MXPA06006817A - Electromagnetic control of chemical catalysis - Google Patents

Abstract

The present disclosure methods and systems that provide heat, via at least Photon-Electron resonance, also known as excitation, of at least a particle utilized, at least in part, to initiate and/or drive at least one catalytic chemical reaction. In some implementations, the particles are structures or metallic structures, such as nanostructures. The one or more metallic structures are heat at least as a result of interaction of incident electromagnetic radiation, having particular frequencies and/or frequency ranges, with delocalized surface electrons of the one or more particles. This provides a control of catalytic chemical reactions, via spatial and temporal control of generated heat, on the scale of nanometers as well as a method by which catalytic chemical reaction temperatures are provided .

Description

ELECTROMAGNETIC CONTROL OF CHEMICAL CATALYSIS RELATED APPLICATIONS [0001] This application claims the benefit of and priority of the provisional patent application of the US. Serial Number 60 / 529,869, filed December 15, 2003 under the title "Process of Chemical Vapor Deposition of Arrayed Nanostructures: Photon-Electron Assisted CVD", hereby incorporated by reference in its entirety. [0002] Background [0003] 1. Field [0004] The present disclosure is directed to localized heating of micro- or nano-structures and their associated methods of use and applications. More particularly and in one aspect, the teachings described herein also provide highly localized heating of specific nano- and microstructures, for the purpose of influencing a catalyzed chemical reaction. In one aspect, providing heat for a chemical reaction that is carried out in and / or adjacent to a supplied structure or plurality thereof, which generates heat as a result of at least photon-electron resonance, as illustrated herein. [0005] 2. Related Art [0006] The use of catalysis in continuous large-scale chemical processes is well known. Many chemical reactions have a temperature threshold. Prior art methods typically utilize macroscopic heat sources that provide heat for these reactions and typically involve total convection, total conduction or total radiation. Examples of these macroscopic heat sources are thermal strips, ovens, lamps or heated gases. [0007] Inherent with the use of these conventional heating methods is the difficulty of having control of the temperature of a catalyst, the proximity of the catalyst and / or the heat applied both temporarily and spatially. For example, it may be convenient that a reaction is carried out for a predetermined time which is considerably less than that determined by the time constants associated with a surrounding substrate or container in which, or in / adjacent to which they are to be taken. out these reactions, respectively. For example, if it were able to provide the required heat in very small, particular areas / locations and not heat the container and / or chamber and / or surrounding substrate, this would allow a much longer time control over the temperatures used and the catalyst, that is, the reaction times would be significantly shortened because the thermal mass of the container or substrate can be neglected. It may also be convenient to spatially locate the reaction in the order of nanometers and / or microns. [0008] The heat generated when coupling photons with metal nanoparticles can be derived as follows: The polarity, alpha, of a small metallic sphere with radius, R, can be shown to be: a ^ fiM3 '- where e0 is the dielectric constant of free space, e is the dielectric constant of the particle and em is the dielectric constant of the nanoparticle. A resonance occurs for a spatial stationary field, variant in time, when the following conditions are satisfied: = Minimum.

This condition can be satisfied with noble metals, and corresponding nano-structures are known to have strong absorptions related to photon-electron resonances in the visible portion of the spectrum.

"U. K. Kreibig and M. Vollmer's, Optical Properties of Metal Clusters, Springer-Veri g., New York, 1995", here incorporated by reference entirely. Near the resonance frequency there is an order of magnitude increase in close absorption. If the particles are fully absorbed at the proper resonance frequency, a simple Stefan-Boltzman calculation, and power / area-sT4 where s is the Stefan-Boltzman constant, can estimate the power needed to achieve a select particle temperature. [0009] From the above, it is seen that localized nanoscale reactions are convenient and in addition, for associated devices, structures, methods and systems that can be used for and in a variety of applications and fields. COMPENDIUM [0010] According to one aspect of the description, techniques directed to chemical processes are provided. The provision of micro- or nano-structures and their applications is also achieved. The present invention can be used for other fields and applications such as life sciences, chemistry, materials sciences, nanotechnology, electronics and others.

[0011] In some exemplary implementations, chemical reactions affected by selected local heat temperature are provided which is provided by at least photon-electron interactions, sometimes also referred to in the literature and known in the art as plasmon resonance. [0012] Only as an example and in one implementation, the present disclosure provides chemical vapor deposition assisted by photon-electron (PACVD = photon-electron chemical vapor deposition) which uses heat generated by photon-electron interaction in nanometer-sized structures as the heat source to initiate or facilitate catalytic chemical reactions associated with the deposition of the material. [0013] In some exemplary implementations, a reaction product can simply be a hot reagent that is heated by photon-electron interaction in accordance with the teachings of the present disclosure. A reagent heated in this manner can be used in additional steps and / or processes if so desired. In particular, and in accordance with the teachings provided herein, the application of particular predetermined frequencies and / or frequency ranges of electromagnetic radiation excites at least one photon-electron resonance in the nanometer-sized structures and controls the heating and the relative temperature of structures of nanometer size, with which chemical reactions occur. [0014] In some exemplary implementations, a laser provides the electromagnetic radiation used to excite at least one photon-electron resonance. [0015] In some exemplary implementations, the present disclosure allows the use of light sources such as laser source, and conventional optical components to provide the desired electromagnetic radiation, which selectively shifts the resonance of photons-electrons to heat structures to the size of nanometers using substantially lower energy densities than those typically employed by the prior art to heat material, thereby stimulating, facilitating and / or initiating a reaction. [0016] Some exemplary implementations allow spatial control of chemical processing, such as chemical synthesis, deposition and / or degradation on the catalytic substrate on a nanometer scale. This also provides a high degree of temporal control of the temperature of the reaction-processes. Stopping the flow of incident electromagnetic radiation to nanometer-sized structures results in a very rapid reduction of temperature in nanometer-sized structures, ie a previously established photon-electron resonance of these structures attenuates / decreases, as does the associated generated localized heat. [0017] Techniques using micro- or nano-structures for electromagnetically controlled chemical catalysis are provided. More particularly, the teachings described herein provide methods, systems and resulting structures for improving chemical reactions by catalysis based on a combination of known catalytic microstructures and temperature / heating control based on electromagnetically displaced photon-electron interaction. [0018] In an exemplary implementation, the method includes providing reagents or reagents such as, but not limited to a reactive species (e.g., Ti (2, 2, 6, 6-tetramethyl-3,5-heptanedione, SiH, and GeH) adjacent to one or more particles and irradiating one or more particles with electromagnetic radiation (e.g., from a laser source, or other source) having a pre-selected frequency, i.e. substantially equaling or equaling the resonance frequency of photons-electrons or "P-ERF" of the surface electrons of the one or more structures, here for example, a particle or plurality of particles The term "adjacent" is taken to include current contact between one object and another. can be any element or compound that can be subjected to or be part of a reaction that occurs as a result of exposure to heat that is provided by the photon-electron resonance excitation at least as described herein. n temperature of the one or more particles to at least one selected temperature (for example, reaction temperature) results from an influence of at least the electromagnetic radiation having the pre-selected frequency. The method causes a chemical reaction of the reagent to at least increase the temperature of the one or more particles. [0019] In an exemplary implementation, the present disclosure provides an alternate method for accelerating a catalytic chemical reaction using electromagnetic radiation. The method includes providing one or more particles. Preferably, the one or more particles have a thermal characteristic. The method includes applying at least one adjacent reagent and / or one or more particles and irradiating the one or more particles with electromagnetic radiation having a pre-selected frequency. The method includes increasing a temperature of the one or more particles having the thermal characteristic to at least one temperature selected from an influence of at least the electromagnetic radiation having the preselected frequency and causing a catalytic chemical reaction of the reagent at least from at least the increase in the temperature of the one or more particles. That heat can be used for other processes to initiate the formation of a reaction product. [0020] In some exemplary implementations, the particles heated through irradiation and photon-electron interactions may themselves be the catalytic agent in the improved chemical reaction processes. In other exemplary implementations, multiple particles can be used together; some of these particles can be used to cause an increase in localized temperature through the aforementioned photon-electron interactions, while others act as catalytic particles, which improve the desired chemical reaction at a suitable temperature or temperature range. The benefits of spatial and temporal control can apply in one or both cases. [0021] Still further, the present disclosure provides a method for forming a reaction product that uses heat generated by at least the photon-electron resonance of supplied structures, in some implementations, placed in a particular form on a substrate. The exemplary method includes providing a substrate comprising a pattern of at least one or more structures preferably one or more nano-structures, which are made from a select material. The method includes determining a P-ERF of the selected material of the nano-structure and exciting at least a portion of the selected material using an electromagnetic source that provides electromagnetic radiation with a pre-determined frequency in or substantially superimposed with P-ERF to cause generation of, and an increase in, thermal energy of the selected material. The method includes providing at least one reagent superimposed / adjacent to the substrate and the selected material excited in the P-ERF and causing production of the desired reaction product, depending on at least the reagent or reagents provided. [0022] Depending on the implementation, the present disclosure also provides one or more of the following exemplary features, which are further described through the present specification and more particularly below. [0023] 1. A method using excitation of photons-electrons in metal nano-structures as a means to create local temperature profiles or induce localized heating which is sufficient to initiate chemical reactions. [0024] 2. Photon-electron excitation in metal nano-structures, for locally heating a structure, such as a preform, in a given space, in accordance with exemplary implementations, is also described. A brief sequence of stages can be provided as follows: a. Develop and / or provide at least one metallic nano-structure on a substrate (a pre-form) such as, but not limited to, a set of palladium or gold particles by effective means, including but not limited to beam lithography. electrons, precipitation and nano-printing. b. Computation and / or use of the P-ERF (eg, or frequency range) for selected select material, spacing, selected selected particle size, etc. of the metal nano-structures. c. Use a light source of appropriate frequency and / or range of frequencies and sufficient intensity to induce resonant heating of photons-electrons in each of at least one nano-structure. This can be achieved by using a focused or diffuse source that can excite all metal nano-structures simultaneously. d. Carrying out step (c) within a given space, such that at least one reagent such as, for example, vaporized chemical precursors, is provided and is in contact with hot metal nano-structures, which catalyze a chemical reaction . [0025] Controlling the source of electromagnetic radiation can be used to at least turn the heating on / off. The heating is induced more quickly and dissipates more quickly because it is the interaction of electromagnetic radiation incident with the metal nano-structures that establish, through at least resonance of photons- - electrons, localized heating of metal structures and not all the substráete The withdrawal of the flow of incident electromagnetic radiation, which has the appropriate frequency or range of frequencies, of the metallic structures, results in a very rapid cooling of the metallic structures due to the small size / mass of the metallic structures. [0026] Depending on the implementation, one or more of these features may be included. Of course, a person with skill in the specialty will recognize many variations, modifications and alternatives. In particular, it should be clear that various types of particles, nanoparticles or nano-structures, can be used in the same process. Some particles or nano-structures can be used to control temperature in the manner indicated above, but which has no catalytic activity. Other particles may be present in the pre-form that act as catalysts, when the appropriate temperature is reached. [0027] In addition, some exemplary implementations that are provided herein, integrate with and provide processes and apparatus that are compatible with conventional manufacturing / process technology without substantial modifications to the equipment. Preferably, the teachings described herein provide improved process integration for design rules of nanometers and less. These and other benefits will be described in greater detail through the present specification and more particularly below. [0028] In some exemplary implementations, the specific localized warming of structures such as nano-structures results from at least the resonance excitation of photons-electrons. In other implementations, specific localized warming of these structures occurs as a result of other effects or combinations of effects that result from the occurrence of electromagnetic radiation in the structures, resulting in heat generation at a desired temperature. Exemplary effects that result in localized heating of the present invention may include excitation of a photon-electron resonance, phonon network vibrations, electron / dynamic orifice creation and Landau damped or any combination thereof. [0029] In one aspect, the teachings of the present disclosure provide a method that facilitates chemical reactions using localized heating, comprising the steps of providing a substrate having at least one structure, introducing at least one reagent adjacent to the structure at least and irradiate the structure at least with electromagnetic radiation. In some implementations a plurality of structures is provided. The electromagnetic radiation has a predetermined frequency or range of frequencies which is absorbed by the structure at least and preferably excites at least a photon-electron resonance of the structure. This provides and generates localized heat of the structure as a minimum and as a result of photon-electron resonance, and increases the temperature to facilitate at least one catalytic chemical reaction involving at least the reagent, which provides at least one reaction product. [0030] In some implementations at least one structure is provided on the substrate in a desired configuration to provide a pre-shape that determines the location at which the catalytic chemical reaction is carried out at least. The preform may include a plurality of structures or a structure, wherein the structure as a minimum or plurality has for example a shape selected from the group consisting of a particle, a dot, a sphere, a wire, a line, a film and any combination thereof. In some implementations, the particle, point, sphere, wire, line, film and any combination thereof have nanoscale dimensions (any one or combinations of height, length, width, diameter, radius, diagonal, etc.). in some implementations, the particle and / or sphere may have a radius of about .5 to about 500 nanometers or from about 1 to 100 nanometers. [0031] In some exemplary implementations, the structure at least is or contains at least one metal. The metal can be one of gold, copper, silver, titanium, aluminum, nickel, palladium, platinum, ruthenium, iridium, iron, cobalt, rhodium, osmium, zinc or any combination thereof. The metal as a minimum can act as a catalyst in the chemical reaction at least and / or act as a source of localized heating to provide heat at a reaction temperature. In some exemplary implementations, the reagent may at least be a gas, a liquid, a plasma, a solid or any combination thereof. [0032] In some exemplary implementations, the structure as a minimum is or contains at least one element or combination of elements as found in the Periodic Table of the elements or any combination thereof. The structure as a minimum can act as a catalyst in the chemical reaction at least and / or act as a source of localized heating to provide heat at a chemical reaction temperature. In some exemplary implementations, the reagent may at least be a gas, a liquid, a plasma, a solid or any combination thereof. [0033] In some exemplary implementations, the chemical reaction involving the reagent at least may be, for example, a decomposition reaction wherein the reaction product at least is or contains at least one reagent component. In some implementations, the reagent at least is a compound having a particular proportion of elements, wherein the reaction product at least has the same proportion of elements as the compound and the chemical reaction at least results in a change of at least one characteristic of the compound. Exemplary changes include for example a re-arrangement of atoms, change in the number of links, change in type of links, change in link angle. In some implementations, the reaction achieves a change of at least one characteristic that results in at least one reagent isomer production. In some implementations, this isomer production may result in the production of enantiomers. [0034] In some exemplary implementations, the chemical reaction involving the reagent at least may be for example any substitution reaction, an addition reaction, a deletion reaction, a condensation reaction or any combination thereof. In some implementations, the reagent at least combines with at least one second reagent to form a reaction product. [0035] The electromagnetic radiation used in some implementations is in the form of a laser that is provided by a laser source. Various laser sources and lasers can be used in accordance with the present disclosure. Electromagnetic radiation, for example, can be ultraviolet, visible or infrared or any combination thereof. In some implementations, the electromagnetic radiation provided radiates at least a portion of the substrate. [0036] In one aspect, the present disclosure provides methods wherein at least one reagent is a carbon-containing compound. In certain implementations, at least one second reagent is provided, wherein the reagent is at least one carbon-containing compound and the second reagent is a hydrogen-containing compound. [0037] In some exemplary implementations, the substrate is constituted by silicon or materials of groups III-V or. silicon in insulator or germanium, or qz or glass or any combination thereof.

[0038] In some exemplary implementations, electromagnetic radiation having the predetermined frequency or range of frequencies is directed to a plurality of structures or a subset. of the plurality of structures. The plurality of structures may comprise at least a first subset and a second subset of structures, each subset differing in composition from another subset. In one implementation, the first subset is heated to a first reaction temperature that is a result of the interaction of the electromagnetic radiation irradiation with the first subset, to displace at least one catalytic chemical reaction. In a further exemplary step, additional electromagnetic radiation is provided, wherein the additional electromagnetic radiation has a frequency or range of predetermined frequencies that differ from the electromagnetic radiation previously provided and excites at least one photon-electron resonance in the second subset of structures and in this way it provides heat for an additional reaction. [0039] The present disclosure also provides methods and apparatus wherein localized heat is provided, at least in part, by at least one of phonon network vibrations, dynamics / creation of electron holes, Landau damped or any combination of the same, in addition to the resonance of photons-electrons, to provide the described heat. [0040] The present also provides an exemplary apparatus for photon-electron assisted deposition. In some exemplary implementations, this apparatus includes a given space, at least one input in communication with the determined space to drive at least one reagent to the given space, a substrate that has at least one structure disposed, the substrate is located within the determined space . A source of electromagnetic radiation is also provided, located to irradiate the substrate with electromagnetic radiation having a predetermined frequency or range of frequencies, which is absorbed by the structure at least and excites at least one resonance of photons-electrons of the structure at least . In some implementations, the electromagnetic radiation is provided in such a way that it radiates at least a portion of the substrate having the structure at least there disposed. This allows the localized heat of the structure at least and as a result of at least photon-electron resonance at a temperature to facilitate at least one catalytic chemical reaction involving at least the reagent. The apparatus also comprises at least one exit, in communication with the determined space. The output as a minimum may be to conduct the reaction product at least from the determined space. Some implementations may include a second entry in communication with the determined space and / or a second exit from the determined space. [0041] In some exemplary implementations of the apparatus, the structure at least contains at least one metal such as, but not limited to, any of gold, copper, silver, titanium, aluminum, nickel, palladium, platinum, ruthenium, iridium, iron , zinc and any combination thereof. The structure at least has a shape / structure that can be any of a particle, a point, a sphere, a wire, a line, a film and any combination thereof. As discussed above, some implementations of the apparatus use at least one structure having a shape / structure such as a particle, point, sphere, wire, line, film or any combination thereof having nanoscale dimensions. Exemplary dimensions such as height, width, thickness, etc. they can be anywhere from 5 to 500 nanometers. Some implementations use these structures that have dimensions of 1 to 100 nanometers and still others of 10 to 50 nanometers or approximately with any intermediate range. [0042] Depending on the implementation, the metal at least of the structure as a minimum, can be a catalyst in the deposition reaction at least and / or acts as a heat source for the reaction. In exemplary form, at least one reagent can be any or a combination of gas, liquid, plasma or solid, [0043] Various additional objects, features and advantages of the present invention can be more fully appreciated with reference to the detailed description and the accompanying drawings. next. BRIEF DESCRIPTION OF THE DRAWINGS [0044] Figure 1 is an illustrative structure and at least one reagent. [0045] Figure IA is an illustrative close-up view of a surface of a structure, incident electromagnetic radiation, exemplary surface electrons of the surface of the structure and at least one reagent. [0046] Figure IB illustrates a first layer of exemplary material placed on the structure and a second incident electromagnetic radiation, a second reagent and exemplary surface electrons of the first layer of exemplary material deposited. [0047] Figure 1C illustrates a second layer of deposition of material on the first layer of material. [0048] Figure 2A is an illustration of an exemplary substrate, plurality of structures. [0049] Figure 2B is a schematic enlarged view of a structure shown in FIG. 2A and a reagent that is subjected to an exemplary chemical reaction, [0050] Figure 3A is an illustration of an exemplary substrate, plurality of structures and two reagents. [0051] Figure 3B is a schematic enlarged view of a structure shown in FIG. 3A and another exemplary reaction. [0052] Figure 4A is an illustration of an exemplary substrate, plurality of structures and a reagent. [0053] Figure 4B is a schematic enlarged view of a structure shown in FIG. 4A and another exemplary reaction. [0054] Figure 5 is a schematic enlarged view of another exemplary structure, heat and. Still another exemplary reaction.

[0055] Figure 6 is a schematic configuration of an exemplary apparatus in accordance with the teachings described herein. DETAILED DESCRIPTION OF THE INVENTION [0056] Descriptions of exemplary implementations are pred and reference is made to the accompanying figures that form a part thereof, and which are shown by way of illustration of exemplary implementation of the teachings herein pred. It will be understood that other implementations and applications of the teachings herein pred may be utilized and structural and functional changes may be made, without departing from the spirit and scope of the present disclosure. Additionally, the figures are for illustrative purposes and no relative or limiting sizes, scales or proportions are intended. [0057] Techniques directed to micro or nano-structures and their applications are pred. More particularly and in one aspect, the teachings described herein pre methods, systems and resulting structures and their use to form nano- and micro-structures using novel deposition techniques useful for a wide variety of applications. Just as an example, these deposition techniques can be applied to the formation of one or more films in the manufacture of electronic devices, such as integrated circuits, memory means, both volatile and non-volatile storage media. It will be recognized that the invention has a much wider range of applicability. The generation of heat by electron photons-electron resonance excitation dissociated by incident electromagnetic radiation from particular structures, such as but not limited to particles, rods, wires, spheres and the like, can be used in and for various manufacturing techniques , particularly large scale manufacturing, chemical processing and other uses where a very localized heat generation is desired. [0058] According to some implementations, the size of these structures, which will pre / generate heat upon exposure to electromagnetic radiation as described herein and in accordance with the teachings described, may have dimensions of about .5 to about 500 nanometers, of preferably from about 1 to 100 nanometers or any specific range therebetween wherein at least one photon-electron resonance can be pred, which supplies heat at a desired temperature such as a reaction temperature.

[0059] In one implementation, a method for manufacturing a film of material using a photon-electron assisted process according to an implementation of the present invention, can be established as follows: [0060] A substrate having a surface region is pred in which a metallic structure is placed, preferably a metallic nano-structure. In this implementation, this metallic structure may be one or more particles having a particular thermal characteristic, for example the ability to pre appropriate photon-electron resonance upon exposure to appropriate electromagnetic radiation having the P-ERF or range of P-ERFs. appropriate. The P-ERF is the frequency in which the electromagnetic energy of an electromagnetic wave is efficiently converted into a collective electron movement into a solid structure. The frequency of photons-electrons can be derived by solving the Maxwell equations with the appropriate boundary conditions or can be measured empirically from an absorption or reflection spectrum. The one or more particles are placed in at least a portion of the surface region of the substrate. At least one reagent is pred within a neighborhood of the one or more particles. The reagent at least is composed of at least one component, although the reagent may include two or more components. The one or more particles are irradiated with electromagnetic radiation having a pre-selected frequency, in a selected spatial region. The spatial region can be defined substantially by the position of one or more particles on the substrate. The impacted spatial region may also include areas of the substrate in which the one or more particles are not located. The spatial region may also include areas less than the areas of the substrate in which the one or more particles are placed, for example radiation falls on some particles but not others on a certain one. [0061] The pre-selected frequency of the irradiating electromagnetic radiation is of a frequency concordant / substantially concordant with a P-ERF of the metal structure disposed, here the one or more particles. This results in an increase in temperature of the one or more particles having the thermal characteristic to at least one selected temperature, of an influence of at least the electromagnetic radiation having the preselected frequency. The surrounding substrate is not heated appreciably with respect to the one or more particles there placed. This very specific and localized heating due to the resonance of photons-electrons, occurs as a result of the interaction of the electromagnetic radiation, of the pre-selected frequency, with the delocalized surface electrons of the one or more particles, provides the required energy (ie heat) to instigate a chemical reaction, which includes at least one reagent, of at least the increase in temperature of the one or more particles. This initiates a reaction that can be used for the formation / deposition of a film of material based on the reagent at least. [0062] The metal structure 8 in Figures 1 and 1A-1C is illustrated as squares, simply for illustrative purposes and can be any desired shape as previously described. The incident electromagnetic radiation 4 excites a photon-electron resonance of the metal structure 8, for example in a set of a substrate 2 in a CVD environment, which includes at least one reagent such as, but not limited to, an evaporated chemical precursor 6. [0063] Figures 1A-1C are illustrative schematics very close to the surface of a structure from which heat is generated by photon-electron interaction in nanometer-sized structures, in accordance with the teachings described herein. In Figure IA and taking the metallic structure 8 as an example, the dissociated surface electrons are illustrated as "e-". The incident electromagnetic radiation 4 that has a frequency consonant with the resonance of photons-electrons of these surface electrons, excites and establishes a resonance of photons-electrons, which in turn generates heat at a reaction temperature e? which a reaction between the metal structure 8 and at least one reagent such as chemical precursors 6 for example and / or between the chemical precursors 6 itself, results in the formation of material and deposition 10. In some implementations, the structure at least plays the double role of a catalyst as well as a heat generator. As illustrated here, when the heat is localized, so does the chemical reaction and any deposition that may be associated with it. [0064] Turning to Figure IB, the material itself constituting deposition 10 has dissociated surface electrons which are illustrated here as e- '. A second incident electromagnetic radiation 20 and a second reactive radiation are introduced, such as a second chemical precursor 21. The second incident electromagnetic radiation 20 has a frequency that is consonant with the photon-electron resonance of these surface electrons (e "') and excites and establishes at least a second resonance of photons-electrons and associated generated heat.The interaction heating effects of photons-electrons in nanoparticles, are related to the average kinetic energy of driving electrons, and the incident electromagnetic radiation will cause oscillations of electrons in the superficial region of a metal, thus increasing the average kinetic energy. The kinetic energy of the surface electrons is eventually transferred in a somewhat random fashion to the inner electrons on the surface, ie electrons in volume. This is the basis of radiant heating. However, if the electromagnetic radiation is at or near the P-ERF, there will be collective oscillations or a resonance of the surface electrons and the heating will be maximized. As the size of a structure decreases, there is an increase in the surface-to-volume ratio, which is proportional to 1 / R, where R is the radius of the particle. Nanoparticles in particular have high surface-to-volume ratios, such that there is a larger number of surface electrons relative to electrons in volume. It is generally considered that this accounts for the efficient heating of nanoparticles by electromagnetic radiation at the plasmon resonance frequency. The frequency of the optimal solution may depend both on the shape of the individual nanoparticles and on the geometric arrangement of a nanoparticle collection (for example on a surface). For an individual spherical particle, the calculation of the absorption spectrum goes back to the work of Mié at the beginning of the last century. Recent experimental evidence suggests that this heating process can occur at very rapid time scales. The heat generated can raise the temperature enough to start a chemical reaction. The heat can be applied between deposition 10 and second chemical precursor 21 and / or between the second chemical precursors 21 themselves, resulting in a second formation and deposition of material 18 on a previously supplied deposition 10. [0065] Exemplary metals (which can be used for forming metal structures such as Cu, Ag, Au, Ni, Pd, Pt, Rh, and Ir, have absorption resonances at visible wavelengths due to dissociated surface electrons known as plasmons. minimal and associated heating of the metal nano-structures due to excitation of these surface electrons, it is possible to heat, with the appropriate wavelength and the power of incident light, structures with nanometer size, ie nano-structures, but not limited to spheres, lines, assemblies and rods at adequate temperatures to facilitate deposition reactions, including but not limited to as to material growth. [0066] In some embodiments, the underlying substrate may comprise one or any combination of silicon or metals of group III-V (of the Periodic Table) silicon in insulator, germanium or quartz or glass. In any of the cases described herein, electromagnetic radiation at a constant and / or pulsed speed is provided on the structures to generate heat as a result of at least one photon-electron interaction when some components of the structure or plurality of structures. In some embodiments, these components are nano-structures that contain metal. Facilitated reactions that allow any number of types of reaction products, some of which can be deposited on the substrate 2. [0067]. In some implementations, the substrate may comprise one or any combination of silicon or group III-V materials (from the Periodic Table), silicon in insulator, germanium or quartz or glass. In any of the present cases described herein, the electromagnetic radiation provided may result in a constant and / or pulsed speed on the structures to generate heat as a result of at least one photon-electron resonance of a structure or plurality of structures, in some implementations nano-structures that contain metal. [0068] Various chemical reactions are carried out in and or adjacent to the structure as a minimum or plurality of structures (such as a set, for example) . In addition, the structure as a minimum that acts as a localized heat source, can simultaneously act as a catalyst in at least one chemical reaction. As previously stated, the structure at least preferably contains metal such as, but not limited to, gold, copper, silver, titanium, aluminum, nickel, palladium, platinum, ruthenium, iridium, iron, cobalt, osmium, zinc, rhodium or any combination thereof. In some implementations, a plurality of nano-structure particles is provided, at least some act only as heat sources and some act only as catalyst units. In some implementations where a plurality of structures are provided, at least a first and a second subset of structures can be provided. The subassemblies can comprise the same materials and have different shapes / structures from each other, placed on the substrate 2 (for example a set and a set of wires). Other contemplated implementations include subassemblies of structures on a substrate comprising different materials, provided by each subset of structures, particular thermal characteristics, for example at least photon-electron resonances, which provide heat as a result of exposure to particular electromagnetic radiation frequencies or Frequency ranges that do not excite the photon-electron resonances at least in the other subset. This allows specific heat for a specific subset, for a specific chemical reaction, everything that happens adjacent to the other second subset in the substrate. [0069] The structure as a minimum can be provided as previously described as a particle, point, sphere, wire, - line, film or any combination thereof, having nanoscale dimensions, that is, having one or more appropriate combinations of height, length, width, radius, diagonal, diameter of any of .5 to 500 nanometers, preferably between 1 to 100 nanometers or any interval between them and around them. [0070] The exemplary chemical reaction reagents that are provided in accordance with the present disclosure may be any or combination of a gas, liquid, plasma or solid. Various types of reactions can be provided in accordance with the present teachings. An exemplary reaction can be a decomposition reaction wherein at least one reaction product is or contains at least one component of a reagent. This is exemplified in Figure 2A, where a plurality of metal structures 8 is illustrated on the substrate 2, irradiated by electromagnetic radiation 4 having the predetermined frequencies or frequency ranges, which excite at least one photon-electron resonance at each metallic structure 8. The exemplary decomposition reagent 62 is also provided. Figure 2B is a schematic first plane view of a single metal structure 8, that is, it generates heat illustrated herein with a plurality of wavy lines 29, at a chemical reaction temperature as a result of at least the resonance of excited photon-electrons. which is provided as a result of the interaction of the photon-electron electrons of the metal structure 8 with electromagnetic radiation 4 at the appropriate frequency or range of resonance frequencies of photons-electrons. This increase in temperature occurs adjacent to, above and / or in the local vicinity of the catalyst (which may be the metal structures). The exemplary decomposition reagent 62 is subjected to decomposition and decomposes into at least two portions 62A and 62B, providing at least one desired reaction product. The exemplary reaction illustrated in Figures 2A and 2B is sometimes referred to as a removal reaction, wherein the reagent is removed by decomposition into component parts. [0071] Another exemplary chemical reaction may be a substitution reaction, wherein at least one reagent reacts with at least one second reagent and is replaced or a portion thereof in place of a portion of a second reagent and / or added to the second reagent, to give rise to the reaction product. This is exemplified in schematic form of Figure 3A where in this exemplary implementation, a plurality of metal structures 8 is provided on the substrate 2. Appropriate electromagnetic radiation 4 is provided to generate heat from the plurality of metal structures 8, due to when minus the resonance excitation of photons-electrons in the plurality of metal structures 8. Here, a first exemplary reagent is symbolized as a connected pair of triangles 62 and a second exemplary reagent is symbolized as a connected pair of circles. As shown in the schematic foreground view of Figure 3B, the heat 29 provides the desired reaction temperature adjacent to, above and / or in the local vicinity of the catalyst (which may be the metal structures) and is carried out At least one chemical reaction. In this example, one of the triangles that can be a portion of the first exemplary reagent, changes site with one of the portion of the second reagent, to provide at least one reaction product having a portion of the first reagent and a portion of the second reagent . In Figure 3B, this is symbolized as the connected circle and triangle 64. In another exemplary reaction, a bulk combination of a first reagent with at least one second reagent, can result in an addition reaction product. This is, as illustrated in exemplary and symbolic form in Figure 5, where a first reagent, shown as a star 82 and a second reagent, shown as a circle 83 are aggregated together to the chemical reaction temperature provided, for forming a reaction product which is an additive combination of the two, shown here as a pair of the star symbols 82 and circle 83, to provide an addition reaction product in combination 88. [0072] In some implementations, the reagent as minimum of a which provides at least one chemical reaction, is a starting compound 73 having a particular proportion of elements, as exemplified in Figure 4A by a circle, square and triangle, symbolizing an exemplary starting compound. As before, appropriate electromagnetic radiation 4 is provided, appropriate heat is generated by at least one photon-electron resonance of the metal structure 8 at a chemical reaction temperature and at least one chemical reaction is carried out, exemplified in the schematic of Figure 4B. Here, the reaction as a minimum and at least one reaction product, indicated as the altered compound 79 have the same proportion of elements as the starting compound 73 and the chemical reaction at least results in a change of at least one characteristic of the compound of Item 73. Exemplary changes include any of a rearrangement of atoms, change in the number of links, change in link type, change in link angle, or any combination of these. In some implementations, the reaction at least achieves a change of at least one characteristic of the starting compound 73, for example resulting in at least one reagent isomer production. In some implementations, this isomer production may result in the production of enantiomers. [0073] An exemplary apparatus according to an aspect of the description is schematically illustrated in Figure 6. In this example, the apparatus includes a given space 1200, at least one input 1217 in communication with the given space 1200, to drive the minus one reagent from at least one reagent supply 1204 to the given space 1200, a substrate 2 having at least one structure, here an ordered collection or array 7 comprising a plurality of metal structures., for example. Other configurations are contemplated within the scope and teachings of the present disclosure. The substrate 2 is located within the given space and a source of electromagnetic radiation 1202 is also provided. The source of electromagnetic radiation 1202 is located to irradiate the substrate having the structure at least there and / or a portion thereof, with electromagnetic radiation having a predetermined frequency or range of frequencies that is absorbed by the structure at least, illustrated in exemplary form as the ordered collection 7 having a plurality of metal structures 8 and exciting at least one photon-electron resonance of the plurality of the metal structures 8. In some implementations, the electromagnetic radiation 4 is provided in such a way that it radiates at least a portion of the substrate having the structure at least there disposed. This provides localized heat from the structure at least and as a result a minimum photon-electron resonance at a chemical reaction temperature to facilitate at least one chemical reaction involving at least one reagent that is provided by the reagent 1204 supply. At least one output 1219 is also provided in communication with the given space 1200. The output at least 1219 may be to produce at least one reaction product from the given space 1200. Some implementations may include a second input 1218 in communication with the space determined 1200 and a second reagent supply 1206 containing a second reagent. Additionally and in this implementation, an additional output 1220 may also be provided, in fluid communication with the determined space 1200 and an analysis apparatus 1210, such as a gas chromatograph, for example. In addition, a vacuum 1208 may also be provided and may operate to collect at least one reaction product and / or extract reaction products for the analysis apparatus 1210. Of course, appropriate valves 1205 are provided in exemplary form as illustrated in the Figure 6. The total operation of the apparatus and monitoring and control of the reactions according to the teachings provided herein, can be provided by at least one computer system 1021, which is in operational communication with various components of the configuration of the apparatus, such as it is shown in exemplary form in Figure 6. The reagents of supplies 1204 and 1206 can be provided to the given space 1200 in a desired state, such as gas, liquid, solid, plasma or any combination thereof. [0074] In some implementations of the apparatus, the structure as a minimum, here the plurality of metal structures 8, contain at least one metal, such as but not limited to any of gold, copper, silver, titanium, aluminum, nickel, palladium, platinum, ruthenium, rhodium, iridium, iron, zinc and any combination thereof. The structure at least has a shape that can be any of a particle, a point, a sphere, a wire, a line, a film and any combination thereof, as previously described. As discussed above, some implementations of the apparatus use at least one structure having a shape / structure such as a particle, point, sphere, wire, line, film and any combination thereof having nano-scale dimensions. Exemplary dimensions of these structures such as height, thickness, width, diameter, length or any combination thereof are from about .5 to about 500 nanometers. In some implementations, the structure at least has dimensions of approximately 1 to 100 nanometers and in still others, of approximately 10 to 50 nanometers. The total sizes that are provided to establish and use at least one photon-electron resonance provide heat at a desired reaction temperature. [0075] Depending on the implementation, the metal at least of at least one structure is a catalyst in the chemical reaction at least and / or acts as a heat source for the chemical reaction. Exemplary chemical reaction temperatures may be several hundred Celsius (C), 60 to 1200 C and thus localized heating, as described and provided by the present teachings, can reach these temperatures. In various implementations, by pressing a laser, for example, it is possible to control chemical reaction times and temperatures. Exemplary apparatuses that are provided herein, can accommodate a variety of chemical reactions in accordance with the present disclosure as discussed above. [0076] In some implementations, the exemplary apparatus includes at least one source of electromagnetic radiation 1202, it can be derived from a laser source, such as, but not limited to, a solid state laser, a semiconductor diode laser, a laser Neon-helium gas, a gas-argon laser, a gas-krypton laser, a xenon ion gas, adjustable lasers and / or lamps. Preferably, the pre-selected wavelength ranges are in the range from about 100 nm to about 10 μm. Exemplary electromagnetic radiation 4 which is provided and used by the exemplary apparatus, may include one or any combination of visible or infrared ultraviolet radiation. The exemplary source of electromagnetic radiation provides pulsed electromagnetic radiation having the frequency or range of pre-determined frequencies. [0077] As described above, the electromagnetic radiation used in accordance with the present disclosure can be provided by any number of sources such as a laser source or lamp, for example. The electromagnetic radiation 4 can be any or a combination of ultraviolet, visible or electromagnetic infrared radiation. [0078] While resonance of photons-electrons has been discussed in detail, it is further contemplated that various other aspects alone or in any combination, may contribute to the very localized specific heat generation methodologies discussed above. These can include damped Landau, dynamics / creation of electron holes, as well as phonon network vibrations in any combination and contribution. [0079] It is also understood that the examples of implementations described herein are for illustrative purposes only and that various modifications or changes in light of the present will be suggested to persons skilled in the art and should be included within the spirit and essence of the invention. this application and scope of the appended claims and their combinations.

Claims (75)

1. CLAIMS 1. A method for facilitating catalytic chemical reactions using localized heating derived by photon-electron resonance, characterized in that it comprises: providing a substrate that has at least one structure there; introducing at least one reagent adjacent to the structure at least; irradiating the structure at least with electromagnetic radiation, wherein the electromagnetic radiation has a predetermined frequency or frequency range that excites at least one resonance of photons-electrons of the structure at least; providing localized heat from the structure as a minimum and as a result of at least photon-electron resonance at a catalytic chemical reaction temperature to facilitate at least one catalytic chemical reaction involving at least the reagent; and generating at least one reaction product. The method according to claim 1, characterized in that the structure is at least provided on the substrate in a desired configuration to provide a pre-form. 3. The method according to claim 1, characterized in that the structure at least contains at least one metal. 4. The method according to claim 3, characterized in that the structure at least has a shape selected from the group consisting of a particle, a point, a sphere, a wire, a line, a film and any combination thereof. The method according to claim 4, characterized in that the metal is at least selected from the group consisting of gold, copper, silver, titanium, aluminum, nickel, palladium, platinum, ruthenium, iridium, iron, cobalt, osmium, zinc, rhodium and any combination thereof. The method according to claim 5, characterized in that the metal at least acts as a catalyst in the catalytic chemical reaction at least. The method according to claim 5, characterized in that the metal at least acts only as a source of localized heating to provide heat at the catalytic chemical reaction temperature. The method according to claim 4, characterized in that the point, sphere, wire, line, film and any combination thereof have nanoscale dimensions. 9. The method according to claim 5, characterized in that the metal is constituted by one or more particles, each particle with a diameter of about .5 to about 500 nanometers. 10. The method according to claim 1, characterized in that the reagent is at least a gas. 11. The method according to claim 1, characterized in that the reagent is at least a liquid. 12. The method according to claim 1, characterized in that the reagent is at least a plasma. The method according to claim 1, characterized in that the reagent is at least a solid. The method according to claim 1, characterized in that the chemical reaction at least involving the reagent at least is a decomposition reaction that the reaction product at least is or contains at least one reagent component. The method according to claim 1, characterized in that the reagent at least is a compound having a particular proportion of elements in the compound, wherein the reaction product has at least the same proportion of elements as the compound and the At least one catalytic chemical reaction results in a change of at least one characteristic of the compound. 16. The method according to claim 15, characterized in that the change of the characteristic at least, is chosen from the group consisting of re-arrangement of atoms, change in number of links, change in type of link, change in angle of link and any combination thereof. 17. The method according to claim 15, characterized in that the change of at least one characteristic results in at least one reagent isomer production. 18. The method according to claim 1, characterized in that the production of isomer includes production of enantiomers. The method according to claim 1, characterized in that the catalytic chemical reaction at least involving the reagent at least is a substitution reaction, wherein the reagent at least reacts with at least one second reagent and is replaced instead of a portion of the second reagent to produce the reaction product. The method according to claim 1, characterized in that the catalytic chemical reaction at least involving the reagent at least is an addition reaction, wherein the reagent at least and at least one second reagent combine with each other to form the reaction product. The method according to claim 1, characterized in that the catalytic chemical reaction at least involving the reagent at least is a removal reaction, wherein the reagent at least is decomposed in the reaction product, the reaction product comprises at least two portions. 22. The method according to claim 1, characterized in that the electromagnetic radiation is in the form of a laser that is provided by a laser source. 23. The method according to claim 1, characterized in that the electromagnetic radiation is chosen from the group consisting of ultraviolet, visible, infrared radiation and any combination thereof. 24. The method according to claim 1, characterized in that the electromagnetic radiation having the pre-determined frequency or frequency range is pressed on the structure at least. 25. The method according to claim 1, characterized in that the electromagnetic radiation having the pre-determined frequency or range of frequencies radiates at least a portion of the substrate having the structure at least there disposed. 26. The method according to claim 1, characterized in that the electromagnetic radiation having the pre-determined frequency or frequency range is absorbed at least partially by the structure at least. 27. The method according to claim 1, characterized in that the structure is at least placed on the substrate by nano-printing, precipitation or electron beam lithography or a combination thereof. 28. Method for facilitating chemical reactions using localized heating, characterized in that it comprises: providing a substrate having a plurality of structures disposed; introducing at least one reagent adjacent to the plurality of structures; irradiate the plurality of structures with electromagnetic radiation, wherein the electromagnetic radiation has a frequency or range of pre-determined frequencies that excite at least one photon-electron resonance of the plurality of structures, provide localized heat, of the plurality of sources and as a result of at least one photon-electron resonance at a chemical reaction temperature to facilitate a minimum chemical reaction involving at least the reagent; and providing at least one reaction product. 29. The method according to claim 28, characterized in that the plurality of structures is provided on the substrate in a desired configuration to provide a preform. 30. The method according to claim 28, characterized in that the plurality of structures contains at least one metal. 31. The method according to claim 28, characterized in that the electromagnetic radiation, having the pre-determined frequency or frequency range, is absorbed at least partially by the plurality of structures. 32. The method according to claim 30, characterized in that the metal is at least selected from the group consisting of gold, copper, silver, titanium, aluminum, nickel, palladium, platinum, ruthenium, iridium, iron, cobalt, osmium, zinc, rhodium and any combination thereof. The method according to claim 28, characterized in that the substrate comprises silicon, or group III-V materials or silicon in insulator or germanium or quartz or glass or any combination thereof. 34. The method according to claim 32, characterized in that the metal structure comprises particles, each of which have a diameter of about .5 to about 500 nanometers. 35. The method according to claim 32, characterized in that the metal structure comprises particles each of which have a diameter of about 1 to about 100 nanometers. 36. The method according to claim 28, characterized in that the electromagnetic radiation is in the form of a laser that is provided by a laser source. 37. The method according to claim 28, characterized in that the electromagnetic radiation is chosen from the group consisting of ultraviolet, visible, infrared radiation and any combination thereof. 38. The method according to claim 28, characterized in that the reagent is at least a gas. 39. The method according to claim 28, characterized in that the reagent is at least a liquid. 40. The method according to claim 28, characterized in that the reagent is at least a plasma. 41. The method according to claim 28, characterized in that the reagent is at least a solid. 42. The method according to claim 28, characterized in that the radiation or electromagnetic radiation having the pre-determined frequency or frequency range is pressed on the plurality of structures or a subset of the set of plurality of structures. 43. The method according to claim 28, characterized in that the plurality of structures comprises at least a first subset and a second subset of structures, each subset differs in composition from another subset. 44. The method according to claim 28, characterized in that the first sub-assembly is heated to a first reaction temperature that is provided by irradiation of the first sub-assembly by electromagnetic radiation, to displace the catalytic chemical reaction at least. 45. The method according to claim 43, characterized in that it further comprises the step of providing additional electromagnetic radiation, wherein the additional electromagnetic radiation has a pre-determined frequency or frequency range, which differ from the electromagnetic radiation and excites at least a resonance of photons-electrons in the second subset of structures and in this way provides heat for an additional chemical reaction. 46. The method according to claim 28, characterized in that localized heat is provided, at least in part by at least one of phonon network vibrations, dynamics / creation of electron holes, Landau damped or any combination thereof, besides the resonance of photons-electrons. 47. The method according to claim 28, characterized in that the plurality of structures are placed on the substrate by nano-printing, precipitation or electron beam lithography or a combination thereof. 48. An apparatus for conducting chemical catalysis, characterized in that it comprises: a reaction chamber; at least one input in communication with the reaction chamber, to conduct at least one reagent to the reaction chamber; a substrate that has placed at least one structure, the structure is located inside the reaction chamber; a source of electromagnetic radiation located to irradiate the substrate, the electromagnetic radiation has a pre-determined frequency or range of frequencies, which are absorbed by the structure at least and excites at least one resonance of photons-electrons of the structure at least, providing in this way localized heat from the structure at least as a result of photon-electron resonance, at a catalytic chemical reaction temperature to facilitate at least one catalytic chemical reaction involving at least the reagent; and at least one outlet in communication with the reaction chamber, to drive at least one reaction product from the reaction chamber. 49. The method according to claim 48, characterized in that the structure contains at least one metal. 50. The method according to claim 48, characterized in that the structure at least has a shape selected from the group consisting of a particle, a point, a sphere, a wire, a line, a film and any combination thereof. 51. The method according to claim 49, characterized in that the metal is at least selected from the group consisting of gold, copper, silver, titanium, aluminum, nickel, palladium, platinum, ruthenium, iridium, iron, cobalt, osmium, zinc, rhodium and any combination thereof. 52. The method according to claim 49, characterized in that the metal at least is a catalyst in the chemical reaction at least. 53. The method according to claim 49, characterized in that the metal as minimum acts only as a localized heating source to provide heat that reaches the chemical reaction temperature. 54. The method according to claim 50, characterized in that the particle, point, sphere, wire, line, film and any combination thereof have nanoscale dimensions. 55. The method according to claim 54, characterized in that the nano-scale dimensions are from about .5 to about 500 nanometers. 56. The method according to claim 54, characterized in that the nanoscale dimensions are from about 1 to about 100 nanometers. 57. The method according to claim 48, characterized in that the reagent is at least a gas. 58. The method according to claim 48, characterized in that the reagent is at least a liquid. 59. The method according to claim 48, characterized in that the reagent is at least one plasma. 60. The method according to claim 48, characterized in that the reagent is at least a solid. 61. The method according to claim 48, characterized in that the second input at least has communication with the reaction chamber. 62. The method according to claim 48, characterized in that the catalytic chemical reaction at least involving the reagent at least is a decomposition reaction and the reaction product at least is or contains at least one reagent component. 63. The method according to claim 48, characterized in that the reagent at least is a compound having a particular proportion of elements in the compound, wherein the reaction product at least has the same proportion of elements as the compound and the At least one catalytic chemical reaction results in a change of at least one characteristic of the compound. 64. The method according to claim 63, characterized in that the change of at least one characteristic is chosen from the group consisting of re-arrangement of atoms, change in number of links, change in type of link, change in angle of link, and any combination of these. 65. The method according to claim 63, characterized in that the change of at least one characteristic results in at least one reagent isomer production. 66. The method according to claim 65, characterized in that the production of isomers includes enantiomers. 67. The method according to claim 48, characterized in that the catalytic chemical reaction at least involving the reagent at least is a substitution reaction, wherein the reagent at least reacts with at least one second reagent and replaces it instead of a portion of the second reagent to produce the reaction product. 68. The method according to claim 48, characterized in that the catalytic chemical reaction at least involving the reagent at least is an addition reaction, wherein the reagent at least and a second reagent at least, combine with each other to form the reaction product. 69. The method according to claim 48, characterized in that the catalytic chemical reaction at least involving the reagent at least is a removal reaction, wherein the reagent at least decomposes in the reaction product, the reaction product comprises at least two portions. 70. The method according to claim 48, characterized in that the electromagnetic radiation is chosen from the group consisting of ultraviolet, visible or infrared radiation and any combination thereof. 71. The method according to claim 48, characterized in that the source of electromagnetic radiation provides pulsed electromagnetic radiation having the pre-determined frequency or frequency range. 72. The method according to claim 48, characterized in that the source of electromagnetic radiation that provides electromagnetic radiation with the pre-determined frequency or frequency range is located to irradiate at least a portion of the substrate having the structure at least there. willing. 73. The method according to claim 48, characterized in that the structure is at least placed on the substrate by nano-printing, precipitation or electron beam lithography or a combination thereof. 74. A method for facilitating catalytic chemical reactions with localized heating derived from photon-electron resonance, characterized in that it comprises: irradiating at least one structure with electromagnetic radiation, wherein the electromagnetic radiation has a frequency or range of pre-determined frequencies that excite at least one photon-electron resonance of the structure at least; introduce at least one reagent adjacent to the structure at least; providing localized heat from the structure at least and as a result of at least one photon-electron resonance at a catalytic chemical reaction temperature to facilitate at least one chemical reaction involving at least the reagent; and providing a substrate that has there placed at least one structure. 75. The method according to claim 74, characterized in that it further comprises generating at least one reaction product.