MD3135C2 - Installation for conducting layer obtaining - Google Patents
Installation for conducting layer obtainingInfo
- Publication number
- MD3135C2 MD3135C2 MDA20030063A MD20030063A MD3135C2 MD 3135 C2 MD3135 C2 MD 3135C2 MD A20030063 A MDA20030063 A MD A20030063A MD 20030063 A MD20030063 A MD 20030063A MD 3135 C2 MD3135 C2 MD 3135C2
- Authority
- MD
- Moldova
- Prior art keywords
- conducting layer
- installation
- layer obtaining
- anode
- cathode
- Prior art date
Links
Landscapes
- Manufacturing Of Printed Wiring (AREA)
Abstract
The invention refers to the electrical engineering, in particular to installations for conducting layer obtaining.The installation for conducting layer obtaining includes a high-voltage source, a chamber filled with inert gas, wherein along the common axis there are oppositely placed a table-anode and a cathode, as well as a substrate fixed onto the table-anode. Novelty of the invention consists in that the substrate is fixed onto the table asymmetrically to the common axis. The cathode is mounted with the possibility of changing the distance between it and the table-anode.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
MDA20030063A MD3135C2 (en) | 2003-02-27 | 2003-02-27 | Installation for conducting layer obtaining |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
MDA20030063A MD3135C2 (en) | 2003-02-27 | 2003-02-27 | Installation for conducting layer obtaining |
Publications (2)
Publication Number | Publication Date |
---|---|
MD3135B2 MD3135B2 (en) | 2006-08-31 |
MD3135C2 true MD3135C2 (en) | 2007-09-30 |
Family
ID=36992837
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MDA20030063A MD3135C2 (en) | 2003-02-27 | 2003-02-27 | Installation for conducting layer obtaining |
Country Status (1)
Country | Link |
---|---|
MD (1) | MD3135C2 (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1067577A2 (en) * | 1999-07-06 | 2001-01-10 | Applied Materials, Inc. | Sputtering reactor and method of using an unbalanced magnetron |
-
2003
- 2003-02-27 MD MDA20030063A patent/MD3135C2/en not_active IP Right Cessation
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1067577A2 (en) * | 1999-07-06 | 2001-01-10 | Applied Materials, Inc. | Sputtering reactor and method of using an unbalanced magnetron |
Non-Patent Citations (1)
Title |
---|
B. Y. Jin, J.B. Ketterson. Artificial metallic superlattices. Advances in Physics, v. 38, nr. 3, 1989, p.197 * |
Also Published As
Publication number | Publication date |
---|---|
MD3135B2 (en) | 2006-08-31 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
TC4A | Change of name of proprietor (patent for invention) |
Owner name: INSTITUTUL DE INGINERIE ELECTRONICA SI TEHNOLOGI.. Free format text: FORMER NAME: LABORATORUL INTERNATIONAL DE SUPRACONDUCTIBILITATE SI ELECTRONICA SOLIDULUI AL ACADEMIEI DE STIINTE A REPUBLICII MOLDOVA, MD |
|
FG4A | Patent for invention issued | ||
KA4A | Patent for invention lapsed due to non-payment of fees (with right of restoration) | ||
MM4A | Patent for invention definitely lapsed due to non-payment of fees |