expired
- 1984-05-14 JP JP59094755A patent/JPS59211574A/ja active Granted
- 1984-05-25 US US06/614,434 patent/US4505948A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
FR2545839B1 (fr) | 1988-01-15 |
FR2545839A1 (fr) | 1984-11-16 |
GB8412124D0 (en) | 1984-06-20 |
JPS59211574A (ja) | 1984-11-30 |
US4505948A (en) | 1985-03-19 |
GB2139648B (en) | 1987-04-08 |
SE8402153D0 (sv) | 1984-04-18 |
DE3417462C2 (sv) | 1992-10-15 |
US4609564A (en) | 1986-09-02 |
SE458205B (sv) | 1989-03-06 |
IL71643A0 (en) | 1984-07-31 |
DE3417462A1 (de) | 1984-11-15 |
IT1173587B (it) | 1987-06-24 |
IT8420832A0 (it) | 1984-05-08 |
IT8420832A1 (it) | 1985-11-08 |
CH662823A5 (de) | 1987-10-30 |
US4609564C2 (en) | 2001-10-09 |
IL71643A (en) | 1987-10-20 |
CA1213852A (en) | 1986-11-12 |
DE3417462C3 (de) | 1996-02-08 |
JPH0373631B2 (sv) | 1991-11-22 |
GB2139648A (en) | 1984-11-14 |
US4609564B1 (en) | 1998-04-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
NUG | Patent has lapsed |
Ref document number: 8402153-4 Effective date: 19910117 Format of ref document f/p: F |