MX2017015177A - Dispositivo optico para detectar un defecto interno de un sustrato transparente y metodo para el mismo. - Google Patents
Dispositivo optico para detectar un defecto interno de un sustrato transparente y metodo para el mismo.Info
- Publication number
- MX2017015177A MX2017015177A MX2017015177A MX2017015177A MX2017015177A MX 2017015177 A MX2017015177 A MX 2017015177A MX 2017015177 A MX2017015177 A MX 2017015177A MX 2017015177 A MX2017015177 A MX 2017015177A MX 2017015177 A MX2017015177 A MX 2017015177A
- Authority
- MX
- Mexico
- Prior art keywords
- substrate
- detection unit
- detecting
- optical device
- photosensitive element
- Prior art date
Links
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/8901—Optical details; Scanning details
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/8914—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the material examined
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8854—Grading and classifying of flaws
- G01N2021/8867—Grading and classifying of flaws using sequentially two or more inspection runs, e.g. coarse and fine, or detecting then analysing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
- G01N2021/8967—Discriminating defects on opposite sides or at different depths of sheet or rod
Landscapes
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Pathology (AREA)
- Biochemistry (AREA)
- Immunology (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Se proporciona un dispositivo óptico (100) y un método para detectar un defecto de un sustrato transparente (130). El dispositivo óptico (100) para detectar un defecto interno de un sustrato transparente (130) incluye: una primera unidad de detección (110) configurada para detectar el sustrato (130) en una baja resolución predeterminada, donde la primera unidad de detección (110) incluye un primer elemento fotosensible (111) y una primera lente (112) entre el sustrato (130) y el primer elemento fotosensible (111), y el primer elemento fotosensible (111) y la primera lente (112) se disponen de modo que un plano objeto se incline en relación con el sustrato (130); una segunda unidad de detección (120) configurada para detectar el sustrato (130) en una alta resolución predeterminada, donde la segunda unidad de detección (120) incluye un segundo elemento fotosensible (121) y una segunda lente (122) entre el sustrato (130) y el segundo elemento fotosensible (121); y un procesador (150) configurado para determinar una porción de los defectos detectados por la primera unidad de detección (110) como defectos que se detectarán por la segunda unidad de detección (120), y determinar un tipo del defecto con base en una imagen para el sustrato (130) capturado por la segunda unidad de detección (120).
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510301023.0A CN106248684B (zh) | 2015-06-03 | 2015-06-03 | 用于检测透明基底的内部瑕疵的光学装置及方法 |
PCT/CN2016/082440 WO2016192534A1 (en) | 2015-06-03 | 2016-05-18 | Optical device for detecting an internal flaw of a transparent substrate and method for the same |
Publications (1)
Publication Number | Publication Date |
---|---|
MX2017015177A true MX2017015177A (es) | 2018-04-13 |
Family
ID=57440044
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MX2017015177A MX2017015177A (es) | 2015-06-03 | 2016-05-18 | Dispositivo optico para detectar un defecto interno de un sustrato transparente y metodo para el mismo. |
Country Status (8)
Country | Link |
---|---|
US (1) | US10429317B2 (es) |
EP (1) | EP3304055A4 (es) |
KR (1) | KR20180015139A (es) |
CN (1) | CN106248684B (es) |
BR (1) | BR112017025162B1 (es) |
DE (1) | DE202016009070U1 (es) |
MX (1) | MX2017015177A (es) |
WO (1) | WO2016192534A1 (es) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102373458B1 (ko) | 2018-02-07 | 2022-03-10 | 주식회사 엘지에너지솔루션 | 배터리를 위한 등가 회로 모델의 파라미터 추정 방법 및 배터리 관리 시스템 |
US10599951B2 (en) * | 2018-03-28 | 2020-03-24 | Kla-Tencor Corp. | Training a neural network for defect detection in low resolution images |
FR3101420A1 (fr) * | 2019-09-30 | 2021-04-02 | Saint-Gobain Glass France | Méthode d’évaluation de la qualité optique d’une zone délimitée d’un vitrage |
CN110987954B (zh) * | 2019-12-30 | 2021-10-22 | 江南大学 | 一种消除皮革表面缺陷检测盲区的方法及*** |
CN116309559B (zh) * | 2023-05-17 | 2023-08-04 | 山东鲁玻玻璃科技有限公司 | 一种中硼硅玻璃生产瑕疵智能识别方法 |
JP7415215B1 (ja) | 2023-09-05 | 2024-01-17 | ダイトロン株式会社 | 外観検査装置 |
CN117191807B (zh) * | 2023-11-06 | 2024-01-30 | 常州讯磊电子科技有限公司 | 一种基于工业相机的产品在线缺陷检测装置 |
Family Cites Families (22)
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DE3565893D1 (en) * | 1984-12-14 | 1988-12-01 | Flachglas Ag | Method and device for inspecting transparent strip material, in particular flat glass ribbons |
IL99823A0 (en) * | 1990-11-16 | 1992-08-18 | Orbot Instr Ltd | Optical inspection method and apparatus |
FR2681429B1 (fr) * | 1991-09-13 | 1995-05-24 | Thomson Csf | Procede et dispositif d'inspection du verre. |
US5790247A (en) * | 1995-10-06 | 1998-08-04 | Photon Dynamics, Inc. | Technique for determining defect positions in three dimensions in a transparent structure |
US5777729A (en) * | 1996-05-07 | 1998-07-07 | Nikon Corporation | Wafer inspection method and apparatus using diffracted light |
AUPO023596A0 (en) | 1996-05-31 | 1996-06-27 | University Of Queensland, The | Detection of defects in glass |
US6359686B1 (en) * | 1999-06-29 | 2002-03-19 | Corning Incorporated | Inspection system for sheet material |
US7084383B2 (en) * | 2002-06-03 | 2006-08-01 | Olympus Corporation | Image processing apparatus |
US20040086166A1 (en) * | 2002-11-01 | 2004-05-06 | Photon Dynamics, Inc. | Method and apparatus for flat patterned media inspection |
CN100520379C (zh) * | 2002-11-01 | 2009-07-29 | 光子动力学公司 | 用于检查具有图样的平的介质的方法和装置 |
DE102004005019A1 (de) * | 2004-01-30 | 2005-08-18 | Isra Glass Vision Gmbh | Verfahren zur Bestimmung der Tiefe eines Fehlers in einem Glasband |
US7567344B2 (en) * | 2006-05-12 | 2009-07-28 | Corning Incorporated | Apparatus and method for characterizing defects in a transparent substrate |
JP5169194B2 (ja) * | 2006-12-14 | 2013-03-27 | 日本電気硝子株式会社 | 板ガラス欠陥検出装置、板ガラスの製造方法 |
JP2008180602A (ja) * | 2007-01-24 | 2008-08-07 | Sharp Corp | 検査装置、検査方法、検査プログラムおよびコンピュータ読み取り可能な記録媒体 |
JP2010008177A (ja) * | 2008-06-26 | 2010-01-14 | Adtec Engineeng Co Ltd | 欠陥検出装置及び方法 |
JP2010048745A (ja) * | 2008-08-25 | 2010-03-04 | Asahi Glass Co Ltd | 欠陥検査システムおよび欠陥検査方法 |
WO2010079474A1 (en) * | 2009-01-11 | 2010-07-15 | Brightview Systems Ltd | A system and method for thin film quality assurance |
CN102023164B (zh) * | 2009-09-23 | 2015-09-16 | 法国圣-戈班玻璃公司 | 用于检测透明平板的局部缺陷的装置和方法 |
TWM443849U (en) * | 2012-03-09 | 2012-12-21 | Synpower Co Ltd | Optical defect detection device |
US9116103B2 (en) * | 2013-01-14 | 2015-08-25 | Kla-Tencor Corporation | Multiple angles of incidence semiconductor metrology systems and methods |
CN104406988A (zh) * | 2014-11-18 | 2015-03-11 | 浙江大学 | 一种玻璃内部缺陷的检测方法 |
KR20160107006A (ko) * | 2015-03-03 | 2016-09-13 | 삼성전자주식회사 | 3차원 영상을 이용한 웨이퍼 검사장치 |
-
2015
- 2015-06-03 CN CN201510301023.0A patent/CN106248684B/zh active Active
-
2016
- 2016-05-18 WO PCT/CN2016/082440 patent/WO2016192534A1/en active Application Filing
- 2016-05-18 DE DE202016009070.5U patent/DE202016009070U1/de active Active
- 2016-05-18 BR BR112017025162-0A patent/BR112017025162B1/pt active IP Right Grant
- 2016-05-18 MX MX2017015177A patent/MX2017015177A/es unknown
- 2016-05-18 US US15/579,064 patent/US10429317B2/en active Active
- 2016-05-18 EP EP16802457.8A patent/EP3304055A4/en not_active Withdrawn
- 2016-05-18 KR KR1020177034358A patent/KR20180015139A/ko not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
US10429317B2 (en) | 2019-10-01 |
KR20180015139A (ko) | 2018-02-12 |
CN106248684B (zh) | 2019-12-17 |
BR112017025162B1 (pt) | 2022-03-03 |
DE202016009070U1 (de) | 2021-11-18 |
EP3304055A1 (en) | 2018-04-11 |
WO2016192534A1 (en) | 2016-12-08 |
US20180164225A1 (en) | 2018-06-14 |
BR112017025162A2 (pt) | 2018-08-07 |
EP3304055A4 (en) | 2019-01-09 |
CN106248684A (zh) | 2016-12-21 |
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