NL8302860A - Piezo-elektrische micropomp. - Google Patents
Piezo-elektrische micropomp. Download PDFInfo
- Publication number
- NL8302860A NL8302860A NL8302860A NL8302860A NL8302860A NL 8302860 A NL8302860 A NL 8302860A NL 8302860 A NL8302860 A NL 8302860A NL 8302860 A NL8302860 A NL 8302860A NL 8302860 A NL8302860 A NL 8302860A
- Authority
- NL
- Netherlands
- Prior art keywords
- channel
- micropump according
- displacer
- micropump
- valves
- Prior art date
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 16
- 229910052710 silicon Inorganic materials 0.000 claims description 16
- 239000010703 silicon Substances 0.000 claims description 16
- 239000011521 glass Substances 0.000 claims description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 238000006073 displacement reaction Methods 0.000 claims description 4
- 239000012530 fluid Substances 0.000 claims description 4
- 235000012239 silicon dioxide Nutrition 0.000 claims description 4
- 230000002572 peristaltic effect Effects 0.000 claims description 3
- 239000000377 silicon dioxide Substances 0.000 claims description 2
- 229910052581 Si3N4 Inorganic materials 0.000 claims 1
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 1
- 239000012528 membrane Substances 0.000 description 14
- 230000005684 electric field Effects 0.000 description 4
- NOESYZHRGYRDHS-UHFFFAOYSA-N insulin Chemical compound N1C(=O)C(NC(=O)C(CCC(N)=O)NC(=O)C(CCC(O)=O)NC(=O)C(C(C)C)NC(=O)C(NC(=O)CN)C(C)CC)CSSCC(C(NC(CO)C(=O)NC(CC(C)C)C(=O)NC(CC=2C=CC(O)=CC=2)C(=O)NC(CCC(N)=O)C(=O)NC(CC(C)C)C(=O)NC(CCC(O)=O)C(=O)NC(CC(N)=O)C(=O)NC(CC=2C=CC(O)=CC=2)C(=O)NC(CSSCC(NC(=O)C(C(C)C)NC(=O)C(CC(C)C)NC(=O)C(CC=2C=CC(O)=CC=2)NC(=O)C(CC(C)C)NC(=O)C(C)NC(=O)C(CCC(O)=O)NC(=O)C(C(C)C)NC(=O)C(CC(C)C)NC(=O)C(CC=2NC=NC=2)NC(=O)C(CO)NC(=O)CNC2=O)C(=O)NCC(=O)NC(CCC(O)=O)C(=O)NC(CCCNC(N)=N)C(=O)NCC(=O)NC(CC=3C=CC=CC=3)C(=O)NC(CC=3C=CC=CC=3)C(=O)NC(CC=3C=CC(O)=CC=3)C(=O)NC(C(C)O)C(=O)N3C(CCC3)C(=O)NC(CCCCN)C(=O)NC(C)C(O)=O)C(=O)NC(CC(N)=O)C(O)=O)=O)NC(=O)C(C(C)CC)NC(=O)C(CO)NC(=O)C(C(C)O)NC(=O)C1CSSCC2NC(=O)C(CC(C)C)NC(=O)C(NC(=O)C(CCC(N)=O)NC(=O)C(CC(N)=O)NC(=O)C(NC(=O)C(N)CC=1C=CC=CC=1)C(C)C)CC1=CN=CN1 NOESYZHRGYRDHS-UHFFFAOYSA-N 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000005086 pumping Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000000284 resting effect Effects 0.000 description 3
- 102000004877 Insulin Human genes 0.000 description 2
- 108090001061 Insulin Proteins 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 229940125396 insulin Drugs 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Classifications
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M5/00—Devices for bringing media into the body in a subcutaneous, intra-vascular or intramuscular way; Accessories therefor, e.g. filling or cleaning devices, arm-rests
- A61M5/14—Infusion devices, e.g. infusing by gravity; Blood infusion; Accessories therefor
- A61M5/142—Pressure infusion, e.g. using pumps
- A61M5/14244—Pressure infusion, e.g. using pumps adapted to be carried by the patient, e.g. portable on the body
- A61M5/14276—Pressure infusion, e.g. using pumps adapted to be carried by the patient, e.g. portable on the body specially adapted for implantation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/0009—Special features
- F04B43/0027—Special features without valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/12—Machines, pumps, or pumping installations having flexible working members having peristaltic action
- F04B43/14—Machines, pumps, or pumping installations having flexible working members having peristaltic action having plate-like flexible members
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F11/00—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it
- G01F11/10—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it with measuring chambers moved during operation
- G01F11/12—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it with measuring chambers moved during operation of the valve type, i.e. the separating being effected by fluid-tight or powder-tight movements
- G01F11/125—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it with measuring chambers moved during operation of the valve type, i.e. the separating being effected by fluid-tight or powder-tight movements of the peristaltic pump type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M2205/00—General characteristics of the apparatus
- A61M2205/02—General characteristics of the apparatus characterised by a particular materials
- A61M2205/0244—Micromachined materials, e.g. made from silicon wafers, microelectromechanical systems [MEMS] or comprising nanotechnology
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M2205/00—General characteristics of the apparatus
- A61M2205/02—General characteristics of the apparatus characterised by a particular materials
- A61M2205/0272—Electro-active or magneto-active materials
- A61M2205/0294—Piezoelectric materials
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M5/00—Devices for bringing media into the body in a subcutaneous, intra-vascular or intramuscular way; Accessories therefor, e.g. filling or cleaning devices, arm-rests
- A61M5/14—Infusion devices, e.g. infusing by gravity; Blood infusion; Accessories therefor
- A61M5/142—Pressure infusion, e.g. using pumps
- A61M5/14212—Pumping with an aspiration and an expulsion action
- A61M5/14224—Diaphragm type
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M5/00—Devices for bringing media into the body in a subcutaneous, intra-vascular or intramuscular way; Accessories therefor, e.g. filling or cleaning devices, arm-rests
- A61M5/14—Infusion devices, e.g. infusing by gravity; Blood infusion; Accessories therefor
- A61M5/168—Means for controlling media flow to the body or for metering media to the body, e.g. drip meters, counters ; Monitoring media flow to the body
- A61M5/16877—Adjusting flow; Devices for setting a flow rate
- A61M5/16881—Regulating valves
Landscapes
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Biomedical Technology (AREA)
- Veterinary Medicine (AREA)
- Hematology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Heart & Thoracic Surgery (AREA)
- Anesthesiology (AREA)
- Vascular Medicine (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Reciprocating Pumps (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL8302860A NL8302860A (nl) | 1983-08-15 | 1983-08-15 | Piezo-elektrische micropomp. |
EP84201185A EP0134614A1 (de) | 1983-08-15 | 1984-08-15 | Piezoelektrische Mikropumpe |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL8302860A NL8302860A (nl) | 1983-08-15 | 1983-08-15 | Piezo-elektrische micropomp. |
NL8302860 | 1983-08-15 |
Publications (1)
Publication Number | Publication Date |
---|---|
NL8302860A true NL8302860A (nl) | 1985-03-01 |
Family
ID=19842271
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL8302860A NL8302860A (nl) | 1983-08-15 | 1983-08-15 | Piezo-elektrische micropomp. |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP0134614A1 (de) |
NL (1) | NL8302860A (de) |
Families Citing this family (52)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB8712951D0 (en) * | 1987-06-03 | 1987-07-08 | Rolls Royce Plc | Valve |
JP2912372B2 (ja) * | 1988-04-15 | 1999-06-28 | 科学技術振興事業団 | 液体マイクロバルブ |
CH679555A5 (de) * | 1989-04-11 | 1992-03-13 | Westonbridge Int Ltd | |
US5205819A (en) * | 1989-05-11 | 1993-04-27 | Bespak Plc | Pump apparatus for biomedical use |
FR2650634B1 (fr) * | 1989-08-07 | 1994-04-15 | Debiopharm | Micropompe perfectionnee |
DE69011631T2 (de) * | 1989-06-14 | 1995-03-23 | Westonbridge Int Ltd | Mikropumpe. |
DE3926066A1 (de) * | 1989-08-07 | 1991-02-14 | Ibm Deutschland | Mikromechanische kompressorkaskade und verfahren zur druckerhoehung bei extrem niedrigem arbeitsdruck |
CH681168A5 (en) * | 1989-11-10 | 1993-01-29 | Westonbridge Int Ltd | Micro-pump for medicinal dosing |
DE4006152A1 (de) * | 1990-02-27 | 1991-08-29 | Fraunhofer Ges Forschung | Mikrominiaturisierte pumpe |
GB2248891A (en) * | 1990-10-18 | 1992-04-22 | Westonbridge Int Ltd | Membrane micropump |
US5262696A (en) * | 1991-07-05 | 1993-11-16 | Rockwell International Corporation | Biaxial transducer |
DE4314888C1 (de) * | 1993-05-05 | 1994-08-18 | Ignaz Eisele | Verfahren zum Abscheiden einer ganzflächigen Schicht durch eine Maske und optionalem Verschließen dieser Maske |
US5466932A (en) * | 1993-09-22 | 1995-11-14 | Westinghouse Electric Corp. | Micro-miniature piezoelectric diaphragm pump for the low pressure pumping of gases |
DE4332720C2 (de) * | 1993-09-25 | 1997-02-13 | Karlsruhe Forschzent | Mikromembranpumpe |
EP0722540B1 (de) * | 1993-10-04 | 1998-12-23 | Research International, Inc. | Mikromaschinen-flüssigkeitsfluss-regulator |
DE4405026A1 (de) * | 1994-02-17 | 1995-08-24 | Rossendorf Forschzent | Mikro-Fluidmanipulator |
FR2730551A1 (fr) * | 1995-02-14 | 1996-08-14 | Westonbridge Int Ltd | Procede de raccordement etanche entre un organe mecanique et la paroi en verre d'un composant |
DE19507978C2 (de) * | 1995-03-07 | 2002-03-07 | Joachim Heinzl | Brenneranordnung für flüssige Brennstoffe |
US6962579B2 (en) | 1995-03-23 | 2005-11-08 | Advanced Animal Technology Limited | Substance delivery device |
EP0990425B1 (de) | 1995-03-23 | 2003-01-15 | Advanced Animal Technology Limited | Vorrichtung zur Verabreichung einer Substanz |
JP3035854B2 (ja) * | 1995-09-15 | 2000-04-24 | ハーン−シッカート−ゲゼルシャフト フア アンゲワンテ フォルシュンク アインゲトラーゲナー フェライン | 逆止弁を有しない流体ポンプ |
DE19546570C1 (de) * | 1995-12-13 | 1997-03-27 | Inst Mikro Und Informationstec | Fluidpumpe |
DE19648695C2 (de) | 1996-11-25 | 1999-07-22 | Abb Patent Gmbh | Vorrichtung zur automatischen und kontinuierlichen Analyse von Flüssigkeitsproben |
DE19719861A1 (de) * | 1997-05-12 | 1998-11-19 | Fraunhofer Ges Forschung | Verfahren zum Herstellen eines Mikromembranpumpenkörpers |
DE19719862A1 (de) | 1997-05-12 | 1998-11-19 | Fraunhofer Ges Forschung | Mikromembranpumpe |
DE19724240C2 (de) * | 1997-06-09 | 2003-06-05 | Sascha Bechtel | Förderpumpe, insbesondere Mikroförderpumpe |
US6082185A (en) * | 1997-07-25 | 2000-07-04 | Research International, Inc. | Disposable fluidic circuit cards |
AU1406399A (en) * | 1997-11-13 | 1999-06-07 | Ronald E. Bowden | Artificial heart design |
US6048328A (en) * | 1998-02-02 | 2000-04-11 | Medtronic, Inc. | Implantable drug infusion device having an improved valve |
US6368079B2 (en) * | 1998-12-23 | 2002-04-09 | Battelle Pulmonary Therapeutics, Inc. | Piezoelectric micropump |
US6471675B1 (en) | 1999-04-30 | 2002-10-29 | Medtronic, Inc. | Passive flow control devices for implantable pumps |
CA2347022C (en) * | 1999-09-03 | 2009-01-13 | Baxter International Inc. | Systems and methods for control of pumps |
US6538873B1 (en) | 1999-11-02 | 2003-03-25 | Varian Semiconductor Equipment Associates, Inc. | Active electrostatic seal and electrostatic vacuum pump |
US6362946B1 (en) | 1999-11-02 | 2002-03-26 | Varian Semiconductor Equipment Associates, Inc. | Electrostatic wafer clamp having electrostatic seal for retaining gas |
DE10202996A1 (de) * | 2002-01-26 | 2003-08-14 | Eppendorf Ag | Piezoelektrisch steuerbare Mikrofluidaktorik |
US6827559B2 (en) | 2002-07-01 | 2004-12-07 | Ventaira Pharmaceuticals, Inc. | Piezoelectric micropump with diaphragm and valves |
US20040120836A1 (en) * | 2002-12-18 | 2004-06-24 | Xunhu Dai | Passive membrane microvalves |
CN100344874C (zh) * | 2003-01-28 | 2007-10-24 | 清华大学 | 一种流体的传输方法及实现该方法的微型蠕动泵 |
GB0303432D0 (en) * | 2003-02-14 | 2003-03-19 | Council Cent Lab Res Councils | Self-cleaning tube |
AU2003216931A1 (en) * | 2003-04-04 | 2004-10-25 | Electro Ad, Sl | Dual-head micro vacuum pump |
DE102004042987A1 (de) * | 2004-09-06 | 2006-03-23 | Roche Diagnostics Gmbh | Push-Pull betriebene Pumpe für ein mikrofluidisches System |
DE102004062923A1 (de) * | 2004-12-28 | 2006-07-06 | Hirschmann Laborgeräte GmbH & Co. KG | Vorrichtung zur Förderung von Fluiden, Verfahren zur Herstellung derselben und Pipette mit einer solchen Vorrichtung |
DE102005038483B3 (de) * | 2005-08-13 | 2006-12-14 | Albert-Ludwigs-Universität Freiburg | Mikropumpe |
DE102007045637A1 (de) * | 2007-09-25 | 2009-04-02 | Robert Bosch Gmbh | Mikrodosiervorrichtung zum Dosieren von Kleinstmengen eines Mediums |
EP2222959B1 (de) * | 2007-11-05 | 2012-01-25 | Bartels Mikrotechnik GmbH | Verfahren zum fördern eines fluids und mikropumpe hierfür |
US20090326517A1 (en) * | 2008-06-27 | 2009-12-31 | Toralf Bork | Fluidic capillary chip for regulating drug flow rates of infusion pumps |
AU2015221488A1 (en) * | 2008-06-27 | 2015-09-24 | Codman Neuro Sciences Sarl | Fluidic capillary chip for regulating drug flow rates of infusion pumps |
CN102961793A (zh) * | 2012-12-10 | 2013-03-13 | 同济大学 | 医用反馈式扁平压电自动微量注射器 |
CN104083815A (zh) * | 2014-06-17 | 2014-10-08 | 南京山诺生物科技有限公司 | 微型压电式输液器 |
FR3027380A1 (fr) * | 2014-10-17 | 2016-04-22 | Commissariat Energie Atomique | Dispositif de refroidissement par liquide caloporteur pour composants electroniques |
CN109821093B (zh) * | 2019-03-01 | 2021-03-12 | 浙江师范大学 | 一种压电堆驱动的输液装置 |
TWI780833B (zh) * | 2021-07-23 | 2022-10-11 | 研能科技股份有限公司 | 氣體傳輸裝置 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE378029B (de) * | 1973-04-25 | 1975-08-11 | Original Odhner Ab | |
CH597596A5 (de) * | 1975-06-27 | 1978-04-14 | Hoffmann La Roche | |
FR2379055A1 (fr) * | 1977-01-27 | 1978-08-25 | Commissariat Energie Atomique | Distributeur de volumes doses d'un liquide |
US4231287A (en) * | 1978-05-01 | 1980-11-04 | Physics International Company | Spring diaphragm |
-
1983
- 1983-08-15 NL NL8302860A patent/NL8302860A/nl not_active Application Discontinuation
-
1984
- 1984-08-15 EP EP84201185A patent/EP0134614A1/de not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
EP0134614A1 (de) | 1985-03-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A1B | A search report has been drawn up | ||
BV | The patent application has lapsed |