NO982426L - FremgangsmÕte for initiering av oscillatorer for kapasitiv mÕling av kraft, akselerasjon og/eller rotasjonshastighet - Google Patents

FremgangsmÕte for initiering av oscillatorer for kapasitiv mÕling av kraft, akselerasjon og/eller rotasjonshastighet

Info

Publication number
NO982426L
NO982426L NO982426A NO982426A NO982426L NO 982426 L NO982426 L NO 982426L NO 982426 A NO982426 A NO 982426A NO 982426 A NO982426 A NO 982426A NO 982426 L NO982426 L NO 982426L
Authority
NO
Norway
Prior art keywords
oscillators
force
frequency
voltages
acceleration
Prior art date
Application number
NO982426A
Other languages
English (en)
Other versions
NO982426D0 (no
Inventor
Bruno Ryrko
Guenter Spahlinger
Walter Gutman
Original Assignee
Litef Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Litef Gmbh filed Critical Litef Gmbh
Publication of NO982426D0 publication Critical patent/NO982426D0/no
Publication of NO982426L publication Critical patent/NO982426L/no

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0207—Driving circuits
    • B06B1/0215—Driving circuits for generating pulses, e.g. bursts of oscillations, envelopes
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D19/00—Control of mechanical oscillations, e.g. of amplitude, of frequency, of phase
    • G05D19/02—Control of mechanical oscillations, e.g. of amplitude, of frequency, of phase characterised by the use of electric means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
    • B06B2201/40—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups with testing, calibrating, safety devices, built-in protection, construction details
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
    • B06B2201/50—Application to a particular transducer type
    • B06B2201/52—Electrodynamic transducer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
    • B06B2201/70—Specific application

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Mechanical Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Gyroscopes (AREA)

Abstract

I en fremgangsmåte for kapasitiv driftsinitiering av oscillatorer i sensorer for kapasitiv måling av kraft, akselerasjon og særlig rotasjonshastigheter, ifølge coriolisprinsippet anvendes det for driftsinitiering likespenningsfrie og amplitudekonstante høyfrekvens-pulspakke som reguleres i bredde eller fasestilling for opprett- holdelse av konstant oscillatorhastighet med henblikk på tilbakestilling eller toleransekorrigering. Ved bruk av fremgangsmåten i en annen versjon kan det ved elektrode- oscillatorer som er anordnet parvis og symmetrisk om rotasjonsaksen, opprettes høyfrekvens-spenninger som er identiske og amplitudekonstante. Frekvensen som velges for disse spenninger ligger markert over oscillatorfrekvensen, hvorved oscillatoren påvirkes av en viss attraksjonskraft ved innbyrdes faseforskyning i driftsspenningene. Hvis det er anordnet rotasjonshastighetssensorer som fungerer etter "closed-loop"-prinsippet kan det også sikres tilbake- stilling til utgangsstillingen. Oppfinnelsen gjør det også mulig å avhjelpe problemer i tilknytning til initierings- signalets avledning til utvelgerkanalen i et mikromekanisk oscillatorsystem.
NO982426A 1996-09-04 1998-05-28 FremgangsmÕte for initiering av oscillatorer for kapasitiv mÕling av kraft, akselerasjon og/eller rotasjonshastighet NO982426L (no)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19635923A DE19635923C1 (de) 1996-09-04 1996-09-04 Verfahren zur Antriebsanregung von Schwingern zur kapazitiven Messung von Kraft, Beschleunigung und/oder Drehraten
PCT/EP1997/003257 WO1998010258A1 (de) 1996-09-04 1997-06-20 Verfahren zur antriebsanregung von schwingern zur kapazitiven messung von kraft, beschleunigung und/oder drehraten

Publications (2)

Publication Number Publication Date
NO982426D0 NO982426D0 (no) 1998-05-28
NO982426L true NO982426L (no) 1999-02-26

Family

ID=7804630

Family Applications (1)

Application Number Title Priority Date Filing Date
NO982426A NO982426L (no) 1996-09-04 1998-05-28 FremgangsmÕte for initiering av oscillatorer for kapasitiv mÕling av kraft, akselerasjon og/eller rotasjonshastighet

Country Status (7)

Country Link
US (1) US6374671B1 (no)
EP (1) EP0923715B1 (no)
JP (1) JP3034311B2 (no)
CA (1) CA2238615A1 (no)
DE (2) DE19635923C1 (no)
NO (1) NO982426L (no)
WO (1) WO1998010258A1 (no)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19828424C1 (de) * 1998-06-25 1999-12-02 Litef Gmbh Mikromechanischer Drehratensensor
US6718823B2 (en) * 2002-04-30 2004-04-13 Honeywell International Inc. Pulse width modulation drive signal for a MEMS gyroscope
DE10320675B4 (de) 2003-05-08 2006-03-16 Litef Gmbh Betriebsverfahren für einen Corioliskreisel und dafür geeignete Auswerte-/Regelelektronik
JP4375098B2 (ja) * 2004-04-23 2009-12-02 パナソニック電工株式会社 角速度センサ
JP4345562B2 (ja) * 2004-04-23 2009-10-14 パナソニック電工株式会社 角速度センサ
DE102004056699A1 (de) * 2004-11-24 2006-06-01 Litef Gmbh Verfahren zur Steuerung/Regelung einer physikalischen Größe eines dynamischen Systems, insbesondere eines mikromechanischen Sensors
DE102005034698A1 (de) * 2005-07-26 2007-02-01 Robert Bosch Gmbh Verfahren und Schaltungsanordnung zum Antrieb und zur gleichzeitigen Geschwindigkeitsmessung eines Drehratensensors
JP6225526B2 (ja) * 2013-07-17 2017-11-08 株式会社デンソー 加振装置
DE102020206003A1 (de) * 2020-05-13 2021-11-18 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren zum Betreiben eines mikroelektromechanischen Gyroskops, Gyroskop

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4452092A (en) * 1981-03-27 1984-06-05 Sperry Corporation Torque feedback control for two degree of freedom rate sensor
US4578650A (en) * 1983-06-15 1986-03-25 Watson Industries, Inc. Resonance drive oscillator circuit
US4791815A (en) * 1986-04-11 1988-12-20 Matsushita Electric Industrial Co., Ltd. Cyclically driven gyro and adjusting system therefor
DE59304431D1 (de) 1993-05-05 1996-12-12 Litef Gmbh Mikromechanische Beschleunigungsmessvorrichtung und Verfahren zu deren Herstellung
US5481914A (en) * 1994-03-28 1996-01-09 The Charles Stark Draper Laboratory, Inc. Electronics for coriolis force and other sensors
DE4430439C2 (de) 1994-08-29 1997-12-11 Litef Gmbh Sensoreinheit mit mindestens einem Drehratensensor und Verfahren zu seiner Herstellung
JP3061864B2 (ja) * 1995-05-31 2000-07-10 リテフ ゲゼルシャフト ミット ベシュレンクテル ハフツング マイクロメカニカル回転速度センサ
US5859368A (en) * 1996-04-15 1999-01-12 Cargille; Donald R. Tunneling-based rotation rate sensor

Also Published As

Publication number Publication date
DE59706512D1 (de) 2002-04-04
JPH11513127A (ja) 1999-11-09
NO982426D0 (no) 1998-05-28
CA2238615A1 (en) 1998-03-12
EP0923715A1 (de) 1999-06-23
WO1998010258A1 (de) 1998-03-12
DE19635923C1 (de) 1998-02-26
EP0923715B1 (de) 2002-02-27
JP3034311B2 (ja) 2000-04-17
US6374671B1 (en) 2002-04-23

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