PL2486392T3 - Przyrząd pomiarowy i sposób określania właściwości przedmiotu i jego powierzchni - Google Patents

Przyrząd pomiarowy i sposób określania właściwości przedmiotu i jego powierzchni

Info

Publication number
PL2486392T3
PL2486392T3 PL10821623T PL10821623T PL2486392T3 PL 2486392 T3 PL2486392 T3 PL 2486392T3 PL 10821623 T PL10821623 T PL 10821623T PL 10821623 T PL10821623 T PL 10821623T PL 2486392 T3 PL2486392 T3 PL 2486392T3
Authority
PL
Poland
Prior art keywords
item
determination
properties
measuring instrument
instrument
Prior art date
Application number
PL10821623T
Other languages
English (en)
Inventor
Karri NIEMELÄ
Heimo KERÄNEN
Original Assignee
Focalspec Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=41263452&utm_source=***_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=PL2486392(T3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Focalspec Oy filed Critical Focalspec Oy
Publication of PL2486392T3 publication Critical patent/PL2486392T3/pl

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55Specular reflectivity
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G01B11/0633Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection using one or more discrete wavelengths
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608Height gauges
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0641Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization
    • G01B11/065Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization using one or more discrete wavelengths
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0691Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of objects while moving
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41Refractivity; Phase-affecting properties, e.g. optical path length
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55Specular reflectivity
    • G01N21/57Measuring gloss
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/40Caliper-like sensors
    • G01B2210/44Caliper-like sensors with detectors on both sides of the object to be measured
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/50Using chromatic effects to achieve wavelength-dependent depth resolution

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
PL10821623T 2009-10-08 2010-10-07 Przyrząd pomiarowy i sposób określania właściwości przedmiotu i jego powierzchni PL2486392T3 (pl)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FI20096035A FI124299B (fi) 2009-10-08 2009-10-08 Mittalaite ja menetelmä kohteen ja kohteen pinnan ominaisuuksien mittaamiseksi
EP10821623.5A EP2486392B1 (en) 2009-10-08 2010-10-07 Measuring instrument and method for determination of the properties of an item and its surface
PCT/FI2010/050778 WO2011042606A1 (en) 2009-10-08 2010-10-07 Measuring instrument and method for determination of the properties of an item and its surface

Publications (1)

Publication Number Publication Date
PL2486392T3 true PL2486392T3 (pl) 2020-01-31

Family

ID=41263452

Family Applications (1)

Application Number Title Priority Date Filing Date
PL10821623T PL2486392T3 (pl) 2009-10-08 2010-10-07 Przyrząd pomiarowy i sposób określania właściwości przedmiotu i jego powierzchni

Country Status (8)

Country Link
US (1) US8786836B2 (pl)
EP (1) EP2486392B1 (pl)
JP (1) JP2013507608A (pl)
CN (1) CN102575985B (pl)
ES (1) ES2743461T3 (pl)
FI (1) FI124299B (pl)
PL (1) PL2486392T3 (pl)
WO (1) WO2011042606A1 (pl)

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FI125408B (fi) * 2012-09-17 2015-09-30 Focalspec Oy Menetelmä ja mittalaite pinnan etäisyyden, kohteen paksuuden ja optisten ominaisuuksien mittaamiseksi
JP5701837B2 (ja) 2012-10-12 2015-04-15 横河電機株式会社 変位センサ、変位測定方法
FI20126126L (fi) 2012-10-30 2014-05-01 Metso Automation Oy Menetelmä ja laite kiillon mittaamiseksi
GB2507813B (en) * 2012-11-13 2017-06-21 Focalspec Oy Apparatus and method for inspecting seals of items
CN103063615B (zh) * 2012-12-28 2014-12-31 天威(成都)太阳能热发电开发有限公司 基于抛物面反射镜的光洁度测量仪及其测量方法
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JP5907364B2 (ja) * 2015-02-17 2016-04-26 横河電機株式会社 分光特性測定装置、分光特性測定方法、面状測定対象物品質監視装置
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US10480935B2 (en) 2016-12-02 2019-11-19 Alliance For Sustainable Energy, Llc Thickness mapping using multispectral imaging
EP3346229B1 (en) * 2017-01-09 2022-03-30 Unity Semiconductor GmbH Method and assembly for determining the thickness of layers in a sample stack
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DE102017126310A1 (de) 2017-11-09 2019-05-09 Precitec Optronik Gmbh Abstandsmessvorrichtung
CN110118737A (zh) * 2018-02-05 2019-08-13 康代有限公司 检查包括光敏聚酰亚胺层的物体
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US11473901B2 (en) * 2018-05-29 2022-10-18 Hitachi High-Tech Corporation Height measurement device in which optical paths projected on the sample at different incidence angles
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DE102018130901A1 (de) * 2018-12-04 2020-06-04 Precitec Optronik Gmbh Optische Messeinrichtung
JP2020148463A (ja) * 2019-03-11 2020-09-17 株式会社日立ハイテク 高さ測定装置及びビーム照射装置
MX2021011991A (es) * 2019-04-11 2021-11-03 Cryovac Llc Sistema para inspeccion en linea de integridad del sello.
US10876882B1 (en) * 2019-06-26 2020-12-29 Honeywell International Inc. Online grade selection for weight measurements of composite sheets
CN110425983B (zh) * 2019-07-26 2021-04-06 杭州电子科技大学 一种基于偏振多光谱的单目视觉三维重建测距方法
CN110398447A (zh) * 2019-08-15 2019-11-01 华帝股份有限公司 一种高灵敏度油烟浓度测量装置
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CN111750786B (zh) * 2020-07-06 2022-03-01 上海新昇半导体科技有限公司 厚度量测设备、抛光***及抛光物料管理方法
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Also Published As

Publication number Publication date
CN102575985B (zh) 2015-10-14
FI20096035A (fi) 2011-04-09
EP2486392A1 (en) 2012-08-15
EP2486392A4 (en) 2017-01-04
CN102575985A (zh) 2012-07-11
JP2013507608A (ja) 2013-03-04
WO2011042606A1 (en) 2011-04-14
US20120206710A1 (en) 2012-08-16
US8786836B2 (en) 2014-07-22
FI124299B (fi) 2014-06-13
FI20096035A0 (fi) 2009-10-08
ES2743461T3 (es) 2020-02-19
EP2486392B1 (en) 2019-06-05

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