NL1010321A1 - Wafeldrager. - Google Patents
Wafeldrager.Info
- Publication number
- NL1010321A1 NL1010321A1 NL1010321A NL1010321A NL1010321A1 NL 1010321 A1 NL1010321 A1 NL 1010321A1 NL 1010321 A NL1010321 A NL 1010321A NL 1010321 A NL1010321 A NL 1010321A NL 1010321 A1 NL1010321 A1 NL 1010321A1
- Authority
- NL
- Netherlands
- Prior art keywords
- wafer carrier
- wafer
- carrier
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67383—Closed carriers characterised by substrate supports
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Electrostatic Charge, Transfer And Separation In Electrography (AREA)
- Cable Accessories (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US95464097A | 1997-10-20 | 1997-10-20 | |
| US95464097 | 1997-10-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| NL1010321A1 true NL1010321A1 (nl) | 1999-04-21 |
| NL1010321C2 NL1010321C2 (nl) | 1999-09-08 |
Family
ID=25495730
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL1010321A NL1010321C2 (nl) | 1997-10-20 | 1998-10-15 | Wafeldrager. |
Country Status (9)
| Country | Link |
|---|---|
| JP (1) | JPH11204629A (nl) |
| KR (1) | KR100830654B1 (nl) |
| CN (1) | CN1165963C (nl) |
| DE (1) | DE19848147A1 (nl) |
| FR (1) | FR2770498B1 (nl) |
| HK (1) | HK1023228A1 (nl) |
| IT (1) | IT1303138B1 (nl) |
| NL (1) | NL1010321C2 (nl) |
| SG (1) | SG81942A1 (nl) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113433793A (zh) * | 2020-03-23 | 2021-09-24 | 家登精密工业股份有限公司 | 光掩模盒及其耐磨件 |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10151320B4 (de) * | 2001-10-17 | 2006-02-09 | Infineon Technologies Ag | Scheibenträger |
| EP1458634A1 (en) * | 2001-11-27 | 2004-09-22 | Entegris, Inc. | Front opening wafer carrier with path to ground effectuated by door |
| JP4146718B2 (ja) | 2002-12-27 | 2008-09-10 | ミライアル株式会社 | 薄板支持容器 |
| JP4681221B2 (ja) * | 2003-12-02 | 2011-05-11 | ミライアル株式会社 | 薄板支持容器 |
| JP4842879B2 (ja) * | 2007-04-16 | 2011-12-21 | 信越ポリマー株式会社 | 基板収納容器及びそのハンドル |
| JP2009259951A (ja) * | 2008-04-15 | 2009-11-05 | Shin Etsu Polymer Co Ltd | 基板収納容器 |
| JP5078042B2 (ja) * | 2009-06-08 | 2012-11-21 | ゴールド工業株式会社 | 精密基板収納容器およびその製造方法 |
| JP5120668B2 (ja) * | 2009-06-08 | 2013-01-16 | ゴールド工業株式会社 | 精密基板収納容器およびその製造方法 |
| JP5449974B2 (ja) * | 2009-10-16 | 2014-03-19 | ゴールド工業株式会社 | 精密基板収納容器 |
| JP2011249372A (ja) * | 2010-05-24 | 2011-12-08 | Shin Etsu Polymer Co Ltd | 基板収納容器 |
| JP5700434B2 (ja) * | 2011-05-18 | 2015-04-15 | 信越ポリマー株式会社 | ウェーハ収納容器 |
| JP5921371B2 (ja) * | 2012-07-13 | 2016-05-24 | 信越ポリマー株式会社 | 基板収納容器 |
| KR102281583B1 (ko) * | 2014-01-21 | 2021-07-27 | 우범제 | 퓸 제거 장치 |
| KR102162366B1 (ko) | 2014-01-21 | 2020-10-06 | 우범제 | 퓸 제거 장치 |
| KR102223033B1 (ko) * | 2014-04-29 | 2021-03-04 | 삼성전자주식회사 | 웨이퍼 수납장치 |
| US9881820B2 (en) * | 2015-10-22 | 2018-01-30 | Lam Research Corporation | Front opening ring pod |
| CN107706144A (zh) * | 2017-09-14 | 2018-02-16 | 德淮半导体有限公司 | 晶圆清洗固定装置及清洗设备 |
| KR102020294B1 (ko) * | 2017-09-15 | 2019-09-11 | (주)상아프론테크 | 슬롯 구조체 및 이를 포함하는 웨이퍼 보관 용기 |
| TWI689030B (zh) * | 2018-06-14 | 2020-03-21 | 家登精密工業股份有限公司 | 基板載具 |
| CN109003928B (zh) * | 2018-07-21 | 2021-03-09 | 江苏德尔科测控技术有限公司 | 一种硅片承载装置 |
| KR200493303Y1 (ko) * | 2018-12-27 | 2021-03-10 | 위아코퍼레이션 주식회사 | 웨이퍼 캐리어의 슬롯바 |
| TWI751814B (zh) * | 2020-09-22 | 2022-01-01 | 家登精密工業股份有限公司 | 支撐片狀物的中央支撐裝置及存放片狀物的儲存設備 |
| KR102349499B1 (ko) * | 2020-09-24 | 2022-01-07 | 우범제 | 사이드 스토리지 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5492229A (en) * | 1992-11-27 | 1996-02-20 | Toshiba Ceramics Co., Ltd. | Vertical boat and a method for making the same |
| JP3145252B2 (ja) * | 1994-07-29 | 2001-03-12 | 淀川化成株式会社 | 基板支承用側板およびそれを用いたカセット |
| JPH0864669A (ja) * | 1994-08-25 | 1996-03-08 | Hitachi Cable Ltd | ウエハボックス |
| US5452795A (en) * | 1994-11-07 | 1995-09-26 | Gallagher; Gary M. | Actuated rotary retainer for silicone wafer box |
| US5534074A (en) * | 1995-05-17 | 1996-07-09 | Heraeus Amersil, Inc. | Vertical boat for holding semiconductor wafers |
| JP3328763B2 (ja) * | 1995-10-30 | 2002-09-30 | エヌティティエレクトロニクス株式会社 | 縦型ウエハボートのウエハ支持構造 |
| JPH1098096A (ja) * | 1996-09-25 | 1998-04-14 | Nippon Valqua Ind Ltd | 半導体ウェハ用カセット |
-
1998
- 1998-10-15 NL NL1010321A patent/NL1010321C2/nl not_active IP Right Cessation
- 1998-10-16 IT IT1998TO000879A patent/IT1303138B1/it active IP Right Grant
- 1998-10-20 KR KR1019980043797A patent/KR100830654B1/ko not_active IP Right Cessation
- 1998-10-20 CN CNB981224393A patent/CN1165963C/zh not_active Expired - Lifetime
- 1998-10-20 SG SG9804226A patent/SG81942A1/en unknown
- 1998-10-20 FR FR9813123A patent/FR2770498B1/fr not_active Expired - Fee Related
- 1998-10-20 JP JP10298859A patent/JPH11204629A/ja active Pending
- 1998-10-20 DE DE19848147A patent/DE19848147A1/de not_active Ceased
-
2000
- 2000-04-20 HK HK00102409A patent/HK1023228A1/xx not_active IP Right Cessation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113433793A (zh) * | 2020-03-23 | 2021-09-24 | 家登精密工业股份有限公司 | 光掩模盒及其耐磨件 |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2770498A1 (fr) | 1999-05-07 |
| FR2770498B1 (fr) | 2000-06-16 |
| HK1023228A1 (en) | 2000-09-01 |
| JPH11204629A (ja) | 1999-07-30 |
| DE19848147A1 (de) | 1999-04-22 |
| CN1165963C (zh) | 2004-09-08 |
| KR100830654B1 (ko) | 2008-11-11 |
| SG81942A1 (en) | 2001-07-24 |
| ITTO980879A1 (it) | 2000-04-16 |
| IT1303138B1 (it) | 2000-10-30 |
| CN1232289A (zh) | 1999-10-20 |
| KR19990037214A (ko) | 1999-05-25 |
| NL1010321C2 (nl) | 1999-09-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| AD1A | A request for search or an international type search has been filed | ||
| RD2N | Patents in respect of which a decision has been taken or a report has been made (novelty report) |
Effective date: 19990708 |
|
| SD | Assignments of patents |
Owner name: ENTEGRIS, INC. Effective date: 20050708 |
|
| MM | Lapsed because of non-payment of the annual fee |
Effective date: 20161101 |