NO20024248D0 - Method and equipment for accelerating flowing plasma gas combinations - Google Patents
Method and equipment for accelerating flowing plasma gas combinationsInfo
- Publication number
- NO20024248D0 NO20024248D0 NO20024248A NO20024248A NO20024248D0 NO 20024248 D0 NO20024248 D0 NO 20024248D0 NO 20024248 A NO20024248 A NO 20024248A NO 20024248 A NO20024248 A NO 20024248A NO 20024248 D0 NO20024248 D0 NO 20024248D0
- Authority
- NO
- Norway
- Prior art keywords
- equipment
- plasma gas
- gas combinations
- flowing plasma
- accelerating flowing
- Prior art date
Links
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NO20024248A NO20024248D0 (en) | 2002-09-05 | 2002-09-05 | Method and equipment for accelerating flowing plasma gas combinations |
AU2003262591A AU2003262591A1 (en) | 2002-09-05 | 2003-09-05 | Method and equipment for generating a gas plasma ball |
PCT/FI2003/000654 WO2004023853A1 (en) | 2002-09-05 | 2003-09-05 | Method and equipment for generating a gas plasma ball |
EP03793840A EP1576863A1 (en) | 2002-09-05 | 2003-09-05 | Method and equipment for generating a gas plasma ball |
CA002537935A CA2537935A1 (en) | 2002-09-05 | 2003-09-05 | Method and equipment for generating a gas plasma ball |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NO20024248A NO20024248D0 (en) | 2002-09-05 | 2002-09-05 | Method and equipment for accelerating flowing plasma gas combinations |
Publications (1)
Publication Number | Publication Date |
---|---|
NO20024248D0 true NO20024248D0 (en) | 2002-09-05 |
Family
ID=19913972
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NO20024248A NO20024248D0 (en) | 2002-09-05 | 2002-09-05 | Method and equipment for accelerating flowing plasma gas combinations |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP1576863A1 (en) |
AU (1) | AU2003262591A1 (en) |
CA (1) | CA2537935A1 (en) |
NO (1) | NO20024248D0 (en) |
WO (1) | WO2004023853A1 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100428365C (en) * | 2005-09-29 | 2008-10-22 | 核工业西南物理研究院 | Ultrasonic gas or cluter injector |
KR20100072316A (en) * | 2007-10-19 | 2010-06-30 | 엠케이에스 인스트루먼츠, 인코포레이티드 | Toroidal plasma chamber for high gas flow rate process |
CN112335342B (en) | 2018-06-14 | 2023-07-14 | Mks仪器公司 | Radical output monitor for remote plasma source and method of use |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3356892A (en) * | 1963-01-10 | 1967-12-05 | Edgar A Bunt | Arc plasma generator starting method utilizing a displaceable valve communicating with atmosphere |
EP0586370B1 (en) * | 1991-05-28 | 1997-04-02 | KONKOLA, Seppo Taneli | A method for generating and exploiting a plasma ball or a similar phenomenon in a chamber and the chamber |
US5444208A (en) * | 1993-03-29 | 1995-08-22 | Fmc Corporation | Multiple source plasma generation and injection device |
-
2002
- 2002-09-05 NO NO20024248A patent/NO20024248D0/en unknown
-
2003
- 2003-09-05 CA CA002537935A patent/CA2537935A1/en not_active Abandoned
- 2003-09-05 EP EP03793840A patent/EP1576863A1/en not_active Withdrawn
- 2003-09-05 WO PCT/FI2003/000654 patent/WO2004023853A1/en not_active Application Discontinuation
- 2003-09-05 AU AU2003262591A patent/AU2003262591A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
AU2003262591A1 (en) | 2004-03-29 |
WO2004023853A1 (en) | 2004-03-18 |
CA2537935A1 (en) | 2004-03-18 |
EP1576863A1 (en) | 2005-09-21 |
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NO20024248D0 (en) | Method and equipment for accelerating flowing plasma gas combinations |