SE393483B - Anordning for snabb omkoppling av en jonstrale - Google Patents

Anordning for snabb omkoppling av en jonstrale

Info

Publication number: SE393483B
Authority: SE; Sweden
Prior art keywords: jonstrale; quick switch; quick; switch
Prior art date: 1973-05-23

Application number

SE7406471A

Other languages

English (en)

Inventor

H Boroffka

E Krimmel

H Runge

Original Assignee

Siemens Ag

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1973-05-23

Filing date

1974-05-15

Publication date

1977-05-09

1974-05-15 Application filed by Siemens Ag filed Critical Siemens Ag

1977-05-09 Publication of SE393483B publication Critical patent/SE393483B/sv

Links

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation

Landscapes

Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Physical Vapour Deposition (AREA)
Electron Sources, Ion Sources (AREA)

SE7406471A 1973-05-23 1974-05-15 Anordning for snabb omkoppling av en jonstrale SE393483B (sv)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
DE2326279A DE2326279A1 (de)	1973-05-23	1973-05-23	Ionenstrahlschnellschaltung zur erzielung definierter festkoerperdotierungen durch ionenimplantation

Publications (1)

Publication Number	Publication Date
SE393483B true SE393483B (sv)	1977-05-09

Family

ID=5881909

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
SE7406471A SE393483B (sv)	1973-05-23	1974-05-15	Anordning for snabb omkoppling av en jonstrale

Country Status (13)

Country	Link
US (1)	US3970854A (sv)
JP (1)	JPS5021673A (sv)
AT (1)	AT353845B (sv)
BE (1)	BE815436A (sv)
CA (1)	CA1024865A (sv)
CH (1)	CH568654A5 (sv)
DE (1)	DE2326279A1 (sv)
FR (1)	FR2231106B1 (sv)
GB (1)	GB1458908A (sv)
IT (1)	IT1012721B (sv)
LU (1)	LU70135A1 (sv)
NL (1)	NL7405857A (sv)
SE (1)	SE393483B (sv)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5439873A (en) *	1977-09-06	1979-03-27	Nippon Denso Co	Incombustible ypet flexible printed wiring board
FR2412939A1 (fr) *	1977-12-23	1979-07-20	Anvar	Implanteur d'ions a fort courant
JPS57130358A (en) *	1981-02-05	1982-08-12	Nippon Telegr & Teleph Corp <Ntt>	Full automatic ion implantation device
HU190959B (en) *	1984-04-20	1986-12-28	Gyulai,Jozsef,Hu	Method and apparatus for the irradiation of solid materials with ions
US4825080A (en) *	1986-03-25	1989-04-25	Universite De Reims Champagne-Ardenne	Electrical particle gun
US4719349A (en) *	1986-05-27	1988-01-12	The United States Of America As Represented By The Department Of Health And Human Services	Electrochemical sample probe for use in fast-atom bombardment mass spectrometry
EP0304525A1 (en) *	1987-08-28	1989-03-01	FISONS plc	Pulsed microfocused ion beams
US5132544A (en) *	1990-08-29	1992-07-21	Nissin Electric Company Ltd.	System for irradiating a surface with atomic and molecular ions using two dimensional magnetic scanning
JP3034009B2 (ja) *	1990-10-22	2000-04-17	株式会社日立製作所	イオン打込み装置
JP3123345B2 (ja) *	1994-05-31	2001-01-09	株式会社日立製作所	イオン打込み装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3117022A (en) *	1960-09-06	1964-01-07	Space Technhology Lab Inc	Deposition arrangement
NL294850A (sv) *	1962-07-05
DE1498936B2 (de) *	1963-12-28	1971-01-14	Nihon Densht K K , Tokio	Verfahren und Vorrichtung zur Steue rung der Expositionszeit in einem Massen spektrographen
US3476906A (en) *	1966-11-21	1969-11-04	United Aircraft Corp	Resistance monitoring apparatus
US3547074A (en) *	1967-04-13	1970-12-15	Block Engineering	Apparatus for forming microelements
GB1280013A (en) *	1969-09-05	1972-07-05	Atomic Energy Authority Uk	Improvements in or relating to apparatus bombarding a target with ions
US3789185A (en) *	1969-12-15	1974-01-29	Ibm	Electron beam deflection control apparatus
US3682729A (en) *	1969-12-30	1972-08-08	Ibm	Method of changing the physical properties of a metallic film by ion beam formation and devices produced thereby
FR2076567A5 (sv) *	1970-01-20	1971-10-15	Commissariat Energie Atomique
GB1331113A (en) *	1970-11-05	1973-09-19	Secr Defence	Control apparatus for an electron beam welding machine

1973
- 1973-05-23 DE DE2326279A patent/DE2326279A1/de active Pending
1974
- 1974-04-16 GB GB1648774A patent/GB1458908A/en not_active Expired
- 1974-05-01 NL NL7405857A patent/NL7405857A/xx not_active Application Discontinuation
- 1974-05-02 AT AT363074A patent/AT353845B/de not_active IP Right Cessation
- 1974-05-08 CH CH630274A patent/CH568654A5/xx not_active IP Right Cessation
- 1974-05-15 SE SE7406471A patent/SE393483B/sv unknown
- 1974-05-20 US US05/471,283 patent/US3970854A/en not_active Expired - Lifetime
- 1974-05-21 LU LU70135A patent/LU70135A1/xx unknown
- 1974-05-22 IT IT23056/74A patent/IT1012721B/it active
- 1974-05-22 CA CA200,486A patent/CA1024865A/en not_active Expired
- 1974-05-22 FR FR7417810A patent/FR2231106B1/fr not_active Expired
- 1974-05-22 BE BE144663A patent/BE815436A/xx unknown
- 1974-05-23 JP JP49058331A patent/JPS5021673A/ja active Pending

Also Published As

Publication number	Publication date
CH568654A5 (sv)	1975-10-31
JPS5021673A (sv)	1975-03-07
BE815436A (fr)	1974-09-16
IT1012721B (it)	1977-03-10
ATA363074A (de)	1979-05-15
GB1458908A (en)	1976-12-15
AT353845B (de)	1979-12-10
FR2231106B1 (sv)	1978-01-27
NL7405857A (sv)	1974-11-26
LU70135A1 (sv)	1974-10-09
CA1024865A (en)	1978-01-24
FR2231106A1 (sv)	1974-12-20
DE2326279A1 (de)	1974-12-19
US3970854A (en)	1976-07-20

Publication	Publication Date	Title
SE406754B (sv)	1979-02-26	Arkvendningsanordning
TR18458A (tr)	1977-02-18	Muflar meydana getirmeye mahsus tertibat
SE399476B (sv)	1978-02-13	Antislirningsanordning
SE7506217L (sv)	1975-12-08	Signalomkopplingsanordning
AT336692B (de)	1977-05-25	Schaltereinheit
SE393483B (sv)	1977-05-09	Anordning for snabb omkoppling av en jonstrale
SE406374B (sv)	1979-02-05	Anordning for framstellning av kopior
SE406475B (sv)	1979-02-12	Anordning for att undvika forbrenningsrumssvengningar
SE385543B (sv)	1976-07-12	Skum-vattensprinkleranordning
IT1020025B (it)	1977-12-20	Intenruttore a pulsank
BE815764A (fr)	1974-12-02	Commutateur
BR7404720D0 (pt)	1975-01-21	Dispositivo embobinador
IT1026731B (it)	1978-10-20	Dispositivo a riverberazione
SE393500B (sv)	1977-05-09	Anordning for snabbkoppling av induktanser
BR7502588A (pt)	1976-04-13	Conjunto interruptor
SE401967B (sv)	1978-06-05	Tvavegshalvledaromkopplare
SE410081B (sv)	1979-09-24	Hallare for en lopare
SE405399B (sv)	1978-12-04	Synkroniseringsanordning
DK144226C (da)	1982-06-21	Krydsfelt-skydeomskifter
AT338187B (de)	1977-07-25	Pulverkraftbetriebenes setzgerat
SE387556B (sv)	1976-09-13	Anordning for instellning av skerhallare
SE401566B (sv)	1978-05-16	Metsystem for en borrhalssond
BR7410766D0 (pt)	1975-09-02	Dispositivo mostrador
SE410821B (sv)	1979-11-12	Industningsanordning
AT342664B (de)	1978-04-10	Abzweigschalter