NL7603931A - Ellipsometer. - Google Patents
Ellipsometer.Info
- Publication number
- NL7603931A NL7603931A NL7603931A NL7603931A NL7603931A NL 7603931 A NL7603931 A NL 7603931A NL 7603931 A NL7603931 A NL 7603931A NL 7603931 A NL7603931 A NL 7603931A NL 7603931 A NL7603931 A NL 7603931A
- Authority
- NL
- Netherlands
- Prior art keywords
- ellipsometer
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
- G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
- G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0641—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization
- G01B11/065—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization using one or more discrete wavelengths
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
- G01N21/211—Ellipsometry
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/572,476 US4053232A (en) | 1973-06-25 | 1975-04-28 | Rotating-compensator ellipsometer |
Publications (1)
Publication Number | Publication Date |
---|---|
NL7603931A true NL7603931A (nl) | 1976-11-01 |
Family
ID=24287979
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL7603931A NL7603931A (nl) | 1975-04-28 | 1976-04-14 | Ellipsometer. |
Country Status (8)
Country | Link |
---|---|
JP (1) | JPS6042901B2 (nl) |
BE (1) | BE839043A (nl) |
CA (1) | CA1048806A (nl) |
DE (1) | DE2616141A1 (nl) |
FR (1) | FR2309860A1 (nl) |
GB (1) | GB1493087A (nl) |
IT (1) | IT1064176B (nl) |
NL (1) | NL7603931A (nl) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4526471A (en) * | 1982-06-17 | 1985-07-02 | Bykov Anatoly P | Method for sensing spatial coordinate of article point and apparatus therefor |
JPS5930004A (ja) * | 1982-08-09 | 1984-02-17 | インタ−ナシヨナル ビジネス マシ−ンズ コ−ポレ−シヨン | 膜厚測定装置 |
JPS59182324A (ja) * | 1983-03-31 | 1984-10-17 | Horiba Ltd | 旋光計 |
NO850157L (no) * | 1984-01-16 | 1985-10-23 | Barringer Research Ltd | Fremgangsmaate og apparat til paavisning av hydrokarboner paa en vannflate. |
JPH0820358B2 (ja) * | 1986-03-03 | 1996-03-04 | オリンパス光学工業株式会社 | 光学的記録媒体用基盤の屈折率の測定装置 |
DE3708148A1 (de) * | 1987-03-11 | 1987-10-15 | Michael Linder | Verfahren und vorrichtung zur ellipsometrischen messung |
JPS6428509A (en) * | 1987-07-23 | 1989-01-31 | Nippon Kokan Kk | Apparatus for measuring thickness of film |
DE19805853B4 (de) * | 1997-03-25 | 2004-03-11 | Schmekel, Björn | Verfahren und Vorrichtung zur Messung des Brechungsindex und/oder der Lichtstrahlwinkel an einer Mediumgrenze |
KR20140056261A (ko) * | 2011-07-07 | 2014-05-09 | 케이엘에이-텐코 코포레이션 | 다중-분광기 각도 스펙트로스코픽 엘립소메트리 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1422426A (en) * | 1973-06-22 | 1976-01-28 | Penny Turbines Ltd Noel | Compressor rotor |
-
1976
- 1976-01-21 GB GB225176A patent/GB1493087A/en not_active Expired
- 1976-02-17 FR FR7605148A patent/FR2309860A1/fr active Granted
- 1976-02-27 BE BE164736A patent/BE839043A/xx not_active IP Right Cessation
- 1976-03-23 IT IT2145776A patent/IT1064176B/it active
- 1976-04-07 JP JP51038338A patent/JPS6042901B2/ja not_active Expired
- 1976-04-13 CA CA76250134A patent/CA1048806A/en not_active Expired
- 1976-04-13 DE DE19762616141 patent/DE2616141A1/de not_active Withdrawn
- 1976-04-14 NL NL7603931A patent/NL7603931A/nl unknown
Also Published As
Publication number | Publication date |
---|---|
JPS6042901B2 (ja) | 1985-09-25 |
JPS51131655A (en) | 1976-11-16 |
CA1048806A (en) | 1979-02-20 |
BE839043A (fr) | 1976-06-16 |
FR2309860A1 (fr) | 1976-11-26 |
FR2309860B1 (nl) | 1979-04-20 |
DE2616141A1 (de) | 1976-11-11 |
IT1064176B (it) | 1985-02-18 |
GB1493087A (en) | 1977-11-23 |
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