MX159116A - Mejoras en aparato para producir dispositivos fotovoltaicos - Google Patents
Mejoras en aparato para producir dispositivos fotovoltaicosInfo
- Publication number
- MX159116A MX159116A MX198371A MX19837183A MX159116A MX 159116 A MX159116 A MX 159116A MX 198371 A MX198371 A MX 198371A MX 19837183 A MX19837183 A MX 19837183A MX 159116 A MX159116 A MX 159116A
- Authority
- MX
- Mexico
- Prior art keywords
- photovoltaic devices
- produce photovoltaic
- produce
- devices
- photovoltaic
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
- C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/168—Sealings between relatively-moving surfaces which permits material to be continuously conveyed
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/40—Sealings between relatively-moving surfaces by means of fluid
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S277/00—Seal for a joint or juncture
- Y10S277/906—Seal for article of indefinite length, e.g. strip, sheet
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Analytical Chemistry (AREA)
- Plasma & Fusion (AREA)
- Physics & Mathematics (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Photovoltaic Devices (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/407,983 US4438724A (en) | 1982-08-13 | 1982-08-13 | Grooved gas gate |
US06/466,995 US4450786A (en) | 1982-08-13 | 1983-02-16 | Grooved gas gate |
Publications (1)
Publication Number | Publication Date |
---|---|
MX159116A true MX159116A (es) | 1989-04-21 |
Family
ID=27020086
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MX198371A MX159116A (es) | 1982-08-13 | 1983-08-12 | Mejoras en aparato para producir dispositivos fotovoltaicos |
Country Status (8)
Country | Link |
---|---|
US (1) | US4450786A (es) |
EP (1) | EP0101286B1 (es) |
BR (1) | BR8304258A (es) |
CA (1) | CA1194617A (es) |
DE (1) | DE3362604D1 (es) |
ES (1) | ES524944A0 (es) |
MX (1) | MX159116A (es) |
PH (1) | PH19757A (es) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4480585A (en) * | 1983-06-23 | 1984-11-06 | Energy Conversion Devices, Inc. | External isolation module |
US4593644A (en) * | 1983-10-26 | 1986-06-10 | Rca Corporation | Continuous in-line deposition system |
CA1289512C (en) * | 1985-07-29 | 1991-09-24 | Vincent D. Cannella | Depositing an electrical insulator with unidirectional gas flow in series of chambers |
US5133561A (en) * | 1990-02-26 | 1992-07-28 | Tokyo Electron Limited | Sealing device |
JP2975151B2 (ja) * | 1991-03-28 | 1999-11-10 | キヤノン株式会社 | 半導体素子の連続的製造装置 |
US5997588A (en) * | 1995-10-13 | 1999-12-07 | Advanced Semiconductor Materials America, Inc. | Semiconductor processing system with gas curtain |
DE19727857C1 (de) * | 1997-06-30 | 1999-04-29 | Fraunhofer Ges Forschung | Plasmarektor mit Prallströmung zur Oberflächenbehandlung |
JP4606675B2 (ja) * | 1999-07-13 | 2011-01-05 | アイクストロン、アーゲー | 化学薬品蒸気溶着室およびそれを備えたエピタクシー反応装置 |
ATE244780T1 (de) * | 1999-12-22 | 2003-07-15 | Aixtron Ag | Cvd reaktor und prozesskammer dafür |
US6943066B2 (en) * | 2002-06-05 | 2005-09-13 | Advantech Global, Ltd | Active matrix backplane for controlling controlled elements and method of manufacture thereof |
WO2006053218A2 (en) * | 2004-11-10 | 2006-05-18 | Daystar Technologies, Inc. | Pressure control system in a photovoltaic substrate deposition |
EP1810344A2 (en) * | 2004-11-10 | 2007-07-25 | Daystar Technologies, Inc. | Pallet based system for forming thin-film solar cells |
US7271111B2 (en) * | 2005-06-08 | 2007-09-18 | Advantech Global, Ltd | Shadow mask deposition of materials using reconfigurable shadow masks |
US7531470B2 (en) * | 2005-09-27 | 2009-05-12 | Advantech Global, Ltd | Method and apparatus for electronic device manufacture using shadow masks |
US20080023059A1 (en) * | 2006-07-25 | 2008-01-31 | Basol Bulent M | Tandem solar cell structures and methods of manufacturing same |
US20080175993A1 (en) * | 2006-10-13 | 2008-07-24 | Jalal Ashjaee | Reel-to-reel reaction of a precursor film to form solar cell absorber |
US9103033B2 (en) * | 2006-10-13 | 2015-08-11 | Solopower Systems, Inc. | Reel-to-reel reaction of precursor film to form solar cell absorber |
US8323735B2 (en) * | 2006-10-13 | 2012-12-04 | Solopower, Inc. | Method and apparatus to form solar cell absorber layers with planar surface |
US20090050208A1 (en) * | 2006-10-19 | 2009-02-26 | Basol Bulent M | Method and structures for controlling the group iiia material profile through a group ibiiiavia compound layer |
US8425753B2 (en) * | 2008-05-19 | 2013-04-23 | Solopower, Inc. | Electroplating methods and chemistries for deposition of copper-indium-gallium containing thin films |
US8409418B2 (en) * | 2009-02-06 | 2013-04-02 | Solopower, Inc. | Enhanced plating chemistries and methods for preparation of group IBIIIAVIA thin film solar cell absorbers |
US20100226629A1 (en) * | 2008-07-21 | 2010-09-09 | Solopower, Inc. | Roll-to-roll processing and tools for thin film solar cell manufacturing |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3602192A (en) * | 1969-05-19 | 1971-08-31 | Ibm | Semiconductor wafer processing |
US4048955A (en) * | 1975-09-02 | 1977-09-20 | Texas Instruments Incorporated | Continuous chemical vapor deposition reactor |
US4354686A (en) * | 1979-07-06 | 1982-10-19 | Matsushita Electric Industrial Co., Ltd. | Contact-free sealing member |
DE3009019A1 (de) * | 1980-03-08 | 1981-09-24 | M.A.N.- Roland Druckmaschinen AG, 6050 Offenbach | Papierbahnschleuse an einer vakuum- oder gaskammer |
IE53197B1 (en) * | 1981-03-16 | 1988-08-31 | Energy Conversion Devices Inc | Isolation valve |
-
1983
- 1983-02-16 US US06/466,995 patent/US4450786A/en not_active Expired - Lifetime
- 1983-08-04 PH PH29351A patent/PH19757A/en unknown
- 1983-08-08 BR BR8304258A patent/BR8304258A/pt unknown
- 1983-08-08 EP EP83304577A patent/EP0101286B1/en not_active Expired
- 1983-08-08 DE DE8383304577T patent/DE3362604D1/de not_active Expired
- 1983-08-12 MX MX198371A patent/MX159116A/es unknown
- 1983-08-12 CA CA000434521A patent/CA1194617A/en not_active Expired
- 1983-08-12 ES ES524944A patent/ES524944A0/es active Granted
Also Published As
Publication number | Publication date |
---|---|
PH19757A (en) | 1986-06-26 |
EP0101286A1 (en) | 1984-02-22 |
EP0101286B1 (en) | 1986-03-19 |
ES8501568A1 (es) | 1984-11-16 |
DE3362604D1 (en) | 1986-04-24 |
CA1194617A (en) | 1985-10-01 |
US4450786A (en) | 1984-05-29 |
ES524944A0 (es) | 1984-11-16 |
BR8304258A (pt) | 1984-04-24 |
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