RU2008138032A - LASER ELECTRON BEAM DEVICE FOR PICOSECOND PULSE GENERATION - Google Patents
LASER ELECTRON BEAM DEVICE FOR PICOSECOND PULSE GENERATION Download PDFInfo
- Publication number
- RU2008138032A RU2008138032A RU2008138032/28A RU2008138032A RU2008138032A RU 2008138032 A RU2008138032 A RU 2008138032A RU 2008138032/28 A RU2008138032/28 A RU 2008138032/28A RU 2008138032 A RU2008138032 A RU 2008138032A RU 2008138032 A RU2008138032 A RU 2008138032A
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- RU
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- Prior art keywords
- electron beam
- electron
- laser
- beam device
- pulse generation
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- Electron Beam Exposure (AREA)
- Lasers (AREA)
Abstract
Лазерный электронно-лучевой прибор, включающий электронную пушку, системы фокусировки и отклонения электронного пучка и лазерный экран, включающий плоскопараллельную полупроводниковую пластину с нанесенными на ее поверхности отражающими покрытиями, отличающийся тем, что содержит дополнительно СВЧ отклоняющую систему, расположенную между электронной пушкой и системой отклонения, и щелевую маску, выполненную из поглощающего электроны материала, расположенную на лазерном экране со стороны электронного пучка.A laser electron beam device including an electron gun, focusing systems and electron beam deflection and a laser screen including a plane-parallel semiconductor wafer with reflective coatings deposited on its surface, characterized in that it further comprises a microwave deflecting system located between the electron gun and the deflection system, and a slit mask made of an electron-absorbing material located on the laser screen from the side of the electron beam.
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| RU2008138032/28A RU2391753C1 (en) | 2008-09-23 | 2008-09-23 | Laser electron-beam device for generating picosecond pulses |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| RU2008138032/28A RU2391753C1 (en) | 2008-09-23 | 2008-09-23 | Laser electron-beam device for generating picosecond pulses |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| RU2008138032A true RU2008138032A (en) | 2010-03-27 |
| RU2391753C1 RU2391753C1 (en) | 2010-06-10 |
Family
ID=42138099
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| RU2008138032/28A RU2391753C1 (en) | 2008-09-23 | 2008-09-23 | Laser electron-beam device for generating picosecond pulses |
Country Status (1)
| Country | Link |
|---|---|
| RU (1) | RU2391753C1 (en) |
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2008
- 2008-09-23 RU RU2008138032/28A patent/RU2391753C1/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| RU2391753C1 (en) | 2010-06-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| NF4A | Reinstatement of patent |
Effective date: 20111020 |
|
| MM4A | The patent is invalid due to non-payment of fees |
Effective date: 20120924 |
|
| NF4A | Reinstatement of patent |
Effective date: 20141027 |
|
| MM4A | The patent is invalid due to non-payment of fees |
Effective date: 20150924 |