PL2259662T3 - Urządzenie wygaszające nietypowe wyładowanie do przyrządu próżniowego - Google Patents

Urządzenie wygaszające nietypowe wyładowanie do przyrządu próżniowego

Info

Publication number
PL2259662T3
PL2259662T3 PL08778137T PL08778137T PL2259662T3 PL 2259662 T3 PL2259662 T3 PL 2259662T3 PL 08778137 T PL08778137 T PL 08778137T PL 08778137 T PL08778137 T PL 08778137T PL 2259662 T3 PL2259662 T3 PL 2259662T3
Authority
PL
Poland
Prior art keywords
abnormal discharge
vacuum apparatus
suppressing device
discharge suppressing
vacuum
Prior art date
Application number
PL08778137T
Other languages
English (en)
Inventor
Itsuo Yuzurihara
Atsushi Takayanagi
Original Assignee
Kyosan Electric Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyosan Electric Mfg filed Critical Kyosan Electric Mfg
Publication of PL2259662T3 publication Critical patent/PL2259662T3/pl

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/3299—Feedback systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/02—Details
    • H01J2237/0203—Protection arrangements
    • H01J2237/0206—Extinguishing, preventing or controlling unwanted discharges

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
  • Physical Vapour Deposition (AREA)
PL08778137T 2008-03-26 2008-07-14 Urządzenie wygaszające nietypowe wyładowanie do przyrządu próżniowego PL2259662T3 (pl)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2008080863 2008-03-26
PCT/JP2008/062666 WO2009118920A1 (ja) 2008-03-26 2008-07-14 真空装置用異常放電抑制装置
EP08778137.3A EP2259662B1 (en) 2008-03-26 2008-07-14 Abnormal discharge suppressing device for vacuum apparatus

Publications (1)

Publication Number Publication Date
PL2259662T3 true PL2259662T3 (pl) 2019-10-31

Family

ID=41113145

Family Applications (1)

Application Number Title Priority Date Filing Date
PL08778137T PL2259662T3 (pl) 2008-03-26 2008-07-14 Urządzenie wygaszające nietypowe wyładowanie do przyrządu próżniowego

Country Status (9)

Country Link
US (1) US8169162B2 (pl)
EP (1) EP2259662B1 (pl)
JP (2) JP5454944B2 (pl)
KR (1) KR101124789B1 (pl)
CN (1) CN101772992B (pl)
PL (1) PL2259662T3 (pl)
SG (1) SG183056A1 (pl)
TW (1) TWI446838B (pl)
WO (1) WO2009118920A1 (pl)

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US11596309B2 (en) 2019-07-09 2023-03-07 COMET Technologies USA, Inc. Hybrid matching network topology
KR102223874B1 (ko) 2019-10-28 2021-03-05 주식회사 뉴파워 프라즈마 이그니션 동작과 관련된 고주파 전원 장치의 보호 리미트 변경 제어 방법
KR102223876B1 (ko) 2019-10-28 2021-03-05 주식회사 뉴파워 프라즈마 불안정 매칭 현상을 해소하기 위한 다중 전압 제어 방법 및 다중 전압 제어 방식의 고주파 전원 장치
JP7293536B2 (ja) * 2019-12-25 2023-06-20 株式会社ダイヘン アーク検出装置、および、高周波電源装置
JP7293535B2 (ja) * 2019-12-25 2023-06-20 株式会社ダイヘン アーク検出装置、および、高周波電源装置
US11887820B2 (en) 2020-01-10 2024-01-30 COMET Technologies USA, Inc. Sector shunts for plasma-based wafer processing systems
US11830708B2 (en) 2020-01-10 2023-11-28 COMET Technologies USA, Inc. Inductive broad-band sensors for electromagnetic waves
US11521832B2 (en) 2020-01-10 2022-12-06 COMET Technologies USA, Inc. Uniformity control for radio frequency plasma processing systems
US11670488B2 (en) 2020-01-10 2023-06-06 COMET Technologies USA, Inc. Fast arc detecting match network
US11605527B2 (en) 2020-01-20 2023-03-14 COMET Technologies USA, Inc. Pulsing control match network
US11961711B2 (en) 2020-01-20 2024-04-16 COMET Technologies USA, Inc. Radio frequency match network and generator
US11373844B2 (en) 2020-09-28 2022-06-28 COMET Technologies USA, Inc. Systems and methods for repetitive tuning of matching networks
KR102511063B1 (ko) 2021-04-23 2023-03-16 주식회사 뉴파워 프라즈마 출력 안정화 장치를 구비한 플라즈마 발생용 고주파 전력 공급 장치
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Also Published As

Publication number Publication date
WO2009118920A1 (ja) 2009-10-01
TWI446838B (zh) 2014-07-21
JPWO2009118920A1 (ja) 2011-07-21
CN101772992B (zh) 2012-08-29
EP2259662A1 (en) 2010-12-08
TW200942089A (en) 2009-10-01
JP5669332B2 (ja) 2015-02-12
EP2259662B1 (en) 2019-06-26
JP5454944B2 (ja) 2014-03-26
US8169162B2 (en) 2012-05-01
KR101124789B1 (ko) 2012-03-23
SG183056A1 (en) 2012-08-30
CN101772992A (zh) 2010-07-07
KR20100019573A (ko) 2010-02-18
EP2259662A4 (en) 2015-08-05
JP2014056825A (ja) 2014-03-27
US20100187998A1 (en) 2010-07-29

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