SE417657B - METHOD OF PHOTOLITOGRAPHIC STRUCTURE OF RESISTANCE COURSES - Google Patents
METHOD OF PHOTOLITOGRAPHIC STRUCTURE OF RESISTANCE COURSESInfo
- Publication number
- SE417657B SE417657B SE7602098A SE7602098A SE417657B SE 417657 B SE417657 B SE 417657B SE 7602098 A SE7602098 A SE 7602098A SE 7602098 A SE7602098 A SE 7602098A SE 417657 B SE417657 B SE 417657B
- Authority
- SE
- Sweden
- Prior art keywords
- photolitographic
- courses
- resistance
- resistance courses
- photolitographic structure
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/702—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof of thick-or thin-film circuits or parts thereof
- H01L21/707—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof of thick-or thin-film circuits or parts thereof of thin-film circuits or parts thereof
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/16—Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor
- H05K1/167—Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor incorporating printed resistors
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
- H05K3/061—Etching masks
- H05K3/064—Photoresists
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/03—Conductive materials
- H05K2201/0302—Properties and characteristics in general
- H05K2201/0317—Thin film conductor layer; Thin film passive component
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/03—Metal processing
- H05K2203/0361—Stripping a part of an upper metal layer to expose a lower metal layer, e.g. by etching or using a laser
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
- H05K3/388—Improvement of the adhesion between the insulating substrate and the metal by the use of a metallic or inorganic thin film adhesion layer
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Semiconductor Integrated Circuits (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH275775A CH613556A5 (en) | 1975-03-05 | 1975-03-05 | Process for photolithographic patterning of resistor tracks in hybrid circuits |
Publications (2)
Publication Number | Publication Date |
---|---|
SE7602098L SE7602098L (en) | 1976-09-06 |
SE417657B true SE417657B (en) | 1981-03-30 |
Family
ID=4240925
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE7602098A SE417657B (en) | 1975-03-05 | 1976-02-23 | METHOD OF PHOTOLITOGRAPHIC STRUCTURE OF RESISTANCE COURSES |
Country Status (6)
Country | Link |
---|---|
CH (1) | CH613556A5 (en) |
DE (1) | DE2512860C2 (en) |
DK (1) | DK91576A (en) |
FR (1) | FR2303444A1 (en) |
GB (1) | GB1535995A (en) |
SE (1) | SE417657B (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2532472B1 (en) * | 1982-08-31 | 1985-12-20 | Lignes Telegraph Telephon | METHOD FOR MANUFACTURING ELECTRICAL CONNECTIONS FOR HYBRID CIRCUIT AND HYBRID CIRCUIT COMPRISING SUCH CONNECTIONS |
DE3708832A1 (en) * | 1987-03-18 | 1988-09-29 | Siemens Ag | Wet-chemical patterning of hafnium boride layers |
FR2648232B1 (en) | 1989-06-09 | 1991-09-27 | Erg | METHOD AND DEVICE FOR IN SITU MEASUREMENT OF SWELLING CHARACTERISTICS OF A SOIL |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3457148A (en) * | 1964-10-19 | 1969-07-22 | Bell Telephone Labor Inc | Process for preparation of stabilized metal film resistors |
CH576739A5 (en) * | 1972-08-25 | 1976-06-15 | Ciba Geigy Ag |
-
1975
- 1975-03-05 CH CH275775A patent/CH613556A5/en not_active IP Right Cessation
- 1975-03-24 DE DE19752512860 patent/DE2512860C2/en not_active Expired
-
1976
- 1976-02-23 SE SE7602098A patent/SE417657B/en not_active IP Right Cessation
- 1976-03-03 GB GB855876A patent/GB1535995A/en not_active Expired
- 1976-03-03 DK DK91576A patent/DK91576A/en not_active Application Discontinuation
- 1976-03-03 FR FR7605954A patent/FR2303444A1/en active Granted
Also Published As
Publication number | Publication date |
---|---|
DK91576A (en) | 1976-09-06 |
FR2303444B1 (en) | 1980-01-25 |
SE7602098L (en) | 1976-09-06 |
FR2303444A1 (en) | 1976-10-01 |
DE2512860A1 (en) | 1976-09-23 |
CH613556A5 (en) | 1979-09-28 |
DE2512860C2 (en) | 1986-06-19 |
GB1535995A (en) | 1978-12-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
NUG | Patent has lapsed |
Ref document number: 7602098-1 Effective date: 19930912 Format of ref document f/p: F |