NL8302860A - Piezo-elektrische micropomp. - Google Patents

Piezo-elektrische micropomp. Download PDF

Info

Publication number
NL8302860A
NL8302860A NL8302860A NL8302860A NL8302860A NL 8302860 A NL8302860 A NL 8302860A NL 8302860 A NL8302860 A NL 8302860A NL 8302860 A NL8302860 A NL 8302860A NL 8302860 A NL8302860 A NL 8302860A
Authority
NL
Netherlands
Prior art keywords
channel
micropump according
displacer
micropump
valves
Prior art date
Application number
NL8302860A
Other languages
English (en)
Dutch (nl)
Original Assignee
Stichting Ct Voor Micro Elektr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Stichting Ct Voor Micro Elektr filed Critical Stichting Ct Voor Micro Elektr
Priority to NL8302860A priority Critical patent/NL8302860A/nl
Priority to EP84201185A priority patent/EP0134614A1/de
Publication of NL8302860A publication Critical patent/NL8302860A/nl

Links

Classifications

    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61MDEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M5/00Devices for bringing media into the body in a subcutaneous, intra-vascular or intramuscular way; Accessories therefor, e.g. filling or cleaning devices, arm-rests
    • A61M5/14Infusion devices, e.g. infusing by gravity; Blood infusion; Accessories therefor
    • A61M5/142Pressure infusion, e.g. using pumps
    • A61M5/14244Pressure infusion, e.g. using pumps adapted to be carried by the patient, e.g. portable on the body
    • A61M5/14276Pressure infusion, e.g. using pumps adapted to be carried by the patient, e.g. portable on the body specially adapted for implantation
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00Machines, pumps, or pumping installations having flexible working members
    • F04B43/0009Special features
    • F04B43/0027Special features without valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00Machines, pumps, or pumping installations having flexible working members
    • F04B43/02Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04Pumps having electric drive
    • F04B43/043Micropumps
    • F04B43/046Micropumps with piezoelectric drive
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00Machines, pumps, or pumping installations having flexible working members
    • F04B43/12Machines, pumps, or pumping installations having flexible working members having peristaltic action
    • F04B43/14Machines, pumps, or pumping installations having flexible working members having peristaltic action having plate-like flexible members
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F11/00Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it
    • G01F11/10Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it with measuring chambers moved during operation
    • G01F11/12Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it with measuring chambers moved during operation of the valve type, i.e. the separating being effected by fluid-tight or powder-tight movements
    • G01F11/125Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it with measuring chambers moved during operation of the valve type, i.e. the separating being effected by fluid-tight or powder-tight movements of the peristaltic pump type
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/20Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047Membrane type
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61MDEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M2205/00General characteristics of the apparatus
    • A61M2205/02General characteristics of the apparatus characterised by a particular materials
    • A61M2205/0244Micromachined materials, e.g. made from silicon wafers, microelectromechanical systems [MEMS] or comprising nanotechnology
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61MDEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M2205/00General characteristics of the apparatus
    • A61M2205/02General characteristics of the apparatus characterised by a particular materials
    • A61M2205/0272Electro-active or magneto-active materials
    • A61M2205/0294Piezoelectric materials
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61MDEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M5/00Devices for bringing media into the body in a subcutaneous, intra-vascular or intramuscular way; Accessories therefor, e.g. filling or cleaning devices, arm-rests
    • A61M5/14Infusion devices, e.g. infusing by gravity; Blood infusion; Accessories therefor
    • A61M5/142Pressure infusion, e.g. using pumps
    • A61M5/14212Pumping with an aspiration and an expulsion action
    • A61M5/14224Diaphragm type
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61MDEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M5/00Devices for bringing media into the body in a subcutaneous, intra-vascular or intramuscular way; Accessories therefor, e.g. filling or cleaning devices, arm-rests
    • A61M5/14Infusion devices, e.g. infusing by gravity; Blood infusion; Accessories therefor
    • A61M5/168Means for controlling media flow to the body or for metering media to the body, e.g. drip meters, counters ; Monitoring media flow to the body
    • A61M5/16877Adjusting flow; Devices for setting a flow rate
    • A61M5/16881Regulating valves

Landscapes

  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Biomedical Technology (AREA)
  • Veterinary Medicine (AREA)
  • Hematology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Anesthesiology (AREA)
  • Vascular Medicine (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Reciprocating Pumps (AREA)
NL8302860A 1983-08-15 1983-08-15 Piezo-elektrische micropomp. NL8302860A (nl)

Priority Applications (2)

Application Number Priority Date Filing Date Title
NL8302860A NL8302860A (nl) 1983-08-15 1983-08-15 Piezo-elektrische micropomp.
EP84201185A EP0134614A1 (de) 1983-08-15 1984-08-15 Piezoelektrische Mikropumpe

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL8302860A NL8302860A (nl) 1983-08-15 1983-08-15 Piezo-elektrische micropomp.
NL8302860 1983-08-15

Publications (1)

Publication Number Publication Date
NL8302860A true NL8302860A (nl) 1985-03-01

Family

ID=19842271

Family Applications (1)

Application Number Title Priority Date Filing Date
NL8302860A NL8302860A (nl) 1983-08-15 1983-08-15 Piezo-elektrische micropomp.

Country Status (2)

Country Link
EP (1) EP0134614A1 (de)
NL (1) NL8302860A (de)

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GB8712951D0 (en) * 1987-06-03 1987-07-08 Rolls Royce Plc Valve
JP2912372B2 (ja) * 1988-04-15 1999-06-28 科学技術振興事業団 液体マイクロバルブ
CH679555A5 (de) * 1989-04-11 1992-03-13 Westonbridge Int Ltd
US5205819A (en) * 1989-05-11 1993-04-27 Bespak Plc Pump apparatus for biomedical use
FR2650634B1 (fr) * 1989-08-07 1994-04-15 Debiopharm Micropompe perfectionnee
DE69011631T2 (de) * 1989-06-14 1995-03-23 Westonbridge Int Ltd Mikropumpe.
DE3926066A1 (de) * 1989-08-07 1991-02-14 Ibm Deutschland Mikromechanische kompressorkaskade und verfahren zur druckerhoehung bei extrem niedrigem arbeitsdruck
CH681168A5 (en) * 1989-11-10 1993-01-29 Westonbridge Int Ltd Micro-pump for medicinal dosing
DE4006152A1 (de) * 1990-02-27 1991-08-29 Fraunhofer Ges Forschung Mikrominiaturisierte pumpe
GB2248891A (en) * 1990-10-18 1992-04-22 Westonbridge Int Ltd Membrane micropump
US5262696A (en) * 1991-07-05 1993-11-16 Rockwell International Corporation Biaxial transducer
DE4314888C1 (de) * 1993-05-05 1994-08-18 Ignaz Eisele Verfahren zum Abscheiden einer ganzflächigen Schicht durch eine Maske und optionalem Verschließen dieser Maske
US5466932A (en) * 1993-09-22 1995-11-14 Westinghouse Electric Corp. Micro-miniature piezoelectric diaphragm pump for the low pressure pumping of gases
DE4332720C2 (de) * 1993-09-25 1997-02-13 Karlsruhe Forschzent Mikromembranpumpe
EP0722540B1 (de) * 1993-10-04 1998-12-23 Research International, Inc. Mikromaschinen-flüssigkeitsfluss-regulator
DE4405026A1 (de) * 1994-02-17 1995-08-24 Rossendorf Forschzent Mikro-Fluidmanipulator
FR2730551A1 (fr) * 1995-02-14 1996-08-14 Westonbridge Int Ltd Procede de raccordement etanche entre un organe mecanique et la paroi en verre d'un composant
DE19507978C2 (de) * 1995-03-07 2002-03-07 Joachim Heinzl Brenneranordnung für flüssige Brennstoffe
US6962579B2 (en) 1995-03-23 2005-11-08 Advanced Animal Technology Limited Substance delivery device
EP0990425B1 (de) 1995-03-23 2003-01-15 Advanced Animal Technology Limited Vorrichtung zur Verabreichung einer Substanz
JP3035854B2 (ja) * 1995-09-15 2000-04-24 ハーン−シッカート−ゲゼルシャフト フア アンゲワンテ フォルシュンク アインゲトラーゲナー フェライン 逆止弁を有しない流体ポンプ
DE19546570C1 (de) * 1995-12-13 1997-03-27 Inst Mikro Und Informationstec Fluidpumpe
DE19648695C2 (de) 1996-11-25 1999-07-22 Abb Patent Gmbh Vorrichtung zur automatischen und kontinuierlichen Analyse von Flüssigkeitsproben
DE19719861A1 (de) * 1997-05-12 1998-11-19 Fraunhofer Ges Forschung Verfahren zum Herstellen eines Mikromembranpumpenkörpers
DE19719862A1 (de) 1997-05-12 1998-11-19 Fraunhofer Ges Forschung Mikromembranpumpe
DE19724240C2 (de) * 1997-06-09 2003-06-05 Sascha Bechtel Förderpumpe, insbesondere Mikroförderpumpe
US6082185A (en) * 1997-07-25 2000-07-04 Research International, Inc. Disposable fluidic circuit cards
AU1406399A (en) * 1997-11-13 1999-06-07 Ronald E. Bowden Artificial heart design
US6048328A (en) * 1998-02-02 2000-04-11 Medtronic, Inc. Implantable drug infusion device having an improved valve
US6368079B2 (en) * 1998-12-23 2002-04-09 Battelle Pulmonary Therapeutics, Inc. Piezoelectric micropump
US6471675B1 (en) 1999-04-30 2002-10-29 Medtronic, Inc. Passive flow control devices for implantable pumps
CA2347022C (en) * 1999-09-03 2009-01-13 Baxter International Inc. Systems and methods for control of pumps
US6538873B1 (en) 1999-11-02 2003-03-25 Varian Semiconductor Equipment Associates, Inc. Active electrostatic seal and electrostatic vacuum pump
US6362946B1 (en) 1999-11-02 2002-03-26 Varian Semiconductor Equipment Associates, Inc. Electrostatic wafer clamp having electrostatic seal for retaining gas
DE10202996A1 (de) * 2002-01-26 2003-08-14 Eppendorf Ag Piezoelektrisch steuerbare Mikrofluidaktorik
US6827559B2 (en) 2002-07-01 2004-12-07 Ventaira Pharmaceuticals, Inc. Piezoelectric micropump with diaphragm and valves
US20040120836A1 (en) * 2002-12-18 2004-06-24 Xunhu Dai Passive membrane microvalves
CN100344874C (zh) * 2003-01-28 2007-10-24 清华大学 一种流体的传输方法及实现该方法的微型蠕动泵
GB0303432D0 (en) * 2003-02-14 2003-03-19 Council Cent Lab Res Councils Self-cleaning tube
AU2003216931A1 (en) * 2003-04-04 2004-10-25 Electro Ad, Sl Dual-head micro vacuum pump
DE102004042987A1 (de) * 2004-09-06 2006-03-23 Roche Diagnostics Gmbh Push-Pull betriebene Pumpe für ein mikrofluidisches System
DE102004062923A1 (de) * 2004-12-28 2006-07-06 Hirschmann Laborgeräte GmbH & Co. KG Vorrichtung zur Förderung von Fluiden, Verfahren zur Herstellung derselben und Pipette mit einer solchen Vorrichtung
DE102005038483B3 (de) * 2005-08-13 2006-12-14 Albert-Ludwigs-Universität Freiburg Mikropumpe
DE102007045637A1 (de) * 2007-09-25 2009-04-02 Robert Bosch Gmbh Mikrodosiervorrichtung zum Dosieren von Kleinstmengen eines Mediums
EP2222959B1 (de) * 2007-11-05 2012-01-25 Bartels Mikrotechnik GmbH Verfahren zum fördern eines fluids und mikropumpe hierfür
US20090326517A1 (en) * 2008-06-27 2009-12-31 Toralf Bork Fluidic capillary chip for regulating drug flow rates of infusion pumps
AU2015221488A1 (en) * 2008-06-27 2015-09-24 Codman Neuro Sciences Sarl Fluidic capillary chip for regulating drug flow rates of infusion pumps
CN102961793A (zh) * 2012-12-10 2013-03-13 同济大学 医用反馈式扁平压电自动微量注射器
CN104083815A (zh) * 2014-06-17 2014-10-08 南京山诺生物科技有限公司 微型压电式输液器
FR3027380A1 (fr) * 2014-10-17 2016-04-22 Commissariat Energie Atomique Dispositif de refroidissement par liquide caloporteur pour composants electroniques
CN109821093B (zh) * 2019-03-01 2021-03-12 浙江师范大学 一种压电堆驱动的输液装置
TWI780833B (zh) * 2021-07-23 2022-10-11 研能科技股份有限公司 氣體傳輸裝置

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SE378029B (de) * 1973-04-25 1975-08-11 Original Odhner Ab
CH597596A5 (de) * 1975-06-27 1978-04-14 Hoffmann La Roche
FR2379055A1 (fr) * 1977-01-27 1978-08-25 Commissariat Energie Atomique Distributeur de volumes doses d'un liquide
US4231287A (en) * 1978-05-01 1980-11-04 Physics International Company Spring diaphragm

Also Published As

Publication number Publication date
EP0134614A1 (de) 1985-03-20

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A1B A search report has been drawn up
BV The patent application has lapsed