NL7002828A - - Google Patents

Info

Publication number: NL7002828A
Authority: NL; Netherlands

Application number

NL7002828A

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1969-02-27

Filing date

1970-02-27

Publication date

1970-08-31

1969-12-11 Priority claimed from JP44099699A external-priority patent/JPS5023276B1/ja

1970-02-20 Priority claimed from JP45015124A external-priority patent/JPS5147026B1/ja

1970-02-27 Application filed filed Critical

1970-08-31 Publication of NL7002828A publication Critical patent/NL7002828A/xx

Links

Classifications

- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

NL7002828A 1969-02-27 1970-02-27 NL7002828A (en)

Applications Claiming Priority (5)

Application Number	Priority Date	Filing Date
JP1748069		1969-02-27
JP1748169		1969-02-27
JP44099699A JPS5023276B1 (en)	1969-12-11	1969-12-11
JP1220270		1970-02-12
JP45015124A JPS5147026B1 (en)	1970-02-20	1970-02-20

Publications (1)

Publication Number	Publication Date
NL7002828A true NL7002828A (en)	1970-08-31

Family

ID=27519374

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
NL7002828A NL7002828A (en)	1969-02-27	1970-02-27

Country Status (3)

Country	Link
DE (1)	DE2009284C3 (en)
GB (1)	GB1305792A (en)
NL (1)	NL7002828A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CN112083578A (en) *	2020-08-26	2020-12-15	中国科学院西安光学精密机械研究所	Target simulator for image surface docking of photoelectric equipment, debugging system and method

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3853398A (en) *	1972-07-05	1974-12-10	Canon Kk	Mask pattern printing device
US4473293A (en) *	1979-04-03	1984-09-25	Optimetrix Corporation	Step-and-repeat projection alignment and exposure system
US4573791A (en) *	1979-04-03	1986-03-04	Optimetrix Corporation	Step-and-repeat projection alignment and exposure system
US4597664A (en) *	1980-02-29	1986-07-01	Optimetrix Corporation	Step-and-repeat projection alignment and exposure system with auxiliary optical unit
EP0035113B1 (en) *	1980-02-29	1985-12-11	Eaton-Optimetrix Inc.	Alignment apparatus
US4452526A (en) *	1980-02-29	1984-06-05	Optimetrix Corporation	Step-and-repeat projection alignment and exposure system with auxiliary optical unit
DD158824A1 (en) *	1980-11-03	1983-02-02	Adelbrecht Schorcht	ARRANGEMENT FOR AUTOMATIC ADJUSTMENT OF AT LEAST ONE OBJECT
US4577958A (en) *	1982-06-18	1986-03-25	Eaton Optimetrix, Inc.	Bore-sighted step-and-repeat projection alignment and exposure system
JPS5928337A (en) *	1982-08-09	1984-02-15	Hitachi Ltd	Projection aligner
US4577957A (en) *	1983-01-07	1986-03-25	Eaton-Optimetrix, Inc.	Bore-sighted step-and-repeat projection alignment and exposure system

1970
- 1970-02-27 GB GB957070A patent/GB1305792A/en not_active Expired
- 1970-02-27 DE DE19702009284 patent/DE2009284C3/en not_active Expired
- 1970-02-27 NL NL7002828A patent/NL7002828A/xx unknown

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CN112083578A (en) *	2020-08-26	2020-12-15	中国科学院西安光学精密机械研究所	Target simulator for image surface docking of photoelectric equipment, debugging system and method
CN112083578B (en) *	2020-08-26	2021-06-22	中国科学院西安光学精密机械研究所	Target simulator for image surface docking of photoelectric equipment, debugging system and method

Also Published As

Publication number	Publication date
DE2009284A1 (en)	1970-09-10
DE2009284C3 (en)	1974-08-22
DE2009284B2 (en)	1974-01-03
GB1305792A (en)	1973-02-07

Publication	Publication Date	Title
AU465413B2 (en)	1975-09-11
AU429630B2 (en)	1972-10-26
CS151044B2 (en)	1973-09-17
AU450150B2 (en)	1970-11-12
AU442375B2 (en)	1973-11-06
AU470301B1 (en)	1972-05-25
AU427401B2 (en)	1972-08-17
AU470661B1 (en)	1970-10-05
AU442535B2 (en)	1973-11-12
AU442380B2 (en)	1973-11-05
AU438128B2 (en)	1973-07-16
AU442357B2 (en)	1973-11-07
AU442322B2 (en)	1973-11-02
AU442285B2 (en)	1973-11-02
AU442463B2 (en)	1973-11-09
AU4949169A (en)	1970-07-30
AU5109569A (en)	1970-08-27
AU4540468A (en)	1971-04-01
CS151128B1 (en)	1973-09-17
CS150637B2 (en)	1973-09-04
AU4923469A (en)	1970-07-23
AU5077469A (en)	1970-08-27
AU5006968A (en)	1970-08-06
CH584690A5 (en)	1977-02-15
BE736073A (en)	1969-12-16