SE470029B - Optisk anordning för kontroll av jämnhet och planhet hos en yta - Google Patents

Optisk anordning för kontroll av jämnhet och planhet hos en yta

Info

Publication number
SE470029B
SE470029B SE9200846A SE9200846A SE470029B SE 470029 B SE470029 B SE 470029B SE 9200846 A SE9200846 A SE 9200846A SE 9200846 A SE9200846 A SE 9200846A SE 470029 B SE470029 B SE 470029B
Authority
SE
Sweden
Prior art keywords
mirror
image plane
lines
interference method
smoothness
Prior art date
Application number
SE9200846A
Other languages
English (en)
Swedish (sv)
Other versions
SE9200846D0 (sv
SE9200846L (sv
Inventor
Tomas Rostvall
Original Assignee
Sandvik Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sandvik Ab filed Critical Sandvik Ab
Priority to SE9200846A priority Critical patent/SE470029B/sv
Publication of SE9200846D0 publication Critical patent/SE9200846D0/xx
Priority to PCT/SE1993/000216 priority patent/WO1993019345A1/en
Priority to DE4391183T priority patent/DE4391183T1/de
Priority to JP5516455A priority patent/JPH07504751A/ja
Priority to US08/295,871 priority patent/US5583639A/en
Publication of SE9200846L publication Critical patent/SE9200846L/
Publication of SE470029B publication Critical patent/SE470029B/sv

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
SE9200846A 1992-03-19 1992-03-19 Optisk anordning för kontroll av jämnhet och planhet hos en yta SE470029B (sv)

Priority Applications (5)

Application Number Priority Date Filing Date Title
SE9200846A SE470029B (sv) 1992-03-19 1992-03-19 Optisk anordning för kontroll av jämnhet och planhet hos en yta
PCT/SE1993/000216 WO1993019345A1 (en) 1992-03-19 1993-03-11 Optical device for checking the flatness and smoothness of a surface
DE4391183T DE4391183T1 (de) 1992-03-19 1993-03-11 Optische Vorrichtung für Ebenheitsmessung
JP5516455A JPH07504751A (ja) 1992-03-19 1993-03-11 光学平坦度測定装置
US08/295,871 US5583639A (en) 1992-03-19 1993-03-11 Optical device for checking the flatness and smoothness of a surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9200846A SE470029B (sv) 1992-03-19 1992-03-19 Optisk anordning för kontroll av jämnhet och planhet hos en yta

Publications (3)

Publication Number Publication Date
SE9200846D0 SE9200846D0 (sv) 1992-03-19
SE9200846L SE9200846L (sv) 1993-09-20
SE470029B true SE470029B (sv) 1993-10-25

Family

ID=20385668

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9200846A SE470029B (sv) 1992-03-19 1992-03-19 Optisk anordning för kontroll av jämnhet och planhet hos en yta

Country Status (5)

Country Link
US (1) US5583639A (ja)
JP (1) JPH07504751A (ja)
DE (1) DE4391183T1 (ja)
SE (1) SE470029B (ja)
WO (1) WO1993019345A1 (ja)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5777740A (en) * 1997-02-27 1998-07-07 Phase Metrics Combined interferometer/polarimeter
JP2000234912A (ja) * 1999-02-15 2000-08-29 Hitachi Electronics Eng Co Ltd ウエハ厚さ測定装置
US6608919B1 (en) 1999-11-10 2003-08-19 Digimarc Corporation Method and apparatus for encoding paper with information
US6687008B1 (en) 2000-10-19 2004-02-03 Kla-Tencor Corporation Waveguide based parallel multi-phaseshift interferometry for high speed metrology, optical inspection, and non-contact sensing
US7237033B2 (en) * 2001-04-30 2007-06-26 Aol Llc Duplicating switch for streaming data units to a terminal
US6856384B1 (en) * 2001-12-13 2005-02-15 Nanometrics Incorporated Optical metrology system with combined interferometer and ellipsometer
US7095507B1 (en) * 2002-09-27 2006-08-22 Kla-Tencor Technologies Corporation Method and apparatus using microscopic and interferometric based detection
US7061625B1 (en) 2002-09-27 2006-06-13 Kla-Tencor Technologies Corporation Method and apparatus using interferometric metrology for high aspect ratio inspection
DE10303659B4 (de) * 2003-01-23 2005-07-28 Berliner Elektronenspeicherring-Gesellschaft für Synchrotronstrahlung mbH Optisches Messverfahren zur Ermittlung von Idealformabweichungen technisch polierter Oberflächen und Präzisionsmessmaschine zur Durchführung des Messverfahrens
SE527168C2 (sv) * 2003-12-31 2006-01-10 Abb Ab Förfarande och anordning för mätning, bestämning och styrning av planhet hos ett metallband

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2159271B (en) * 1984-04-27 1988-05-18 Nissan Motor Surface flaw detecting method and apparatus
US4854708A (en) * 1987-01-13 1989-08-08 Rotlex Optics Ltd. Optical examination apparatus particularly useful as a Fizeau interferometer and schlieren device
GB8810714D0 (en) * 1988-05-06 1988-06-08 Leicester Polytechnic Method & apparatus for inspecting smooth surface

Also Published As

Publication number Publication date
JPH07504751A (ja) 1995-05-25
US5583639A (en) 1996-12-10
DE4391183T1 (de) 1995-02-23
SE9200846D0 (sv) 1992-03-19
WO1993019345A1 (en) 1993-09-30
SE9200846L (sv) 1993-09-20

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