SE8200941L - Vakuumbagplasmaanordning - Google Patents

Vakuumbagplasmaanordning

Info

Publication number
SE8200941L
SE8200941L SE8200941A SE8200941A SE8200941L SE 8200941 L SE8200941 L SE 8200941L SE 8200941 A SE8200941 A SE 8200941A SE 8200941 A SE8200941 A SE 8200941A SE 8200941 L SE8200941 L SE 8200941L
Authority
SE
Sweden
Prior art keywords
solenoid
pct
consumable cathode
length
sec
Prior art date
Application number
SE8200941A
Other languages
English (en)
Other versions
SE427003B (sv
Inventor
Ivan Ivanovich Axenov
Viktor Grigorievich Bren
Valentin Glebovich Padalka
Leonid Pavlovich Sablev
Rimma Ivanovna Stupak
Vladimir Maximovich Khoroshikh
Original Assignee
Axenov Ivan I
Viktor Grigorievich Bren
Padalka Valentin G
Sablev Leonid P
Rimma Ivanovna Stupak
Vladimir Maximovich Khoroshikh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Axenov Ivan I, Viktor Grigorievich Bren, Padalka Valentin G, Sablev Leonid P, Rimma Ivanovna Stupak, Vladimir Maximovich Khoroshikh filed Critical Axenov Ivan I
Publication of SE8200941L publication Critical patent/SE8200941L/sv
Publication of SE427003B publication Critical patent/SE427003B/sv

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/48—Generating plasma using an arc
    • H05H1/50—Generating plasma using an arc and using applied magnetic fields, e.g. for focusing or rotating the arc
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Physical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Nitrogen And Oxygen Or Sulfur-Condensed Heterocyclic Ring Systems (AREA)
SE8200941A 1980-06-25 1982-02-16 Vakuumbagplasmaanordning SE427003B (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU802933851A SU1040631A1 (ru) 1980-06-25 1980-06-25 Вакуумно-дуговое устройство

Publications (2)

Publication Number Publication Date
SE8200941L true SE8200941L (sv) 1982-02-16
SE427003B SE427003B (sv) 1983-02-21

Family

ID=20899404

Family Applications (1)

Application Number Title Priority Date Filing Date
SE8200941A SE427003B (sv) 1980-06-25 1982-02-16 Vakuumbagplasmaanordning

Country Status (12)

Country Link
US (1) US4551221A (sv)
JP (1) JPS6036468B2 (sv)
BR (1) BR8103781A (sv)
CA (1) CA1170315A (sv)
CH (1) CH655632B (sv)
DE (1) DE3152131C2 (sv)
FR (1) FR2485863B1 (sv)
GB (1) GB2092419B (sv)
IT (1) IT1171327B (sv)
SE (1) SE427003B (sv)
SU (1) SU1040631A1 (sv)
WO (1) WO1982000075A1 (sv)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE34806E (en) * 1980-11-25 1994-12-13 Celestech, Inc. Magnetoplasmadynamic processor, applications thereof and methods
CH657242A5 (de) * 1982-03-22 1986-08-15 Axenov Ivan I Lichtbogen-plasmaquelle und lichtbogenanlage mit einer solchen lichtbogen-plasmaquelle zur plasmabehandlung der oberflaeche von werkstuecken.
AT376460B (de) * 1982-09-17 1984-11-26 Kljuchko Gennady V Plasmalichtbogeneinrichtung zum auftragen von ueberzuegen
US5096558A (en) * 1984-04-12 1992-03-17 Plasco Dr. Ehrich Plasma - Coating Gmbh Method and apparatus for evaporating material in vacuum
CH664768A5 (de) * 1985-06-20 1988-03-31 Balzers Hochvakuum Verfahren zur beschichtung von substraten in einer vakuumkammer.
US4620913A (en) * 1985-11-15 1986-11-04 Multi-Arc Vacuum Systems, Inc. Electric arc vapor deposition method and apparatus
US4873605A (en) * 1986-03-03 1989-10-10 Innovex, Inc. Magnetic treatment of ferromagnetic materials
US4816291A (en) * 1987-08-19 1989-03-28 The Regents Of The University Of California Process for making diamond, doped diamond, diamond-cubic boron nitride composite films
US5601652A (en) * 1989-08-03 1997-02-11 United Technologies Corporation Apparatus for applying ceramic coatings
DE4006456C1 (en) * 1990-03-01 1991-05-29 Balzers Ag, Balzers, Li Appts. for vaporising material in vacuum - has electron beam gun or laser guided by electromagnet to form cloud or pre-melted spot on the target surface
JPH0817171B2 (ja) * 1990-12-31 1996-02-21 株式会社半導体エネルギー研究所 プラズマ発生装置およびそれを用いたエッチング方法
US5126030A (en) * 1990-12-10 1992-06-30 Kabushiki Kaisha Kobe Seiko Sho Apparatus and method of cathodic arc deposition
CA2065581C (en) 1991-04-22 2002-03-12 Andal Corp. Plasma enhancement apparatus and method for physical vapor deposition
US5306408A (en) * 1992-06-29 1994-04-26 Ism Technologies, Inc. Method and apparatus for direct ARC plasma deposition of ceramic coatings
US5282944A (en) * 1992-07-30 1994-02-01 The United States Of America As Represented By The United States Department Of Energy Ion source based on the cathodic arc
US5480527A (en) * 1994-04-25 1996-01-02 Vapor Technologies, Inc. Rectangular vacuum-arc plasma source
US5670415A (en) * 1994-05-24 1997-09-23 Depositech, Inc. Method and apparatus for vacuum deposition of highly ionized media in an electromagnetic controlled environment
US5518597A (en) * 1995-03-28 1996-05-21 Minnesota Mining And Manufacturing Company Cathodic arc coating apparatus and method
US6144544A (en) * 1996-10-01 2000-11-07 Milov; Vladimir N. Apparatus and method for material treatment using a magnetic field
US6103074A (en) * 1998-02-14 2000-08-15 Phygen, Inc. Cathode arc vapor deposition method and apparatus
US6495002B1 (en) 2000-04-07 2002-12-17 Hy-Tech Research Corporation Method and apparatus for depositing ceramic films by vacuum arc deposition
US7381311B2 (en) * 2003-10-21 2008-06-03 The United States Of America As Represented By The Secretary Of The Air Force Filtered cathodic-arc plasma source
US8157976B2 (en) * 2007-04-26 2012-04-17 Veeco Instruments, Inc. Apparatus for cathodic vacuum-arc coating deposition
JP6095568B2 (ja) 2010-06-22 2017-03-15 エリコン・サーフェス・ソリューションズ・アクチェンゲゼルシャフト，トリュープバッハ 定義された電界を有するａｒｃ蒸着ソース
CN101956161A (zh) * 2010-08-27 2011-01-26 苏州五方光电科技有限公司 离子镀膜装置
US9153422B2 (en) 2011-08-02 2015-10-06 Envaerospace, Inc. Arc PVD plasma source and method of deposition of nanoimplanted coatings
EP2607517A1 (en) * 2011-12-22 2013-06-26 Oerlikon Trading AG, Trübbach Low temperature arc ion plating coating
KR101440316B1 (ko) * 2014-04-30 2014-09-18 주식회사 유니벡 박막 코팅을 위한 진공 챔버 내부 아크 스팟 생성장치
KR102342124B1 (ko) * 2019-02-14 2021-12-22 주식회사 히타치하이테크 반도체 제조 장치
CN110277298A (zh) * 2019-07-26 2019-09-24 江苏鲁汶仪器有限公司 一种射频旋转接头及设置有射频旋转接头的离子刻蚀***
UA127223C2 (uk) * 2020-09-25 2023-06-14 Національний Науковий Центр "Харківський Фізико-Технічний Інститут" Спосіб створення вакуумно-дугової катодної плазми

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2972695A (en) * 1957-05-24 1961-02-21 Vickers Electrical Co Ltd Stabilisation of low pressure d.c. arc discharges
SU307666A1 (ru) * 1968-09-09 1979-01-08 Sablev L P Электродуговой испаритель металлов
US3836451A (en) * 1968-12-26 1974-09-17 A Snaper Arc deposition apparatus
US3625848A (en) * 1968-12-26 1971-12-07 Alvin A Snaper Arc deposition process and apparatus
SU349325A1 (ru) * 1970-10-19 1978-03-30 Л. П. Саблев, Ю. И. Долотов, Л. И. Гетьман, В. Н. Горбунов, Е. Г. Гольдинер, К. Т. Киршфельд , В. В. Усов Электродуговой испаритель металлов
US3793179A (en) * 1971-07-19 1974-02-19 L Sablev Apparatus for metal evaporation coating
US3783231A (en) * 1972-03-22 1974-01-01 V Gorbunov Apparatus for vacuum-evaporation of metals under the action of an electric arc
SU563826A1 (ru) * 1975-06-04 1978-03-05 Предприятие П/Я В-8851 Устройство дл нанесени тонких пленок
JPS54110988A (en) * 1978-01-31 1979-08-30 Nii Chiefunorogii Afutomobirin Coating vacuum evaporation apparatus

Also Published As

Publication number Publication date
US4551221A (en) 1985-11-05
WO1982000075A1 (en) 1982-01-07
SE427003B (sv) 1983-02-21
SU1040631A1 (ru) 1983-09-07
BR8103781A (pt) 1982-03-09
IT1171327B (it) 1987-06-10
FR2485863A1 (fr) 1981-12-31
IT8148744A0 (it) 1981-06-24
FR2485863B1 (fr) 1986-12-12
DE3152131A1 (en) 1982-08-26
CA1170315A (en) 1984-07-03
JPS6036468B2 (ja) 1985-08-20
DE3152131C2 (de) 1986-09-04
JPS57500931A (sv) 1982-05-27
GB2092419B (en) 1983-12-14
GB2092419A (en) 1982-08-11
CH655632B (sv) 1986-04-30

Similar Documents

Publication Publication Date Title
SE8200941L (sv) Vakuumbagplasmaanordning
DE3471430D1 (en) Welding or cutting torch and method of striking an arc for such a torch
DE69005187D1 (de) Durch transversale Entladung angeregter Laserkopf mit drei Elektroden.
MX165103B (es) Electrodo para soldadura consumible mejorado y metodo para usar el mismo
DE69107705D1 (de) Elektrode zum Gebrauch im Plasmalichtbogenbrenner.
IT8320424A0 (it) Metodo utilizzante l'effetto raddrizzante di una fiamma per rivelare il funzionamento di un bruciatore e dispositivo per la concretizzazione pratica di detto metodo.
DE3887676T2 (de) Kontaktende für Lichtbogenschweissen des Typs mit verzehrender Elektrode.
GB2127846B (en) Flux-cored arc welding tubular electrode
IT7822615A0 (it) Metodo di saldatura ad arco erelativo cannello di saldatura.
DE3677533D1 (de) Therapiegeraet mit funkenentladung.
SE8305164D0 (sv) Elektrod for anvendning i en skerbrennare
ES517566A0 (es) Perfeccionamientos en sopletes generadores de arco entre un electrodo de carbon y una pieza de trabajo.
EP0149337A3 (en) X-ray generating apparatus and method of operating an x-ray tube
ES498563A0 (es) Procedimiento de escarpado por un chorro de oxigeno y soplete multiforme para la utilizacion de este procedimiento.
ES516992A0 (es) Aparato para suministrar un abrasivo a una corriente de gas.
JPS5540099A (en) Magnetically driven arc welding method
JPS53104549A (en) Arc welder
EP0046998A3 (en) Welding torch, especially an arc welding torch
SE8009071L (sv) Elektrisk urladdningslampa med en keramikkolv
JPS5417342A (en) Butt arc welding process
JPS542736A (en) Cleaning method of corona discharger
JPS6446993A (en) Axial gas laser apparatus
JPS5411849A (en) Coated arc welding rod excellent in crack resistance
JPS53100143A (en) Welding electrode for projection welding
JPS53120654A (en) Welding method for cylindrical body

Legal Events

Date Code Title Description
NUG Patent has lapsed

Ref document number: 8200941-6

Effective date: 19921005

Format of ref document f/p: F