MY182211A - Methods for purifying halosilane-containing streams - Google Patents
Methods for purifying halosilane-containing streamsInfo
- Publication number
- MY182211A MY182211A MYPI2014703145A MYPI2014703145A MY182211A MY 182211 A MY182211 A MY 182211A MY PI2014703145 A MYPI2014703145 A MY PI2014703145A MY PI2014703145 A MYPI2014703145 A MY PI2014703145A MY 182211 A MY182211 A MY 182211A
- Authority
- MY
- Malaysia
- Prior art keywords
- halosilane
- purifying
- methods
- containing streams
- process stream
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
- C01B33/10778—Purification
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D3/00—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping
- B01D3/14—Fractional distillation or use of a fractionation or rectification column
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Silicon Compounds (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Abstract
Methods for purifying a halosilane-containing process stream include a process stream purified by removing arsenic and phosphorous impurities by use of distillation.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201261639641P | 2012-04-27 | 2012-04-27 | |
US13/836,018 US10011493B2 (en) | 2012-04-27 | 2013-03-15 | Methods for purifying halosilane-containing streams |
PCT/US2013/036972 WO2013162969A1 (en) | 2012-04-27 | 2013-04-17 | Methods for purifying halosilane-containing streams |
Publications (1)
Publication Number | Publication Date |
---|---|
MY182211A true MY182211A (en) | 2021-01-18 |
Family
ID=49476378
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MYPI2014703145A MY182211A (en) | 2012-04-27 | 2013-04-17 | Methods for purifying halosilane-containing streams |
Country Status (8)
Country | Link |
---|---|
US (1) | US10011493B2 (en) |
KR (1) | KR102099486B1 (en) |
CN (1) | CN104822430A (en) |
DE (1) | DE112013002206B4 (en) |
IN (1) | IN2014KN02373A (en) |
MY (1) | MY182211A (en) |
TW (1) | TWI637908B (en) |
WO (1) | WO2013162969A1 (en) |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL235008A (en) * | 1958-01-11 | |||
US3069239A (en) | 1958-10-28 | 1962-12-18 | Westinghouse Electric Corp | Purification of halogenated silicon compounds |
US3188318A (en) | 1958-12-30 | 1965-06-08 | Hercules Powder Co Ltd | Process for producing phthalocyanines |
FR1518553A (en) | 1960-03-11 | 1968-03-29 | Pechiney Prod Chimiques Sa | Process for the purification of volatile compounds of germanium and silicon |
US3067229A (en) * | 1960-08-02 | 1962-12-04 | Union Carbide Corp | Phosphorus containing organosilicon compounds |
US3156630A (en) * | 1960-12-19 | 1964-11-10 | Nat Distillers Chem Corp | Purification of titanium tetrachloride by distillation in the presence of an oil and the use of an inert gas purge |
BE632835A (en) | 1962-06-04 | |||
DE1792651A1 (en) | 1968-09-28 | 1971-11-25 | Dynamit Nobel Ag | Process for cleaning chlorosilanes |
US4099936A (en) | 1976-12-16 | 1978-07-11 | Union Carbide Corporation | Process for the purification of silane |
CA1162028A (en) * | 1979-08-01 | 1984-02-14 | Larry M. Coleman | Ultrahigh purity silane and silicon production |
US4340574A (en) | 1980-08-28 | 1982-07-20 | Union Carbide Corporation | Process for the production of ultrahigh purity silane with recycle from separation columns |
US4374110A (en) * | 1981-06-15 | 1983-02-15 | Motorola, Inc. | Purification of silicon source materials |
US4481178A (en) | 1982-11-08 | 1984-11-06 | General Electric Company | Purification of chlorosilanes |
US5232602A (en) | 1992-07-01 | 1993-08-03 | Hemlock Semiconductor Corporation | Phosphorous removal from tetrachlorosilane |
DE10061682A1 (en) | 2000-12-11 | 2002-07-04 | Solarworld Ag | Process for the production of high-purity silicon |
ITRM20040570A1 (en) * | 2004-11-19 | 2005-02-19 | Memc Electronic Materials | PROCEDURE AND PLANT FOR THE PURIFICATION OF TRICHLOROSILANE AND SILICON TETRACLORIDE. |
DE102007014107A1 (en) * | 2007-03-21 | 2008-09-25 | Evonik Degussa Gmbh | Work-up of boron-containing chlorosilane streams |
DE102008002537A1 (en) * | 2008-06-19 | 2009-12-24 | Evonik Degussa Gmbh | Process for the removal of boron-containing impurities from halosilanes and plant for carrying out the process |
-
2013
- 2013-03-15 US US13/836,018 patent/US10011493B2/en active Active
- 2013-04-17 IN IN2373KON2014 patent/IN2014KN02373A/en unknown
- 2013-04-17 CN CN201380033101.2A patent/CN104822430A/en active Pending
- 2013-04-17 DE DE112013002206.0T patent/DE112013002206B4/en active Active
- 2013-04-17 WO PCT/US2013/036972 patent/WO2013162969A1/en active Application Filing
- 2013-04-17 MY MYPI2014703145A patent/MY182211A/en unknown
- 2013-04-17 KR KR1020147032868A patent/KR102099486B1/en active IP Right Grant
- 2013-04-26 TW TW102114946A patent/TWI637908B/en active
Also Published As
Publication number | Publication date |
---|---|
US10011493B2 (en) | 2018-07-03 |
TWI637908B (en) | 2018-10-11 |
KR102099486B1 (en) | 2020-04-10 |
DE112013002206T5 (en) | 2015-01-08 |
WO2013162969A1 (en) | 2013-10-31 |
US20130284585A1 (en) | 2013-10-31 |
IN2014KN02373A (en) | 2015-05-01 |
DE112013002206B4 (en) | 2023-01-12 |
TW201348133A (en) | 2013-12-01 |
CN104822430A (en) | 2015-08-05 |
KR20150020283A (en) | 2015-02-25 |
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