RU94036273A - Method for coat deposition by centrifuging - Google Patents
Method for coat deposition by centrifugingInfo
- Publication number
- RU94036273A RU94036273A RU94036273/25A RU94036273A RU94036273A RU 94036273 A RU94036273 A RU 94036273A RU 94036273/25 A RU94036273/25 A RU 94036273/25A RU 94036273 A RU94036273 A RU 94036273A RU 94036273 A RU94036273 A RU 94036273A
- Authority
- RU
- Russia
- Prior art keywords
- plate
- deposition
- solution
- photoresist
- speed
- Prior art date
Links
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
FIELD: semiconductor engineering; deposition of coats (such as photoresist) on plates. SUBSTANCE: upon deposition of metered portion of solution on plate rotating at speed of 5000-7000 rpm and coating of plate entire surface with solution, uniform layer is formed for 10-15 s while varying plate speed according to law: ω=A/t, where t is time from beginning of deposition; w is angular velocity of plate; A is experimental constant depending on physical properties of photoresist (viscosity, etc.). Irregularity of layer obtained by this method is 9-10% lower. EFFECT: improved uniformity of layer obtained.
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
RU94036273A RU2094903C1 (en) | 1994-09-19 | 1994-09-19 | Method for depositing coats by centrifuging |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
RU94036273A RU2094903C1 (en) | 1994-09-19 | 1994-09-19 | Method for depositing coats by centrifuging |
Publications (2)
Publication Number | Publication Date |
---|---|
RU94036273A true RU94036273A (en) | 1996-07-10 |
RU2094903C1 RU2094903C1 (en) | 1997-10-27 |
Family
ID=20160991
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
RU94036273A RU2094903C1 (en) | 1994-09-19 | 1994-09-19 | Method for depositing coats by centrifuging |
Country Status (1)
Country | Link |
---|---|
RU (1) | RU2094903C1 (en) |
-
1994
- 1994-09-19 RU RU94036273A patent/RU2094903C1/en active
Also Published As
Publication number | Publication date |
---|---|
RU2094903C1 (en) | 1997-10-27 |
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