MX159116A - Mejoras en aparato para producir dispositivos fotovoltaicos - Google Patents

Mejoras en aparato para producir dispositivos fotovoltaicos

Info

Publication number
MX159116A
MX159116A MX198371A MX19837183A MX159116A MX 159116 A MX159116 A MX 159116A MX 198371 A MX198371 A MX 198371A MX 19837183 A MX19837183 A MX 19837183A MX 159116 A MX159116 A MX 159116A
Authority
MX
Mexico
Prior art keywords
photovoltaic devices
produce photovoltaic
produce
devices
photovoltaic
Prior art date
Application number
MX198371A
Other languages
English (en)
Inventor
Kevin Richard Hoffman
David Attilio Gattuso
Original Assignee
Energy Conversion Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/407,983 external-priority patent/US4438724A/en
Application filed by Energy Conversion Devices Inc filed Critical Energy Conversion Devices Inc
Publication of MX159116A publication Critical patent/MX159116A/es

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/168—Sealings between relatively-moving surfaces which permits material to be continuously conveyed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/40—Sealings between relatively-moving surfaces by means of fluid
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S277/00—Seal for a joint or juncture
    • Y10S277/906—Seal for article of indefinite length, e.g. strip, sheet

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Analytical Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Photovoltaic Devices (AREA)
  • Chemical Vapour Deposition (AREA)
MX198371A 1982-08-13 1983-08-12 Mejoras en aparato para producir dispositivos fotovoltaicos MX159116A (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/407,983 US4438724A (en) 1982-08-13 1982-08-13 Grooved gas gate
US06/466,995 US4450786A (en) 1982-08-13 1983-02-16 Grooved gas gate

Publications (1)

Publication Number Publication Date
MX159116A true MX159116A (es) 1989-04-21

Family

ID=27020086

Family Applications (1)

Application Number Title Priority Date Filing Date
MX198371A MX159116A (es) 1982-08-13 1983-08-12 Mejoras en aparato para producir dispositivos fotovoltaicos

Country Status (8)

Country Link
US (1) US4450786A (es)
EP (1) EP0101286B1 (es)
BR (1) BR8304258A (es)
CA (1) CA1194617A (es)
DE (1) DE3362604D1 (es)
ES (1) ES524944A0 (es)
MX (1) MX159116A (es)
PH (1) PH19757A (es)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4480585A (en) * 1983-06-23 1984-11-06 Energy Conversion Devices, Inc. External isolation module
US4593644A (en) * 1983-10-26 1986-06-10 Rca Corporation Continuous in-line deposition system
CA1289512C (en) * 1985-07-29 1991-09-24 Vincent D. Cannella Depositing an electrical insulator with unidirectional gas flow in series of chambers
US5133561A (en) * 1990-02-26 1992-07-28 Tokyo Electron Limited Sealing device
JP2975151B2 (ja) * 1991-03-28 1999-11-10 キヤノン株式会社 半導体素子の連続的製造装置
US5997588A (en) * 1995-10-13 1999-12-07 Advanced Semiconductor Materials America, Inc. Semiconductor processing system with gas curtain
DE19727857C1 (de) * 1997-06-30 1999-04-29 Fraunhofer Ges Forschung Plasmarektor mit Prallströmung zur Oberflächenbehandlung
JP4606675B2 (ja) * 1999-07-13 2011-01-05 アイクストロン、アーゲー 化学薬品蒸気溶着室およびそれを備えたエピタクシー反応装置
ATE244780T1 (de) * 1999-12-22 2003-07-15 Aixtron Ag Cvd reaktor und prozesskammer dafür
US6943066B2 (en) * 2002-06-05 2005-09-13 Advantech Global, Ltd Active matrix backplane for controlling controlled elements and method of manufacture thereof
WO2006053218A2 (en) * 2004-11-10 2006-05-18 Daystar Technologies, Inc. Pressure control system in a photovoltaic substrate deposition
EP1810344A2 (en) * 2004-11-10 2007-07-25 Daystar Technologies, Inc. Pallet based system for forming thin-film solar cells
US7271111B2 (en) * 2005-06-08 2007-09-18 Advantech Global, Ltd Shadow mask deposition of materials using reconfigurable shadow masks
US7531470B2 (en) * 2005-09-27 2009-05-12 Advantech Global, Ltd Method and apparatus for electronic device manufacture using shadow masks
US20080023059A1 (en) * 2006-07-25 2008-01-31 Basol Bulent M Tandem solar cell structures and methods of manufacturing same
US20080175993A1 (en) * 2006-10-13 2008-07-24 Jalal Ashjaee Reel-to-reel reaction of a precursor film to form solar cell absorber
US9103033B2 (en) * 2006-10-13 2015-08-11 Solopower Systems, Inc. Reel-to-reel reaction of precursor film to form solar cell absorber
US8323735B2 (en) * 2006-10-13 2012-12-04 Solopower, Inc. Method and apparatus to form solar cell absorber layers with planar surface
US20090050208A1 (en) * 2006-10-19 2009-02-26 Basol Bulent M Method and structures for controlling the group iiia material profile through a group ibiiiavia compound layer
US8425753B2 (en) * 2008-05-19 2013-04-23 Solopower, Inc. Electroplating methods and chemistries for deposition of copper-indium-gallium containing thin films
US8409418B2 (en) * 2009-02-06 2013-04-02 Solopower, Inc. Enhanced plating chemistries and methods for preparation of group IBIIIAVIA thin film solar cell absorbers
US20100226629A1 (en) * 2008-07-21 2010-09-09 Solopower, Inc. Roll-to-roll processing and tools for thin film solar cell manufacturing

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3602192A (en) * 1969-05-19 1971-08-31 Ibm Semiconductor wafer processing
US4048955A (en) * 1975-09-02 1977-09-20 Texas Instruments Incorporated Continuous chemical vapor deposition reactor
US4354686A (en) * 1979-07-06 1982-10-19 Matsushita Electric Industrial Co., Ltd. Contact-free sealing member
DE3009019A1 (de) * 1980-03-08 1981-09-24 M.A.N.- Roland Druckmaschinen AG, 6050 Offenbach Papierbahnschleuse an einer vakuum- oder gaskammer
IE53197B1 (en) * 1981-03-16 1988-08-31 Energy Conversion Devices Inc Isolation valve

Also Published As

Publication number Publication date
PH19757A (en) 1986-06-26
EP0101286A1 (en) 1984-02-22
EP0101286B1 (en) 1986-03-19
ES8501568A1 (es) 1984-11-16
DE3362604D1 (en) 1986-04-24
CA1194617A (en) 1985-10-01
US4450786A (en) 1984-05-29
ES524944A0 (es) 1984-11-16
BR8304258A (pt) 1984-04-24

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