PL3460858T3 - Sposób wytwarzania kolumnowych struktur elektroluminescencyjnych UV i struktury wytworzone tym sposobem - Google Patents

Sposób wytwarzania kolumnowych struktur elektroluminescencyjnych UV i struktury wytworzone tym sposobem

Info

Publication number
PL3460858T3
PL3460858T3 PL17461607T PL17461607T PL3460858T3 PL 3460858 T3 PL3460858 T3 PL 3460858T3 PL 17461607 T PL17461607 T PL 17461607T PL 17461607 T PL17461607 T PL 17461607T PL 3460858 T3 PL3460858 T3 PL 3460858T3
Authority
PL
Poland
Prior art keywords
structures
emitting
producing light
column
produced
Prior art date
Application number
PL17461607T
Other languages
English (en)
Inventor
Mariusz Rudziński
Original Assignee
Instytut Technologii Materialów Elektronicznych
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Instytut Technologii Materialów Elektronicznych filed Critical Instytut Technologii Materialów Elektronicznych
Publication of PL3460858T3 publication Critical patent/PL3460858T3/pl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/20—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/005—Processes
    • H01L33/0062—Processes for devices with an active region comprising only III-V compounds
    • H01L33/0066—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound
    • H01L33/007—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound comprising nitride compounds
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/005—Processes
    • H01L33/0062—Processes for devices with an active region comprising only III-V compounds
    • H01L33/0075—Processes for devices with an active region comprising only III-V compounds comprising nitride compounds
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/005—Processes
    • H01L33/0093—Wafer bonding; Removal of the growth substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/08—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a plurality of light emitting regions, e.g. laterally discontinuous light emitting layer or photoluminescent region integrated within the semiconductor body
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/12—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a stress relaxation structure, e.g. buffer layer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/16—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular crystal structure or orientation, e.g. polycrystalline, amorphous or porous
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/20—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
    • H01L33/24—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate of the light emitting region, e.g. non-planar junction
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/26—Materials of the light emitting region
    • H01L33/30—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
    • H01L33/32—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
PL17461607T 2017-09-20 2017-09-20 Sposób wytwarzania kolumnowych struktur elektroluminescencyjnych UV i struktury wytworzone tym sposobem PL3460858T3 (pl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP17461607.8A EP3460858B1 (en) 2017-09-20 2017-09-20 A method for producing light-emitting uv column structures and the structures produced using this method

Publications (1)

Publication Number Publication Date
PL3460858T3 true PL3460858T3 (pl) 2020-11-16

Family

ID=60327264

Family Applications (1)

Application Number Title Priority Date Filing Date
PL17461607T PL3460858T3 (pl) 2017-09-20 2017-09-20 Sposób wytwarzania kolumnowych struktur elektroluminescencyjnych UV i struktury wytworzone tym sposobem

Country Status (4)

Country Link
US (1) US10749073B2 (pl)
EP (1) EP3460858B1 (pl)
ES (1) ES2808992T3 (pl)
PL (1) PL3460858T3 (pl)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
PL3460858T3 (pl) * 2017-09-20 2020-11-16 Instytut Technologii Materialów Elektronicznych Sposób wytwarzania kolumnowych struktur elektroluminescencyjnych UV i struktury wytworzone tym sposobem
EP3731260A4 (en) * 2017-12-19 2021-12-22 Sumco Corporation GROUP III SEMICONDUCTOR NITRIDE SUBSTRATE PRODUCTION PROCESS

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE60043122D1 (de) * 1999-03-17 2009-11-19 Mitsubishi Chem Corp Halbleiterbasis ihre Herstellung und Halbleiterkristallhersetllungsmethode
JP3556916B2 (ja) * 2000-09-18 2004-08-25 三菱電線工業株式会社 半導体基材の製造方法
KR101019941B1 (ko) 2006-03-10 2011-03-09 에스티씨. 유엔엠 Ｇａｎ 나노선의 펄스 성장 및 ⅲ 족 질화물 반도체 기판 물질과 디바이스에서의 어플리케이션
US8716049B2 (en) * 2010-02-23 2014-05-06 Applied Materials, Inc. Growth of group III-V material layers by spatially confined epitaxy
JP6592894B2 (ja) * 2012-11-02 2019-10-23 国立研究開発法人理化学研究所 紫外発光ダイオードおよびその製造方法
KR101834785B1 (ko) * 2013-10-21 2018-03-06 센서 일렉트로닉 테크놀로지, 인크 합성물 반도체 층을 포함하는 이종 접합 구조
KR102188499B1 (ko) 2014-07-11 2020-12-09 삼성전자주식회사 나노구조 반도체 발광소자
JP6375890B2 (ja) * 2014-11-18 2018-08-22 日亜化学工業株式会社 窒化物半導体素子及びその製造方法
DE102014117892A1 (de) 2014-12-04 2016-06-09 Osram Opto Semiconductors Gmbh Optoelektronisches Bauelement sowie optoelektronisches Bauteil
KR102328457B1 (ko) * 2015-05-29 2021-11-18 쑤저우 레킨 세미컨덕터 컴퍼니 리미티드 발광소자, 발광소자 제조방법 및 이를 구비하는 조명시스템
JP6686876B2 (ja) * 2016-12-28 2020-04-22 豊田合成株式会社 半導体構造体および半導体素子
JP6642805B2 (ja) * 2016-12-28 2020-02-12 豊田合成株式会社 半導体構造体の製造方法および半導体素子の製造方法
PL3460858T3 (pl) * 2017-09-20 2020-11-16 Instytut Technologii Materialów Elektronicznych Sposób wytwarzania kolumnowych struktur elektroluminescencyjnych UV i struktury wytworzone tym sposobem

Also Published As

Publication number Publication date
US20190140135A1 (en) 2019-05-09
EP3460858B1 (en) 2020-04-29
US10749073B2 (en) 2020-08-18
ES2808992T3 (es) 2021-03-02
EP3460858A1 (en) 2019-03-27

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