RU2001133169A - Vacuum coating system - Google Patents
Vacuum coating systemInfo
- Publication number
- RU2001133169A RU2001133169A RU2001133169/02A RU2001133169A RU2001133169A RU 2001133169 A RU2001133169 A RU 2001133169A RU 2001133169/02 A RU2001133169/02 A RU 2001133169/02A RU 2001133169 A RU2001133169 A RU 2001133169A RU 2001133169 A RU2001133169 A RU 2001133169A
- Authority
- RU
- Russia
- Prior art keywords
- coating system
- vacuum coating
- vacuum
- thermoresistive
- magnetron
- Prior art date
Links
- 238000001771 vacuum deposition Methods 0.000 title 1
- 229910045601 alloy Inorganic materials 0.000 claims 1
- 239000000956 alloy Substances 0.000 claims 1
- 239000002131 composite material Substances 0.000 claims 1
- 238000001704 evaporation Methods 0.000 claims 1
- 238000009434 installation Methods 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 150000002739 metals Chemical class 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
RU2001133169/02A RU2271409C2 (en) | 2001-12-06 | 2001-12-06 | Apparatus for deposition of coatings in vacuum |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
RU2001133169/02A RU2271409C2 (en) | 2001-12-06 | 2001-12-06 | Apparatus for deposition of coatings in vacuum |
Publications (2)
Publication Number | Publication Date |
---|---|
RU2001133169A true RU2001133169A (en) | 2003-08-27 |
RU2271409C2 RU2271409C2 (en) | 2006-03-10 |
Family
ID=36116252
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
RU2001133169/02A RU2271409C2 (en) | 2001-12-06 | 2001-12-06 | Apparatus for deposition of coatings in vacuum |
Country Status (1)
Country | Link |
---|---|
RU (1) | RU2271409C2 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AT12021U1 (en) * | 2010-04-14 | 2011-09-15 | Plansee Se | COATING SOURCE AND METHOD FOR THE PRODUCTION THEREOF |
RU2634833C1 (en) * | 2016-12-06 | 2017-11-03 | Российская Федерация, от имени которой выступает Государственная корпорация по атомной энергии "Росатом" | Device for applying coatings on substrates in vacuum |
RU2681587C1 (en) * | 2018-01-22 | 2019-03-11 | Федеральное государственное бюджетное научное учреждение "Федеральный исследовательский центр "Красноярский научный центр Сибирского отделения Российской академии наук" | Method of application of a nanofilm coating on a substrate |
-
2001
- 2001-12-06 RU RU2001133169/02A patent/RU2271409C2/en not_active IP Right Cessation
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