NL194893B - Zeeman-ellipsometer. - Google Patents
Zeeman-ellipsometer.Info
- Publication number
- NL194893B NL194893B NL9202303A NL9202303A NL194893B NL 194893 B NL194893 B NL 194893B NL 9202303 A NL9202303 A NL 9202303A NL 9202303 A NL9202303 A NL 9202303A NL 194893 B NL194893 B NL 194893B
- Authority
- NL
- Netherlands
- Prior art keywords
- sailor
- ellipsometer
- sailor ellipsometer
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
- G01N21/211—Ellipsometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/04—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by beating two waves of a same source but of different frequency and measuring the phase shift of the lower frequency obtained
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL9202303A NL194893C (nl) | 1992-12-31 | 1992-12-31 | Zeeman-ellipsometer. |
PCT/NL1993/000283 WO1994016310A1 (en) | 1992-12-31 | 1993-12-30 | Zeeman ellipsometer |
AU58441/94A AU5844194A (en) | 1992-12-31 | 1993-12-30 | Zeeman ellipsometer |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL9202303A NL194893C (nl) | 1992-12-31 | 1992-12-31 | Zeeman-ellipsometer. |
NL9202303 | 1992-12-31 |
Publications (3)
Publication Number | Publication Date |
---|---|
NL9202303A NL9202303A (nl) | 1994-07-18 |
NL194893B true NL194893B (nl) | 2003-02-03 |
NL194893C NL194893C (nl) | 2003-06-04 |
Family
ID=19861714
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL9202303A NL194893C (nl) | 1992-12-31 | 1992-12-31 | Zeeman-ellipsometer. |
Country Status (3)
Country | Link |
---|---|
AU (1) | AU5844194A (nl) |
NL (1) | NL194893C (nl) |
WO (1) | WO1994016310A1 (nl) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL1006016C2 (nl) | 1997-05-09 | 1998-11-10 | Univ Delft Tech | Ellipsometer met twee lasers. |
US7688435B2 (en) | 1997-09-22 | 2010-03-30 | Kla-Tencor Corporation | Detecting and classifying surface features or defects by controlling the angle of the illumination plane of incidence with respect to the feature or defect |
US7714995B2 (en) | 1997-09-22 | 2010-05-11 | Kla-Tencor Corporation | Material independent profiler |
US7282729B2 (en) * | 2003-08-20 | 2007-10-16 | Xyratex Technology Limited | Fabry-Perot resonator apparatus and method for observing low reflectivity surfaces |
DE102007062052A1 (de) * | 2007-12-21 | 2009-06-25 | Siemens Ag | Schichtdickenmessung an transparenten Schichten |
CN103234909A (zh) * | 2013-04-26 | 2013-08-07 | 北京理工大学 | 一种快速脉冲激光偏振度测量装置 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT1155284B (it) * | 1982-02-10 | 1987-01-28 | Cselt Centro Studi Lab Telecom | Procedimento e apparecchiatura per la misura dell'indice di rifrazione e dello spessore di materiali trasparenti |
JPS61105408A (ja) * | 1984-10-30 | 1986-05-23 | Matsushita Electric Ind Co Ltd | 光学測定装置 |
IT1184100B (it) * | 1985-04-23 | 1987-10-22 | Cselt Centro Studi Lab Telecom | Ellissometro interferometrico statico |
JPH03282205A (ja) * | 1990-03-29 | 1991-12-12 | Mitsubishi Electric Corp | 厚さ測定装置 |
-
1992
- 1992-12-31 NL NL9202303A patent/NL194893C/nl not_active IP Right Cessation
-
1993
- 1993-12-30 WO PCT/NL1993/000283 patent/WO1994016310A1/en active Application Filing
- 1993-12-30 AU AU58441/94A patent/AU5844194A/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
AU5844194A (en) | 1994-08-15 |
WO1994016310A1 (en) | 1994-07-21 |
NL194893C (nl) | 2003-06-04 |
NL9202303A (nl) | 1994-07-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A1B | A search report has been drawn up | ||
BC | A request for examination has been filed | ||
V1 | Lapsed because of non-payment of the annual fee |
Effective date: 20060701 |