NL6908499A - - Google Patents
Info
- Publication number
- NL6908499A NL6908499A NL6908499A NL6908499A NL6908499A NL 6908499 A NL6908499 A NL 6908499A NL 6908499 A NL6908499 A NL 6908499A NL 6908499 A NL6908499 A NL 6908499A NL 6908499 A NL6908499 A NL 6908499A
- Authority
- NL
- Netherlands
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/061—Electron guns using electron multiplication
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/077—Electron guns using discharge in gases or vapours as electron sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/08—Ion sources; Ion guns
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB26600/68A GB1275261A (en) | 1968-06-04 | 1968-06-04 | Improvements in or relating to non thermionic cathode slow discharge devices |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL6908499A true NL6908499A (en) | 1969-12-08 |
Family
ID=10246166
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL6908499A NL6908499A (en) | 1968-06-04 | 1969-06-04 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US3614510A (en) |
| JP (1) | JPS493119B1 (en) |
| DE (1) | DE1927979A1 (en) |
| FR (1) | FR2013329A1 (en) |
| GB (1) | GB1275261A (en) |
| NL (1) | NL6908499A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2245779B1 (en) * | 1973-09-28 | 1978-02-10 | Cit Alcatel | |
| NL160114C (en) * | 1974-05-27 | 1979-09-17 | Philips Nv | GAS DISCHARGE ELECTRONIC GUN OF THE HOLLOW ANODE TYPE FOR GENERATING AN ELECTRON BEAM USING A GLASS DISCHARGE. |
| CH658545A5 (en) * | 1982-09-10 | 1986-11-14 | Balzers Hochvakuum | METHOD FOR EVENLY HEATING HEATING MATERIAL IN A VACUUM RECIPIENT. |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3262003A (en) * | 1962-05-25 | 1966-07-19 | Martin Marietta Corp | Perforated hollow cathode discharge device |
| US3381157A (en) * | 1964-12-10 | 1968-04-30 | United Aircraft Corp | Annular hollow cathode discharge apparatus |
| US3414702A (en) * | 1965-05-28 | 1968-12-03 | Gen Electric | Nonthermionic electron beam apparatus |
| US3383541A (en) * | 1965-11-17 | 1968-05-14 | United Aircraft Corp | Glow discharge cathode having a large electron beam emitting aperture |
| US3430091A (en) * | 1965-11-17 | 1969-02-25 | United Aircraft Corp | Contoured glow discharge cathode producing focused electron beams |
| GB1154379A (en) * | 1965-12-30 | 1969-06-04 | Atomic Energy Authority Uk | Improvements in or relating to Cold-Cathode Discharge Devices |
| GB1209026A (en) * | 1966-10-26 | 1970-10-14 | Atomic Energy Authority Uk | Improvements in or relating to cold cathode, glow discharge device |
| US3466487A (en) * | 1967-06-16 | 1969-09-09 | United Aircraft Corp | Device for moving a beam of charged particles |
-
1968
- 1968-06-04 GB GB26600/68A patent/GB1275261A/en not_active Expired
-
1969
- 1969-06-02 US US829544A patent/US3614510A/en not_active Expired - Lifetime
- 1969-06-02 DE DE19691927979 patent/DE1927979A1/en active Pending
- 1969-06-03 FR FR6918266A patent/FR2013329A1/fr not_active Withdrawn
- 1969-06-04 JP JP44043924A patent/JPS493119B1/ja active Pending
- 1969-06-04 NL NL6908499A patent/NL6908499A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| GB1275261A (en) | 1972-05-24 |
| JPS493119B1 (en) | 1974-01-24 |
| FR2013329A1 (en) | 1970-04-03 |
| DE1927979A1 (en) | 1970-02-05 |
| US3614510A (en) | 1971-10-19 |