MX2017015177A - Dispositivo optico para detectar un defecto interno de un sustrato transparente y metodo para el mismo. - Google Patents

Dispositivo optico para detectar un defecto interno de un sustrato transparente y metodo para el mismo.

Info

Publication number
MX2017015177A
MX2017015177A MX2017015177A MX2017015177A MX2017015177A MX 2017015177 A MX2017015177 A MX 2017015177A MX 2017015177 A MX2017015177 A MX 2017015177A MX 2017015177 A MX2017015177 A MX 2017015177A MX 2017015177 A MX2017015177 A MX 2017015177A
Authority
MX
Mexico
Prior art keywords
substrate
detection unit
detecting
optical device
photosensitive element
Prior art date
Application number
MX2017015177A
Other languages
English (en)
Inventor
Zheng Yuan
Zhu Jia
Original Assignee
Saint Gobain
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Saint Gobain filed Critical Saint Gobain
Publication of MX2017015177A publication Critical patent/MX2017015177A/es

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8806Specially adapted optical and illumination features
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901Optical details; Scanning details
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8914Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the material examined
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958Inspecting transparent materials or objects, e.g. windscreens
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8851Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854Grading and classifying of flaws
    • G01N2021/8867Grading and classifying of flaws using sequentially two or more inspection runs, e.g. coarse and fine, or detecting then analysing
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8851Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8887Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G01N2021/8967Discriminating defects on opposite sides or at different depths of sheet or rod

Landscapes

  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Pathology (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

Se proporciona un dispositivo óptico (100) y un método para detectar un defecto de un sustrato transparente (130). El dispositivo óptico (100) para detectar un defecto interno de un sustrato transparente (130) incluye: una primera unidad de detección (110) configurada para detectar el sustrato (130) en una baja resolución predeterminada, donde la primera unidad de detección (110) incluye un primer elemento fotosensible (111) y una primera lente (112) entre el sustrato (130) y el primer elemento fotosensible (111), y el primer elemento fotosensible (111) y la primera lente (112) se disponen de modo que un plano objeto se incline en relación con el sustrato (130); una segunda unidad de detección (120) configurada para detectar el sustrato (130) en una alta resolución predeterminada, donde la segunda unidad de detección (120) incluye un segundo elemento fotosensible (121) y una segunda lente (122) entre el sustrato (130) y el segundo elemento fotosensible (121); y un procesador (150) configurado para determinar una porción de los defectos detectados por la primera unidad de detección (110) como defectos que se detectarán por la segunda unidad de detección (120), y determinar un tipo del defecto con base en una imagen para el sustrato (130) capturado por la segunda unidad de detección (120).
MX2017015177A 2015-06-03 2016-05-18 Dispositivo optico para detectar un defecto interno de un sustrato transparente y metodo para el mismo. MX2017015177A (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201510301023.0A CN106248684B (zh) 2015-06-03 2015-06-03 用于检测透明基底的内部瑕疵的光学装置及方法
PCT/CN2016/082440 WO2016192534A1 (en) 2015-06-03 2016-05-18 Optical device for detecting an internal flaw of a transparent substrate and method for the same

Publications (1)

Publication Number Publication Date
MX2017015177A true MX2017015177A (es) 2018-04-13

Family

ID=57440044

Family Applications (1)

Application Number Title Priority Date Filing Date
MX2017015177A MX2017015177A (es) 2015-06-03 2016-05-18 Dispositivo optico para detectar un defecto interno de un sustrato transparente y metodo para el mismo.

Country Status (8)

Country Link
US (1) US10429317B2 (es)
EP (1) EP3304055A4 (es)
KR (1) KR20180015139A (es)
CN (1) CN106248684B (es)
BR (1) BR112017025162B1 (es)
DE (1) DE202016009070U1 (es)
MX (1) MX2017015177A (es)
WO (1) WO2016192534A1 (es)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102373458B1 (ko) 2018-02-07 2022-03-10 주식회사 엘지에너지솔루션 배터리를 위한 등가 회로 모델의 파라미터 추정 방법 및 배터리 관리 시스템
US10599951B2 (en) * 2018-03-28 2020-03-24 Kla-Tencor Corp. Training a neural network for defect detection in low resolution images
FR3101420A1 (fr) * 2019-09-30 2021-04-02 Saint-Gobain Glass France Méthode d’évaluation de la qualité optique d’une zone délimitée d’un vitrage
CN110987954B (zh) * 2019-12-30 2021-10-22 江南大学 一种消除皮革表面缺陷检测盲区的方法及***
CN116309559B (zh) * 2023-05-17 2023-08-04 山东鲁玻玻璃科技有限公司 一种中硼硅玻璃生产瑕疵智能识别方法
JP7415215B1 (ja) 2023-09-05 2024-01-17 ダイトロン株式会社 外観検査装置
CN117191807B (zh) * 2023-11-06 2024-01-30 常州讯磊电子科技有限公司 一种基于工业相机的产品在线缺陷检测装置

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3565893D1 (en) * 1984-12-14 1988-12-01 Flachglas Ag Method and device for inspecting transparent strip material, in particular flat glass ribbons
IL99823A0 (en) * 1990-11-16 1992-08-18 Orbot Instr Ltd Optical inspection method and apparatus
FR2681429B1 (fr) * 1991-09-13 1995-05-24 Thomson Csf Procede et dispositif d'inspection du verre.
US5790247A (en) * 1995-10-06 1998-08-04 Photon Dynamics, Inc. Technique for determining defect positions in three dimensions in a transparent structure
US5777729A (en) * 1996-05-07 1998-07-07 Nikon Corporation Wafer inspection method and apparatus using diffracted light
AUPO023596A0 (en) 1996-05-31 1996-06-27 University Of Queensland, The Detection of defects in glass
US6359686B1 (en) * 1999-06-29 2002-03-19 Corning Incorporated Inspection system for sheet material
US7084383B2 (en) * 2002-06-03 2006-08-01 Olympus Corporation Image processing apparatus
US20040086166A1 (en) * 2002-11-01 2004-05-06 Photon Dynamics, Inc. Method and apparatus for flat patterned media inspection
CN100520379C (zh) * 2002-11-01 2009-07-29 光子动力学公司 用于检查具有图样的平的介质的方法和装置
DE102004005019A1 (de) * 2004-01-30 2005-08-18 Isra Glass Vision Gmbh Verfahren zur Bestimmung der Tiefe eines Fehlers in einem Glasband
US7567344B2 (en) * 2006-05-12 2009-07-28 Corning Incorporated Apparatus and method for characterizing defects in a transparent substrate
JP5169194B2 (ja) * 2006-12-14 2013-03-27 日本電気硝子株式会社 板ガラス欠陥検出装置、板ガラスの製造方法
JP2008180602A (ja) * 2007-01-24 2008-08-07 Sharp Corp 検査装置、検査方法、検査プログラムおよびコンピュータ読み取り可能な記録媒体
JP2010008177A (ja) * 2008-06-26 2010-01-14 Adtec Engineeng Co Ltd 欠陥検出装置及び方法
JP2010048745A (ja) * 2008-08-25 2010-03-04 Asahi Glass Co Ltd 欠陥検査システムおよび欠陥検査方法
WO2010079474A1 (en) * 2009-01-11 2010-07-15 Brightview Systems Ltd A system and method for thin film quality assurance
CN102023164B (zh) * 2009-09-23 2015-09-16 法国圣-戈班玻璃公司 用于检测透明平板的局部缺陷的装置和方法
TWM443849U (en) * 2012-03-09 2012-12-21 Synpower Co Ltd Optical defect detection device
US9116103B2 (en) * 2013-01-14 2015-08-25 Kla-Tencor Corporation Multiple angles of incidence semiconductor metrology systems and methods
CN104406988A (zh) * 2014-11-18 2015-03-11 浙江大学 一种玻璃内部缺陷的检测方法
KR20160107006A (ko) * 2015-03-03 2016-09-13 삼성전자주식회사 3차원 영상을 이용한 웨이퍼 검사장치

Also Published As

Publication number Publication date
US10429317B2 (en) 2019-10-01
KR20180015139A (ko) 2018-02-12
CN106248684B (zh) 2019-12-17
BR112017025162B1 (pt) 2022-03-03
DE202016009070U1 (de) 2021-11-18
EP3304055A1 (en) 2018-04-11
WO2016192534A1 (en) 2016-12-08
US20180164225A1 (en) 2018-06-14
BR112017025162A2 (pt) 2018-08-07
EP3304055A4 (en) 2019-01-09
CN106248684A (zh) 2016-12-21

Similar Documents

Publication Publication Date Title
MX2017015177A (es) Dispositivo optico para detectar un defecto interno de un sustrato transparente y metodo para el mismo.
IL254331B (en) Sub-pixel and sub-resolution location of defects in sample slices
CA2896638C (en) Reference speed measurement for a non-destructive testing system
IL278660B (en) Metrology of critical optical dimensions
MX349197B (es) Determinacion de distancia o posicion.
GB2532642A (en) A laser line probe having improved high dynamic range
EP2911093A3 (en) Method and device for detecting straight line
TW201612504A (en) Inspection apparatus and inspection method
WO2012154320A8 (en) System and method for detecting and repairing defects in an electrochromic device using thermal imaging
MX370424B (es) Método y aparato para ajustar el brillo de la pantalla.
MY188579A (en) Parking space line detection method and device
WO2014164550A3 (en) System and methods for calibration of an array camera
TW201614586A (en) Repeater detection
MX348395B (es) Aparato y método para determinar la desviación de posición objetivo de dos cuerpos.
EP2778623A3 (en) Position detection apparatus, lens apparatus, image pickup system, and machine tool apparatus
WO2014026819A3 (en) Method and apparatus for measuring asymmetry of a microstructure, position measuring method, position measuring apparatus, lithographic apparatus and device manufacturing method
WO2014201009A3 (en) Systems and methods for infrared detection
TW201611950A (en) Film thickness signal processing apparatus, polishing apparatus, film thickness signal processing method, and polishing method
EP4254330A3 (en) Flaw detection device and flaw detection method
EP3889590A3 (en) Apparatus for inspecting a substrate for a foreign substance
MX354715B (es) Dispositivo de deteccion de defectos y sistema de produccion.
MX2016010525A (es) Dispositivo, sistema y metodo de determinacion de signos vitales de un sujeto basado en luz reflejada y transmitida.
JP2017041608A5 (es)
WO2014085798A3 (en) A method and apparatus of profile measurement
WO2014186476A3 (en) Integrated multi-pass inspection