PL404477A1 - Detector for secondary electrons - Google Patents
Detector for secondary electronsInfo
- Publication number
- PL404477A1 PL404477A1 PL404477A PL40447713A PL404477A1 PL 404477 A1 PL404477 A1 PL 404477A1 PL 404477 A PL404477 A PL 404477A PL 40447713 A PL40447713 A PL 40447713A PL 404477 A1 PL404477 A1 PL 404477A1
- Authority
- PL
- Poland
- Prior art keywords
- detector
- wires
- metal
- voltage source
- cathode
- Prior art date
Links
- 239000002184 metal Substances 0.000 abstract 3
- 239000004020 conductor Substances 0.000 abstract 1
Landscapes
- Measurement Of Radiation (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
Wynalazek dotyczy detektora elektronów wtórnych przewidzianego do stosowania w środowisku gazowym i wykorzystywanego w elektronowych mikroskopach skaningowych i jonowych mikroskopach skaningowych takich, które umożliwiają uzyskanie i utrzymanie w komorze preparatowej ciśnienia gazów poniżej 10 Pa. Detektor ma korpus (1), oraz, katodę i anodę składające się z metalowych drutów, ułożonych na przemian na jednej powierzchni równolegle do siebie, a metalowe druty katody połączone są przewodem (4) ze źródłem napięcia stałego (6) natomiast metalowe druty anody połączone są przewodem (5) przez wzmacniacz elektroniczny (8) ze źródłem napięcia stałego (7).The invention relates to a secondary electron detector intended for use in a gaseous environment and used in scanning electron microscopes and ion scanning microscopes that allow obtaining and maintaining a gas pressure below 10 Pa in the preparation chamber. The detector has a body (1), and, a cathode and anode consisting of metal wires, alternately arranged on one surface parallel to each other, and the metal cathode wires are connected by a conductor (4) with a direct voltage source (6) while the metal anode wires are connected are the cable (5) through the electronic amplifier (8) with the DC voltage source (7).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PL404477A PL229014B1 (en) | 2013-06-27 | 2013-06-27 | Detector for secondary electrons |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PL404477A PL229014B1 (en) | 2013-06-27 | 2013-06-27 | Detector for secondary electrons |
Publications (2)
Publication Number | Publication Date |
---|---|
PL404477A1 true PL404477A1 (en) | 2014-06-09 |
PL229014B1 PL229014B1 (en) | 2018-05-30 |
Family
ID=50846665
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PL404477A PL229014B1 (en) | 2013-06-27 | 2013-06-27 | Detector for secondary electrons |
Country Status (1)
Country | Link |
---|---|
PL (1) | PL229014B1 (en) |
-
2013
- 2013-06-27 PL PL404477A patent/PL229014B1/en unknown
Also Published As
Publication number | Publication date |
---|---|
PL229014B1 (en) | 2018-05-30 |
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