NL2012474A

NL2012474A - Transferable system for use in in-situ experiments in a microscope.

Info

Publication number: NL2012474A
Application number: NL2012474A
Authority: NL
Inventors: Willem Zandbergen Hendrik
Original assignee: Univ Delft Tech
Priority date: 2014-03-19
Filing date: 2014-03-19
Publication date: 2015-12-08
Also published as: NL2012474B1; WO2015142177A1

Description

Transferable system for use in in-situ experiments in a microscope

FIELD OF THE INVENTION

The present invention is in the field of a transferable system for use in in-situ experiments in a microscope and spectrometer, use of said transferable system, and a microscope and spectrometer comprising said transferable system.

BACKGROUND OF THE INVENTION

The present invention is in the field of microscopy, X-ray microscopy, specifically in the field of electron microscopy (EM), and spectroscopy. However its application is extendable in principle to any field of microscopy, such as optical microscopy, especially wherein a specimen (or sample) is manipulated.

Microscopy is a technique used particularly in semiconductor and materials science fields as well as for biological samples for site-specific analysis, and optionally deposition, and ablation of materials. Also it is widely used in life sciences to obtain information in the 0.1 nm to 1 pm resolution domain. In microscopy typically a source is used to obtain an image. The source may be a source of light, electrons, and ions. Under optimal conditions a modern microscope can image a sample with a spot size typically in the order of a few tenths of nanometers for a TEM, a nanometer for a FIB and Scanning (S)EM, and a few hundred nanometers for an optical microscope.

Typically a sample to be observed is provided in a holder. The holder is placed in a microscope, such as a TEM, and then the holder is manipulated, such as by a goniometer. Therewith a sample can be observed under different observation angles. If a sample needs to be observed in a required environment, such as in oxygen, some microscopes, such as electron microscopes and the like, are inherently unsuited, whereas for other microscopes special measures have to be taken. Prior art systems typically relate to a complex system, including gas holders, tubing, etc. to provide a gas.

Often a sample needs to be observed under various (more than one) conditions. Such requires changing of equipment, possible exposure of the sample to the environment, etc.

For instance, one might want to take a sample out of one type of analysis system like an EM to another type of analysis system like an optical spectrometer, whereby it is essential that the sample remains exactly the same and thus is not modified during the transfer. Such is at the very least not practical.

Often sample need to be observed under dynamic or static conditions. Such functionality is practically not possible in prior art systems.

Researchers have been trying hardly to develop a system that can monitor dynamic gas-solid, and liquid-solid reaction of samples in a TEM, with a required resolution up to 0.5 A. Such a system can be obtained by differentially pumped apertures in the TEM, dedicated environmental transmission electron microscope (ETEM), which gives very high resolution at a limited gas pressure, < 50 Torr. Another approach is to develop a gas holder with two electron transparent windows isolating its gas channel to the TEM column. Gas is provided to the system through long inlet and outlet tubes which can result in safety issue if there exists a leakage. As mentioned, these systems are considered not practical for various reasons .

The present invention therefore relates to a transferable system for use in (combination with) microscopy and spectroscopy, and a microscope or spectrometer comprising said transferable system, which solve one or more of the above problems and drawbacks of the prior art, providing reliable results, without jeopardizing functionality and advantages.

SUMMARY OF THE INVENTION

The present invention relates to a transferable system according to claim 1, use of the transferable system according to claim 9, and a microscope according to claim 10.

For convenience of the reader a table with reference numerals is incorporated below.

With the present removable transferable system it is now possible to make use of various shapes of samples, functionality, to perform experiments at temperatures up to about 800 °C, in a safe way, in a user friendly way, with improved control and reliability, etc. The present transferable system can be moved from a first system, such as a SEM, to another system, such as an aging tool. Likewise gas loading can be done at a location, and thereafter sealing the present transferable system, and then moving the transferable system to an analytical tool, to an ex-situ aging set-up etc. It is considered essential in this exchange from one system to another system is that the specimen (sample) is shielded, e.g. from the ambient atmosphere. Herein use can be made of a removable gas system, including one or more gas tubes for loading the gas .

With the present transferable system easy and very controlled transfer from and to a gas loading or liquid loading system is now possible. Heating of a sample, also during transfer, is an option. The transferable system may be considered as a stand-alone system and it does not require complicated gas-flow systems, such as in flowing-gas holders.

An advantage is that much less gas/liquid compared to prior art systems is used, and thus less danger is brought to e.g. a TEM and operators thereof. A control over gas pressure can be realised by add-on features, such as micro pump. A precise measurement of pressure is possible with a micro pressure meter, which may be included in the removable transferable system. The may be clamped to the holder well and very easily.

The transferable system may comprise a reactor, such as a micro reactor or a nanoreactor, and may have inherent functionality to function as a reactor. Electrical connections from the holder and/or from the transferable system to the reactor can be made easily. Therewith the reactor can be operated with ease.

From a practical point of view the present transferable system can be cleaned and/or baked out, in order for it to be ready for further experimentation, without much effort.

As the transferable system is removable it can be hooked into/onto an aging set-up. In the set-up the sample can be subjected to aging e.g. at industrial conditions such as 1.000 kPa (10 bar). The pressure can be very high by realising a pressure of a reaction gas inside the (nano) reactor and a pressure of an inert gas of the same pressure outside of the (nano) reactor .

The present transferable system can contain compartments, e.g. to store optional reaction products. It can also contain a sieve, such as a molecular sieve. It may also contain an absorbent, e.g. to absorb water.

Further components may be present in the (nano)-reactor or the rest of the transferable system, such as a pump to pump a gas around. Certain reaction products may be captured for instance by absorption.

Aging experiments have become an important issue. The transferable system can be positioned into a set-up in which gas can be led controllably through the present transferable system, c.q. nanoreactor, at a constant (flow) rate over a long period of time (months) and whereby every now and then the sample changes may be quickly checked by TEM. Such an (aging) experiment could take from a few days to months.

The present transferable system is suited for advanced material science research, e.g. at harsh conditions, and control of advanced manufacturing, such as semiconductor manufacturing. The present transferable system is also suited for loading in a glovebox and the like.

The present transferable system, as indicated above, is very well suited for use in in-situ experiments, including aging. Thereto the transferable system comprises a space for receiving a sample to be observed in in-situ experiments. The space typically comprises a window, through which the sample may be inspected. The window may be a quartz or glass window, e.g. for use in optical microscopy, a SiN window, for use in electron microscopy, etc. The window is preferably as thin as possible, to reduce interference thereof, and thick enough to withstand pressure. It also provides adequate sealing properties, e.g. in view of gas/liquid used.

For performing in-situ experiments at least one gas and/or liquid is provided. The gas or liquid is stored in a container, until it may be released. It can be released at once, gradually, intermittent, etc., as required. The present container typically has a volume of lCT3-500 mm3, such as 1CT2-100 mm3. The present transferable system may be somewhat larger in size if more than one gas/liquid is provided, the present containers may be somewhat smaller, or both.

For transferring the gas/liquid from the container to the space at least one fluid passage way is provided. The passage way has suitable dimensions, such as a width and height of 5-500 pm.

The gas/liquid remains in the transferable system, as such, and/or as a reaction product. In other words, leakage of gas/liquid is minimized or absent.

As mentioned above, it is a big advantage that the present transferable system is removable. As such it can be mounted on a microscope, it can be stored as such, it can be mounted on an aging set-up, etc. Thereto on set of contacts may be present, or a variety of contacts, providing mounting of the transferable system on various devices.

In view of costs the present transferable system is clearly much cheaper and less complicated than e.g. a (complete) holder offering similar possibilities.

In a second aspect the present invention relates to use of the present transferable system, and in a third aspect to a microscope comprising said transferable system.

Thereby the present invention provides a solution to one or more of the above mentioned problems and drawbacks.

Advantages of the present description are detailed throughout the description.

DETAILED DESCRIPTION OF THE INVENTION

The present invention relates in a first aspect to a transferable system according to claim 1.

In an example the present transferable system comprises a means for moving gas or liquid, such as a pump, a chip, a piezo element, a piston, a pressure differentiator (for creating a difference in pressure), and a high pressure chamber. The example provides an alternative to static experiments, where conditions remain (largely) the same, by moving gas/liquid around. Therewith the present transferable system can be operated in a dynamic fashion. The means for moving the gas/liquid are typically so small that they can be integrated in the (design of) the transferable system. Therewith all of the functionality of the transferable system can be moved together with the transferable system.

In an example the present transferable system comprises one or more of a pressure sensor, a temperature sensor, a heat provider, a valve, a gas/liquid chamber, a gas/liquid inlet, a gas/liquid outlet, a sealing, a cover, a heat regulator, software, logics, a controller, a specimen (micro)heat provider, wherein the specimen (micro)heat provider comprises an first electrically controlled heat device, having a maximum heat capacity of 0.01 mW-1 W, such as 0.1 mW-0.5 W, a MEMS, a means for accessing the container, a contact, preferably 2-6 contacts, a compartment, a sieve, an absorbent, a capturing agent, a catalyst, a cooler, and a gel. The sealing provides adequate sealing for the gas/liquid. The sensors and meters are for measuring parameters. The measurements obtained can be used to control the conditions in the transferable system. The inlets, outlets and valves can be used to direct the gas/liquids to a location and to provide or remove the gas/liquid, respectively. For heating a sample or a reactor one or more heat providers are provided in the example. Software and controllers, on board, external, or in combination, can be used to control variables. The at least one container is filled with a liquid/gas, typically at a different location compared to a location where in-situ experiments take place.

In order to fill the present container special measures may be taken (see examples), and the gas/liquid is confined in the container by a closing means/accessing means, such as a screw. Further also various contacts are provided, typically electrical contacts, e.g. for providing heat, for manipulating elements in the transferable system, such as opening/closing a valve, for manipulating a position of the sample/transferable system, in order to observe the sample under a different angle (or angles). The MEMS device(s) may also contain logics, e.g. for optimizing performance, operability and reducing a number of (electrical) connections.

One of the big problems with in-situ electron microscopy and X-ray microscopy experiments with a gas is deposition of C-like species on the surface of a sample to be investigated, due to cracking of hydrocarbon molecules to carbon-type species by an electron beam or an X-ray beam. Further, water can play a catalytic role in this cracking. Both the hydrocar- bons and the water are present as contamination in the (nano) reactor as well as the gas system in the transferable system. It is very difficult in prior art systems to get rid of these contaminants. For instance, heating of a chip to about 500 °C is required, in combination with heating a sample to 250 °C (if possible at all). Use of a glove box or the like is found to be insufficient in this respect as well. It has been found that if the transferable system is cooled to a temperature well below 0 °C, such as -50 °C, surface diffusion and release from the surface of the unwanted hydrocarbon and water molecules can be greatly reduced. The present MEMS heater allows for very local heating, a high temperature in the sample area can be realized, while the transferable system and the main body of the nanoreactor are at such a low temperature that they will not release any unwanted hydrocarbon and water molecules and even capture these if a gas is flown through them. In a similar manner, somewhere in the transferable system one can realize capturing "agents" such as a zeolites, and noble metals, such as Pd, or one can actively crack the hydrocarbons by a combination of local temperature and cracking catalysts, which can be realized in a second or third nanoreactor optionally included in the transferable system.

In an example the present transferable system comprises a means of manipulating the sample, such as a multicontact device. Therewith the sample can be observed at a different location/angle. The present transferable system may also be capable of providing double tilt, a first tilt provided by the goniometer and the second tilt provided by the (specimen) cradle.

In an example the present transferable system comprises one or more connections, such as to a microscope holder, such as electrical connections, fixing means, and manipulation means. By having connections the transferable system can be fixed in place, such as to a microscope. An example is a slit type connection. A click type connection is for some systems considered not particularly suited in view of a risk of damage of parts of the system. Further the transferable system is preferably fixed, such as to (a holder of) the microscope, in order to secure its relative position. The trans- ferable system may also comprise manipulating means. Therewith the transferable system and sample can be observed under different conditions and angles.

In an example of the present transferable system the microscope is selected from an electron microscope, an IR-microscope, a Raman-microscope, X-ray microscope, and an optical microscope, such as a TEM, a SEM, a transmission mode SEM, and combinations thereof. The spectrometer may be selected form a (FT)IR spectrometer, a UV(-vis) spectrometer, and a Raman spectrometer. The present transferable system is exchangeable to various sorts of microscopes. Therewith a spectrum of different observation techniques is available.

In an example of the present transferable system the means for sealing the reactor can withstand 100 kPa, preferably 500 kPa. The present space and container and window are preferably sealed tightly, in order to withstand pressures (an outside pressure in a SEM is typically absent). Such allows for at least some variation of pressure inside the present transferable system, and thus to perform in-situ experiments under (partly) pressurized conditions.

In an example the present transferable system is in combination with a holder. Typically such a holder is present in for instance an electron microscope, such as a SEM, and a TEM.

In an example the holder, and likewise the microscope and spectrometer may comprise a cooler for providing cooling to a sample and/or to the transferable system.

In a second aspect the present invention relates to a use of the present transferable system according to claim 9. Herewith a large range of experiments may be performed with the present transferable system.

In a third aspect the present invention relates to a microscope and a spectrometer according to claim 10. Such a microscope, in combination with the present transferable system, provides an easy to use and flexible set up for a large variety of experiments.

The one or more of the above examples and embodiments may be combined, falling within the scope of the invention.

EXAMPLES

The invention is further detailed by the accompanying figures, which are exemplary and explanatory of nature and are not limiting the scope of the invention. To the person skilled in the art it may be clear that many variants, being obvious or not, may be conceivable falling within the scope of protection, defined by the present claims.

FIGURES

The invention although described in detailed explanatory context may be best understood in conjunction with the accompanying figures.

Figure 1. (a) Image of the static gas holder and its large view in the transferable system part, (b) A sketch of holder transferable system in cross section view. O-ring positions are indicated with arrows. Figure 2. (a) PdOx nanoparticles in 02 with pressure of 64.5 kPa (0.645 bar) at 500 °C. (b) FFT of image (a), the white circle is 1 A. The triangle indicates a diffraction spot with a d-spacing of 0.88 A.

Figure 3. Pd nanoparticles in H2 with a pressure of 52 kPa (0.52 bar) at 200 °C. (b) FFT of image (a), the white circle is 1 A. The triangle indicates a diffraction spot with a d-spacing of 0.85 A.

Figure 4 shows a gas loading system.

Figure 5 shows a gas loading system.

Figure 6 shows a side view of a transferable system.

Figure 7a shows a side view of a transferable system in com bination with a receiving holder in a non-connected status, whereas figure 7b a connected status. Figure 7c shows a top view of figure 7b.

Figure 8 shows a side view of a transferable system in combination with a receiving holder.

Figure 9 shows a side view of a transferable system in combination with a receiving holder in a TEM. DETAILED DESCRIPTION OF THE FIGURES List of elements: 100: Transferable system 131: Fluid passageway from nanoreactor to outlet (partly visible) 132: Fluid passageway from nanoreactor to inlet

133: Fluid passageway from nanoreactor to extra MEMS 134: Fluid passageway from extra MEMS to inlet (and out let) (gas line) partly visible 150: Nanoreactor 16 0: Pump 170: Extra MEMS device 180: Fixing means electrical contacts (block) 190: Electrical connector (contact); optionally more con nectors 200: Gas fill equipment 210: Transparent Flange 211: Viewing window (optional) 220: Stops to prevent that screwdriver is blown out/in 230: Screwdriver, screw not in transferable system 232a,b: Screw valve 236: Screw for closure 240: To vacuum gas supply and vacuum 2 51 : Inlet 252: Outlet 280: Transferable system support 300: Transferable system receiver 321: (Electrical) contacts for control (e.g. pressure me ter ) 322: (Electrical) contacts for control of (nano) reactor 323: (Electrical) contact pads 410: TEM Holder 420: Vacuum Chamber 430: Electron beam 460: Sapphire window 480: Laser 481: Laser pulse 482: Reflected laser pulse (to e.g. Raman spectrometer)

In an example of the present invention a TEM experiment is given beyond the ~ 2 kPa (20 mbar) pressure regime that is achieved by ETEM. In the present nanoreactor concept, a gas is enclosed along the beam direction by two very thin membranes of for instance SiN. With this approach pressures up to 450 kPa (4.5 bar) are obtainable. An obvious question in this approach is what kind of resolution can be obtained, given that the resolution limit is now no longer set by the electron microscopes, provided these are equipped with aberration correctors.

Inventors present a new type of gas holder, which in an example relates to a static gas holder, which has also two windows but no dynamic gas supply system (figure 1). Instead, the holder has a separable tip, which contains an airtight chamber that can store gas with volume of 1.5 to 10 cubic millimeter. Gas is loaded in or pumped out through a valve in the tip (see figure 1). Similar to the dynamic nanoreactor, it consists of two silicon chips, which have a low stress 400 nm thick SiN membrane of for instance 400 pm x 400 pm. One of the two membranes contains a Pt heater spiral and both of the membranes contain with 5-20 small thin SiN membranes "windows" with thickness of 10-20 nm. The windows of the top and bottom chip have to be aligned to be overlapping, such that a sample on top of one of the windows can be investigated by transmission electron microscopy. In this system, the temperature can be changed within a second over for instance 100°C with low specimen drift. Since the gas volume is very small, no harm to the gun part of the TEM when there is a sudden release of all gas inside the nanoreactor and the tip. An obstacle for high-resolution imaging can be the contamination in the system, which can originate from sample, chips, gases, O-rings etc.

We demonstrate that when contamination is minimized, the resolution of the system can reach the resolution limitation of the microscope at gas pressures of e.g. oxygen of at least 60 kPa (0.6 bar) (figure 2 and figure 3).

In figure 4 shows a gas loading system is shown. In view of optionally poisonous/toxic gas (or liquid) the present system if filled in an enclosed environment. Thereto the system (100) is placed on a transferable system support 280. The present system can be "opened" and "closed" by removing or introducing a screw 236 with a screw driver 230.

Figure 5 shows a gas loading system, comparable to figure 4, that can also be used as an aging set-up, because gas can be led through the nanoreactor over a long period of time, while if required the heater of the nanoreactor can maintain an elevated temperature. Note that the gas line 131 and valve 232b are connected by a gas line that is not in the field of view. Various fluid passageways 131,132, a reactor 150, screws 232, screw driver, and an inlet and outlet are shown .

Figure 6 shows a side view of a transferable system. Note that the gas line 132 and 134 are connected by a gas line that is not in the field of view. Further electrical connections 190 may be present. Typically these connections are fixed by fixing means 180. The system may further comprise one or more pumps 160, and a MEMS device 170.

Figure 7a shows a side view of a transferable system in combination with a receiving holder in a non-connected status, whereas figure 7b a connected status. Figure 7c shows a top view of figure 7b. The holder and system can be slit together, and likewise separated. Further various (electrical) contacts for control may be present, such as for control of the reactor, for control of various additional elements, such as a pressure meter, etc. Also contact pads 323 for the contacts may be present.

Figure 8 shows a side view of a transferable system in combination with a receiving holder. The present system 100 is placed in a TEM holder 410. A laser 480 may be provided for generating a laser pulse 481. The laser pulse passes through a sapphire window to the present system. A reflected laser pulse 482 may be further analysed, such as by a Raman spectrometer. The present system is located in a vacuum chamber (of the TEM) .

Figure 9 shows a side view of a transferable system in combination with a receiving holder in a TEM (see also fig. 8). Therein an electron beam 430 is shown (schematically).

Claims

1. Overdraagbaar systeem voor gebruik in in-situ experimenten omvattende: (a) een ruimte voor het opnemen van een monster; (b) ten minste één venster voor het inspecteren van het monster; (c) ten minste één houder voor gas of vloeistof; (d) ten minste één fluïdum doorgang voor het verbinden van de ruimte voor het opnemen van het monster en de houder voor gas of vloeistof, (e) waarbij het overdraagbaar systeem overdraagbaar is, en (f) waarin het gas/de vloeistof kan worden opgesloten in het overdraagbaar systeem.A transferable system for use in in-situ experiments comprising: (a) a space for taking a sample; (b) at least one window for inspecting the sample; (c) at least one gas or liquid container; (d) at least one fluid passage for connecting the space for receiving the sample and the gas or liquid container, (e) wherein the transferable system is transferable, and (f) in which the gas / liquid can become locked in the transferable system.

2. Overdraagbaar systeem volgens conclusie 1, verder omvattende een middel voor het verplaatsen van gas of vloeistof, zoals een pomp, een chip, een piëzoelement, een zuiger, een druk differentiator, en een hoge drukkamer.The transferable system of claim 1, further comprising a means for moving gas or liquid, such as a pump, a chip, a piezo element, a piston, a pressure differentiator, and a high pressure chamber.

3. Overdraagbaar systeem volgens één der voorgaande conclusies, verder omvattende één of meer van een druksensor, een temperatuursensor, een warmteverschaffer, een klep, een gas/vloeistofkamer, een gas/vloeistofinlaat, een gas/vloei-stofuitlaat, een afdichting, een bedekking, een warmteregula-tor, software, logica, een controller, een monster (micro)-warmteverschaffer, waarbij de monster (micro)warmteverschaffer een eerste elektrisch regelbare verwarmingsapparaat omvat, met een maximale warmtecapaciteit van 0,01 mW -1 W, zoals 0,1 mW -0.5 W, een MEMS, een middel voor de toegang tot de houder, een contact, bij voorkeur 2-6 contacten, een compartiment, een zeef, een absorberend middel, een afvangmiddel, een katalysator, een koeler, en een gel.A transferable system according to any one of the preceding claims, further comprising one or more of a pressure sensor, a temperature sensor, a heat provider, a valve, a gas / liquid chamber, a gas / liquid inlet, a gas / liquid outlet, a seal, a cover , a heat regulator, software, logic, a controller, a sample (micro) heat provider, wherein the sample (micro) heat provider comprises a first electrically controllable heater, with a maximum heat capacity of 0.01 mW -1 W, such as 0 , 1 mW -0.5 W, a MEMS, a means for access to the container, a contact, preferably 2-6 contacts, a compartment, a sieve, an absorbent, a scavenger, a catalyst, a cooler, and a gel.

4. Overdraagbaar systeem volgens één der voorgaande conclusies, verder omvattende een middel van het manipuleren van het monster, zoals een multicontactinrichting.A transferable system according to any of the preceding claims, further comprising a means of manipulating the sample, such as a multi-contact device.

5. Overdraagbaar systeem volgens één der voorgaande conclusies, verder omvattende één of meer verbindingen, zoals naar een microscoophouder, zoals elektrische aansluitingen, bevestigingsmiddelen en manipulatiemiddelen.A transferable system according to any one of the preceding claims, further comprising one or more connections, such as to a microscope holder, such as electrical connections, mounting means and manipulation means.

6. Overdraagbaar systeem volgens één der voorgaande conclusies, waarbij de microscoop is gekozen uit een elektronenmicroscoop, een IR-microscoop, een Raman-microscoop, een röntgenmicroscoop, en een optische microscoop, zoals een TEM, een SEM, een transmissie modus SEM, en combinaties daarvan.A transferable system according to any one of the preceding claims, wherein the microscope is selected from an electron microscope, an IR microscope, a Raman microscope, an X-ray microscope, and an optical microscope such as a TEM, an SEM, a transmission mode SEM, and combinations thereof.

7. Overdraagbaar systeem volgens één der voorgaande conclusies, waarbij de middelen voor het afdichten van de reactor 100 kPa kan weerstaan, bij voorkeur 500 kPa.A transferable system according to any one of the preceding claims, wherein the means for sealing the reactor can withstand 100 kPa, preferably 500 kPa.

8. Overdraagbaar systeem volgens één der voorgaande conclusies, in combinatie met een houder, waarbij de houder eventueel omvat een koeler.A transferable system according to any one of the preceding claims, in combination with a holder, the holder optionally comprising a cooler.

9. Gebruik van een overdraagbaar systeem volgens één der voorgaande conclusies, voor gebruik in het uitvoeren van een in-situ gas/vloeistof experiment zonder externe toevoer van gas/vloeistof, voor het uitvoeren van temperatuur geregelde experimenten, voor het uitvoeren van drukgestuurde experimenten, voor het veiligstellen van een monster gedurende een lange periode, voor het uitvoeren van giftig gas/vloeistof experimenten, voor het uitvoeren van gas/vloei-stof ondersteunde experimenten bij een druk van 0,1 kPa-500 kPa, voor veroude-ringsexperimenten, voor spectroscopie, en combinaties daarvan.Use of a transferable system according to any one of the preceding claims, for use in conducting an in-situ gas / liquid experiment without external gas / liquid supply, for conducting temperature-controlled experiments, for conducting pressure-controlled experiments, for securing a sample for a long period, for conducting toxic gas / liquid experiments, for conducting gas / liquid supported experiments at a pressure of 0.1 kPa-500 kPa, for aging experiments, for spectroscopy, and combinations thereof.

10. Microscoop gekozen uit een elektronenmicroscoop, een IR-microscoop, een Raman-microscoop, een röntgenmicroscoop, en een optische microscoop, zoals een TEM, een SEM, een transmissiemodus SEM, of spectrometer, gekozen uit een (FT)IR spectrometer, een UV(-vis) spectrometer, en een Raman spectrometer, en combinaties daarvan, omvattende een overdraagbaar systeem volgens één der conclusies 1-9.A microscope selected from an electron microscope, an IR microscope, a Raman microscope, an X-ray microscope, and an optical microscope, such as a TEM, an SEM, a transmission mode SEM, or spectrometer, selected from an (FT) IR spectrometer, an UV (-vis) spectrometer, and a Raman spectrometer, and combinations thereof, comprising a transferable system according to any of claims 1-9.

11. Microscoop volgens conclusie 10, omvattende een elektronenmicroscoop, zoals een TEM en SEM, en een geïntegreerde optische microscoop.A microscope according to claim 10, comprising an electron microscope, such as a TEM and SEM, and an integrated optical microscope.