PL3184663T3 - Tarcza do napylania na bazie tlenku cyrkonu - Google Patents
Tarcza do napylania na bazie tlenku cyrkonuInfo
- Publication number
- PL3184663T3 PL3184663T3 PL15202311T PL15202311T PL3184663T3 PL 3184663 T3 PL3184663 T3 PL 3184663T3 PL 15202311 T PL15202311 T PL 15202311T PL 15202311 T PL15202311 T PL 15202311T PL 3184663 T3 PL3184663 T3 PL 3184663T3
- Authority
- PL
- Poland
- Prior art keywords
- zirconium oxide
- sputtering target
- oxide based
- based sputtering
- target
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3414—Targets
- H01J37/3426—Material
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
- C01G25/00—Compounds of zirconium
- C01G25/02—Oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/083—Oxides of refractory metals or yttrium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2002/00—Crystal-structural characteristics
- C01P2002/70—Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data
- C01P2002/72—Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data by d-values or two theta-values, e.g. as X-ray diagram
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Inorganic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Coating By Spraying Or Casting (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP15202311.5A EP3184663B1 (en) | 2015-12-23 | 2015-12-23 | Zirconium oxide based sputtering target |
Publications (1)
Publication Number | Publication Date |
---|---|
PL3184663T3 true PL3184663T3 (pl) | 2020-11-16 |
Family
ID=55083302
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PL15202311T PL3184663T3 (pl) | 2015-12-23 | 2015-12-23 | Tarcza do napylania na bazie tlenku cyrkonu |
Country Status (7)
Country | Link |
---|---|
US (1) | US10347472B2 (pl) |
EP (1) | EP3184663B1 (pl) |
JP (1) | JP2019507241A (pl) |
CN (1) | CN108431292B (pl) |
ES (1) | ES2786348T3 (pl) |
PL (1) | PL3184663T3 (pl) |
WO (1) | WO2017108271A1 (pl) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN116023327A (zh) * | 2016-08-08 | 2023-04-28 | 北京康蒂尼药业股份有限公司 | 一种羟尼酮的制备方法 |
BE1026850B1 (nl) | 2018-11-12 | 2020-07-07 | Soleras Advanced Coatings Bv | Geleidende sputter doelen met silicium, zirkonium en zuurstof |
CN111041432A (zh) * | 2019-11-26 | 2020-04-21 | 广州市尤特新材料有限公司 | 一种旋转氧化锆靶材及其制备方法 |
CN116283278B (zh) * | 2023-02-20 | 2024-06-18 | 深圳市翔通光电技术有限公司 | 一种锆氧化物及其制备方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1997008359A1 (fr) | 1995-08-23 | 1997-03-06 | Asahi Glass Company Ltd. | Cible, son procede de production et procede de formation d'une couche tres refringente |
JP4253855B2 (ja) * | 1998-01-23 | 2009-04-15 | 東ソー株式会社 | 蒸着材 |
JP2000327417A (ja) * | 1999-05-25 | 2000-11-28 | Tosoh Corp | 蒸着材 |
DE10140514A1 (de) | 2001-08-17 | 2003-02-27 | Heraeus Gmbh W C | Sputtertarget auf Basis von Titandioxid |
ATE532886T1 (de) * | 2008-09-19 | 2011-11-15 | Oerlikon Trading Ag | Verfahren zum herstellen von metalloxidschichten durch funkenverdampfung |
JP4891381B2 (ja) * | 2009-11-19 | 2012-03-07 | 出光興産株式会社 | In−Ga−Zn系焼結体、及びスパッタリングターゲット |
JP5846203B2 (ja) * | 2011-05-30 | 2016-01-20 | 旭硝子株式会社 | 低放射率積層体、および複層ガラス |
WO2012169194A1 (ja) * | 2011-06-08 | 2012-12-13 | 株式会社アルバック | 抵抗変化素子の製造方法およびその製造装置 |
EP2549521A1 (de) * | 2011-07-21 | 2013-01-23 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren und Vorrichtung zur Herstellung partikelarmer Schichten auf Substraten |
CN102839354A (zh) * | 2012-10-07 | 2012-12-26 | 复旦大学 | 一种组分可控的ZrOx薄膜的制备方法 |
CN104451582B (zh) * | 2014-12-30 | 2017-09-29 | 北京恒隆科技有限公司 | 一种导电氧化锆旋转靶材及其制备方法 |
-
2015
- 2015-12-23 ES ES15202311T patent/ES2786348T3/es active Active
- 2015-12-23 EP EP15202311.5A patent/EP3184663B1/en active Active
- 2015-12-23 PL PL15202311T patent/PL3184663T3/pl unknown
-
2016
- 2016-11-15 CN CN201680074500.7A patent/CN108431292B/zh active Active
- 2016-11-15 JP JP2018532732A patent/JP2019507241A/ja active Pending
- 2016-11-15 WO PCT/EP2016/077709 patent/WO2017108271A1/en active Application Filing
-
2017
- 2017-12-01 US US15/829,452 patent/US10347472B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
ES2786348T3 (es) | 2020-10-09 |
EP3184663B1 (en) | 2020-04-15 |
EP3184663A1 (en) | 2017-06-28 |
CN108431292A (zh) | 2018-08-21 |
WO2017108271A1 (en) | 2017-06-29 |
US10347472B2 (en) | 2019-07-09 |
US20180155820A1 (en) | 2018-06-07 |
JP2019507241A (ja) | 2019-03-14 |
CN108431292B (zh) | 2020-04-21 |
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