RU95103208A - Integrated circuit of microdisplacement transducers (accelerometers)
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Integrated circuit of microdisplacement transducers (accelerometers)
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Publication number
RU95103208A
RU95103208ARU95103208/25ARU95103208ARU95103208ARU 95103208 ARU95103208 ARU 95103208ARU 95103208/25 ARU95103208/25 ARU 95103208/25ARU 95103208 ARU95103208 ARU 95103208ARU 95103208 ARU95103208 ARU 95103208A
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FIELD: measurement technology; electronic safety systems for vehicles; navigation systems of moving objects. SUBSTANCE: integrated circuit has two sensing elements made in the form of beams or cantilevers with seismic masses, arranged one on top of other in two relatively perpendicular directions and carrying movable parts of at least three sensing elements. Both surfaces of main chip mounting sensing elements carry two chips wherein fixed parts of sensing elements are formed to provide for determining degree of microdisplacements in two relatively opposite directions. Microdisplacements in third plane are determined by sensing element placed on beam surface. EFFECT: improved design. 1 cl, 3 dwg
Claims (1)
Назначение: изобретение относится к производству интегральных датчиков микроперемещений, используемых в измерительной технике, в электронных системах обеспечения безопасности транспортных средств, а также в навигационных системах движущихся объектов. Сущность изобретения: интегральная схема датчика микроперемещений содержит два чувствительных элемента, выполненных в виде балок или консолей с сейсмическими массами, размещенных друг под другом в двух взаимоперпендикулярных направлениях, на поверхностях которого расположены подвижные части чувствительных элементов в количестве не менее трех. На обеих поверхностях основного кристалла с чувствительными элементами смонтированы два кристалла, в объемах материалов которых сформированы неподвижные части чувствительных элементов, позволяющих определять величины микроперемещений в двух взаимоперпендикулярных направлениях. Определение микроперемещений в третьей плоскости обеспечивается чувствительным элементом, размещенным на поверхностях балок.Purpose: the invention relates to the production of integrated micro displacement sensors used in measurement technology, in electronic systems for ensuring vehicle safety, as well as in navigation systems of moving objects. The essence of the invention: the integrated circuit of the micro displacement sensor contains two sensing elements made in the form of beams or consoles with seismic masses, placed one below the other in two mutually perpendicular directions, on the surfaces of which are moving parts of the sensing elements in an amount of at least three. Two crystals are mounted on both surfaces of the main crystal with sensitive elements, in the volumes of the materials of which the fixed parts of the sensitive elements are formed, which make it possible to determine the magnitude of micro displacements in two mutually perpendicular directions. The determination of micromotion in the third plane is provided by a sensitive element located on the surfaces of the beams.
RU95103208/25A1995-03-071995-03-07Integrated circuit of microdisplacement transducers (accelerometers)
RU95103208A
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