NL266760A - - Google Patents
Info
- Publication number
- NL266760A NL266760A NL266760DA NL266760A NL 266760 A NL266760 A NL 266760A NL 266760D A NL266760D A NL 266760DA NL 266760 A NL266760 A NL 266760A
- Authority
- NL
- Netherlands
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Physical Vapour Deposition (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CS438860 | 1960-07-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL266760A true NL266760A (de) |
Family
ID=5386503
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL124459D NL124459C (de) | 1960-07-08 | ||
| NL266760D NL266760A (de) | 1960-07-08 |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL124459D NL124459C (de) | 1960-07-08 |
Country Status (4)
| Country | Link |
|---|---|
| DE (1) | DE1142262B (de) |
| FR (1) | FR1294562A (de) |
| GB (1) | GB939275A (de) |
| NL (2) | NL266760A (de) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3314873A (en) * | 1962-11-28 | 1967-04-18 | Western Electric Co | Method and apparatus for cathode sputtering using a cylindrical cathode |
| GB1039691A (en) * | 1964-03-17 | 1966-08-17 | Gen Precision Inc | Vacuum coating and ion bombardment apparatus |
| US3318790A (en) * | 1964-04-29 | 1967-05-09 | Texas Instruments Inc | Production of thin organic polymer by screened glow discharge |
| US3344055A (en) * | 1964-04-29 | 1967-09-26 | Texas Instruments Inc | Apparatus for polymerizing and forming thin continuous films using a glow discharge |
| US3325393A (en) * | 1964-05-28 | 1967-06-13 | Gen Electric | Electrical discharge cleaning and coating process |
| US3351543A (en) * | 1964-05-28 | 1967-11-07 | Gen Electric | Process of coating diamond with an adherent metal coating using cathode sputtering |
| US3526584A (en) * | 1964-09-25 | 1970-09-01 | Western Electric Co | Method of providing a field free region above a substrate during sputter-depositing thereon |
| US3507774A (en) * | 1967-06-02 | 1970-04-21 | Nat Res Corp | Low energy sputtering apparatus for operation below one micron pressure |
| US3361659A (en) * | 1967-08-14 | 1968-01-02 | Ibm | Process of depositing thin films by cathode sputtering using a controlled grid |
| US3530055A (en) * | 1968-08-26 | 1970-09-22 | Ibm | Formation of layers of solids on substrates |
| US4116793A (en) * | 1974-12-23 | 1978-09-26 | Telic Corporation | Glow discharge method and apparatus |
| JPS6040507B2 (ja) * | 1978-07-08 | 1985-09-11 | テルマク・アンラ−ゲンバウ・アクチエンゲゼルシャフト | 誘電性の被加工材料上に金属層或いは合金層を積層させる方法およびこの方法を実施するための装置 |
-
0
- NL NL124459D patent/NL124459C/xx active
- NL NL266760D patent/NL266760A/xx unknown
-
1961
- 1961-07-06 GB GB2439661A patent/GB939275A/en not_active Expired
- 1961-07-07 DE DEC24617A patent/DE1142262B/de active Pending
- 1961-07-08 FR FR867429A patent/FR1294562A/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| GB939275A (en) | 1963-10-09 |
| FR1294562A (fr) | 1962-05-26 |
| NL124459C (de) | |
| DE1142262B (de) | 1963-01-10 |