SE308151B - - Google Patents
Info
- Publication number
- SE308151B SE308151B SE10622/62A SE1062262A SE308151B SE 308151 B SE308151 B SE 308151B SE 10622/62 A SE10622/62 A SE 10622/62A SE 1062262 A SE1062262 A SE 1062262A SE 308151 B SE308151 B SE 308151B
- Authority
- SE
- Sweden
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
- H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
- H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/006—Thin film resistors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49082—Resistor making
- Y10T29/49099—Coating resistive material on a base
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
- Y10T428/265—1 mil or less
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Physical Vapour Deposition (AREA)
- Non-Adjustable Resistors (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US142702A US3242006A (en) | 1961-10-03 | 1961-10-03 | Tantalum nitride film resistor |
Publications (1)
Publication Number | Publication Date |
---|---|
SE308151B true SE308151B (xx) | 1969-02-03 |
Family
ID=22500933
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE10622/62A SE308151B (xx) | 1961-10-03 | 1962-10-03 |
Country Status (7)
Country | Link |
---|---|
US (1) | US3242006A (xx) |
BE (2) | BE623060A (xx) |
DE (1) | DE1490927C3 (xx) |
FR (1) | FR1334290A (xx) |
GB (1) | GB1015143A (xx) |
NL (2) | NL124711C (xx) |
SE (1) | SE308151B (xx) |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3369991A (en) * | 1965-01-28 | 1968-02-20 | Ibm | Apparatus for cathode sputtering including a shielded rf electrode |
US3413711A (en) * | 1966-09-07 | 1968-12-03 | Western Electric Co | Method of making palladium copper contact for soldering |
US3537891A (en) * | 1967-09-25 | 1970-11-03 | Gen Electric | Resistor films of transition metal nitrides and method of forming |
US3516914A (en) * | 1968-02-26 | 1970-06-23 | United Aircraft Corp | Aluminum masking of active components during tantalum/nitride sputtering |
US3639165A (en) * | 1968-06-20 | 1972-02-01 | Gen Electric | Resistor thin films formed by low-pressure deposition of molybdenum and tungsten |
US3607384A (en) * | 1968-07-11 | 1971-09-21 | Western Electric Co | Thin-film resistors having positive resistivity profiles |
US3574143A (en) * | 1969-02-19 | 1971-04-06 | Bell Telephone Labor Inc | Resistive composition of matter and device utilizing same |
US3664943A (en) * | 1969-06-25 | 1972-05-23 | Oki Electric Ind Co Ltd | Method of producing tantalum nitride film resistors |
US3622410A (en) * | 1969-12-18 | 1971-11-23 | Control Data Corp | Method of fabricating film resistors |
US3655544A (en) * | 1970-03-02 | 1972-04-11 | Gen Electric | Refractory metal/refractory metal nitride resistor films |
US3664931A (en) * | 1970-07-27 | 1972-05-23 | Dieter Gerstenberg | Method for fabrication of thin film capacitor |
FR2112667A5 (xx) * | 1970-11-05 | 1972-06-23 | Lignes Telegraph Telephon | |
BE793097A (fr) * | 1971-12-30 | 1973-04-16 | Western Electric Co | Procede pour ajuster le coefficient de resistance en fonction de la temperature d'alliages tantale-aluminium |
BE791139A (fr) * | 1972-01-14 | 1973-03-01 | Western Electric Co | Procede pour le depot de beta-tantale dope par l'azote |
US3847658A (en) * | 1972-01-14 | 1974-11-12 | Western Electric Co | Article of manufacture having a film comprising nitrogen-doped beta tantalum |
US3775278A (en) * | 1972-03-22 | 1973-11-27 | Bell Telephone Labor Inc | Technique for the fabrication of thin film resistors |
US3912612A (en) * | 1972-07-14 | 1975-10-14 | Westinghouse Electric Corp | Method for making thin film superconductors |
US3916075A (en) * | 1972-07-22 | 1975-10-28 | Philips Corp | Chemically highly resistant material |
US4325048A (en) * | 1980-02-29 | 1982-04-13 | Gould Inc. | Deformable flexure element for strain gage transducer and method of manufacture |
DE3113745A1 (de) * | 1981-04-04 | 1982-10-21 | Robert Bosch Gmbh, 7000 Stuttgart | Duennschicht-dehnungsmessstreifen und verfahren zu seiner herstellung |
JPS61255001A (ja) * | 1985-05-07 | 1986-11-12 | 富士ゼロックス株式会社 | サ−マルヘツド |
US5201923A (en) * | 1990-07-27 | 1993-04-13 | Toshiba Tungaloy Co., Ltd. | Stoichiometric b1-type tantalum nitride and a sintered body thereof and method of synthesizing the b1-type tantalum nitride |
US5221449A (en) * | 1990-10-26 | 1993-06-22 | International Business Machines Corporation | Method of making Alpha-Ta thin films |
JPH0819516B2 (ja) * | 1990-10-26 | 1996-02-28 | インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン | 薄膜状のアルファTaを形成するための方法および構造 |
FR2679651B1 (fr) * | 1991-07-26 | 1993-11-12 | Schlumberger Services Petroliers | Couche mince extensometrique en cermet a base de tantale et de nitrate de tantale, son procede de preparation et son utilisation dans un capteur de pression. |
EP0630749B1 (en) | 1993-06-28 | 1998-12-23 | Canon Kabushiki Kaisha | Heat generating resistor containing TaN0.8, substrate provided with said heat generating resistor for liquid jet head, liquid jet head provided with said substrate, and liquid jet apparatus provided with said liquid jet head |
JPH09120713A (ja) * | 1995-10-25 | 1997-05-06 | Murata Mfg Co Ltd | 抵抗材料組成物 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US420881A (en) * | 1890-02-04 | Rudolf langhans | ||
US896341A (en) * | 1904-11-14 | 1908-08-18 | Gen Electric | Filament for incandescent lamps. |
US1123585A (en) * | 1913-05-31 | 1915-01-05 | Int Agricultural Corp | Double-nitrid composition of matter. |
AT86825B (de) * | 1920-06-14 | 1921-12-27 | Hugo Janistyn | Verfahren zur Herstellung von Glühkörpern für Beleuchtungs- und Durchleuchtungszwecke. |
US2003592A (en) * | 1933-01-03 | 1935-06-04 | Globar Corp | Glaze for nonmetallic resistors |
DE1069448B (de) * | 1953-11-16 | 1959-11-19 | MetallgeseMschaft Aktiengesellschaft, Frankfurt/M | Zahnräder |
GB830391A (en) * | 1955-10-28 | 1960-03-16 | Edwards High Vacuum Ltd | Improvements in or relating to cathodic sputtering of metal and dielectric films |
US2917442A (en) * | 1955-12-30 | 1959-12-15 | Electronique & Automatisme Sa | Method of making electroluminescent layers |
US3063858A (en) * | 1959-07-22 | 1962-11-13 | Nat Res Corp | Vapor source and processes for vaporizing iron, nickel and copper |
-
0
- BE BE634012D patent/BE634012A/xx unknown
- NL NL283435D patent/NL283435A/xx unknown
- NL NL124711D patent/NL124711C/xx active
-
1961
- 1961-10-03 US US142702A patent/US3242006A/en not_active Expired - Lifetime
-
1962
- 1962-09-08 DE DE1490927A patent/DE1490927C3/de not_active Expired
- 1962-09-25 FR FR910437A patent/FR1334290A/fr not_active Expired
- 1962-09-27 GB GB36673/62A patent/GB1015143A/en not_active Expired
- 1962-10-01 BE BE623060D patent/BE623060A/xx unknown
- 1962-10-03 SE SE10622/62A patent/SE308151B/xx unknown
Also Published As
Publication number | Publication date |
---|---|
US3242006A (en) | 1966-03-22 |
NL283435A (xx) | |
FR1334290A (fr) | 1963-08-02 |
DE1490927A1 (de) | 1969-11-13 |
GB1015143A (en) | 1965-12-31 |
BE623060A (xx) | 1962-10-31 |
NL124711C (xx) | |
DE1490927C3 (de) | 1973-10-31 |
DE1490927B2 (de) | 1973-04-12 |
BE634012A (xx) |