NL2010611C2 - Magnetic actuator and method of controlling such a magnetic actuator. - Google Patents

Magnetic actuator and method of controlling such a magnetic actuator. Download PDF

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Publication number
NL2010611C2
NL2010611C2 NL2010611A NL2010611A NL2010611C2 NL 2010611 C2 NL2010611 C2 NL 2010611C2 NL 2010611 A NL2010611 A NL 2010611A NL 2010611 A NL2010611 A NL 2010611A NL 2010611 C2 NL2010611 C2 NL 2010611C2
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Netherlands
Prior art keywords
stage
coarse
fine
fine stage
coarse stage
Prior art date
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NL2010611A
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Dutch (nl)
Inventor
Josephus Wilhelmus Spronck
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Univ Delft Tech
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Publication of NL2010611C2 publication Critical patent/NL2010611C2/en

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F7/00—Magnets
    • H01F7/06—Electromagnets; Actuators including electromagnets
    • H01F7/08—Electromagnets; Actuators including electromagnets with armatures
    • H01F7/121—Guiding or setting position of armatures, e.g. retaining armatures in their end position
    • H01F7/122—Guiding or setting position of armatures, e.g. retaining armatures in their end position by permanent magnets
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F7/00—Magnets
    • H01F7/06—Electromagnets; Actuators including electromagnets
    • H01F7/08—Electromagnets; Actuators including electromagnets with armatures
    • H01F7/18—Circuit arrangements for obtaining desired operating characteristics, e.g. for slow operation, for sequential energisation of windings, for high-speed energisation of windings
    • H01F7/1844—Monitoring or fail-safe circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F7/00—Magnets
    • H01F7/06—Electromagnets; Actuators including electromagnets
    • H01F7/08—Electromagnets; Actuators including electromagnets with armatures
    • H01F7/18—Circuit arrangements for obtaining desired operating characteristics, e.g. for slow operation, for sequential energisation of windings, for high-speed energisation of windings
    • H01F7/1844—Monitoring or fail-safe circuits
    • H01F2007/185—Monitoring or fail-safe circuits with armature position measurement

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Description

Magnetic actuator and method of controlling such a magnetic actuator
The invention relates in the first place to a magnetic actuator.
US-A-5,003,211 discloses a permanent magnet flux biased magnetic actuator with flux feedback for adjustably suspending an element on a single axis. The magnetic actuator includes a pair of opposing electromagnets that provides bidirectional forces along the single axis of the suspended element. A position sensor measures the position of the suspended element and feeds an amplifier driver that connects to electrical coils that power the electromagnets.
US-A-4,642,501 discloses a magnetic actuator for providing a single axis, noncontacting force capability with unconstrained cross axis mobility utilizing flux feedback force linearization. Opposing electromagnets cooperate with an armature suspended therebetween and are energized by a biased flux and a signal derived from flux densities sensed in the air gaps between the electromagnets and the armature. The flux density signals are applied in a closed force loop to provide a net force directly proportional to the commanded flux.
For high precision applications, such as atomic force microscopes (AFM) and wafer scanners that are used in lithography applications, it is known to apply a magnetic actuator comprising a movable coarse stage with a core and a movable fine stage with a yoke that together form a magnetic circuit, wherein an air gap or air gaps are defined between the coarse stage and the fine stage and wherein the coarse stage is provided with at least one electrical coil for inducing a magnetic field in the coarse stage's core that influences the attractive force and the air gap or air gaps between the coarse stage and the fine stage. The coarse stage may also comprise a permanent magnet. Further a fine stage position sensor measures the position of the fine stage, which fine stage position sensor connects to a fine stage position controller that drives the at least one electrical coil to maintain the fine stage at a predetermined time variable fine stage setpoint position. In the prior art this is done by predominantly maintaining the air gap or air gaps as constant as possible to improve linearity round the fine stage setpoint position and by varying the flux through the air gap or air gaps.
A problem with this known magnetic actuator is that with a constantly varying fine stage setpoint position which may be desirable in an AFM or in a wafer scanner, the fine stage must be accelerated by generating a current through the at least one electrical coil that causes heat dissipation in said coil. This heat dissipation is detrimental for the accuracy of the actuator. It is therefore a first objective of the invention to reduce heat dissipation close to or in the fine stage which may otherwise cause its deformation, and to improve on the accuracy of the magnetic actuator. A further objective is to provide a method of control of such a magnetic actuator which meets this first objective.
It is a second objective of the invention to provide an alternative to the known magnetic actuator that better meets the requirements of actual practice.
Accordingly the magnetic actuator of the invention and the method of controlling such a magnetic actuator has the features of one or more of the appended claims.
According to a first aspect of the invention the magnetic actuator has conversion means to convert the predetermined time variable fine stage setpoint position into a time variable coarse stage setpoint position, and that it has means to provide this coarse stage setpoint position to a drive for positioning of the coarse stage so as to maintain the fine stage that connects to the coarse stage close to the time variable fine stage setpoint position.
The coarse stage is then placed in a position that induces a required magnetic flux in the air gap or air gaps and a corresponding magnetic force is applied to the fine stage so as to maintain the fine stage that connects to the coarse stage close to the time variable fine stage setpoint position.
In this manner the control activity of the fine stage controller is reduced and a corresponding reduction of the heat dissipation in the electrical coil or coils connected to this controller is achieved. The accuracy of the system is therewith improved. It is also possible to apply a smaller and cheaper amplifier that provides the electrical current to the electri cal coil or coils. The heat dissipation that is caused by the control of the coarse stage takes place distant from the fine stage and has therefore no impact on the thermal deformation or the positioning accuracy of the fine stage. Preventing heat dissipation in the electrical coil or coils is in particular promoted by arranging that movement of the coarse stage based on the time variable coarse stage setpoint position precedes movement of the fine stage that is caused by the time variable fine stage setpoint position.
Accordingly the method of the invention has the features that apart from measuring the position of the fine stage and using same for controlling the at least one electrical coil so as to adjust the magnetic field for maintaining the fine stage at a predetermined time variable fine stage setpoint position, the additional features are applied of converting the time variable fine stage setpoint position into a time variable coarse stage setpoint position, and placing the coarse stage into a position to reduce the difference between the time variable coarse stage setpoint position and the actual position of the coarse stage so as to maintain the fine stage that connects to the coarse stage close to the time variable fine stage set-point position.
In a preferred mode of operation of the method of the invention the position of the coarse stage is measured and used to control the position of the coarse stage to reduce the difference between the time variable coarse stage setpoint position and the measured position of the coarse stage for maintaining the fine stage that connects to the coarse stage close to the time variable fine stage setpoint position. For this purpose the magnetic actuator preferably has conversion means to convert the predetermined time variable fine stage setpoint position into a time variable coarse stage setpoint position, and that a coarse stage position sensor is applied to measure the position of the coarse stage, wherein said conversion means and said coarse stage position sensor connect to a coarse stage position controller that connects to the drive for positioning of the coarse stage.
In a beneficial embodiment the fine stage position controller drives a control loop for the magnetic flux in the air gap or air gaps. This improves the response speed of the actuator of the invention.
Beneficially the conversion means represent a model of the translation behavior of the complete magnetic actuator, including the coarse stage and fine stage in combination and its controls. This improves the accuracy at which the coarse stage can be positioned so as to reduce the remaining control activities that have to be executed by the fine stage controller. Defining the model of this translation behavior is a matter that is within the ambit of the skilled person, and which reguires therefore no further elucidation. In practice the accuracy of the coarse stage positioning can be improved over time iteratively .
Corresponding to the remark above about avoiding heat dissipation it is preferable that the conversion means and the coarse stage position controller are arranged to cause displacement of the coarse stage and a corresponding displacement of the fine stage that precedes displacement of the fine stage caused by the action of the fine stage position controller. Obviously this is beneficial for preventing any unnecessary heat dissipation caused by the operation of the fine stage position controller .
The magnetic actuator can be implemented in many possible embodiments, including a pull-pull arrangement known as such from US 4,642,501. One of the possible embodiments has the feature that it is provided with one or more permanent magnets in the magnetic circuit. This is beneficial for preventing the necessity to apply a bias current in the electrical coils and improve the control linearity of the fine stage.
The invention will hereinafter be further elucidated with reference to the drawing.
In the drawing: -figure 1 schematically shows a first embodiment of the magnetic actuator of the invention with its controls and sensors; and -figure 2 schematically shows a second embodiment of the magnetic actuator of the invention with its controls and sensors .
Whenever in the figures the same reference numerals are applied, these numerals refer to the same parts.
With reference to both figure 1 and figure 2, the mag- netic actuator 1 of the invention comprises a movable coarse stage 2 with a core and a movable fine stage 3 with a yoke that together form a magnetic circuit. Magnetic field lines are clearly shown in the figures and are induced into air gaps 4, 5 that are defined between the coarse stage 2 and the fine stage 3 of the actuator 1. The coarse stage 2 is provided with at least one electrical coil 6 and/or a permanent magnet 7 for inducing a magnetic field in the coarse stage 2 that influences the attractive force and the air gaps 4, 5 between the coarse stage 2 and the fine stage 3. Commonly with the prior art a fine stage position sensor 8 measures the position of the fine stage 3, which fine stage position sensor 8 connects to a fine stage position controller 9 that drives the at least one electrical coil 6 to maintain the fine stage 3 at a predetermined position. The setpoint may for instance be a time variable fine stage setpoint position provided at reference 10. Particularly when such a time variable setpoint is applied, the prior art magnetic actuator suffers from the heat dissipation in the electrical coil 6 which deteriorates the accuracy of the positioning and possible deformation of said fine stage 3.
In accordance with the invention the magnetic actuator 1 is provided with conversion means 11 to convert a predetermined time variable fine stage setpoint position 10 into a time variable coarse stage setpoint position which is then available at the output side 12 of the conversion means 11. Preferably the conversion means 11 represent a model of the translation behavior of the coarse stage 2 and fine stage 3 in combination with their controls, if any.
The output side 12 of the conversion means 11 may in a particular embodiment of the invention directly connect to a drive for the coarse stage 2. In a preferred embodiment of the invention which is shown in the figures, a coarse stage position sensor 13 is applied to measure the actual position of the coarse stage 2. The said conversion means 11 and said coarse stage position sensor 13 then connect to a coarse stage position controller 14 that in turn connects to a drive 15 for positioning of the coarse stage 2 so as to maintain the fine stage 3 that connects to the coarse stage 2 close to the time variable fine stage setpoint position 10. In this connection it is preferable that the conversion means 11 and the coarse stage position controller 14 are arranged to cause displacement of the coarse stage 2 and consequently a corresponding displacement of the fine stage 3 that will preceed displacement of the fine stage 3 caused by the action of the fine stage position controller 9.
Figure 2 shows an embodiment of the actuator of the invention with improved operation of the control loop regulating the position of the fine stage 3. In this embodiment a flux sensor 16 is applied to measure the magnetic flux in the air gap 5 and this is used together with the output of the fine stage position controller 9 to drive a flux controller 17 which -through amplifier 18- drives the electrical coil 6.

Claims (9)

1. Magnetische actuator (1) omvattende een beweegbare grove stage (2) en een beweegbare fijne stage (3) die tezamen een magnetisch circuit vormen, waarbij een luchtspleet of luchtspleten (4, 5) bepaald worden door de grove stage (2) en de fijne stage (3) en dat de grove stage (2) voorzien is van ten minste één elektrische spoel (6) voor het induceren van een magnetisch veld in de grove stage (2) die de aantrekkingskracht en de luchtspleet of luchtspleten (4, 5) tussen de grove stage (2) en de fijne stage (3) beïnvloedt, waarbij een fijne stage-positiesensor (8) de positie van de fijne stage (3) meet, welke fijne stage-positiesensor (8) in verbinding staat met een fijne stage-positieregelaar (9) die de ten minste ene spoel (6) aandrijft voor het handhaven van de fijne stage (3) op een vooraf bepaalde tijd-variabele fijne stage-setpointpositie, met het kenmerk, dat deze conversiemiddelen (11) heeft voor het converteren van de vooraf bepaalde tijdvariabele fijne stage-setpointpositie in een tijdvariabele grove stage-setpointpositie, en dat deze middelen heeft voor het verschaffen van deze grove stage-setpointpositie aan een aandrijving (15) voor het positioneren van de grove stage (2) teneinde de fijne stage (3) die in verbinding staat met de grove stage (2) dichtbij de tijdvariabele fijne stage-setpointpositie te handhaven.A magnetic actuator (1) comprising a movable coarse stage (2) and a movable fine stage (3) which together form a magnetic circuit, wherein an air gap or air gaps (4, 5) are defined by the coarse stage (2) and the fine stage (3) and that the coarse stage (2) is provided with at least one electric coil (6) for inducing a magnetic field in the coarse stage (2) that enhances the attraction and the air gap or air gaps (4, 5) affects between the coarse stage (2) and the fine stage (3), a fine stage position sensor (8) measuring the position of the fine stage (3), which fine stage position sensor (8) is connected to a fine stage position controller (9) which drives the at least one coil (6) for maintaining the fine stage (3) at a predetermined time-variable fine stage set point position, characterized in that these conversion means (11) has fine stage setpoint position i for converting the predetermined time variable n a time variable coarse stage setpoint position, and which has means for providing this coarse stage setpoint position to a drive (15) for positioning the coarse stage (2) so as to have the fine stage (3) in communication with maintain the coarse stage (2) close to the time variable fine stage setpoint position. 2. Magnetische actuator (1) volgens conclusie 1, met het kenmerk, die voorzien is in een grove stage-positiesensor (13) voor het meten van de positie van de grove stage (2), en dat de conversiemiddelen (11) die de tijdvariabele grove stage-setpointpositie verschaffen, en genoemde grove stage-positiesensor (13) in verbinding staan met een grove stage-positieregelaar (14) die met de aandrijving (15) is verbonden voor het positioneren van de grove stage (2) teneinde de fijne stage (3) die in verbinding staat met de grove stage (2) dichtbij de tijdvariabele fijne stage-setpointpositie te handhaven .Magnetic actuator (1) according to claim 1, characterized in that a coarse stage position sensor (13) is provided for measuring the position of the coarse stage (2), and that the conversion means (11) provide coarse stage setpoint position time variable, and said coarse stage position sensor (13) is connected to a coarse stage position controller (14) connected to the drive (15) for positioning the coarse stage (2) in order to stage (3) that is connected to the coarse stage (2) close to the time variable fine stage setpoint position. 3. Magnetische actuator (1) volgens conclusie 1 of 2, met het kenmerk, dat de fijne stage-positieregelaar (9) een regellus (16, 17, 18) aandrijft voor de magnetische flux in de luchtspleet of luchtspleten (4, 5).Magnetic actuator (1) according to claim 1 or 2, characterized in that the fine stage position controller (9) drives a control loop (16, 17, 18) for the magnetic flux in the air gap or air gaps (4, 5) . 4. Magnetische actuator (1) volgens één der conclusies 1-3, met het kenmerk, dat de conversiemiddelen (11) een model representeren van het verplaatsingsgedrag van ten minste de grove stage (2) en fijne stage (3) in combinatie met hun regelingen.Magnetic actuator (1) according to any one of claims 1-3, characterized in that the conversion means (11) represent a model of the displacement behavior of at least the coarse stage (2) and fine stage (3) in combination with their arrangements. 5. Magnetische actuator (1) volgens één der voorgaande conclusies 1-4, met het kenmerk, dat de conversiemiddelen (11) en de grove stage-positieregelaar (14) zijn ingericht om verplaatsing van de grove stage (2) te veroorzaken en een corresponderende verplaatsing van de fijne stage (3) die vooraf gaat aan verplaatsing van de fijne stage (3) ten gevolge van de actie van de fijne stage-positieregelaar (9).Magnetic actuator (1) according to one of the preceding claims 1-4, characterized in that the conversion means (11) and the coarse stage position controller (14) are arranged to cause displacement of the coarse stage (2) and a corresponding displacement of the fine stage (3) that precedes displacement of the fine stage (3) due to the action of the fine stage position controller (9). 6. Werkwijze voor het regelen van een magnetische actuator omvattende een beweegbare grove stage (2) en een beweegbare fijne stage (3) die tezamen een magnetisch circuit vormen, waarbij een luchtspleet of luchtspleten (4, 5) bepaald worden door de grove stage (2) en de fijne stage (3) en waarbij de grove stage (2) voorzien is van ten minste één elektrisch spoel (6) voor het opwekken van een magnetisch veld in de grove stage (2) die de aantrekkingskracht en de luchtspleet of luchtspleten (4, 5) tussen de grove stage (2) en de fijne stage (3) beïnvloeden, in welke de positie van de fijne stage (3) gemeten wordt en gebruikt voor het regelen van de ten minste ene elektrische spoel (6) voor het aanpassen van het magnetisch veld teneinde de fijne stage (3) op een vooraf bepaalde tijdvariabele fijne stage-setpointpositie te handhaven, gekenmerkt door het converteren van de tijdvariabele fijne stage-setpointpositie in een tijdvariabele grove stage-setpointpositie, en het plaatsen van de grove stage (2) in een positie voor het verminderen van het verschil tussen de tijdvariabele grove stage-setpointpositie en de actuele positie van de grove stage (2) teneinde de fijne stage (3) die in verbinding staat met de grove stage (2) dichtbij de tijdvariabele fijne stage-setpointpositie te handhaven.Method for controlling a magnetic actuator comprising a movable coarse stage (2) and a movable fine stage (3) which together form a magnetic circuit, wherein an air gap or air gaps (4, 5) are determined by the coarse stage ( 2) and the fine stage (3) and wherein the coarse stage (2) is provided with at least one electric coil (6) for generating a magnetic field in the coarse stage (2) which enhances the attraction and the air gap or air gaps (4, 5) between the coarse stage (2) and the fine stage (3), in which the position of the fine stage (3) is measured and used to control the at least one electric coil (6) for adjusting the magnetic field to maintain the fine stage (3) at a predetermined time variable fine stage setpoint position, characterized by converting the time variable fine stage setpoint position into a time variable coarse stage setpoint position, and placing the groove ve stage (2) in a position for reducing the difference between the time variable coarse stage setpoint position and the current position of the coarse stage (2) in order to make the fine stage (3) in connection with the coarse stage (2) close to the time variable fine stage setpoint position. 7. Werkwijze volgens conclusie 6, met het kenmerk, dat de positie van de grove stage (2) gemeten wordt en vergeleken met de tijdvariabele grove stage-setpointpositie, en ge bruikt wordt voor het regelen van een aandrijving (15) voor het positioneren van de grove stage (2) teneinde de fijne stage (3) die in verbinding staat met de grove stage (2) dichtbij de tijdvariabele fijne stage-setpointpositie te handhaven.Method according to claim 6, characterized in that the position of the coarse stage (2) is measured and compared with the time variable coarse stage setpoint position, and is used for controlling a drive (15) for positioning the coarse stage (2) in order to maintain the fine stage (3) in communication with the coarse stage (2) close to the time variable fine stage setpoint position. 8. Werkwijze volgens conclusie 6 of 7, met het kenmerk, dat de fijne stage-setpointregelaar (9) een regellus (16, 17, 18) aandrijft voor de magnetische flux in de lucht-spleet of luchtspleten (4, 5).Method according to claim 6 or 7, characterized in that the fine stage setpoint controller (9) drives a control loop (16, 17, 18) for the magnetic flux in the air gap or air gaps (4, 5). 9. Werkwijze volgens conclusie 7 of 8, met het kenmerk, dat beweging van de grove stage (2) gebaseerd op de tijdvariable grove stage-setpointpositie die is afgeleid van de tijdvariabele fijne stage-setpointpositie zo is uitgevoerd dat deze vooraf gaat aan beweging van de fijne stage (3) welke haar oorzaak vindt in de tijdvariabele fijne stage-setpointpositie .Method according to claim 7 or 8, characterized in that movement of the coarse stage (2) based on the time-variable coarse stage setpoint position derived from the time-variable fine stage setpoint position is carried out in such a way that it precedes movement of the fine stage (3) which is caused by the fine stage setpoint position time variable.
NL2010611A 2013-04-10 2013-04-10 Magnetic actuator and method of controlling such a magnetic actuator. NL2010611C2 (en)

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Citations (6)

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Publication number Priority date Publication date Assignee Title
US20050162802A1 (en) * 2004-01-22 2005-07-28 Nikon Research Corporation Of America Offset gap control for electromagnetic devices
JP2006304470A (en) * 2005-04-20 2006-11-02 Yaskawa Electric Corp Electromagnetic unit, electromagnetic actuator, drive controller and stage device therefor
US20070013895A1 (en) * 2005-07-14 2007-01-18 Canon Kabushiki Kaisha Driving device, exposure apparatus using the same, and device manufacturing method
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US20120212723A1 (en) * 2011-02-22 2012-08-23 Asml Netherlands B.V. Electromagnetic actuator, stage apparatus and lithographic apparatus
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Publication number Priority date Publication date Assignee Title
US20050162802A1 (en) * 2004-01-22 2005-07-28 Nikon Research Corporation Of America Offset gap control for electromagnetic devices
JP2006304470A (en) * 2005-04-20 2006-11-02 Yaskawa Electric Corp Electromagnetic unit, electromagnetic actuator, drive controller and stage device therefor
US20070013895A1 (en) * 2005-07-14 2007-01-18 Canon Kabushiki Kaisha Driving device, exposure apparatus using the same, and device manufacturing method
US20120019794A1 (en) * 2010-07-09 2012-01-26 Asml Netherlands B.V. Variable Reluctance Device, Stage Apparatus, Lithographic Apparatus and Device Manufacturing Method
US20120212723A1 (en) * 2011-02-22 2012-08-23 Asml Netherlands B.V. Electromagnetic actuator, stage apparatus and lithographic apparatus
US20120281194A1 (en) * 2011-05-06 2012-11-08 Canon Kabushiki Kaisha Positioning apparatus, exposure apparatus, and method of manufacturing device

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Title
YIXU SONG ET AL: "A dual-stage control system for high-speed, ultra-precise linear motion", THE INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, SPRINGER, BERLIN, DE, vol. 48, no. 5-8, 3 October 2009 (2009-10-03), pages 633 - 643, XP019837506, ISSN: 1433-3015 *

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