RU2001133169A - Vacuum coating system - Google Patents

Vacuum coating system

Info

Publication number
RU2001133169A
RU2001133169A RU2001133169/02A RU2001133169A RU2001133169A RU 2001133169 A RU2001133169 A RU 2001133169A RU 2001133169/02 A RU2001133169/02 A RU 2001133169/02A RU 2001133169 A RU2001133169 A RU 2001133169A RU 2001133169 A RU2001133169 A RU 2001133169A
Authority
RU
Russia
Prior art keywords
coating system
vacuum coating
vacuum
thermoresistive
magnetron
Prior art date
Application number
RU2001133169/02A
Other languages
Russian (ru)
Other versions
RU2271409C2 (en
Inventor
Евгений Григорьевич Качанов
Леонид Владимирович Дербенев
Александр Викторович Федин
Original Assignee
Федеральное государственное унитарное предприятие "Государственный космический научно-производственный центр им. М.В. Хруничева"
Filing date
Publication date
Application filed by Федеральное государственное унитарное предприятие "Государственный космический научно-производственный центр им. М.В. Хруничева" filed Critical Федеральное государственное унитарное предприятие "Государственный космический научно-производственный центр им. М.В. Хруничева"
Priority to RU2001133169/02A priority Critical patent/RU2271409C2/en
Priority claimed from RU2001133169/02A external-priority patent/RU2271409C2/en
Publication of RU2001133169A publication Critical patent/RU2001133169A/en
Application granted granted Critical
Publication of RU2271409C2 publication Critical patent/RU2271409C2/en

Links

Claims (1)

Вакуумная установка для нанесения функциональных и композиционных покрытий, содержащая вакуумную камеру, терморезистивный испаритель, увел крепления и вращения подложки, отличающаяся тем, что дополнительно содержит магнетрон и источник лазерного излучения для распыления и испарения различных металлов и сплавов.A vacuum installation for applying functional and composite coatings, containing a vacuum chamber, a thermoresistive evaporator, increased the fastening and rotation of the substrate, characterized in that it additionally contains a magnetron and a laser radiation source for sputtering and evaporation of various metals and alloys.
RU2001133169/02A 2001-12-06 2001-12-06 Apparatus for deposition of coatings in vacuum RU2271409C2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
RU2001133169/02A RU2271409C2 (en) 2001-12-06 2001-12-06 Apparatus for deposition of coatings in vacuum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
RU2001133169/02A RU2271409C2 (en) 2001-12-06 2001-12-06 Apparatus for deposition of coatings in vacuum

Publications (2)

Publication Number Publication Date
RU2001133169A true RU2001133169A (en) 2003-08-27
RU2271409C2 RU2271409C2 (en) 2006-03-10

Family

ID=36116252

Family Applications (1)

Application Number Title Priority Date Filing Date
RU2001133169/02A RU2271409C2 (en) 2001-12-06 2001-12-06 Apparatus for deposition of coatings in vacuum

Country Status (1)

Country Link
RU (1) RU2271409C2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT12021U1 (en) * 2010-04-14 2011-09-15 Plansee Se COATING SOURCE AND METHOD FOR THE PRODUCTION THEREOF
RU2634833C1 (en) * 2016-12-06 2017-11-03 Российская Федерация, от имени которой выступает Государственная корпорация по атомной энергии "Росатом" Device for applying coatings on substrates in vacuum
RU2681587C1 (en) * 2018-01-22 2019-03-11 Федеральное государственное бюджетное научное учреждение "Федеральный исследовательский центр "Красноярский научный центр Сибирского отделения Российской академии наук" Method of application of a nanofilm coating on a substrate

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