NL7605340A - Belichtingstelsel. - Google Patents
Belichtingstelsel.Info
- Publication number
- NL7605340A NL7605340A NL7605340A NL7605340A NL7605340A NL 7605340 A NL7605340 A NL 7605340A NL 7605340 A NL7605340 A NL 7605340A NL 7605340 A NL7605340 A NL 7605340A NL 7605340 A NL7605340 A NL 7605340A
- Authority
- NL
- Netherlands
- Prior art keywords
- exposure system
- exposure
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
- G03F7/70558—Dose control, i.e. achievement of a desired dose
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure Control For Cameras (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/578,915 US4024428A (en) | 1975-05-19 | 1975-05-19 | Radiation-sensitive control circuit for driving lamp at various power levels |
Publications (1)
Publication Number | Publication Date |
---|---|
NL7605340A true NL7605340A (nl) | 1976-11-23 |
Family
ID=24314847
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL7605340A NL7605340A (nl) | 1975-05-19 | 1976-05-19 | Belichtingstelsel. |
Country Status (8)
Country | Link |
---|---|
US (2) | US4024428A (nl) |
JP (1) | JPS51143411A (nl) |
CA (1) | CA1078913A (nl) |
CH (1) | CH608898A5 (nl) |
DE (1) | DE2621378A1 (nl) |
FR (1) | FR2312048A1 (nl) |
GB (1) | GB1520534A (nl) |
NL (1) | NL7605340A (nl) |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4227119A (en) * | 1975-11-12 | 1980-10-07 | Minolta Camera Kabushiki Kaisha | Controlled lighting device |
JPS5491071U (nl) * | 1977-12-12 | 1979-06-27 | ||
USRE30571E (en) * | 1979-04-18 | 1981-04-07 | Optical Associates, Inc. | Radiation-sensitive control circuit for driving lamp at various power levels |
FR2465241A1 (fr) * | 1979-09-10 | 1981-03-20 | Thomson Csf | Dispositif illuminateur destine a fournir un faisceau d'eclairement a distribution d'intensite ajustable et systeme de transfert de motifs comprenant un tel dispositif |
JPS5694372A (en) * | 1979-12-27 | 1981-07-30 | Canon Inc | Exposure control device |
JPS56132317A (en) * | 1980-03-19 | 1981-10-16 | Minolta Camera Co Ltd | Photographing apparatus using auxiliary light |
DE3133168C2 (de) * | 1980-08-23 | 1986-11-27 | Ricoh Co., Ltd., Tokio/Tokyo | Einrichtung zur Konstanthaltung des von einer Leuchtstoffröhre einer Faseroptik zugeführten Lichtstroms für ein Kopiergerät |
JPS57141923A (en) * | 1981-02-27 | 1982-09-02 | Hitachi Ltd | Projection type exposure device |
JPS57181539A (en) * | 1981-04-30 | 1982-11-09 | Ricoh Co Ltd | Exposure controller for copying machine |
DE3303450A1 (de) * | 1982-02-04 | 1983-08-11 | Canon K.K., Tokyo | Steuereinrichtung fuer kopiergeraete oder dergleichen |
JPS5918965A (ja) * | 1982-07-23 | 1984-01-31 | Fuji Xerox Co Ltd | 複写機の露光量検出装置 |
JPS5928337A (ja) * | 1982-08-09 | 1984-02-15 | Hitachi Ltd | プロジエクシヨンアライナ |
US4618254A (en) * | 1982-10-15 | 1986-10-21 | Ncr Canada Ltd | Automatic light control system |
US4555621A (en) * | 1983-06-24 | 1985-11-26 | Xerox Corporation | Illumination control system utilizing an integrating feedback detector |
JPS6120326A (ja) * | 1984-07-07 | 1986-01-29 | Ushio Inc | 水銀灯による半導体ウエハ−材料の露光方法 |
JPS6120325A (ja) * | 1984-07-07 | 1986-01-29 | Ushio Inc | 水銀灯による半導体ウエハ−材料の露光方法 |
JPS6120322A (ja) * | 1984-07-07 | 1986-01-29 | Ushio Inc | 水銀灯による半導体ウエハ−材料の露光方法 |
US4605301A (en) * | 1984-07-07 | 1986-08-12 | Ushio Denki Kabushiki Kaisha | Exposure method of semiconductor wafer by mercury-vapor lamp |
US4716285A (en) * | 1984-08-23 | 1987-12-29 | Fuji Photo Film Co., Ltd. | Light amount correction method and apparatus for image output system |
JPS61189636A (ja) * | 1985-02-19 | 1986-08-23 | Ushio Inc | キセノン・水銀放電灯による半導体ウエハ−の露光方法 |
DE3535749C2 (de) * | 1985-04-12 | 1987-02-26 | Fa. Carl Zeiss, 7920 Heidenheim | Einrichtung zur Helligkeitsregelung in Mikroskopen |
US5153419A (en) * | 1985-04-22 | 1992-10-06 | Canon Kabushiki Kaisha | Device for detecting position of a light source with source position adjusting means |
US4947030A (en) * | 1985-05-22 | 1990-08-07 | Canon Kabushiki Kaisha | Illuminating optical device |
US4713675A (en) * | 1985-10-31 | 1987-12-15 | Canon Kabushiki Kaisha | Exposure apparatus |
DE3731153A1 (de) * | 1986-10-02 | 1989-03-23 | Steinbach Guenter | Schaltungsanordnung fuer geregelte hochenergieimpulserzeugung fuer gasentladungsblitzlampen |
DE3633566A1 (de) * | 1986-10-02 | 1988-04-21 | Guenter Steinbach | Schaltungsanordnung fuer geregelte hochenergieimpulserzeugung fuer gasentladungsblitzlampen |
EP0295491B1 (en) * | 1987-06-04 | 1993-08-18 | Dainippon Screen Mfg. Co., Ltd. | Apparatus for and method of stabilizing the quantity of light of fluorescent lamp |
CA2069132C (en) * | 1991-08-29 | 1996-01-09 | Koji Fujii | Light-beam heating apparatus |
US5521392A (en) * | 1994-04-29 | 1996-05-28 | Efos Canada Inc. | Light cure system with closed loop control and work piece recording |
US6310337B1 (en) | 1998-08-13 | 2001-10-30 | Joseph M. Chiapperi | Method of preselecting flashlamp voltages for assays |
US6535829B2 (en) * | 2001-06-12 | 2003-03-18 | United Microelectronics Corp. | System for calculating exposure energy |
US20090002669A1 (en) * | 2007-06-29 | 2009-01-01 | Optical Associates, Inc. | Ultraviolet light-emitting diode exposure apparatus for microfabrication |
US20090224690A1 (en) * | 2008-03-05 | 2009-09-10 | Jian Xu | Economy mode for lighting control system |
EP3320548B1 (en) * | 2015-07-08 | 2022-08-31 | Glunz & Jensen A/S | Method for controlling radiation emitting from one or more tubular lamps in an exposure apparatus |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2298344A (en) * | 1941-03-22 | 1942-10-13 | Eastman Kodak Co | Photographic printing apparatus |
US2885563A (en) * | 1954-10-05 | 1959-05-05 | W M Welch Mfg Company | Photographic exposure timer |
US3360650A (en) * | 1964-02-12 | 1967-12-26 | American Cyanamid Co | Apparatus for ultraviolet source stabilization in exposure testing |
US3456155A (en) * | 1965-04-30 | 1969-07-15 | Advance Data Systems Corp | Photosensitive circuit for controlling the intensity of a lamp |
US3431427A (en) * | 1965-10-24 | 1969-03-04 | Henry D Pahl Jr | Solid state color balance controller for incandescent lamps |
US3366835A (en) * | 1967-02-09 | 1968-01-30 | Harold L. Morris | Circuits for energizing a flashtube |
US3483428A (en) * | 1967-07-24 | 1969-12-09 | Bell & Howell Co | Arc lamp supply with constant light regulation and over current protection |
US3726197A (en) * | 1969-03-26 | 1973-04-10 | Canon Kk | Apparatus for automatic electronic flash photography |
US3681654A (en) * | 1971-02-18 | 1972-08-01 | Wagner Electric Corp | Light-regulating power supply circuit for gaseous discharge lamp |
US3743405A (en) * | 1971-06-17 | 1973-07-03 | Eastman Kodak Co | Automatic exposure control in electrophotography |
JPS4838718A (nl) * | 1971-09-16 | 1973-06-07 |
-
1975
- 1975-05-19 US US05/578,915 patent/US4024428A/en not_active Expired - Lifetime
-
1976
- 1976-05-12 CA CA252,337A patent/CA1078913A/en not_active Expired
- 1976-05-14 DE DE19762621378 patent/DE2621378A1/de not_active Withdrawn
- 1976-05-14 GB GB19991/76A patent/GB1520534A/en not_active Expired
- 1976-05-18 JP JP51057171A patent/JPS51143411A/ja active Pending
- 1976-05-18 FR FR7614924A patent/FR2312048A1/fr active Granted
- 1976-05-19 CH CH766283A patent/CH608898A5/xx not_active IP Right Cessation
- 1976-05-19 NL NL7605340A patent/NL7605340A/nl not_active Application Discontinuation
- 1976-12-15 US US05/750,669 patent/US4117375A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US4117375A (en) | 1978-09-26 |
CA1078913A (en) | 1980-06-03 |
FR2312048B3 (nl) | 1980-10-24 |
FR2312048A1 (fr) | 1976-12-17 |
US4024428A (en) | 1977-05-17 |
DE2621378A1 (de) | 1976-12-02 |
JPS51143411A (en) | 1976-12-09 |
CH608898A5 (nl) | 1979-01-31 |
GB1520534A (en) | 1978-08-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
BA | A request for search or an international-type search has been filed | ||
BB | A search report has been drawn up | ||
BV | The patent application has lapsed |