PL1648597T3 - Element filtracyjny oraz sposób jego wytwarzania - Google Patents
Element filtracyjny oraz sposób jego wytwarzaniaInfo
- Publication number
- PL1648597T3 PL1648597T3 PL04763086T PL04763086T PL1648597T3 PL 1648597 T3 PL1648597 T3 PL 1648597T3 PL 04763086 T PL04763086 T PL 04763086T PL 04763086 T PL04763086 T PL 04763086T PL 1648597 T3 PL1648597 T3 PL 1648597T3
- Authority
- PL
- Poland
- Prior art keywords
- membrane
- layer
- membrane layer
- etching
- substrate
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 4
- 238000004519 manufacturing process Methods 0.000 title abstract 3
- 239000012528 membrane Substances 0.000 abstract 13
- 238000005530 etching Methods 0.000 abstract 6
- 239000000758 substrate Substances 0.000 abstract 6
- 239000011148 porous material Substances 0.000 abstract 2
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0081—After-treatment of organic or inorganic membranes
- B01D67/0083—Thermal after-treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0002—Organic membrane manufacture
- B01D67/0023—Organic membrane manufacture by inducing porosity into non porous precursor membranes
- B01D67/0032—Organic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0002—Organic membrane manufacture
- B01D67/0037—Organic membrane manufacture by deposition from the gaseous phase, e.g. CVD, PVD
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0039—Inorganic membrane manufacture
- B01D67/0053—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes
- B01D67/006—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods
- B01D67/0062—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods by micromachining techniques, e.g. using masking and etching steps, photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0039—Inorganic membrane manufacture
- B01D67/0072—Inorganic membrane manufacture by deposition from the gaseous phase, e.g. sputtering, CVD, PVD
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0081—After-treatment of organic or inorganic membranes
- B01D67/0086—Mechanical after-treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0081—After-treatment of organic or inorganic membranes
- B01D67/009—After-treatment of organic or inorganic membranes with wave-energy, particle-radiation or plasma
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
- B01D69/02—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor characterised by their properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
- B01D69/10—Supported membranes; Membrane supports
- B01D69/108—Inorganic support material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/02—Inorganic material
- B01D71/0213—Silicon
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/02—Inorganic material
- B01D71/0215—Silicon carbide; Silicon nitride; Silicon oxycarbide
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B38/00—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof
- C04B38/04—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof by dissolving-out added substances
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2323/00—Details relating to membrane preparation
- B01D2323/34—Use of radiation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2325/00—Details relating to properties of membranes
- B01D2325/08—Patterned membranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2325/00—Details relating to properties of membranes
- B01D2325/24—Mechanical properties, e.g. strength
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
- C04B2111/00474—Uses not provided for elsewhere in C04B2111/00
- C04B2111/00793—Uses not provided for elsewhere in C04B2111/00 as filters or diaphragms
- C04B2111/00801—Membranes; Diaphragms
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S55/00—Gas separation
- Y10S55/05—Methods of making filter
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Optics & Photonics (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Plasma & Fusion (AREA)
- Thermal Sciences (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Filtering Materials (AREA)
- Chemical Vapour Deposition (AREA)
- Micromachines (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10331709 | 2003-07-11 | ||
DE10353894A DE10353894B4 (de) | 2003-07-11 | 2003-11-18 | Filterelement und Verfahren zu dessen Herstellung |
PCT/EP2004/007262 WO2005007276A1 (de) | 2003-07-11 | 2004-07-03 | Filterelement und verfahren zu dessen herstellung |
EP04763086A EP1648597B1 (de) | 2003-07-11 | 2004-07-03 | Filterelement und verfahren zu dessen herstellung |
Publications (1)
Publication Number | Publication Date |
---|---|
PL1648597T3 true PL1648597T3 (pl) | 2009-04-30 |
Family
ID=34081638
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PL04763086T PL1648597T3 (pl) | 2003-07-11 | 2004-07-03 | Element filtracyjny oraz sposób jego wytwarzania |
Country Status (14)
Country | Link |
---|---|
US (1) | US7655075B2 (pl) |
EP (1) | EP1648597B1 (pl) |
JP (1) | JP4917429B2 (pl) |
KR (1) | KR101152577B1 (pl) |
CN (1) | CN100434150C (pl) |
AT (1) | ATE408448T1 (pl) |
AU (1) | AU2004257407B2 (pl) |
BR (1) | BRPI0412466A (pl) |
CA (1) | CA2532103A1 (pl) |
DE (2) | DE10353894B4 (pl) |
ES (1) | ES2314429T3 (pl) |
PL (1) | PL1648597T3 (pl) |
RU (1) | RU2355466C2 (pl) |
WO (1) | WO2005007276A1 (pl) |
Families Citing this family (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7846393B2 (en) * | 2005-04-21 | 2010-12-07 | California Institute Of Technology | Membrane filter for capturing circulating tumor cells |
JP2008540070A (ja) * | 2005-04-29 | 2008-11-20 | ユニバーシティー オブ ロチェスター | 超薄多孔質ナノスケール膜、その製造方法および使用 |
WO2006119252A2 (en) | 2005-04-29 | 2006-11-09 | University Of Rochester | Ultrathin nanoscale membranes, methods of making, and uses thereof |
JP2009529888A (ja) | 2006-03-14 | 2009-08-27 | ユニバーシティ オブ ロチェスター | 超薄多孔質メンブレンを有する細胞培養装置およびその使用 |
US8920723B2 (en) * | 2006-11-16 | 2014-12-30 | Protochips, Inc. | Sample support structure and methods |
US20080277332A1 (en) * | 2007-05-11 | 2008-11-13 | Becton, Dickinson And Company | Micromachined membrane filter device for a glaucoma implant and method for making the same |
JP5541556B2 (ja) * | 2007-06-20 | 2014-07-09 | 日産自動車株式会社 | 水素分離装置及びその製造方法 |
JP5042110B2 (ja) * | 2008-04-22 | 2012-10-03 | サルナス、ペトロニス | ナノ細孔の製造 |
DE102008035772B4 (de) * | 2008-07-31 | 2015-02-12 | Airbus Defence and Space GmbH | Partikelfilter sowie Herstellverfahren hierfür |
US8622223B2 (en) * | 2008-12-17 | 2014-01-07 | General Electric Company | Membrane assemblies and methods of making and using the same |
US20100313758A1 (en) * | 2009-06-12 | 2010-12-16 | Co2Crc Technologies Pty Ltd. | Gas absorption membranes and the manufacture thereof |
RU2446863C1 (ru) * | 2010-09-10 | 2012-04-10 | Сергей Михайлович Кузьмин | Способ изготовления мембранного фильтра |
DE102011015981A1 (de) * | 2011-04-04 | 2013-05-16 | Mann + Hummel Gmbh | Be- und Entlüftungsvorrichtung eines Gehäuses und Verfahren zur Herstellung einer solchen |
US9029813B2 (en) * | 2011-05-20 | 2015-05-12 | Asml Netherlands B.V. | Filter for material supply apparatus of an extreme ultraviolet light source |
KR101938707B1 (ko) * | 2011-09-02 | 2019-01-15 | 에이에스엠엘 네델란즈 비.브이. | 디바이스 제조용 리소그래피 장치에 대한 방법 및 방사선 소스 |
JP5518039B2 (ja) * | 2011-12-28 | 2014-06-11 | 株式会社日立製作所 | フィルター、及びその製造方法 |
CA2873638C (en) | 2012-05-16 | 2021-08-24 | Regents Of The University Of California | Low resistance microfabricated filter |
FR3006606B1 (fr) * | 2013-06-11 | 2015-07-03 | Tech Avancees Et Membranes Industrielles | Procede de fabrication de membranes de filtration par technique additive et membranes obtenues |
CN103341291B (zh) * | 2013-06-30 | 2015-07-15 | 成都易态膜分离技术有限公司 | 烧结多孔材料及应用该多孔材料的过滤元件 |
US9415349B2 (en) * | 2014-02-28 | 2016-08-16 | General Electric Company | Porous membrane patterning technique |
CN104014257B (zh) * | 2014-05-30 | 2016-08-17 | 天津理源科技有限公司 | 一种精密输液用自动止液核孔滤膜及其制备方法 |
AU2015302719B2 (en) * | 2014-08-11 | 2019-10-31 | Kotobuki Holdings Co., Ltd. | Method for producing molded filter body |
BR112017007745B1 (pt) | 2014-10-15 | 2022-01-18 | Veolia Water Solutions & Technologies Support | Tratamento de água produzida particularmente obtida a partir de um processo de recuperação de óleo quimicamente aprimorado com uso de polímeros de aumento de viscosidade |
DE102015101425B4 (de) * | 2014-10-31 | 2018-02-01 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur Herstellung eines Bauelements auf Basis eines strukturierbaren Substrats mit dreidimensionaler, Poren im nm-Bereich aufweisender Membranstruktur |
CN105727755B (zh) * | 2014-12-09 | 2018-08-28 | 中国科学院金属研究所 | 一种梯度孔隙氮化硅结合碳化硅膜管及其制备方法 |
CN104607054B (zh) * | 2014-12-31 | 2017-11-10 | 浙江南洋慧通新材料有限公司 | 具有止液功能的重离子微孔膜制备方法及使用膜的输液器 |
US9517927B2 (en) | 2015-04-29 | 2016-12-13 | Taiwan Semiconductor Manufacturing Co., Ltd. | MEMS structure having rounded edge stopper and method of fabricating the same |
DE102015108068A1 (de) * | 2015-05-21 | 2016-11-24 | Infineon Technologies Ag | Batteriezellen und ein Verfahren zum Bilden einer Batteriezelle |
KR101759093B1 (ko) * | 2015-07-01 | 2017-07-18 | 서울대학교산학협력단 | 나노포어 구조체, 나노포어 구조를 이용한 이온소자 및 나노멤브레인 구조체 제조방법 |
CN110981545A (zh) * | 2019-11-07 | 2020-04-10 | 佛山市中国科学院上海硅酸盐研究所陶瓷研发中心 | 碳化硅陶瓷分离及其制备方法 |
EP3851848A1 (en) | 2020-01-20 | 2021-07-21 | Infineon Technologies AG | Micromechanical device with perforated membrane |
CN113425011B (zh) * | 2020-02-11 | 2023-12-29 | 宁卡赛科技(上海)有限公司 | 用于疾病预防的新型口罩及其生产方法 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH678403A5 (en) | 1989-06-12 | 1991-09-13 | Sulzer Ag | Prodn. of micro-filter membranes contg. microscopic pores - by selectively dissolving grain of different metallurgical composition within its structure |
US5139624A (en) | 1990-12-06 | 1992-08-18 | Sri International | Method for making porous semiconductor membranes |
NL9200902A (nl) | 1992-05-21 | 1993-12-16 | Cornelis Johannes Maria Van Ri | Keramisch membraan voor microfiltratie, alsmede werkwijze ter vervaardiging van een dergelijk membraan. |
NL9401260A (nl) * | 1993-11-12 | 1995-06-01 | Cornelis Johannes Maria Van Ri | Membraan voor microfiltratie, ultrafiltratie, gasscheiding en katalyse, werkwijze ter vervaardiging van een dergelijk membraan, mal ter vervaardiging van een dergelijk membraan, alsmede diverse scheidingssystemen omvattende een dergelijk membraan. |
US5882496A (en) * | 1997-02-27 | 1999-03-16 | The Regents Of The University Of California | Porous silicon structures with high surface area/specific pore size |
NL1006118C2 (nl) * | 1997-05-24 | 1998-11-25 | Koninkl Grolsch N V | Inrichting voor het filtreren van een gefermenteerde vloeistof. |
US6622872B1 (en) * | 1997-11-07 | 2003-09-23 | California Institute Of Technology | Micromachined membrane particle filter using parylene reinforcement |
WO2000032512A1 (en) * | 1998-12-02 | 2000-06-08 | Massachusetts Institute Of Technology | Integrated palladium-based micromembranes for hydrogen separation and hydrogenation/dehydrogenation reactions |
JP2003514677A (ja) * | 1999-11-17 | 2003-04-22 | ザ・リージェンツ・オブ・ザ・ユニバーシティー・オブ・カリフォルニア | ナノメートルスケールの細孔のある膜を形成するための装置及び方法 |
DE60033520T2 (de) * | 1999-12-08 | 2007-06-21 | Baxter International Inc. (A Delaware Corporation), Deerfield | Verfahren zur herstellung einer mikroporösen filtermembran |
US20030150791A1 (en) * | 2002-02-13 | 2003-08-14 | Cho Steven T. | Micro-fluidic anti-microbial filter |
EP1946826B1 (en) * | 2002-07-25 | 2009-08-26 | Dai Nippon Insatsu Kabushiki Kaisha | Production method of hydrogen production filter |
ITTO20030032A1 (it) * | 2003-01-24 | 2004-07-25 | Varian Spa | Membrana permeabile selettivamente ai gas e metodo per la sua realizzazione. |
US7282148B2 (en) * | 2003-10-30 | 2007-10-16 | International Business Machines Corporation | Porous silicon composite structure as large filtration array |
-
2003
- 2003-11-18 DE DE10353894A patent/DE10353894B4/de not_active Expired - Fee Related
-
2004
- 2004-07-03 RU RU2006103984/15A patent/RU2355466C2/ru not_active IP Right Cessation
- 2004-07-03 KR KR1020067000613A patent/KR101152577B1/ko not_active IP Right Cessation
- 2004-07-03 WO PCT/EP2004/007262 patent/WO2005007276A1/de active IP Right Grant
- 2004-07-03 ES ES04763086T patent/ES2314429T3/es not_active Expired - Lifetime
- 2004-07-03 CA CA002532103A patent/CA2532103A1/en not_active Abandoned
- 2004-07-03 CN CNB2004800263482A patent/CN100434150C/zh not_active Expired - Fee Related
- 2004-07-03 EP EP04763086A patent/EP1648597B1/de not_active Expired - Lifetime
- 2004-07-03 DE DE502004008098T patent/DE502004008098D1/de not_active Expired - Lifetime
- 2004-07-03 BR BRPI0412466-9A patent/BRPI0412466A/pt not_active IP Right Cessation
- 2004-07-03 PL PL04763086T patent/PL1648597T3/pl unknown
- 2004-07-03 US US10/564,333 patent/US7655075B2/en not_active Expired - Fee Related
- 2004-07-03 AT AT04763086T patent/ATE408448T1/de not_active IP Right Cessation
- 2004-07-03 JP JP2006518100A patent/JP4917429B2/ja not_active Expired - Fee Related
- 2004-07-03 AU AU2004257407A patent/AU2004257407B2/en not_active Ceased
Also Published As
Publication number | Publication date |
---|---|
KR20060104983A (ko) | 2006-10-09 |
AU2004257407A1 (en) | 2005-01-27 |
DE502004008098D1 (de) | 2008-10-30 |
US7655075B2 (en) | 2010-02-02 |
RU2006103984A (ru) | 2007-08-20 |
AU2004257407B2 (en) | 2010-07-01 |
RU2355466C2 (ru) | 2009-05-20 |
JP4917429B2 (ja) | 2012-04-18 |
EP1648597A1 (de) | 2006-04-26 |
EP1648597B1 (de) | 2008-09-17 |
ATE408448T1 (de) | 2008-10-15 |
CA2532103A1 (en) | 2005-01-27 |
WO2005007276A1 (de) | 2005-01-27 |
JP2009513317A (ja) | 2009-04-02 |
CN100434150C (zh) | 2008-11-19 |
CN1849164A (zh) | 2006-10-18 |
US20070039471A1 (en) | 2007-02-22 |
BRPI0412466A (pt) | 2006-09-19 |
DE10353894A1 (de) | 2005-02-17 |
KR101152577B1 (ko) | 2012-06-01 |
DE10353894B4 (de) | 2007-02-15 |
ES2314429T3 (es) | 2009-03-16 |
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