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Publication of MY139091ApublicationCriticalpatent/MY139091A/en
Container, Conveyance, Adherence, Positioning, Of Wafer
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Abstract
A CARRIER FOR TRANSPORTING SILICON SEMICONDUCTOR WAFERS DURING SEMICONDUCTOR WAFER PROCESSING OPERATIONS INCLUDING AN ENCLOSURE, A DOOR AND A FLANGE STRUCTURED TO INTERFACE WITH A MACHINE SO THAT THE CARRIER CAN BE LIFTED BY THE MACHINE. A LIFT SADDLE CONNECTS THE FLANGE TO THE CONTAINER SO THAT THE LOAD ON THE FLANGE IS TRANSFERRED TO A PART OF THE ENCLOSURE OTHER THAN THE TOP OF THE ENCLOSURE TO PREVENT DISTORTION OF THE ENCLOSURE TO MAINTAINING SEAL INTEGRITY BETWEEN THE ENCLOSURE AND THE FLOOR.