SE7407321L - - Google Patents
Info
- Publication number
- SE7407321L SE7407321L SE7407321A SE7407321A SE7407321L SE 7407321 L SE7407321 L SE 7407321L SE 7407321 A SE7407321 A SE 7407321A SE 7407321 A SE7407321 A SE 7407321A SE 7407321 L SE7407321 L SE 7407321L
- Authority
- SE
- Sweden
- Prior art keywords
- single crystal
- crystal silicon
- silicon dioxide
- structures
- bonding
- Prior art date
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 5
- 229910021421 monocrystalline silicon Inorganic materials 0.000 abstract 3
- 239000000377 silicon dioxide Substances 0.000 abstract 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 2
- 239000011521 glass Substances 0.000 abstract 2
- 238000002955 isolation Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 239000000203 mixture Substances 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
- H01L21/76264—SOI together with lateral isolation, e.g. using local oxidation of silicon, or dielectric or polycristalline material refilled trench or air gap isolation regions, e.g. completely isolated semiconductor islands
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
- H01L23/291—Oxides or nitrides or carbides, e.g. ceramics, glass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
- H01L21/76264—SOI together with lateral isolation, e.g. using local oxidation of silicon, or dielectric or polycristalline material refilled trench or air gap isolation regions, e.g. completely isolated semiconductor islands
- H01L21/76275—Vertical isolation by bonding techniques
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
- H01L21/76264—SOI together with lateral isolation, e.g. using local oxidation of silicon, or dielectric or polycristalline material refilled trench or air gap isolation regions, e.g. completely isolated semiconductor islands
- H01L21/76283—Lateral isolation by refilling of trenches with dielectric material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Element Separation (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US366380A US3909332A (en) | 1973-06-04 | 1973-06-04 | Bonding process for dielectric isolation of single crystal semiconductor structures |
Publications (1)
Publication Number | Publication Date |
---|---|
SE7407321L true SE7407321L (xx) | 1974-12-05 |
Family
ID=23442769
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE7407321A SE7407321L (xx) | 1973-06-04 | 1974-06-04 |
Country Status (6)
Country | Link |
---|---|
US (1) | US3909332A (xx) |
JP (1) | JPS5028986A (xx) |
DE (1) | DE2425993A1 (xx) |
FR (1) | FR2232080B3 (xx) |
NL (1) | NL7407484A (xx) |
SE (1) | SE7407321L (xx) |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4045200A (en) * | 1975-01-02 | 1977-08-30 | Owens-Illinois, Inc. | Method of forming glass substrates with pre-attached sealing media |
DE2842492C2 (de) * | 1978-09-29 | 1986-04-17 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Verfahren zur Herstellung einer aus einem Halbleiter-Glas-Verbundwerkstoff bestehenden Photokathode |
JPS6083189U (ja) * | 1983-11-15 | 1985-06-08 | タキロン株式会社 | 二層窓 |
DE3436001A1 (de) * | 1984-10-01 | 1986-04-03 | Siemens AG, 1000 Berlin und 8000 München | Elektrostatisches glasloeten von halbleiterbauteilen |
JPH0618234B2 (ja) * | 1985-04-19 | 1994-03-09 | 日本電信電話株式会社 | 半導体基板の接合方法 |
NL8501773A (nl) * | 1985-06-20 | 1987-01-16 | Philips Nv | Werkwijze voor het vervaardigen van halfgeleiderinrichtingen. |
JP2559700B2 (ja) * | 1986-03-18 | 1996-12-04 | 富士通株式会社 | 半導体装置の製造方法 |
US4905075A (en) * | 1986-05-05 | 1990-02-27 | General Electric Company | Hermetic semiconductor enclosure |
US5133795A (en) * | 1986-11-04 | 1992-07-28 | General Electric Company | Method of making a silicon package for a power semiconductor device |
US5086011A (en) * | 1987-01-27 | 1992-02-04 | Advanced Micro Devices, Inc. | Process for producing thin single crystal silicon islands on insulator |
US4792533A (en) * | 1987-03-13 | 1988-12-20 | Motorola Inc. | Coplanar die to substrate bond method |
US4828597A (en) * | 1987-12-07 | 1989-05-09 | General Electric Company | Flexible glass fiber mat bonding method |
US5034044A (en) * | 1988-05-11 | 1991-07-23 | General Electric Company | Method of bonding a silicon package for a power semiconductor device |
NL8902271A (nl) * | 1989-09-12 | 1991-04-02 | Philips Nv | Werkwijze voor het verbinden van twee lichamen. |
DE69233314T2 (de) * | 1991-10-11 | 2005-03-24 | Canon K.K. | Verfahren zur Herstellung von Halbleiter-Produkten |
JP3237888B2 (ja) * | 1992-01-31 | 2001-12-10 | キヤノン株式会社 | 半導体基体及びその作製方法 |
US5444014A (en) * | 1994-12-16 | 1995-08-22 | Electronics And Telecommunications Research Institute | Method for fabricating semiconductor device |
US5681775A (en) * | 1995-11-15 | 1997-10-28 | International Business Machines Corporation | Soi fabrication process |
JP3431454B2 (ja) * | 1997-06-18 | 2003-07-28 | 株式会社東芝 | 半導体装置の製造方法 |
US6197663B1 (en) * | 1999-12-07 | 2001-03-06 | Lucent Technologies Inc. | Process for fabricating integrated circuit devices having thin film transistors |
US6563133B1 (en) * | 2000-08-09 | 2003-05-13 | Ziptronix, Inc. | Method of epitaxial-like wafer bonding at low temperature and bonded structure |
JP2003209144A (ja) * | 2002-01-16 | 2003-07-25 | Seiko Epson Corp | 半導体装置及びその製造方法、半導体装置の製造装置並びに電子機器 |
US20060108678A1 (en) | 2002-05-07 | 2006-05-25 | Microfabrica Inc. | Probe arrays and method for making |
US20050067292A1 (en) * | 2002-05-07 | 2005-03-31 | Microfabrica Inc. | Electrochemically fabricated structures having dielectric or active bases and methods of and apparatus for producing such structures |
AU2003234398A1 (en) * | 2002-05-07 | 2003-11-11 | Memgen Corporation | Electrochemically fabricated structures having dielectric or active bases |
US20050142739A1 (en) * | 2002-05-07 | 2005-06-30 | Microfabrica Inc. | Probe arrays and method for making |
US10416192B2 (en) | 2003-02-04 | 2019-09-17 | Microfabrica Inc. | Cantilever microprobes for contacting electronic components |
DE10320375B3 (de) * | 2003-05-07 | 2004-12-16 | Süss Micro Tec Laboratory Equipment GmbH | Verfahren zum temporären Fixieren zweier flächiger Werksücke |
DE10326893A1 (de) | 2003-06-14 | 2004-12-30 | Degussa Ag | Harze auf Basis von Ketonen und Aldehyde mit verbesserten Löslichkeitseigenschaften und geringen Farbzahlen |
US20080105355A1 (en) * | 2003-12-31 | 2008-05-08 | Microfabrica Inc. | Probe Arrays and Method for Making |
US9236369B2 (en) * | 2013-07-18 | 2016-01-12 | Taiwan Semiconductor Manufacturing Co., Ltd. | Bonded semiconductor structures |
FR3079662B1 (fr) * | 2018-03-30 | 2020-02-28 | Soitec | Substrat pour applications radiofrequences et procede de fabrication associe |
US11262383B1 (en) | 2018-09-26 | 2022-03-01 | Microfabrica Inc. | Probes having improved mechanical and/or electrical properties for making contact between electronic circuit elements and methods for making |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2620598A (en) * | 1947-04-22 | 1952-12-09 | James A Jobling And Company Lt | Method of fabricating multi-component glass articles |
FR1350402A (fr) * | 1962-03-16 | 1964-01-24 | Gen Electric | Dispositifs à semiconducteurs et méthodes de fabrication |
US3235428A (en) * | 1963-04-10 | 1966-02-15 | Bell Telephone Labor Inc | Method of making integrated semiconductor devices |
US3414465A (en) * | 1965-06-21 | 1968-12-03 | Owens Illinois Inc | Sealed glass article of manufacture |
US3577044A (en) * | 1966-03-08 | 1971-05-04 | Ibm | Integrated semiconductor devices and fabrication methods therefor |
US3620833A (en) * | 1966-12-23 | 1971-11-16 | Texas Instruments Inc | Integrated circuit fabrication |
US3661676A (en) * | 1970-05-04 | 1972-05-09 | Us Army | Production of single crystal aluminum oxide |
US3695956A (en) * | 1970-05-25 | 1972-10-03 | Rca Corp | Method for forming isolated semiconductor devices |
-
1973
- 1973-06-04 US US366380A patent/US3909332A/en not_active Expired - Lifetime
-
1974
- 1974-05-30 DE DE19742425993 patent/DE2425993A1/de active Pending
- 1974-06-03 JP JP49061963A patent/JPS5028986A/ja active Pending
- 1974-06-04 SE SE7407321A patent/SE7407321L/xx not_active Application Discontinuation
- 1974-06-04 NL NL7407484A patent/NL7407484A/xx unknown
- 1974-06-04 FR FR7419278A patent/FR2232080B3/fr not_active Expired
Also Published As
Publication number | Publication date |
---|---|
DE2425993A1 (de) | 1974-12-19 |
US3909332A (en) | 1975-09-30 |
FR2232080A1 (xx) | 1974-12-27 |
NL7407484A (xx) | 1974-12-06 |
JPS5028986A (xx) | 1975-03-24 |
FR2232080B3 (xx) | 1977-04-08 |
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Legal Events
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NAV | Patent application has lapsed |
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