NL7300628A - - Google Patents

Info

Publication number: NL7300628A
Authority: NL; Netherlands

Application number

NL7300628A

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1972-01-17

Filing date

1973-01-16

Publication date

1973-07-19

1972-01-17 Priority claimed from DE19722202055 external-priority patent/DE2202055A1/de

1972-05-02 Priority claimed from DE19722221432 external-priority patent/DE2221432A1/de

1973-01-16 Application filed filed Critical

1973-07-19 Publication of NL7300628A publication Critical patent/NL7300628A/xx

Links

Classifications

- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching

Landscapes

Chemical & Material Sciences (AREA)
General Chemical & Material Sciences (AREA)
Chemical Kinetics & Catalysis (AREA)
Engineering & Computer Science (AREA)
Materials Engineering (AREA)
Mechanical Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Inorganic Chemistry (AREA)
Crystals, And After-Treatments Of Crystals (AREA)
Chemical Vapour Deposition (AREA)

NL7300628A 1972-01-17 1973-01-16 NL7300628A (fr)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
DE19722202055 DE2202055A1 (de)	1972-01-17	1972-01-17	Anordnung zum herstellen eines rohres aus halbleitermaterial
DE19722221432 DE2221432A1 (de)	1972-05-02	1972-05-02	Verfahren und vorrichtung zum herstellen von mit ausnehmungen versehenen gegenstaenden aus halbleitermaterial

Publications (1)

Publication Number	Publication Date
NL7300628A true NL7300628A (fr)	1973-07-19

Family

ID=25762580

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
NL7300628A NL7300628A (fr)	1972-01-17	1973-01-16

Country Status (5)

Country	Link
JP (1)	JPS4883776A (fr)
BE (1)	BE794138A (fr)
FR (1)	FR2168398A1 (fr)
IT (1)	IT978151B (fr)
NL (1)	NL7300628A (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5391463U (fr) *	1976-12-27	1978-07-26

0
- BE BE794138D patent/BE794138A/fr unknown
1973
- 1973-01-15 IT IT1920473A patent/IT978151B/it active
- 1973-01-16 NL NL7300628A patent/NL7300628A/xx unknown
- 1973-01-16 FR FR7301452A patent/FR2168398A1/fr active Granted
- 1973-01-17 JP JP772073A patent/JPS4883776A/ja active Pending

Also Published As

Publication number	Publication date
BE794138A (fr)	1973-07-17
IT978151B (it)	1974-09-20
FR2168398A1 (en)	1973-08-31
FR2168398B3 (fr)	1976-01-16
JPS4883776A (fr)	1973-11-08

Publication	Publication Date	Title
JPS5128893B2 (fr)	1976-08-21
JPS4952136A (fr)	1974-05-21
JPS4934243A (fr)	1974-03-29
JPS5418584B2 (fr)	1979-07-09
JPS4942536U (fr)	1974-04-15
JPS4976806A (fr)	1974-07-24
DE2211107C3 (fr)	1974-05-02
JPS4887479A (fr)	1973-11-17
JPS4976432A (fr)	1974-07-23
JPS4981706U (fr)	1974-07-16
JPS5229465Y2 (fr)	1977-07-05
JPS5613624B2 (fr)	1981-03-30
JPS48103079A (fr)	1973-12-24
JPS48113575U (fr)	1973-12-25
JPS4956830U (fr)	1974-05-20
JPS4973512A (fr)	1974-07-16
JPS4975133U (fr)	1974-06-28
JPS4983391U (fr)	1974-07-18
BG20796A3 (fr)	1975-12-20
CH562680A5 (fr)	1975-06-13
BG17358A1 (fr)	1973-11-10
NL7214187A (fr)	1974-04-23
BG18939A1 (fr)	1975-04-30
BG21854A3 (fr)	1976-09-20
BG21870A3 (fr)	1976-09-20