NZ544886A - Microstructured high pressure nozzle with an in-built filter function - Google Patents
Microstructured high pressure nozzle with an in-built filter functionInfo
- Publication number
- NZ544886A NZ544886A NZ544886A NZ54488604A NZ544886A NZ 544886 A NZ544886 A NZ 544886A NZ 544886 A NZ544886 A NZ 544886A NZ 54488604 A NZ54488604 A NZ 54488604A NZ 544886 A NZ544886 A NZ 544886A
- Authority
- NZ
- New Zealand
- Prior art keywords
- projections
- nozzle according
- base plate
- channels
- microstructured nozzle
- Prior art date
Links
Classifications
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M11/00—Sprayers or atomisers specially adapted for therapeutic purposes
- A61M11/06—Sprayers or atomisers specially adapted for therapeutic purposes of the injector type
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M15/00—Inhalators
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M15/00—Inhalators
- A61M15/0065—Inhalators with dosage or measuring devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
- B05B15/40—Filters located upstream of the spraying outlets
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M2205/00—General characteristics of the apparatus
- A61M2205/02—General characteristics of the apparatus characterised by a particular materials
- A61M2205/0244—Micromachined materials, e.g. made from silicon wafers, microelectromechanical systems [MEMS] or comprising nanotechnology
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M2205/00—General characteristics of the apparatus
- A61M2205/75—General characteristics of the apparatus with filters
- A61M2205/7545—General characteristics of the apparatus with filters for solid matter, e.g. microaggregates
Landscapes
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Veterinary Medicine (AREA)
- Heart & Thoracic Surgery (AREA)
- Hematology (AREA)
- Biomedical Technology (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Anesthesiology (AREA)
- Bioinformatics & Cheminformatics (AREA)
- Pulmonology (AREA)
- Biophysics (AREA)
- Nozzles (AREA)
- Containers And Packaging Bodies Having A Special Means To Remove Contents (AREA)
- Filtration Of Liquid (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
- Filtering Materials (AREA)
- Ink Jet (AREA)
- Special Spraying Apparatus (AREA)
- Separating Particles In Gases By Inertia (AREA)
Abstract
Description
Claims (1)
- <div class="application article clearfix printTableText" id="claims"> <p lang="en"> WO 2005/000476<br><br> 18<br><br> PCT/EP2004/006768<br><br> 544886<br><br> Patent Claims<br><br> 1. Microstructured nozzle having a filter, an inlet for unfiltered fluid and an outlet for filtered fluid, the nozzle comprising:<br><br> a substantially flat base plate (1) and a cover plate which may be attached thereto;<br><br> a main filter constructed as the primary structure, with a plurality of projections (7) arranged side by side in rows (3), each comprising an integral component of the base plate (1) and projecting therefrom, the projections (7) being spaced from one another by channels (8) which form a path for fluid through the nozzle from the inlet to the outlet, while the cover plate, if it is attached to the base plate, covers the projections (7) and the channels (8); and a filtrate collecting chamber (50a) arranged behind the main filter in the direction of flow,<br><br> characterised in that in the filtrate collecting chamber (50a) is disposed a secondary structure (50) which comprises a plurality of built-in elements (51) acting on the base plate (1) and/or the cover plate.<br><br> 2. Microstructured nozzle according to claim 1, characterised in that the built-in elements (51) have a cylindrical circumferential wall.<br><br> 3. Microstructured nozzle according to claim 1 or 2, characterised in that the built-in elements (51) are at a spacing of from 0.005 mm to 0.02 mm from one another.<br><br> 4. Microstructured nozzle according to one of claims 1 to 3, characterised in that the built-in elements (51) have a diameter of from 0.005 mm to 0.02 mm, most preferably 0.01 mm.<br><br> WO 2005/000476 19 PCT/EP2004/006768<br><br> 544886<br><br> 5. Microstructured nozzle according to claim 1, characterised in that the built-in elements (51) have a concave circumferential wall.<br><br> 6. Microstructured nozzle according to claim 13 characterised in that the built-in elements (51) have a convex circumferential wall.<br><br> 7. Microstructured nozzle according to claim I, characterised in that the built-in elements extend in the manner of pillars from the base plate to the cover plate and are an integral part of the cover plate.<br><br> 8. Microstructured nozzle according to one of claims 1 to 7, characterised in that the projections (7) of the main filter are formed in a zigzag configuration starting from a central plane (52) with spikes (53) in the direction of the inlet and outlet.<br><br> 9. Microstructured nozzle according to one of claims 1 to 8, characterised in that the projections (7) are arranged side by side over the entire width of the filter.<br><br> 10. Microstructured nozzle according to claim 8 or 9, characterised in that the secondary structure (50) is formed as an integral part of the base plate on the side of the outlet of the zigzag configuration up to the central line (52).<br><br> 11. Microstructured nozzle according to claim 8 or 9, characterised in that the secondary structure (50) is formed on the side of the outlet of the zigzag configuration right into the points projecting in the direction of the inlet.<br><br> 12. Microstructured nozzle according to claim 8 or 9, characterised in that the secondary structure (50) is formed in front of and behind the zigzag configuration in the direction of flow.<br><br> 13. Microstructured nozzle according to one of claims 1 to 123 characterised by<br><br> - a spacing between the base plate in the area around the projections and the cover plate within a row (3) of projections (7), which is about the same size<br><br> WO 2005/000476 20 PCT/EP2004/006768<br><br> 544886<br><br> as the width of the channels (8) on the side of the projections (7) where the fluid enters the row of channels (8).<br><br> 14. Microstructured nozzle according to one of claims 1 to 13, characterised by<br><br> - a plurality of projections (7) arranged side by side in rows (3), which project from a base plate (1) and are an integral part of the base plate, wherein<br><br> - several rows (3) of projections are arranged in a cascade and<br><br> - the cross section of the channels (8) decreases from row to row perpendicularly to the direction of flow of the fluid, viewed in the direction of flow, and<br><br> - the projections (3) arranged closer to the inlet side of the filter are larger or are more numerous, so that the spacings between them are smaller than the projections (3) arranged more on the outlet side of the filter and<br><br> - the spacing between the base plate and the cover plate in the area around each row of projections (7) arranged in a cascade is about the same size as the width of the channels on the side of the projections (7) where the fluid enters the row of channels, and<br><br> - an oblong inlet slot (5) for the unfiltered fluid which extends over approximately the entire width of the filter and is about the same height as the projections protruding from the base plate (7) on the inlet side of the filter, and<br><br> - an oblong outlet slot for the filtered fluid which extends over approximately the entire width of the filter and is about the same height as the projections protruding from the base plate (7) on the outlet side of the filter.<br><br> 15. Microstructured nozzle according to claims 1 to 14, characterised by<br><br> WO 2005/000476<br><br> 21<br><br> PCT/EP2004/006768<br><br> 544886<br><br> - a flat base plate (1) and a flat cover plate.<br><br> 16. Microstructured nozzle according to claims 1 to 15, characterised in that all the structures of the filter are formed exclusively on the base plate (1).<br><br> 5<br><br> 17. Microstructured nozzle according to claims 1 to 16, characterised by<br><br> - a spacing between the flat base plate (1) in the area around the projections (7) and the flat cover plate within a row (3) of projections (7) between half 10 and twice the width of the channels on the side of the projections where the fluid enters the row of channels (8).<br><br> 18. Microstructured nozzle according to claims 1 to 17, characterised by<br><br> 15 - several rows of projections side by side, the facing sides of two adjacent rows of projections (7) defining a cohesive chamber into which the fluid from all the channels flows between the projections of a first row and out of which the fluid flows into all the channels between the projections of the next row in the direction of flow.<br><br> 19. Microstructured nozzle according to claims 1 to 18, characterised in that<br><br> - the collecting chamber (50a) has an oblong cross section between the inlet 25 slot (5) and the first row of projections (4) into which the unfiltered fluid is conveyed and out of which the fluid flows into all the channels between the projections of the first row, and in that<br><br> - the collecting chamber (50a) has an oblong cross section between the last 30 row of projections and the outlet slot into which the fluid from all the channels of the last row flows, and out of which the filtered fluid is discharged.<br><br> 20.<br><br> Microstructured nozzle according to claims 1 to 19, characterised by<br><br> WO 2005/000476<br><br> 22<br><br> PCT/EP2004/006768<br><br> 544886<br><br> - projections in the form of posts (11, 12, 13, 14, 15) which are straight or curved, viewed in the direction of flow, or<br><br> 5 - projections in the form of columns (16, 17, 18, 19).<br><br> 21. Microstructured nozzle according to claims 1 to 20, characterised by<br><br> - channels (8), the length of which is at least twice their height at the entry 10 side for the fluid, their cross section remaining constant.<br><br> 22. Microstructured nozzle according to claims 1 to 21, characterised by<br><br> - channels (8) extending between posts of approximately square cross<br><br> 15 section, which is constant over the length of the channel, with a length of 5<br><br> |xm to 50 jim, with a height of 2.5 jim to 25 ^m and a width of 2.5 to 25 jxm.<br><br> 23. Microstructured nozzle according to claims 1 to 22, characterised by<br><br> 20<br><br> - channels whose cross section is barrel-shaped or trapezoidal, the longer side of the trapezium preferably being formed by the cover plate.<br><br> Microstructured nozzle according to claims 1 to 23, characterised by<br><br> - channels (8) of approximately square cross section on the fluid inlet side and a cross section which becomes wider towards the fluid outlet side.<br><br> 25. Microstructured nozzle according to claims 1 to 24, characterised by<br><br> 30<br><br> - a spacing between the rows of projections which is preferably twice the size of the channel width on the inlet side.<br><br> 24.<br><br> 25<br><br> 26. Microstructured nozzle according to claims 1 to 25, characterised by<br><br> WO 2005/000476<br><br> 23<br><br> PCT/EP2004/006768<br><br> 544886<br><br> - projections which are arranged<br><br> - in rows (31) running parallel to one another or<br><br> - in rows (33) in a meandering pattern or<br><br> - in rows (34) in a zigzag pattern which are inclined towards one another at an angle a of 2 ° to 25 °.<br><br> 27. Microstructured nozzle according to claims 1 to 26, characterised by<br><br> - a constant spacing between the flat base plate (1) in the area around the projections (7) and the flat cover plate within a row (3) of projections.<br><br> 28. Microstructured nozzle according to claims 1 to 26, characterised by a spacing between the base plate (1) and cover plate which tapers in the direction of flow.<br><br> 29. Microstructured nozzle according to claims 1 to 28, characterised by<br><br> - a spacing between the flat base plate (1) in the area around the projections (7) and the flat cover plate within a row of projections arranged in a meandering pattern (33) or zigzag pattern (34), which increases from the region of the end of the row located close to the inlet side of the filter, towards the region of the end of the row located close to the outlet side of the filter.<br><br> 30. Microstructured nozzle according to claims 1 to 29, characterised by<br><br> - a base plate (1) which has been structured by isotropic or anisotropic wet or dry etching or a combination of these methods, preferably by anisotropic dry etching.<br><br> 31.<br><br> Microstructured nozzle according to claims 1 to 30, characterised by<br><br> * ><br><br> WO 2005/000476 24 PCT/EP2004/006768<br><br> 544886<br><br> - a base plate (1) made of silicon and a cover plate made of glass, attached by anodic bonding.<br><br> 32. Microstructured nozzle according to claims 1 to 31, characterised in that the 5 filtrate collecting chamber (50a) tapers conically in the direction of flow and has at least one nozzle (6) as the outlet.<br><br> 33. Microstructured nozzle according to claims 1 to 27, characterised by<br><br> 10 - a base plate (1) made of silicon and a cover plate made of silicon, attached by direct bonding.<br><br> 34. Microstructured nozzle according to claims 1 to 27, characterised in that the spacings between the built-in elements, each of which forms a throughflow<br><br> 15 channel for the liquid passing through, are such that the resulting cross sectional area perpendicular to the direction of flow which is effectively permeable to the liquid is greater than the corresponding effective cross sectional surface area of the throughflow channels formed by the structures of the main filter.<br><br> 20 35. Atomiser for inhalation therapy which comprises a microstructured filter according to one of the preceding claims 1 to 34.<br><br> 36. Process for producing a nozzle according to one of claims 1 to 34, wherein in one step microstructures in the form of the filter structures, secondary structures, 25 nozzle inlet and nozzle outlet are etched into one side of a silicon wafer for a large number of nozzles, in a subsequent step a glass plate is firmly attached to this side of the silicon wafer, in an independent step the silicon wafer is placed on an adhesive film and in a final step the individual nozzles are produced from the assembly comprising the silicon wafer and glass plate with the adhesive film on 30 the underside of the silicon wafer, starting from the glass plate side, using a diamond saw.<br><br> WO 2005/000476 25 PCT/EP2004/006768<br><br> 544886<br><br> AMENDED CLAIMS [filed at the International Bureau on 18 November 2004 (18.11.2004);<br><br> original claims 1-36 replaced by amended claims 1-37 (8 pages)<br><br> 5 Patent Claims<br><br> 1. Microstructured nozzle having a filter, an inlet for unfiltered fluid and an outlet for filtered fluid, the nozzle comprising:<br><br> 10 a substantially flat base plate (1) and a cover plate which may be attached thereto;<br><br> a main filter constructed as the primary structure, with a plurality of projections (7) arranged side by side in rows (3), as integral components of the base plate 15 (1) and projecting therefrom, the projections (7) being spaced from one another by channels (8) which form a path for fluid through the nozzle from the inlet to the outlet, while the cover plate, if it is attached to the base plate, covers the projections (7) and the channels (8); and<br><br> 20 a filtrate collecting chamber (50a) arranged behind the main filter in the direction of flow,<br><br> characterised in that<br><br> 25 in the filtrate collecting chamber (50a) is disposed a secondary structure (50)<br><br> which comprises a plurality of built-in elements (51) acting on the base plate (1) and/or the cover plate, having a diameter of 0.005 mm to 0.02 mm.<br><br> 2. Microstructured nozzle having a filter, an inlet for unfiltered fluid and an outlet 30 for filtered fluid, the nozzle comprising:<br><br> a substantially flat base plate (1) and a cover plate which may be attached thereto;<br><br> WO 2005/000476<br><br> 26<br><br> PCT/EP2004/006768<br><br> 544886<br><br> a main filter constructed as the primary structure, with a plurality of projections (7) arranged side by side in rows (3), as integral components of the base plate (1) and projecting therefrom and arranged in a zigzag configuration, the projections (7) being spaced from one another by channels (8) which form a 5 path for fluid through the nozzle from the inlet to the outlet, while the cover plate, if it is attached to the base plate, covers the projections (7) and the channels (8); and a filtrate collecting chamber (50a) arranged behind the main filter in the 10 direction of flow,<br><br> characterised in that in the filtrate collecting chamber (50a) is disposed a secondary structure (50) which comprises a plurality of built-in elements (51) acting on the base plate 15 (1) and/or the cover plate, which may be formed in front of and loosely behind the zigzag configuration in the direction of flow.<br><br> 3. Microstructured nozzle according to claim 2, characterised in that the built-in elements (51) have a diameter of from 0.005 mm to 0.02 mm.<br><br> 20<br><br> 4. Microstructured nozzle according to one of claims 1 to 3, characterised in that the built-in elements (51) have a cylindrical circumferential wall.<br><br> 5. Microstructured nozzle according to one of claims 1 to 4, characterised in that 25 the built-in elements (51) are at a spacing of 0.005 mm to 0.02 mm from one another.<br><br> 6. Microstructured nozzle according to one of claims 1 to 5, characterised in that the built-in elements (51) have a diameter of 0.01 mm.<br><br> 30<br><br> 7. Microstructured nozzle according to one of claims 1 to 6, characterised in that the built-in elements (51) have a concave circumferential wall.<br><br> WO 2005/000476<br><br> 27<br><br> PCT/EP2004/006768<br><br> 544886<br><br> 8. Microstructured nozzle according to one of claims 1 to 6, characterised in that the built-in elements (51) have a convex circumferential wall.<br><br> 9. Microstructured nozzle according to one of claims 1 to 8> characterised in that the built-in elements extend in the manner of pillars from the base plate to the cover plate and are an integral part of the cover plate.<br><br> 10. Microstructured nozzle according to one of claims 1 to 9, characterised in that the projections (7) are arranged side by side over the entire width of the filter.<br><br> 10<br><br> 11. Microstructured nozzle according to one of claims 2 to 10, characterised in that the secondary structure (50) is formed on the side of the outlet of the zigzag configuration up to the central line (52).<br><br> 15 12. Microstructured nozzle according to one of claims 2 to 10, characterised in that the secondary structure (50) is formed on the side of the outlet of the zigzag configuration right into the points projecting in the direction of the inlet.<br><br> 13. Microstructured nozzle according to one of claims 1 to 12, characterised by<br><br> 20<br><br> - a spacing between the base plate in the area around the projections and the cover plate within a row (3) of projections (7), which is about the same size as the width of the channels (8) on the side of the projections (7) where the fluid enters the row of channels (8).<br><br> 25<br><br> 14. Microstructured nozzle according to one of claims 1 to 13, characterised by<br><br> - a plurality of projections (7) arranged side by side in rows (3), which project from a base plate (1) and are an integral part of the base plate, wherein<br><br> 30<br><br> - several rows (3) of projections are arranged in a cascade and<br><br> PCT/EP2004/006768<br><br> 544886<br><br> - the cross section of the channels (8) decreases from row to row perpendicularly to the direction of flow of the fluid, viewed in the direction of flow, and<br><br> 5 - the projections (3) arranged closer to the inlet side of the filter are larger or are more numerous, so that the spacings between them are smaller than the projections (3) arranged more on the outlet side of the filter and<br><br> WO 2005/000476 28<br><br> - the spacing between the base plate and the cover plate in the area around 10 each row of projections (7) arranged in a cascade is about the same size as the width of the channels on the side of the projections (7) where the fluid enters the row of channels, and<br><br> - an oblong inlet slot (5) for the unfiltered fluid which extends over<br><br> 15 approximately the entire width of the filter and is about the same height as the projections (7) protruding from the base plate on the inlet side of the filter, and<br><br> - an oblong outlet slot for the filtered fluid which extends over approximately 20 the entire width of the filter and is about the same height as the projections<br><br> (7) protruding from the base plate on the outlet side of the filter.<br><br> 15. Microstructured nozzle according to claims 1 to 14, characterised by 25 - a flat base plate (1) and a flat cover plate.<br><br> 16. Microstructured nozzle according to claims 1 to 15, characterised in that all the structures of the filter are formed exclusively on the base plate (1).<br><br> 30 17. Microstructured nozzle according to claims 1 to 16, characterised by<br><br> - a spacing between the flat base plate (1) in the area around the projections (7) and the flat cover plate within a row (3) of projections (7) between half<br><br> WO 2005/000476 29 PCT/EP2004/006768<br><br> 544886<br><br> and twice the width of the channels on the side of the projections where the fluid enters the row of channels (8),<br><br> 18. Microstructured nozzle according to claims 1 to 17, characterised by<br><br> 5<br><br> - several rows of projections side by side, the facing sides of two adjacent rows of projections (7) defining a cohesive chamber into which the fluid from all the channels flows between the projections of a first row and out of which the fluid flows into all the channels between the projections of the 10 next row in the direction of flow.<br><br> 19. Microstructured nozzle according to claims 1 to 18, characterised in that<br><br> 15 - the collecting chamber (50a) has an oblong cross section between the inlet slot (5) and the first row of projections (4) into which the unfiltered fluid is conveyed and out of which the fluid flows into all the channels between the projections of the first row, and in that<br><br> 20 - the collecting chamber (50a) has an oblong cross section between the last row of projections and the outlet slot into which the fluid from all the channels of the last row flows, and out of which the filtered fluid is discharged.<br><br> 25 20. Microstructured nozzle according to claims 1 to 19, characterised by<br><br> - projections in the form of posts (11, 12, 13, 14, 15) which are straight or curved, viewed in the direction of flow, or<br><br> 30 - projections in the form of columns (16, 17, 18, 19).<br><br> 21.<br><br> Microstructured nozzle according to claims 1 to 20, characterised by<br><br> WO 2005/000476<br><br> 30<br><br> PCT/EP2004/006768<br><br> 544886<br><br> - channels (8), the length of which is at least twice their height at the entry side for the fluid, their cross section remaining constant.<br><br> 22. Microstructured nozzle according to claims 1 to 21, characterised by<br><br> - channels (8) extending between posts of approximately square cross section, which is constant over the length of the channel, with a length of 5 jim to 50 jim, with a height of 2.5 nm to 25 jim and a width of 2.5 to 25 jim.<br><br> 23. Microstructured nozzle according to claims 1 to 22, characterised by<br><br> - channels whose cross section is barrel-shaped or trapezoidal, the longer side of the trapezium preferably being formed by the cover plate.<br><br> 24. Microstructured nozzle according to claims 1 to 23, characterised by<br><br> - channels (8) of approximately square cross section on the fluid inlet side and a cross section which becomes wider towards the fluid outlet side.<br><br> 25. Microstructured nozzle according to claims 1 to 24, characterised by<br><br> - a spacing between the rows of projections which is preferably twice the size of the channel width on the inlet side.<br><br> 26. Microstructured nozzle according to claims 1 to 25, characterised by<br><br> - projections which are arranged<br><br> - in rows (31) running parallel to one another or<br><br> - in rows (33) in a meandering pattern which are inclined towards one another at an angle a of 2 ° to 25 °.<br><br> 27. Microstructured nozzle according to claims 2 to 25, characterised by projections which are inclined towards one another at an angle a of 2 0 to 25<br><br> WO 2005/000476<br><br> 31<br><br> PCT/EP2004/006768<br><br> 544886<br><br> 28. Microstructured nozzle according to claims 1 to 27, characterised by<br><br> 5 - a constant spacing between the flat base plate (1) in the area around the projections (7) and the flat cover plate within a row (3) of projections.<br><br> 29. Microstructured nozzle according to claims 1 to 27, characterised by a spacing between the base plate (1) and cover plate which tapers in the direction of<br><br> 10 flow.<br><br> 30. Microstructured nozzle according to claims 1 to 29, characterised by<br><br> - a spacing between the flat base plate (1) in the area around the projections 15 (7) and the flat cover plate within a row of projections, which increases from the region of the end of the row located close to the inlet side of the filter, towards the region of the end of the row located close to the outlet side of the filter.<br><br> 20 31. Microstructured nozzle according to claims 1 to 30, characterised by<br><br> - a base plate (1) which has been structured by isotropic or anisotropic wet or dry etching or a combination of these methods, preferably by anisotropic dry etching.<br><br> Microstructured nozzle according to claims 1 to 31, characterised by<br><br> - a base plate (1) made of silicon and a cover plate made of glass, attached by anodic bonding.<br><br> Microstructured nozzle according to claims 1 to 30, characterised in that the filtrate collecting chamber (50a) tapers conically in the direction of flow and has at least one nozzle (6) as the outlet.<br><br> 25<br><br> 32.<br><br> 30<br><br> 33.<br><br> WO 2005/000476<br><br> 32<br><br> PCT/EP2004/006768<br><br> 544886<br><br> 34. Microstructured nozzle according to claims 1 to 31, characterised by<br><br> - a base plate (1) made of silicon and a cover plate made of silicon, attached by direct bonding.<br><br> 35. Microstructured nozzle according to claims 1 to 34, characterised in that the spacings between the built-in elements, each of which forms a throughflow channel for the liquid passing through, are such that the resulting cross sectional area perpendicular to the direction of flow which is effectively permeable to the liquid is greater than the corresponding effective cross sectional surface area of the throughflow channels formed by the structures of the main filter.<br><br> 36. Atomiser for inhalation therapy which comprises a microstructured filter according to one of the preceding claims 1 to 35.<br><br> 37. Process for producing a nozzle according to one of claims 1 to 35, wherein in one step microstructures in the form of the filter structures, secondary structures, nozzle inlet and nozzle outlet are etched into one side of a silicon wafer for a large number of nozzles, in a subsequent step a glass plate is firmly attached to this side of the silicon wafer, in an independent step the silicon wafer is placed on an adhesive film and in a final step the individual nozzles are produced from the assembly comprising the silicon wafer and glass plate with the adhesive film on the underside of the silicon wafer, starting from the glass plate side, using a diamond saw.<br><br> </p> </div>
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10330370A DE10330370A1 (en) | 2003-06-30 | 2003-06-30 | Microstructured filter with anti-evaporation device |
EP03027927A EP1493492A1 (en) | 2003-06-30 | 2003-12-04 | Microstructured high-pressure nozzle with integrated filter function |
PCT/EP2004/006768 WO2005000476A1 (en) | 2003-06-30 | 2004-06-23 | Microstructured high pressure nozzle with an in-built filter function |
Publications (1)
Publication Number | Publication Date |
---|---|
NZ544886A true NZ544886A (en) | 2008-08-29 |
Family
ID=33426876
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NZ544886A NZ544886A (en) | 2003-06-30 | 2004-06-23 | Microstructured high pressure nozzle with an in-built filter function |
Country Status (24)
Country | Link |
---|---|
EP (1) | EP1493492A1 (en) |
JP (1) | JP4933252B2 (en) |
CN (1) | CN100496759C (en) |
AR (1) | AR044954A1 (en) |
AT (1) | ATE485891T1 (en) |
CO (1) | CO5700803A2 (en) |
CY (1) | CY1111564T1 (en) |
DE (2) | DE10330370A1 (en) |
DK (1) | DK1641569T3 (en) |
EA (1) | EA008027B1 (en) |
EC (1) | ECSP056234A (en) |
ES (1) | ES2355259T3 (en) |
HK (1) | HK1093175A1 (en) |
HR (1) | HRP20100698T1 (en) |
IL (1) | IL172461A0 (en) |
MY (1) | MY136755A (en) |
NZ (1) | NZ544886A (en) |
PE (1) | PE20050026A1 (en) |
PT (1) | PT1641569E (en) |
RS (1) | RS51295B (en) |
SI (1) | SI1641569T1 (en) |
TW (1) | TW200515940A (en) |
UA (1) | UA87460C2 (en) |
ZA (1) | ZA200509520B (en) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5900494B2 (en) * | 2010-07-16 | 2016-04-06 | ベーリンガー インゲルハイム インターナショナル ゲゼルシャフト ミット ベシュレンクテル ハフツング | Medical instrument filter system |
DE202015009408U1 (en) | 2015-05-27 | 2017-06-30 | Taren-Salt Ug | Spray can |
EP3097981A1 (en) | 2015-05-27 | 2016-11-30 | Taren-Salt UG | Spray head for a spray can, method for its preparation and atomisation method |
EP4035719A1 (en) | 2016-09-15 | 2022-08-03 | Softhale NV | Valve, in particular for a device for administering a liquid medicament, and a corresponding device for administering a liquid medicament |
EP3315207B1 (en) | 2016-10-25 | 2019-10-02 | WERRTA GmbH | Spray head and method for its production |
CN108057151B (en) * | 2016-11-06 | 2021-04-27 | 微邦科技股份有限公司 | High-pressure liquid transmission device |
DE202017002851U1 (en) | 2017-05-30 | 2017-06-27 | WERRTA GmbH i. G. | Nozzle body, in particular for spray cans of spray cans |
TWI761510B (en) * | 2018-05-04 | 2022-04-21 | 微邦科技股份有限公司 | Microstructured passage module and aerosolizer using the same |
EP3787801B1 (en) * | 2018-05-04 | 2023-07-12 | Microbase Technology Corp. | Microstructured nozzle |
EP3856423A1 (en) * | 2018-09-28 | 2021-08-04 | Ttp Plc | Micro-nozzle having an integrated filter |
DE202019000718U1 (en) | 2019-02-14 | 2019-02-26 | WERRTA GmbH Düsen- und Zerstäubungstechnik | inhaler |
CZ34539U1 (en) | 2020-09-24 | 2020-11-16 | SKALA-Medica s.r.o. | Minimally invasive surgical nozzle, especially for invasive surgery |
CN217489461U (en) * | 2021-05-26 | 2022-09-27 | 杭州堃博生物科技有限公司 | Nebulizing catheter and administration device |
DE102022104802A1 (en) | 2022-03-01 | 2023-09-07 | WERRTA GmbH Düsen- und Zerstäubungstechnik | METHOD OF MAKING A NOZZLE BODY AND NOZZLE BODY MADE WITH THE METHOD |
CN117298391B (en) * | 2023-10-26 | 2024-04-30 | 苏州新劢德医疗器械科技有限公司 | Nozzle structure, manufacturing method thereof and atomizer |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6007676A (en) * | 1992-09-29 | 1999-12-28 | Boehringer Ingelheim International Gmbh | Atomizing nozzle and filter and spray generating device |
AU1723997A (en) * | 1996-02-09 | 1997-08-28 | Westonbridge International Limited | Micromachined filter for a micropump |
DE19742439C1 (en) * | 1997-09-26 | 1998-10-22 | Boehringer Ingelheim Int | Fluid micro-filter |
-
2003
- 2003-06-30 DE DE10330370A patent/DE10330370A1/en not_active Ceased
- 2003-12-04 EP EP03027927A patent/EP1493492A1/en not_active Withdrawn
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2004
- 2004-06-23 JP JP2006516032A patent/JP4933252B2/en active Active
- 2004-06-23 ES ES04737131T patent/ES2355259T3/en active Active
- 2004-06-23 EA EA200501904A patent/EA008027B1/en unknown
- 2004-06-23 DK DK04737131.5T patent/DK1641569T3/en active
- 2004-06-23 SI SI200431592T patent/SI1641569T1/en unknown
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- 2004-06-29 TW TW093119062A patent/TW200515940A/en unknown
- 2004-06-30 AR ARP040102288A patent/AR044954A1/en active Pending
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- 2005-12-08 IL IL172461A patent/IL172461A0/en unknown
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- 2005-12-29 CO CO05131443A patent/CO5700803A2/en not_active Application Discontinuation
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2006
- 2006-12-19 HK HK06113969.4A patent/HK1093175A1/en not_active IP Right Cessation
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Also Published As
Publication number | Publication date |
---|---|
ZA200509520B (en) | 2006-10-25 |
HRP20100698T1 (en) | 2011-01-31 |
PE20050026A1 (en) | 2005-03-22 |
DE10330370A1 (en) | 2005-01-20 |
JP4933252B2 (en) | 2012-05-16 |
HK1093175A1 (en) | 2007-02-23 |
PT1641569E (en) | 2010-12-09 |
MY136755A (en) | 2008-11-28 |
IL172461A0 (en) | 2006-04-10 |
CY1111564T1 (en) | 2015-10-07 |
DK1641569T3 (en) | 2011-01-31 |
RS51295B (en) | 2010-12-31 |
UA87460C2 (en) | 2009-07-27 |
CO5700803A2 (en) | 2006-11-30 |
EA008027B1 (en) | 2007-02-27 |
EP1493492A1 (en) | 2005-01-05 |
AR044954A1 (en) | 2005-10-12 |
JP2008529754A (en) | 2008-08-07 |
RS20050965A (en) | 2007-11-15 |
DE502004011825D1 (en) | 2010-12-09 |
ECSP056234A (en) | 2006-10-10 |
TW200515940A (en) | 2005-05-16 |
CN100496759C (en) | 2009-06-10 |
ES2355259T3 (en) | 2011-03-24 |
ATE485891T1 (en) | 2010-11-15 |
SI1641569T1 (en) | 2011-03-31 |
EA200501904A1 (en) | 2006-08-25 |
CN1809424A (en) | 2006-07-26 |
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