MY139091A - Substrate carrier - Google Patents

Substrate carrier

Info

Publication number
MY139091A
MY139091A MYPI20044384A MY139091A MY 139091 A MY139091 A MY 139091A MY PI20044384 A MYPI20044384 A MY PI20044384A MY 139091 A MY139091 A MY 139091A
Authority
MY
Malaysia
Prior art keywords
enclosure
flange
carrier
machine
substrate carrier
Prior art date
Application number
Inventor
John Burns
Matthew A Fuller
Jeffrey J King
Martin L Forbes
Mark V Smith
Michael Zabka
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of MY139091A publication Critical patent/MY139091A/en

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)

Abstract

A CARRIER FOR TRANSPORTING SILICON SEMICONDUCTOR WAFERS DURING SEMICONDUCTOR WAFER PROCESSING OPERATIONS INCLUDING AN ENCLOSURE, A DOOR AND A FLANGE STRUCTURED TO INTERFACE WITH A MACHINE SO THAT THE CARRIER CAN BE LIFTED BY THE MACHINE. A LIFT SADDLE CONNECTS THE FLANGE TO THE CONTAINER SO THAT THE LOAD ON THE FLANGE IS TRANSFERRED TO A PART OF THE ENCLOSURE OTHER THAN THE TOP OF THE ENCLOSURE TO PREVENT DISTORTION OF THE ENCLOSURE TO MAINTAINING SEAL INTEGRITY BETWEEN THE ENCLOSURE AND THE FLOOR.
MYPI20044384 2003-10-24 2004-10-23 Substrate carrier MY139091A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US51404003P 2003-10-24 2003-10-24

Publications (1)

Publication Number Publication Date
MY139091A true MY139091A (en) 2009-08-28

Family

ID=37610150

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI20044384 MY139091A (en) 2003-10-24 2004-10-23 Substrate carrier

Country Status (3)

Country Link
CN (1) CN1898135A (en)
MY (1) MY139091A (en)
TW (1) TWI329604B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4800155B2 (en) * 2006-09-04 2011-10-26 信越ポリマー株式会社 Substrate storage container and check valve
US10020213B1 (en) * 2016-12-30 2018-07-10 Sunpower Corporation Semiconductor wafer carriers
TWI750398B (en) * 2018-07-18 2021-12-21 奇景光電股份有限公司 Wafer cassette

Also Published As

Publication number Publication date
TWI329604B (en) 2010-09-01
TW200519006A (en) 2005-06-16
CN1898135A (en) 2007-01-17

Similar Documents

Publication Publication Date Title
WO2005041267A3 (en) Substrate carrier
TW358221B (en) Etching apparatus for manufacturing semiconductor devices
TWI823166B (en) Load port operation in electronic device manufacturing apparatus, systems, and methods
SG156602A1 (en) Semiconductor package and method of making the same
TW355827B (en) High vacuum dual stage load lock and method for loading and unloading wafers using a high vacuum dual stage load lock
TWI520251B (en) Processing chamber
JP5886821B2 (en) Substrate processing apparatus and method
TW200624360A (en) Substrate treatment method, substrate treatment system, and substrate treatment program
TW200502155A (en) Load port transfer device
US20030194298A1 (en) Transfer chamber with integral loadlock and staging station
CN101728296A (en) Wafer-supporting platform
EP1422742A3 (en) System for processing semiconductor wafers
TW200636808A (en) Novel semicoductor wafer lifter
EP1394840A3 (en) System for transporting substrate carriers
KR20100096682A (en) Substrate treating apparatus and method for transfering carrier thereof
MY139091A (en) Substrate carrier
WO2002022469A3 (en) Loadlock with integrated pre-clean chamber
TW200725858A (en) Method and device for preventing warpage of a substrate strip during semiconductor packaging and the substrate strip
WO2002095795A3 (en) Device for receiving plate-shaped objects
JPS62128538A (en) Carrying method in vacuum atmosphere
JPWO2015141793A1 (en) Substrate processing apparatus, semiconductor device manufacturing method, and program
JP4219309B2 (en) Wheel rim leak test equipment
JP2002270662A (en) Substrate-processing apparatus, substrate-processing system, and substrate transfer method
KR102578557B1 (en) Overhead Hoist Transfer and Method of Transferring using the same
KR20150065076A (en) Apparatus for treating substrate