PL404477A1 - Detector for secondary electrons - Google Patents

Detector for secondary electrons

Info

Publication number
PL404477A1
PL404477A1 PL404477A PL40447713A PL404477A1 PL 404477 A1 PL404477 A1 PL 404477A1 PL 404477 A PL404477 A PL 404477A PL 40447713 A PL40447713 A PL 40447713A PL 404477 A1 PL404477 A1 PL 404477A1
Authority
PL
Poland
Prior art keywords
detector
wires
metal
voltage source
cathode
Prior art date
Application number
PL404477A
Other languages
Polish (pl)
Other versions
PL229014B1 (en
Inventor
Jan Hejna
Original Assignee
Politechnika Wrocławska
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Politechnika Wrocławska filed Critical Politechnika Wrocławska
Priority to PL404477A priority Critical patent/PL229014B1/en
Publication of PL404477A1 publication Critical patent/PL404477A1/en
Publication of PL229014B1 publication Critical patent/PL229014B1/en

Links

Landscapes

  • Measurement Of Radiation (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

Wynalazek dotyczy detektora elektronów wtórnych przewidzianego do stosowania w środowisku gazowym i wykorzystywanego w elektronowych mikroskopach skaningowych i jonowych mikroskopach skaningowych takich, które umożliwiają uzyskanie i utrzymanie w komorze preparatowej ciśnienia gazów poniżej 10 Pa. Detektor ma korpus (1), oraz, katodę i anodę składające się z metalowych drutów, ułożonych na przemian na jednej powierzchni równolegle do siebie, a metalowe druty katody połączone są przewodem (4) ze źródłem napięcia stałego (6) natomiast metalowe druty anody połączone są przewodem (5) przez wzmacniacz elektroniczny (8) ze źródłem napięcia stałego (7).The invention relates to a secondary electron detector intended for use in a gaseous environment and used in scanning electron microscopes and ion scanning microscopes that allow obtaining and maintaining a gas pressure below 10 Pa in the preparation chamber. The detector has a body (1), and, a cathode and anode consisting of metal wires, alternately arranged on one surface parallel to each other, and the metal cathode wires are connected by a conductor (4) with a direct voltage source (6) while the metal anode wires are connected are the cable (5) through the electronic amplifier (8) with the DC voltage source (7).

PL404477A 2013-06-27 2013-06-27 Detector for secondary electrons PL229014B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PL404477A PL229014B1 (en) 2013-06-27 2013-06-27 Detector for secondary electrons

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PL404477A PL229014B1 (en) 2013-06-27 2013-06-27 Detector for secondary electrons

Publications (2)

Publication Number Publication Date
PL404477A1 true PL404477A1 (en) 2014-06-09
PL229014B1 PL229014B1 (en) 2018-05-30

Family

ID=50846665

Family Applications (1)

Application Number Title Priority Date Filing Date
PL404477A PL229014B1 (en) 2013-06-27 2013-06-27 Detector for secondary electrons

Country Status (1)

Country Link
PL (1) PL229014B1 (en)

Also Published As

Publication number Publication date
PL229014B1 (en) 2018-05-30

Similar Documents

Publication Publication Date Title
AR095602A1 (en) SYSTEM AND COATING METHOD OF A SUBSTRATE
EP2814050A3 (en) Electron beam-induced etching
EP4295970A3 (en) X-ray device and structure manufacturing method
CL2017002154A1 (en) Diaphragm-electrode assembly for use in alkaline water electrolysers
MX2011006865A (en) Air ionizer electrode assembly.
MX2015008261A (en) Ion bombardment device and substrate surface cleaning method using same.
SA518391635B1 (en) An electron guiding and receiving element
MX2016005951A (en) Field emission ion source neutron generator.
BR112012025654A2 (en) selection and use of host cells for glycoprotein production
ES2625301T3 (en) Plasma source
PL402029A1 (en) Anode, especially for photoelectrochemical cells, and the use of the eutectic material
CL2016001627A1 (en) Conductive carbon powder, method for manufacturing and use thereof
RU2015100885A (en) SPARK DISCHARGE
AR090792A1 (en) HIGH VOLTAGE CONNECTOR
WO2014132049A3 (en) Apparatus for the generation of low-energy x-rays
PL404477A1 (en) Detector for secondary electrons
PL408320A1 (en) Micromechanical ionization vacuum gauge
RU2012100143A (en) HIGH-FREQUENCY RADIATION GENERATOR BASED ON A Hollow Cathode Discharge
ES2721017T3 (en) CNT-based high energy electron source with remote electromagnetic wave control element
EP2634790A3 (en) Electron multiplying apparatus
MY181668A (en) A supercapacitor
WO2013004566A3 (en) An electron beam device, a getter sheet and a method of manufacturing an electron beam device provided with said getter sheet
SA518391430B1 (en) Electrochemical cell and process
MY190639A (en) Low pressure wire ion plasma discharge source, and application to electron source with secondary emission
RU2013137158A (en) VACUUM DIODE