PT1915472T - Substrato revestido com uma estrutura em camadas compreendendo uma camada de carbono tetraédrico e uma camada exterior mais macia - Google Patents

Substrato revestido com uma estrutura em camadas compreendendo uma camada de carbono tetraédrico e uma camada exterior mais macia

Info

Publication number
PT1915472T
PT1915472T PT06777755T PT06777755T PT1915472T PT 1915472 T PT1915472 T PT 1915472T PT 06777755 T PT06777755 T PT 06777755T PT 06777755 T PT06777755 T PT 06777755T PT 1915472 T PT1915472 T PT 1915472T
Authority
PT
Portugal
Prior art keywords
layered structure
substrate coated
tetrahedral carbon
outer layer
layer
Prior art date
Application number
PT06777755T
Other languages
English (en)
Inventor
Dekempeneer Erik
Original Assignee
Oerlikon Surface Solutions Ag Pfaeffikon
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Surface Solutions Ag Pfaeffikon filed Critical Oerlikon Surface Solutions Ag Pfaeffikon
Publication of PT1915472T publication Critical patent/PT1915472T/pt

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/322—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer only coatings of metal elements only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/343—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one DLC or an amorphous carbon based layer, the layer being doped or not
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/347—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with layers adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
    • C23C28/42—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physical Vapour Deposition (AREA)
  • Laminated Bodies (AREA)
  • Chemical Vapour Deposition (AREA)
PT06777755T 2005-08-18 2006-07-13 Substrato revestido com uma estrutura em camadas compreendendo uma camada de carbono tetraédrico e uma camada exterior mais macia PT1915472T (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP05107584 2005-08-18

Publications (1)

Publication Number Publication Date
PT1915472T true PT1915472T (pt) 2018-12-06

Family

ID=35520006

Family Applications (1)

Application Number Title Priority Date Filing Date
PT06777755T PT1915472T (pt) 2005-08-18 2006-07-13 Substrato revestido com uma estrutura em camadas compreendendo uma camada de carbono tetraédrico e uma camada exterior mais macia

Country Status (6)

Country Link
US (1) US7947372B2 (pt)
EP (1) EP1915472B1 (pt)
JP (2) JP5503145B2 (pt)
CN (1) CN101432462B (pt)
PT (1) PT1915472T (pt)
WO (1) WO2007020139A1 (pt)

Families Citing this family (67)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8555921B2 (en) 2002-12-18 2013-10-15 Vapor Technologies Inc. Faucet component with coating
US8220489B2 (en) * 2002-12-18 2012-07-17 Vapor Technologies Inc. Faucet with wear-resistant valve component
CN101365824B (zh) * 2005-08-18 2010-09-01 贝卡尔特股份有限公司 用包含四面体碳涂层的多层结构涂覆的基底
JP2007131893A (ja) * 2005-11-09 2007-05-31 Osg Corp Ｄｌｃ被膜、およびｄｌｃ被膜被覆工具
DE102007054181A1 (de) * 2007-11-14 2009-05-20 Schaeffler Kg Korrosionsfeste Beschichtung sowie Herstellverfahren hierfür
EP2247767A1 (en) * 2007-12-20 2010-11-10 NV Bekaert SA A substrate coated with amorphous hydrogenated carbon
JP2009167512A (ja) * 2008-01-21 2009-07-30 Kobe Steel Ltd 摺動部品用ダイヤモンドライクカーボン皮膜およびその製造方法
DE102008016864B3 (de) * 2008-04-02 2009-10-22 Federal-Mogul Burscheid Gmbh Kolbenring
DE102008017583C5 (de) * 2008-04-07 2016-01-21 Federal-Mogul Burscheid Gmbh Kolbenring
DE102008022039A1 (de) * 2008-04-30 2009-11-05 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verschleißschutzbeschichtung für auf Reibung beanspruchte Oberflächen von Bauteilen sowie Verfahren zur Ausbildung
DE102008025681A1 (de) 2008-05-29 2009-12-10 Federal-Mogul Nürnberg GmbH Kolbenbolzen für einen Verbrennungsmotor
WO2010020274A1 (en) * 2008-08-18 2010-02-25 Metso Paper, Inc. Coating for lowering friction effect and improving wear resistance of a component in a fibre web machine and process of producing the same
DE102008042747A1 (de) 2008-10-10 2010-04-15 Federal-Mogul Burscheid Gmbh Gleitelement in einem Verbrennungsmotor, insbesondere Kolbenring
DE102008042896A1 (de) 2008-10-16 2010-04-22 Federal-Mogul Burscheid Gmbh Verfahren zur Beschichtung eines Gleitelements und Gleitelement, insbesondere Kolbenring oder Zylinderlaufbuchse eines Verbrennungsmotors
DE102009013855A1 (de) * 2009-03-19 2010-09-23 Federal-Mogul Burscheid Gmbh Verfahren zur Beschichtung eines Gleitelements und Gleitelement, insbesondere Kolbenring
JP5222764B2 (ja) * 2009-03-24 2013-06-26 株式会社神戸製鋼所 積層皮膜および積層皮膜被覆部材
DE102009003232A1 (de) 2009-05-19 2010-12-02 Federal-Mogul Burscheid Gmbh Gleitelement eines Verbrennungsmotors, insbesondere Kolbenring
DE102009022804A1 (de) * 2009-05-27 2010-12-02 Federal-Mogul Burscheid Gmbh Gleitelement mit freigelegter Funktionsfläche
JP5741891B2 (ja) * 2009-06-19 2015-07-01 株式会社ジェイテクト Ｄｌｃ膜形成方法
DE102009028504C5 (de) * 2009-08-13 2014-10-30 Federal-Mogul Burscheid Gmbh Kolbenring mit einer Beschichtung
DE102009046281B3 (de) * 2009-11-02 2010-11-25 Federal-Mogul Burscheid Gmbh Gleitelement, insbesondere Kolbenring, und Kombination eines Gleitelements mit einem Laufpartner
JP4766176B2 (ja) * 2010-02-15 2011-09-07 横浜ゴム株式会社 炭素薄膜被覆物品とゴムとの接着体
DE102010002688C5 (de) * 2010-03-09 2014-03-06 Federal-Mogul Burscheid Gmbh Schraubendruckfeder für einen Ölabstreifring eines Kolbens in einem Verbrennungsmotor und Verfahren zur Beschichtung einer Schraubendruckfeder
DE102010002686A1 (de) * 2010-03-09 2011-09-15 Federal-Mogul Burscheid Gmbh Gleitelement, insbesondere Kolbenring, und Verfahren zur Beschichtung eines Gleitelements
JP5692571B2 (ja) 2010-10-12 2015-04-01 株式会社ジェイテクト Ｄｌｃ被覆部材
JPWO2012063735A1 (ja) * 2010-11-09 2014-05-12 株式会社ニコン カーボン薄膜、光学素子成形用金型及び光学素子の製造方法
DE102011003254A1 (de) * 2011-01-27 2012-08-02 Federal-Mogul Burscheid Gmbh Gleitelement, insbesondere Kolbenring, mit einer Beschichtung sowie Verfahren zur Herstellung eines Gleitelements
JP2012202522A (ja) * 2011-03-28 2012-10-22 Tpr Co Ltd ピストンリング
DE102011083714A1 (de) * 2011-09-29 2013-04-04 Federal-Mogul Burscheid Gmbh Gleitelement mit DLC-Beschichtung
WO2013075061A1 (en) * 2011-11-17 2013-05-23 United Protective Technologies Carbon based coatings and methods of producing the same
DE102012010291A1 (de) * 2012-05-18 2013-11-21 Jenoptik Optical Systems Gmbh Hybride DLC-Beschichtung für IR-Optiken
DE102012214284B4 (de) 2012-08-10 2014-03-13 Federal-Mogul Burscheid Gmbh Gleitelement, insbesondere Kolbenring, mit einer widerstandsfähigen Beschichtung
DE102012219930A1 (de) * 2012-10-31 2014-04-30 Federal-Mogul Burscheid Gmbh Gleitelement, insbesondere Kolbenring, mit einer Beschichtung
DE102013200846A1 (de) * 2013-01-21 2014-07-24 Federal-Mogul Burscheid Gmbh Gleitelement, insbesondere Kolbenring, mit einer Beschichtung
DE102013207988A1 (de) * 2013-04-30 2014-10-30 Schunk Kohlenstofftechnik Gmbh Verfahren zur Beschichtung von Laborwerkzeugen
JP6196170B2 (ja) * 2014-02-10 2017-09-13 大同メタル工業株式会社 摺動部材
DE102014209309A1 (de) * 2014-05-16 2015-12-03 Schaeffler Technologies AG & Co. KG Bauteil, Verwendung eines Bauteils sowie Verfahren zur Herstellung eines verschleißbeständigen und reibungsreduzierenden Bauteils
US9624577B2 (en) 2014-07-22 2017-04-18 Applied Materials, Inc. Deposition of metal doped amorphous carbon film
FR3034707A1 (fr) * 2015-04-13 2016-10-14 Commissariat Energie Atomique Procede de preparation d'une piece metallique en vue de l'amelioration de la mesure de sa temperature par pyrometrie optique lors de sa mise en pression dans des conditions de deformation uniaxiale
EP3330579B1 (en) * 2015-07-31 2019-06-19 Nippon Piston Ring Co., Ltd. Piston ring and manufacturing method thereof
EP3392369B1 (en) * 2015-12-18 2023-07-19 Nippon Piston Ring Co., Ltd. Coating film, manufacturing method therefor, and pvd apparatus
CN105734527B (zh) * 2016-03-08 2019-01-18 仪征亚新科双环活塞环有限公司 一种用于活塞环表面的类金刚石镀层、活塞环及制备工艺
JP6534123B2 (ja) * 2016-03-23 2019-06-26 日本アイ・ティ・エフ株式会社 被覆膜とその製造方法およびｐｖｄ装置
US10626834B2 (en) * 2016-05-03 2020-04-21 GM Global Technology Operations LLC Fuel injector for an internal combustion engine
CN106011855A (zh) * 2016-07-18 2016-10-12 大连维钛克科技股份有限公司 一种应用于滑动部件的碳基涂层
DE102016225449A1 (de) * 2016-12-19 2018-06-21 Robert Bosch Gmbh Verfahren zum Beschichten eines metallischen Bauteils mit einer Verschleißschutzschicht, metallisches Bauteil sowie Kraftstoffeinspritzsystem
US10247157B2 (en) * 2017-02-01 2019-04-02 GM Global Technology Operations LLC Diamond like carbon (DLC) coating for ethanol-blended fuel injector applications
WO2018155385A1 (ja) * 2017-02-21 2018-08-30 日本アイ・ティ・エフ株式会社 硬質炭素膜とその製造方法および摺動部材
DE102017208246B4 (de) * 2017-03-15 2018-12-20 Thyssenkrupp Ag Spannvorrichtung mit einer tetragonal amorphen Carbon-Verbindung beschichteten Spannfläche
JP6413060B1 (ja) * 2017-05-11 2018-10-31 日本アイ・ティ・エフ株式会社 硬質炭素膜とその製造方法および摺動部材
CN107387255A (zh) * 2017-07-26 2017-11-24 安庆雅德帝伯活塞有限公司 一种发动机活塞裙部减摩涂层
CN107288774A (zh) * 2017-07-26 2017-10-24 安庆雅德帝伯活塞有限公司 一种裙部激光处理活塞及其处理方法
JP2019100208A (ja) * 2017-11-29 2019-06-24 株式会社デンソー 燃料噴射弁
JP2019100207A (ja) * 2017-11-29 2019-06-24 株式会社デンソー 燃料噴射弁
KR102612989B1 (ko) * 2017-12-01 2023-12-11 어플라이드 머티어리얼스, 인코포레이티드 고 에칭 선택성 비정질 탄소 막
DE102018202842A1 (de) * 2018-02-26 2019-08-29 Robert Bosch Gmbh Verschleißschutzbeschichtetes metallisches Bauteil insbesondere für ein Kugelventil und Verfahren zum Aufbringen einer mehrschichtigen Verschleißschutzschicht zur Erzeugung eines solchen Bauteils
JP7162799B2 (ja) * 2018-03-08 2022-10-31 日本アイ・ティ・エフ株式会社 複合被膜および複合被膜の形成方法
JP6669922B1 (ja) * 2019-06-12 2020-03-18 Ｔｐｒ株式会社 ピストンリング
BR112020025012B1 (pt) * 2018-06-29 2022-02-08 Tpr Co., Ltd Anel de pistão
US11156033B1 (en) * 2018-09-20 2021-10-26 National Technology & Engineering Solutions Of Sandia, Llc Multilayer solid lubricant architecture for use in drilling tool applications
CN109372651B (zh) * 2018-09-25 2021-06-08 安庆帝伯格茨活塞环有限公司 一种类金刚石涂层活塞环及制备方法
DE102018125631A1 (de) * 2018-10-16 2020-04-16 Schaeffler Technologies AG & Co. KG Schichtsystem, Rollelement und Verfahren
US11639543B2 (en) * 2019-05-22 2023-05-02 Thin Film Service, Inc. Tetrahedral amorphous hydrogenated carbon and amorphous siloxane diamond-like nanocomposite
CN110629200B (zh) * 2019-09-20 2020-04-10 理想晶延半导体设备（上海）有限公司 半导体处理设备
CN111348941B (zh) * 2020-04-29 2022-05-10 中国人民解放军国防科技大学 C/c复合材料表面碳化物衍生碳/铼/铱涂层及其制备方法
CN113078043A (zh) * 2021-03-24 2021-07-06 长鑫存储技术有限公司 非晶碳膜的形成方法及半导体结构
DE102022209741A1 (de) 2022-09-16 2024-03-21 Wmf Gmbh Schneidklinge und verfahren zu deren herstellung

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01167211A (ja) * 1987-12-23 1989-06-30 Hitachi Ltd ダイヤモンドライク炭素膜およびその製造法
JPH02143912A (ja) 1988-11-25 1990-06-01 Nec Corp 磁気記録媒体
JP3007936B2 (ja) 1989-07-27 2000-02-14 日石三菱株式会社 炭素材料の製造法
US5352493A (en) * 1991-05-03 1994-10-04 Veniamin Dorfman Method for forming diamond-like nanocomposite or doped-diamond-like nanocomposite films
BE1008229A3 (nl) * 1993-10-29 1996-02-20 Vito Werkwijze voor het aanbrengen van een tegen slijtage beschermende laag op een substraat.
US5958542A (en) * 1995-06-06 1999-09-28 Hitachi, Ltd. Thin film magnetic disc and method of manufacturing the disc
US5795648A (en) * 1995-10-03 1998-08-18 Advanced Refractory Technologies, Inc. Method for preserving precision edges using diamond-like nanocomposite film coatings
EP0828015A3 (en) * 1996-09-06 1998-07-15 SANYO ELECTRIC Co., Ltd. Hard carbon film-coated substrate and method for fabricating the same
EP0856592A1 (en) * 1997-02-04 1998-08-05 N.V. Bekaert S.A. A coating comprising layers of diamond like carbon and diamond like nanocomposite compositions
JP4256938B2 (ja) * 1997-02-04 2009-04-22 ナムローゼ・フェンノートシャップ・ベーカート・ソシエテ・アノニム ダイヤモンド状カーボン及びダイヤモンド状ナノコンポジット組成物の層を有するコーティング物
JPH1192935A (ja) * 1997-09-19 1999-04-06 Daido Steel Co Ltd 耐摩耗性硬質炭素被膜
JP2000120870A (ja) * 1998-10-15 2000-04-28 Teikoku Piston Ring Co Ltd ピストンリング
US6261693B1 (en) * 1999-05-03 2001-07-17 Guardian Industries Corporation Highly tetrahedral amorphous carbon coating on glass
AU4566400A (en) * 1999-06-08 2000-12-28 N.V. Bekaert S.A. A doped diamond-like carbon coating
DE10003827A1 (de) 2000-01-28 2001-08-02 Reimer Koester Verfahren zur Herstellung einer Stranggießkokille mit verschleißfester Schicht
JP4730753B2 (ja) * 2000-03-23 2011-07-20 株式会社神戸製鋼所 ダイヤモンドライクカーボン硬質多層膜および耐摩耗性、耐摺動性に優れた部材
DE10018143C5 (de) * 2000-04-12 2012-09-06 Oerlikon Trading Ag, Trübbach DLC-Schichtsystem sowie Verfahren und Vorrichtung zur Herstellung eines derartigen Schichtsystems
US6904935B2 (en) * 2002-12-18 2005-06-14 Masco Corporation Of Indiana Valve component with multiple surface layers
EP1498597A1 (en) * 2003-07-17 2005-01-19 Sorevi S.A. Piston with a skirt having a low coefficient of friction
EP1651796B1 (en) * 2003-07-25 2007-01-03 NV Bekaert SA Substrate covered with an intermediate coating and a hard carbon coating
WO2005054539A1 (en) * 2003-12-02 2005-06-16 N.V. Bekaert S.A. A layered structure
WO2005090634A1 (en) * 2004-03-05 2005-09-29 Nv Bekaert Sa Substrate covered with an adhesion promoting layer and a hard carbon coating

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US7947372B2 (en) 2011-05-24
JP2009504448A (ja) 2009-02-05
EP1915472A1 (en) 2008-04-30
CN101432462A (zh) 2009-05-13
JP5503145B2 (ja) 2014-05-28
JP2014088024A (ja) 2014-05-15
US20080220257A1 (en) 2008-09-11
WO2007020139A1 (en) 2007-02-22
EP1915472B1 (en) 2018-09-05
CN101432462B (zh) 2012-12-05

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