NL254549A - - Google Patents
Info
- Publication number
- NL254549A NL254549A NL254549DA NL254549A NL 254549 A NL254549 A NL 254549A NL 254549D A NL254549D A NL 254549DA NL 254549 A NL254549 A NL 254549A
- Authority
- NL
- Netherlands
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/10—Reaction chambers; Selection of materials therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
- H01L21/223—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a gaseous phase
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DES64342A DE1100820B (de) | 1959-08-07 | 1959-08-07 | Vorrichtung zur Herstellung von Halbleiter-anordnungen durch Dotieren von Halbleiterkoerpern aus der Gasphase und Verfahren mittels einer solchen Vorrichtung |
Publications (1)
Publication Number | Publication Date |
---|---|
NL254549A true NL254549A (xx) |
Family
ID=7497114
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL254549D NL254549A (xx) | 1959-08-07 |
Country Status (4)
Country | Link |
---|---|
CH (1) | CH387803A (xx) |
DE (1) | DE1100820B (xx) |
GB (1) | GB907164A (xx) |
NL (1) | NL254549A (xx) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2849240C2 (de) * | 1978-11-13 | 1983-01-13 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | CVD-Beschichtungsvorrichtung für Kleinteile und ihre Verwendung |
FR2542432B1 (fr) * | 1983-03-08 | 1985-07-19 | Centre Nat Etd Spatiales | Dispositif chauffant transparent comprenant au moins deux zones a temperatures differentes |
CN101942697B (zh) * | 2010-08-23 | 2012-11-14 | 清华大学 | 光伏多晶硅铸锭炉测温热电偶套管抽真空装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2742383A (en) * | 1952-08-09 | 1956-04-17 | Hughes Aircraft Co | Germanium junction-type semiconductor devices |
BE555455A (xx) * | 1956-05-18 | |||
DE1040799B (de) * | 1957-03-15 | 1958-10-09 | Telefunken Gmbh | Anordnung zum Hochreinigen und/oder Dopen eines Halbleiterkoerpers |
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0
- NL NL254549D patent/NL254549A/xx unknown
-
1959
- 1959-08-07 DE DES64342A patent/DE1100820B/de active Pending
-
1960
- 1960-08-02 CH CH875960A patent/CH387803A/de unknown
- 1960-08-08 GB GB2738760A patent/GB907164A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
DE1100820B (de) | 1961-03-02 |
CH387803A (de) | 1965-02-15 |
GB907164A (en) | 1962-10-03 |