NO343314B1 - Optisk trykksensor - Google Patents
Optisk trykksensorInfo
- Publication number
- NO343314B1 NO343314B1 NO20151618A NO20151618A NO343314B1 NO 343314 B1 NO343314 B1 NO 343314B1 NO 20151618 A NO20151618 A NO 20151618A NO 20151618 A NO20151618 A NO 20151618A NO 343314 B1 NO343314 B1 NO 343314B1
- Authority
- NO
- Norway
- Prior art keywords
- membranes
- pressure sensor
- diaphragms
- partially
- diaphragm
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 title abstract 2
- 239000012528 membrane Substances 0.000 abstract 5
- 238000006073 displacement reaction Methods 0.000 abstract 1
- 238000010008 shearing Methods 0.000 abstract 1
- 125000006850 spacer group Chemical group 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
- G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
- G01L11/04—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by acoustic means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
- G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
- G01L9/0079—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light with Fabry-Perot arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
- G01N2021/1704—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in gases
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Acoustics & Sound (AREA)
- Health & Medical Sciences (AREA)
- Micromachines (AREA)
- Measuring Fluid Pressure (AREA)
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Abstract
Oppfinnelsen omhandler en optisk trykksensor, for eksempel en mikrofon, som består av to membraner, men hvor lyden ikke treffer normalt på membranen, men kommer inn fra siden.Membranen kan være parallelle som i en Fabry-Perot, eller svakt uparallelle som i et Air-wedge shearing interferometer. Trykksensoren benytter interferometrisk utlesning, og er bestående av to membraner med essensielt like mekaniske egenskaper, hvorav minst en av membranene er både delvis transmitterende og delvis reflekterende, og hvor den andre membranen er minst delvis reflekterende, membranene er separert av et hulrom definert av et avstandsstykke, der avstanden mellom membranene er variabel for derved å tilveiebringe en forskyvningsfølsom Fabry-Perot resonator, og hvor de to membranene har et felles bakvolum, og hvor det felles bakvolumet er tett eller delvis tett på de frekvensene hvor en ønsker å måle, og hvor en trykk-økning medfører at avstanden mellom membranene endres med motsatt retning.
Priority Applications (10)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NO20151618A NO343314B1 (no) | 2015-11-29 | 2015-11-29 | Optisk trykksensor |
BR112018010157-5A BR112018010157B1 (pt) | 2015-11-29 | 2016-11-29 | Sensor óptico de pressão, unidade de sensor de pressão, sensor de gás e uso do sensor de pressão |
JP2018546759A JP6783869B2 (ja) | 2015-11-29 | 2016-11-29 | 光学圧力センサ |
CA3004523A CA3004523A1 (en) | 2015-11-29 | 2016-11-29 | Optical pressure sensor |
EA201890993A EA034405B1 (ru) | 2015-11-29 | 2016-11-29 | Оптический датчик давления |
US15/773,491 US10739220B2 (en) | 2015-11-29 | 2016-11-29 | Optical pressure sensor |
PCT/EP2016/079145 WO2017089624A1 (en) | 2015-11-29 | 2016-11-29 | Optical pressure sensor |
EP16801821.6A EP3380822B1 (en) | 2015-11-29 | 2016-11-29 | Optical pressure sensor |
DK16801821.6T DK3380822T3 (da) | 2015-11-29 | 2016-11-29 | Optisk tryksensor |
CN201680069885.8A CN108291849B (zh) | 2015-11-29 | 2016-11-29 | 光学压力传感器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NO20151618A NO343314B1 (no) | 2015-11-29 | 2015-11-29 | Optisk trykksensor |
Publications (2)
Publication Number | Publication Date |
---|---|
NO20151618A1 NO20151618A1 (no) | 2017-05-30 |
NO343314B1 true NO343314B1 (no) | 2019-01-28 |
Family
ID=57406270
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NO20151618A NO343314B1 (no) | 2015-11-29 | 2015-11-29 | Optisk trykksensor |
Country Status (10)
Country | Link |
---|---|
US (1) | US10739220B2 (no) |
EP (1) | EP3380822B1 (no) |
JP (1) | JP6783869B2 (no) |
CN (1) | CN108291849B (no) |
BR (1) | BR112018010157B1 (no) |
CA (1) | CA3004523A1 (no) |
DK (1) | DK3380822T3 (no) |
EA (1) | EA034405B1 (no) |
NO (1) | NO343314B1 (no) |
WO (1) | WO2017089624A1 (no) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102519055B1 (ko) * | 2015-11-03 | 2023-04-07 | 삼성전자주식회사 | 탄산수 제조 장치, 이를 포함하는 냉장고 및 그 제어 방법 |
NO20161086A1 (no) | 2016-06-29 | 2018-01-01 | Tunable As | Modulerbar Fabry-Perot |
GB2565376B (en) * | 2017-08-11 | 2020-03-25 | Cirrus Logic Int Semiconductor Ltd | MEMS devices and processes |
KR101985896B1 (ko) * | 2017-10-18 | 2019-06-04 | 국방과학연구소 | 광 신호 처리 장치, 그 방법 및 기록매체에 저장된 컴퓨터 프로그램. |
CN109870449B (zh) * | 2019-02-25 | 2021-11-26 | 京东方科技集团股份有限公司 | 一种气体监控装置、***和方法,以及橱柜 |
EP3982108A1 (en) * | 2019-06-19 | 2022-04-13 | Infineon Technologies AG | Mems pressure sensor |
CN110441242A (zh) * | 2019-08-14 | 2019-11-12 | 郑州大学 | 基于金刚石微悬臂梁的气体检测***和方法 |
CN112087698B (zh) * | 2020-10-15 | 2021-07-23 | 潍坊歌尔微电子有限公司 | Mems麦克风 |
CN112576636B (zh) * | 2020-11-18 | 2021-11-19 | 潍柴动力股份有限公司 | 弹性联轴器及具有其的发动机 |
US11666313B1 (en) * | 2020-12-04 | 2023-06-06 | Fonar Corporation | Calibration technique, apparatus and system for pulsed phase-lock loop ultrasound intracranial pressure measurement systems |
CN112630298B (zh) * | 2020-12-15 | 2023-05-09 | 合肥科博慧科技管理有限责任公司 | 一种基于声表面波的土壤VOCs检测装置 |
NO20221394A1 (en) | 2022-12-22 | 2024-06-24 | Tunable As | Improved noise canceling detector |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4023154A1 (de) * | 1990-07-20 | 1992-01-30 | Karl F Prof Dr Renk | Fabry-perot-resonator |
US6344647B1 (en) * | 1997-09-19 | 2002-02-05 | Commissariat A L' Energie Atomique | Miniaturized photoacoustic spectrometer |
CN204807443U (zh) * | 2015-06-24 | 2015-11-25 | 中国计量学院 | 一种基于光纤光栅微腔的fpi氢气传感器 |
Family Cites Families (23)
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US2043416A (en) | 1933-01-27 | 1936-06-09 | Lueg Paul | Process of silencing sound oscillations |
DK247786D0 (da) | 1986-05-27 | 1986-05-27 | Brueel & Kjaer As | Fotoakustisk gasanalysator |
EP0460357A3 (en) * | 1990-06-08 | 1992-07-29 | Landis & Gyr Betriebs Ag | Device for optical measurement of pressure differences |
CH680534A5 (en) * | 1991-09-16 | 1992-09-15 | Landis & Gyr Betriebs Ag | Fabry=perot sensor for optical parameter measurement - uses two opposing mirrors respectively attached to deflected measuring membrane and transparent plate |
CH689925A5 (de) | 1995-02-23 | 2000-01-31 | Aritron Instr Ag | Verfahren und Vorrichtung zur photoakustischen Detektion von Gasen und Dämpfen |
US5832157A (en) | 1996-07-12 | 1998-11-03 | Mcdermott Technology, Inc. | Fiber optic acoustic emission sensor |
NO315397B1 (no) | 2001-11-13 | 2003-08-25 | Sinvent As | Optisk forskyvnings-sensor |
NO315177B1 (no) | 2001-11-29 | 2003-07-21 | Sinvent As | Optisk forskyvnings-sensor |
US7116430B2 (en) | 2002-03-29 | 2006-10-03 | Georgia Technology Research Corporation | Highly-sensitive displacement-measuring optical device |
FI116859B (fi) * | 2002-09-30 | 2006-03-15 | Noveltech Solutions Ltd | Fotoakustinen detektori |
US7359067B2 (en) * | 2006-04-07 | 2008-04-15 | Symphony Acoustics, Inc. | Optical displacement sensor comprising a wavelength-tunable optical source |
WO2007136779A2 (en) * | 2006-05-19 | 2007-11-29 | New Jersey Institute Of Technology | Aligned embossed diaphgragm based fiber optic sensor |
US7554666B2 (en) * | 2006-05-25 | 2009-06-30 | Ric Investments, Llc. | Sensor with optical pressure transducer and method of manufacturing a sensor component |
CA2730004C (en) * | 2008-07-10 | 2014-12-16 | Northrop Grumman Guidance And Electronics Company, Inc. | Fiber optic acoustic sensor array |
US8689607B2 (en) | 2011-05-04 | 2014-04-08 | Honeywell International Inc. | Apparatus and method of photoacoustic sensor signal acquisition |
EP2525194A1 (en) * | 2011-05-16 | 2012-11-21 | Knowles Electronics Asia PTE. Ltd. | Optical sensor |
JP6260076B2 (ja) * | 2012-09-19 | 2018-01-17 | セイコーエプソン株式会社 | 分光装置 |
NO20130884A1 (no) | 2013-06-21 | 2014-12-22 | Sinvent As | Sensorelement med optisk forskyvning |
CN103528735B (zh) * | 2013-10-31 | 2015-11-18 | 南京信息工程大学 | 一种微型光纤法布里-珀罗压力传感器及其制作方法 |
CN204101218U (zh) * | 2014-09-15 | 2015-01-14 | 江苏昂德光电科技有限公司 | 一种f-p腔光纤压力传感装置 |
CN204788749U (zh) * | 2015-07-10 | 2015-11-18 | 成都凯天电子股份有限公司 | 带有复合介质薄膜的f-p压力传感器 |
US9933546B2 (en) * | 2015-09-24 | 2018-04-03 | Baker Hughes, A Ge Company, Llc | Displacement measurements using a multi-cavity sensor |
NO344002B1 (en) * | 2015-09-29 | 2019-08-12 | Sintef Tto As | Optical gas detector |
-
2015
- 2015-11-29 NO NO20151618A patent/NO343314B1/no unknown
-
2016
- 2016-11-29 DK DK16801821.6T patent/DK3380822T3/da active
- 2016-11-29 EP EP16801821.6A patent/EP3380822B1/en active Active
- 2016-11-29 CA CA3004523A patent/CA3004523A1/en active Pending
- 2016-11-29 WO PCT/EP2016/079145 patent/WO2017089624A1/en active Application Filing
- 2016-11-29 EA EA201890993A patent/EA034405B1/ru not_active IP Right Cessation
- 2016-11-29 JP JP2018546759A patent/JP6783869B2/ja active Active
- 2016-11-29 BR BR112018010157-5A patent/BR112018010157B1/pt active IP Right Grant
- 2016-11-29 US US15/773,491 patent/US10739220B2/en active Active
- 2016-11-29 CN CN201680069885.8A patent/CN108291849B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4023154A1 (de) * | 1990-07-20 | 1992-01-30 | Karl F Prof Dr Renk | Fabry-perot-resonator |
US6344647B1 (en) * | 1997-09-19 | 2002-02-05 | Commissariat A L' Energie Atomique | Miniaturized photoacoustic spectrometer |
CN204807443U (zh) * | 2015-06-24 | 2015-11-25 | 中国计量学院 | 一种基于光纤光栅微腔的fpi氢气传感器 |
Also Published As
Publication number | Publication date |
---|---|
EP3380822B1 (en) | 2019-08-14 |
US20180321103A1 (en) | 2018-11-08 |
CN108291849A (zh) | 2018-07-17 |
NO20151618A1 (no) | 2017-05-30 |
CA3004523A1 (en) | 2017-06-01 |
EA034405B1 (ru) | 2020-02-05 |
WO2017089624A1 (en) | 2017-06-01 |
BR112018010157B1 (pt) | 2023-05-09 |
JP2019500625A (ja) | 2019-01-10 |
BR112018010157A2 (pt) | 2018-11-21 |
JP6783869B2 (ja) | 2020-11-11 |
EP3380822A1 (en) | 2018-10-03 |
EA201890993A1 (ru) | 2018-11-30 |
US10739220B2 (en) | 2020-08-11 |
CN108291849B (zh) | 2020-05-22 |
DK3380822T3 (da) | 2019-10-14 |
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Legal Events
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CHAD | Change of the owner's name or address (par. 44 patent law, par. patentforskriften) |
Owner name: TUNABLE INFRARED TECHNOLOGIES AS, NO |
|
CHAD | Change of the owner's name or address (par. 44 patent law, par. patentforskriften) |
Owner name: TUNABLE AS, NO |
|
CHAD | Change of the owner's name or address (par. 44 patent law, par. patentforskriften) |
Owner name: TUNABLE AS, NO |