NL2003139A1 - Cooling of actuator coils. - Google Patents

Cooling of actuator coils. Download PDF

Info

Publication number
NL2003139A1
NL2003139A1 NL2003139A NL2003139A NL2003139A1 NL 2003139 A1 NL2003139 A1 NL 2003139A1 NL 2003139 A NL2003139 A NL 2003139A NL 2003139 A NL2003139 A NL 2003139A NL 2003139 A1 NL2003139 A1 NL 2003139A1
Authority
NL
Netherlands
Prior art keywords
cooling
actuator coils
coils
actuator
Prior art date
Application number
NL2003139A
Other languages
English (en)
Inventor
Roberto Wiener
Pradeep K Govil
Michael Brown
Original Assignee
Asml Holding Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asml Holding Nv filed Critical Asml Holding Nv
Publication of NL2003139A1 publication Critical patent/NL2003139A1/nl

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B27/00—Photographic printing apparatus
    • G03B27/32—Projection printing apparatus, e.g. enlarger, copying camera
    • G03B27/52—Details
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Windings For Motors And Generators (AREA)
  • Motor Or Generator Cooling System (AREA)
NL2003139A 2008-07-31 2009-07-06 Cooling of actuator coils. NL2003139A1 (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US8517908P 2008-07-31 2008-07-31

Publications (1)

Publication Number Publication Date
NL2003139A1 true NL2003139A1 (nl) 2010-02-02

Family

ID=41608002

Family Applications (1)

Application Number Title Priority Date Filing Date
NL2003139A NL2003139A1 (nl) 2008-07-31 2009-07-06 Cooling of actuator coils.

Country Status (3)

Country Link
US (1) US8982317B2 (nl)
JP (1) JP5108839B2 (nl)
NL (1) NL2003139A1 (nl)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5422439B2 (ja) 2010-02-26 2014-02-19 三菱重工業株式会社 プリプレグ積層ヘッド及びこれを備えたプリプレグ自動積層装置
AU2011384034A1 (en) 2011-12-22 2014-07-10 Schneider Electric It Corporation Systems and methods for reducing energy storage requirements in a data center
CN102882314B (zh) * 2012-10-23 2015-12-02 哈尔滨工业大学 超精密直线电机的冷却结构
IN2013CH05013A (nl) 2013-11-07 2015-05-08 Schneider Electric It Corp
JP6333063B2 (ja) 2014-05-22 2018-05-30 三菱重工業株式会社 電磁弁、流体機械、油圧機械及び再生可能エネルギー型発電装置、並びに電磁弁の製造方法
DE102014212667A1 (de) * 2014-07-01 2016-01-07 Carl Zeiss Smt Gmbh Elektrische Spule
US10886821B2 (en) * 2018-12-28 2021-01-05 Apple Inc. Haptic actuator including thermally coupled heat spreading layer and related methods
CN115602406A (zh) * 2021-07-09 2023-01-13 北京北方华创微电子装备有限公司（Cn） 用于产生等离子体的线圈装置及半导体工艺设备

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3722082A (en) * 1966-12-28 1973-03-27 Foster Transformer Co Method of making electrical transformer means
US3508092A (en) * 1968-06-19 1970-04-21 Air Reduction Heat sink for stator winding of dynamo-electric machine
US6078477A (en) * 1998-07-30 2000-06-20 Seagate Technology, Inc. Heat transfer plate for an actuator assembly
DE19945855A1 (de) * 1999-09-24 2001-03-29 Bosch Gmbh Robert Mikrospule
EP1457825A1 (en) * 2003-03-11 2004-09-15 ASML Netherlands B.V. Lithographic apparatus, device manufacturing method and device manufactured thereby
EP1457827A1 (en) * 2003-03-11 2004-09-15 ASML Netherlands B.V. Lithographic apparatus, device manufacturing method and device manufactured thereby
US6946761B2 (en) * 2003-04-18 2005-09-20 Asml Holding, N.V. Actuator coil cooling system
US7679864B2 (en) * 2006-06-08 2010-03-16 Quantum Corporation Narrow width actuator for tape drive systems

Also Published As

Publication number Publication date
JP2010041916A (ja) 2010-02-18
US20100026974A1 (en) 2010-02-04
JP5108839B2 (ja) 2012-12-26
US8982317B2 (en) 2015-03-17

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Legal Events

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AD1A A request for search or an international type search has been filed
WDAP Patent application withdrawn

Effective date: 20100705