NL6516051A - - Google Patents
Info
- Publication number
- NL6516051A NL6516051A NL6516051A NL6516051A NL6516051A NL 6516051 A NL6516051 A NL 6516051A NL 6516051 A NL6516051 A NL 6516051A NL 6516051 A NL6516051 A NL 6516051A NL 6516051 A NL6516051 A NL 6516051A
- Authority
- NL
- Netherlands
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/077—Electron guns using discharge in gases or vapours as electron sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J17/00—Gas-filled discharge tubes with solid cathode
- H01J17/02—Details
- H01J17/04—Electrodes; Screens
- H01J17/06—Cathodes
- H01J17/066—Cold cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2893/00—Discharge tubes and lamps
- H01J2893/0064—Tubes with cold main electrodes (including cold cathodes)
- H01J2893/0065—Electrode systems
- H01J2893/0066—Construction, material, support, protection and temperature regulation of electrodes; Electrode cups
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Plasma Technology (AREA)
- Electron Sources, Ion Sources (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
- Arc Welding In General (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US417399A US3381157A (en) | 1964-12-10 | 1964-12-10 | Annular hollow cathode discharge apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL6516051A true NL6516051A (xx) | 1966-06-13 |
Family
ID=23653867
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL6516051A NL6516051A (xx) | 1964-12-10 | 1965-12-09 |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US3381157A (xx) |
| BE (1) | BE673420A (xx) |
| CH (1) | CH457631A (xx) |
| DE (1) | DE1514990A1 (xx) |
| ES (1) | ES320887A1 (xx) |
| FR (1) | FR1455620A (xx) |
| GB (1) | GB1121115A (xx) |
| IL (1) | IL24630A (xx) |
| NL (1) | NL6516051A (xx) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5552675A (en) * | 1959-04-08 | 1996-09-03 | Lemelson; Jerome H. | High temperature reaction apparatus |
| US3452179A (en) * | 1967-04-12 | 1969-06-24 | Us Air Force | Electron optical system |
| US3466487A (en) * | 1967-06-16 | 1969-09-09 | United Aircraft Corp | Device for moving a beam of charged particles |
| US3492525A (en) * | 1968-03-11 | 1970-01-27 | United Aircraft Corp | Sectional hollow cathode discharge apparatus |
| GB1275261A (en) * | 1968-06-04 | 1972-05-24 | Atomic Energy Authority Uk | Improvements in or relating to non thermionic cathode slow discharge devices |
| US3769008A (en) * | 1971-05-19 | 1973-10-30 | B Borok | Method for sintering workpieces of pressed powdered refractory metal or alloy and vacuum furnace for performing the same |
| JPS547321B2 (xx) * | 1973-11-21 | 1979-04-05 | ||
| US4377773A (en) * | 1980-12-12 | 1983-03-22 | The United States Of America As Represented By The Department Of Energy | Negative ion source with hollow cathode discharge plasma |
| GB8601421D0 (en) * | 1986-01-21 | 1986-02-26 | Welding Inst | Charged particle beam generator |
| GB2194673B (en) * | 1986-08-30 | 1990-10-24 | English Electric Valve Co Ltd | Apparatus for forming an electron beam sheet |
| FR2618602B1 (fr) * | 1987-07-22 | 1990-01-05 | Centre Nat Rech Scient | Source d'electrons |
| EA020763B9 (ru) | 2008-08-04 | 2015-05-29 | Эй-Джи-Си Флет Гласс Норт Эмерике, Инк. | Источник плазмы и способы нанесения тонкопленочных покрытий с использованием плазменно-химического осаждения из газовой фазы |
| PL2401232T3 (pl) * | 2009-02-24 | 2016-10-31 | Bezpośrednie napylanie próżniowe wspomagane plazmą z współosiowej drążonej katody i związany z nim sposób | |
| KR102365939B1 (ko) | 2014-12-05 | 2022-02-22 | 에이지씨 플랫 글래스 노스 아메리카, 인코퍼레이티드 | 거대-입자 감소 코팅을 활용하는 플라즈마 소스 및 박막 코팅의 증착과 표면의 개질을 위해 거대-입자 감소 코팅을 활용하는 플라즈마 소스의 사용 방법 |
| CN107852805B (zh) | 2014-12-05 | 2020-10-16 | Agc玻璃欧洲公司 | 空心阴极等离子体源 |
| US9721764B2 (en) | 2015-11-16 | 2017-08-01 | Agc Flat Glass North America, Inc. | Method of producing plasma by multiple-phase alternating or pulsed electrical current |
| US9721765B2 (en) | 2015-11-16 | 2017-08-01 | Agc Flat Glass North America, Inc. | Plasma device driven by multiple-phase alternating or pulsed electrical current |
| US10573499B2 (en) | 2015-12-18 | 2020-02-25 | Agc Flat Glass North America, Inc. | Method of extracting and accelerating ions |
| US10242846B2 (en) | 2015-12-18 | 2019-03-26 | Agc Flat Glass North America, Inc. | Hollow cathode ion source |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2084172A (en) * | 1930-12-13 | 1937-06-15 | Rca Corp | Electron tube |
| GB888609A (en) * | 1957-07-31 | 1962-01-31 | Cie Francaise Thomsom Houston | Improvements in and relating to electron emitting devices |
| US3262013A (en) * | 1962-02-02 | 1966-07-19 | Martin Marietta Corp | Perforated hollow cathode discharge device |
| US3210518A (en) * | 1962-12-21 | 1965-10-05 | Alloyd Electronics Corp | Hollow cathode device |
| US3218431A (en) * | 1962-12-27 | 1965-11-16 | Gen Electric | Self-focusing electron beam apparatus |
-
1964
- 1964-12-10 US US417399A patent/US3381157A/en not_active Expired - Lifetime
-
1965
- 1965-11-16 IL IL24630A patent/IL24630A/en unknown
- 1965-11-19 GB GB49176/65A patent/GB1121115A/en not_active Expired
- 1965-11-23 DE DE19651514990 patent/DE1514990A1/de active Pending
- 1965-11-25 FR FR39701A patent/FR1455620A/fr not_active Expired
- 1965-12-03 CH CH1673865A patent/CH457631A/de unknown
- 1965-12-08 BE BE673420D patent/BE673420A/xx unknown
- 1965-12-09 NL NL6516051A patent/NL6516051A/xx unknown
- 1965-12-10 ES ES0320887A patent/ES320887A1/es not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| FR1455620A (fr) | 1966-10-14 |
| BE673420A (xx) | 1966-04-01 |
| IL24630A (en) | 1969-11-30 |
| GB1121115A (en) | 1968-07-24 |
| DE1514990A1 (de) | 1970-07-23 |
| US3381157A (en) | 1968-04-30 |
| CH457631A (de) | 1968-06-15 |
| ES320887A1 (es) | 1966-09-01 |